JP2001303249A - Surface treatment apparatus for strip-like sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a sheet from being shifted downward by a simple structure even when the sheet can travel in the forward and reverse directions in a surface treatment apparatus for performing surface reforming treatment by plasma or the like and surface treatment including film deposition by a sputtering method, a plasma CVD method, etc., while continuously transporting the strip- like sheet so that the width direction thereof is perpendicular. SOLUTION: This surface treatment apparatus is provided with a straightening roll 56 for straightening the downward shifting of a traveling sheet W, the straightening roll 56 is a turnable roll capable of changing the traveling direction of the sheet W along the side surface of the roll by passing the sheet W in contact with the side surface of the roll over a predetermined distance in the circumferential direction thereof and provided in a tiltable manner so that the upper portion of a roll shaft 56a is tilted to a non-contact side of the sheet in the plane P dividing the space between the sheet surface Wi on the inlet side and the sheet surface Wo on the outlet side substantially into two.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a belt-like sheet material such as a plastic film, a metal foil, a non-woven fabric, a woven or knitted fabric, or a composite thereof, which travels along the traveling path by plasma, CVD, sputtering, or the like. The present invention relates to a surface treatment apparatus for a belt-shaped sheet material, which performs various surface treatments such as modifying the surface of a sheet or forming a film such as a metal film, a ceramic film, and an organic film on the surface. This surface treatment apparatus is suitably used for the production of various functional films such as a film for preventing fogging, infrared rays, and ultraviolet rays, which is attached to a solar cell, a surface display plate for liquid crystal, or glass.

[0002]

2. Description of the Related Art A surface treatment such as a surface modification treatment using a plasma or the like or a film formation treatment such as a sputtering method or a plasma CVD method for a continuously running belt-shaped sheet material such as a film or a thin metal sheet. In the device, running the sheet material so that its width direction is a vertical direction,
This is an effective means for preventing dirt on the processing electrode from falling onto the sheet material or another electrode as compared with the case of traveling horizontally.

[0003] However, moving the belt-like sheet material in the vertical direction simply requires the use of a horizontal traveling type device at 90 °.
It does not mean that you just need to rotate it. If the sheet material is simply run in the vertical direction, the sheet material gradually falls due to gravity, and the downward displacement causes the take-up portion to take up a bamboo shoot.

[0004] In order to prevent the belt-shaped sheet from shifting downward when running in the vertical direction, see Japanese Patent Application Laid-Open No. 7-326781.
And Japanese Patent Application Laid-Open No. Hei 8-244123 disclose a method of transporting a strip-shaped sheet material traveling in a vertical direction along a side surface of a rotatable roll having a shaft whose upper side is inclined to the unwinding side. ing. By inclining the upper part of the roll shaft to the unwinding side in this way, the sheet material can be lifted upward, so that the downward displacement of the sheet material can be corrected.

[0005]

In the configuration disclosed in the above-mentioned publication, when the unwinding side and the rewinding side of the apparatus are exchanged and the sheet material is caused to run in the opposite direction, the downward displacement is corrected. When the sheet material travels in the forward direction, it is necessary to incline the straightening roll in the opposite direction, and the movable mechanism of the straightening roll becomes more complicated.

SUMMARY OF THE INVENTION The present invention has been made in view of such a point, and it is possible to prevent a downward displacement of a sheet material with a simple structure even when the belt-shaped sheet material is configured to be able to travel forward and backward. An object of the present invention is to provide a surface treatment apparatus for a strip-shaped sheet material that can be used.

[0007]

According to a first aspect of the present invention, there is provided an apparatus for treating a surface of a strip-shaped sheet material, wherein the width direction of the strip-shaped sheet material is controlled by a plurality of rolls having roll axes oriented vertically. In a surface treatment apparatus that performs surface treatment on the sheet material while continuously running as described above, a straightening roll that corrects a downward shift of the running sheet material is provided, and the straightening roll is configured such that the sheet material is By passing a predetermined distance in the circumferential direction against the roll side surface and passing,
A rotatable roll that changes the running direction of the sheet material along the roll side surface, and rolls in a plane that substantially bisects the sheet surface on the entry side and the sheet surface on the release side with respect to the roll. It is characterized in that the upper part of the shaft is tiltably provided so as to tilt toward the non-contact side of the sheet material.

In this surface treatment apparatus, the straightening roll is inclined as described above, so that the sheet material is lifted upward when passing through the straightening roll, whereby the sheet material travels with the sheet surface upright. In this case, the sheet material is prevented from shifting downward. In particular, in the present invention, since the straightening roll is inclined in a plane that divides the angle between the sheet surface on one side and the sheet surface on the other side into two approximately with the straightening roll interposed therebetween, Whether the sheet material travels from one side to the other side, or vice versa, the sheet material travels from the other side to one side to correct the downward displacement of the sheet material by tilting the straightening roll in the same direction. can do. For this reason, even when the sheet member is allowed to travel forward and backward, it is possible to prevent the sheet member from shifting downward with a simple structure.

According to a second aspect of the present invention, there is provided a surface treatment apparatus for a band-shaped sheet material, wherein the belt-shaped sheet material is continuously run by a plurality of rolls arranged with a roll axis directed in a vertical direction so that a width direction of the sheet material is vertical. In a surface treatment apparatus for performing a surface treatment on the sheet material, a straightening roll for correcting a downward shift of the running sheet material is provided, and the straightening roll is configured such that the sheet material is circumferentially oriented with respect to a roll side surface. It is a rotatable drum-shaped roll that changes the running direction of the sheet material along the side surface of the roll by passing through a predetermined distance.

[0010] In this surface treatment apparatus, a drum-shaped roll having a roll axis oriented in a vertical direction is used as a straightening roll, and the sheet material is passed through the drum-shaped roll by contacting it for a predetermined distance. Can be stably driven to the center of the roll in the vertical direction. For this reason, a downward displacement of the sheet material when traveling with the seat surface standing on a vertical surface is prevented. Also, in this case,
Regardless of whether the sheet material is run in the forward direction or the reverse direction, the drum-shaped roll has no direction, so that the downward shift of the sheet material is prevented, so that the sheet material can be driven in the forward and reverse directions. Even in the case of the configuration, it is possible to prevent the sheet material from shifting downward with a simple structure.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A surface treatment apparatus according to one embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan sectional view of a surface treating apparatus 10 for a band-shaped sheet material W according to a first embodiment of the present invention.
FIG. 2 is a longitudinal sectional view of the device 10 taken along the line II-II in FIG.

The surface treatment apparatus 10 according to the present embodiment is configured to deposit a thin film on the surface of the sheet material W by sputtering or plasma CVD while continuously running the belt-shaped sheet material W so that the width direction thereof is vertical. As shown in FIG. 2, the apparatus is composed of a vacuum chamber 12 maintained in a vacuum state, and a mechanical chamber 14 arranged under the vacuum chamber 12 under atmospheric pressure.

The vacuum chamber 12 is a rolled object 1 of a band-shaped sheet material W.
A front surface 12a is formed so as to be openable and closable for taking in and out of 6,18. Inside the vacuum chamber 12, the front surface 12
The unwinding section 20 and the winding section 22 of the sheet material W are provided side by side in close proximity to a.

The unwinding section 20 and the winding section 22 are configured so that the rolled bodies 16 and 18 of the sheet material W are held with their axial directions directed vertically. In detail, unwind shaft 2
4 and a tapered cone 2 that is held by tightening both ends of cores 25 of winding bodies 16 and 18 to be winding shafts 26.
As shown in FIG. 2, 8, 30 are arranged facing up and down. The shaft of the lower taper cone 30 projects into the lower machine room 14 where it is connected to a core drive motor 32. The upper taper cone 28 is connected to the vacuum chamber 12.
Is connected to a core setting mechanism 34 disposed on the upper surface of the core 25, and is moved up and down by the mechanism 34 to tighten and hold the core 25 and release it.

At the rear of the vacuum chamber 12, a large-diameter drive roll 36 is disposed with its axial direction oriented in a vertical direction, and is relatively opposed to the sheet material W running along the drive roll 36. Electrodes 38a, 38b, 38c for forming a film are formed on both left and right side surfaces and a rear surface of the vacuum chamber 12.
Is arranged. That is, the drive roll 36 is surrounded by a plurality of electrodes, in this case, three electrodes 38 a to 38 c on the left, right, and rear sides, and is disposed to face when the sheet material W travels along the drive roll 36. Thin films are sequentially laminated by the three electrodes 38a to 38c.

The drive roll 36 is a transport roll for transporting the sheet material W from the unwinding section 20 to the winding section 22.
It is also a cooling roll or a heating roll for cooling or heating the sheet material W subjected to the film forming process by 8a to 8c. The rotating shaft of the driving roll 36 has a lower end protruding into the lower machine room 14 and is connected to a driving motor 40 thereat, and an upper end is supported by a bearing 42. The drive roll 36 is rotated forward F
And the reverse rotation R is formed. When the reverse rotation R is performed, the unwinding part 20 becomes a winding part and the winding part 22 becomes a unwinding part.

A partition wall 44 is formed around the electrodes 38a to 38c from the wall surface of the vacuum chamber 12 so as to protrude therefrom.
4, processing chambers 46a to 46c are partitioned between the side surfaces of the driving roll 36 and the electrodes 38a to 38c, respectively.

The electrodes 38a to 38c are attached to doors 48 of the vacuum chamber 12, respectively, so that the doors 48 can be opened for maintenance of the electrodes. In this case, as shown in FIG. 6A, the door 48 may be configured to be rotatable in the horizontal direction by a hinge 49 provided on one side in the width direction of the door 48, or as shown in FIG. As shown in (), a hinge portion 49 provided on the lower side of the door 48 may be configured to be rotatable so as to fall forward. In particular, when the door 48 is opened, the electrode 3
Since 8 is in a horizontal position, replacement of the target material is further facilitated.

Between the unwinding section 20 and the driving roll 36, a rotatable first guide roll 50 and an unwinding section 20 are provided.
And a payout roll 52 for feeding out the sheet material W from the rolled object 16 set in the first guide roll 5.
At 0, it turns inward at a substantially right angle and is fed from the feed roll 52 to the rear drive roll 36. In addition, a press roll 53 is disposed to face the feed roll 52, and the press roll 53 presses the sheet material W on the feed roll 52 so as not to shift.

A rotatable second guide roll 54 and a straightening roll 56 for straightening the running sheet material W downward are arranged between the winding section 22 and the driving roll 36. The sheet material W conveyed from the drive roll 36 is turned outward by a straightening roll 56 in front of the sheet material W, further turned forward by a second guide roll 54, and taken up by the unwinding unit 22. It has become.

These rolls 50, 52, 54, 56
Also, the roll shaft is disposed in the vacuum chamber 12 with the roll axis directed vertically. Specifically, the first and second guide rolls 50 and 54 are supported by bearings 58 and 59 provided on the floor surface and the ceiling surface of the vacuum chamber 12, respectively, as shown in FIG. Like the drive roll 36, the lower end of the roll shaft projects into the lower machine room 14 and is connected to a drive motor (not shown), and the upper end of the feed roll 52 is supported by a bearing (not shown). I have. As shown in FIG. 2, the straightening roll 56 is supported by bearings 60 and 61 provided on the floor surface and the ceiling surface of the vacuum chamber 12, respectively.

Here, the straightening roll 56 will be described in detail.

The straightening roll 56 is a rotatable roll that changes the running direction of the sheet material W along the roll side surface by passing the sheet material W in contact with the side surface of the roll by a predetermined distance in the circumferential direction. is there. In this embodiment, as shown in FIG. 1, the running sheet material W is configured to be substantially folded back by the straightening roll 56. For details, see FIG.
As shown in FIG. 7, the sheet material W comes into contact with the side surface of the straightening roll 56 in the circumferential direction in a range of α = approximately 140 ° and passes therethrough. In the present invention, the contact range α = 60 ° to 3 °
Preferably it is 00 °.

The straightening roll 56 is shown in FIGS.
, The sheet surface Wi on the entry side with respect to the roll 56
In a plane P that bisects an angle β formed between the sheet material W and the sheet surface Wo on the release side, the upper part of the roll shaft 56a can be inclined so as to be inclined to the non-contact side of the sheet material W. Specifically, in a posture in which the roll shaft 56a of the straightening roll 56 is oriented in the vertical direction, as shown in FIG. 4, one end A of the contact range α of the sheet material W (the side entering from the drive roll 36) is moved. A crossing line C at which the tangent plane Wi passing through and the tangent plane Wo passing through the other end B (the feeding side to the guide roll 54) is determined,
As shown in FIG. 3, in the plane P including the intersection line C and the roll axis 56a, the roll axis 56a is positioned such that the upper side is opposite to the intersection line C about the correction center K set at the lower end thereof. It is designed to rotate. That is, the roll shaft 56a can be tilted from a vertical position indicated by a dashed line in FIG. 3 to a tilted position indicated by a solid line. Therefore, in this embodiment, the upper bearing 60 that supports the upper end of the straightening roll 56 is formed so as to be movable along the plane P. More specifically, a configuration is such that a downward shift of the sheet material W is detected by a sensor (not shown), and the inclination of the roll 56 is adjusted by controlling the movement of the upper bearing 60 based on the detection result. ing.

On the contrary, the correction center K is set at the upper end of the roll shaft 56a so that the lower side of the roll shaft 56a is rotated toward the intersection C in the plane P. Is also good. In this case, the lower bearing 61 is connected to the plane P
What is necessary is just to be formed so that it can move along.

The surface of the straightening roll 56 is formed of a metal roll having a large frictional force (for example, a metal having a small amount of mirror-like unevenness and having a surface state that easily adheres to a film), rubber, a nonwoven fabric, or the like, having a rough frictional coefficient. It is made of a material that is larger than that of. This is because it is difficult to effectively correct the downward displacement of the sheet material W if the roll surface is slippery and has a small frictional force. If the straightening roll 56 is extremely inclined, straightening is possible even with a slippery roll, but the lower part of the sheet material W is pulled by the tension for traveling on the sheet material W, and the upper part is Extremely loose, resulting in sheet material W
This will cause wrinkles. From such a viewpoint, it is preferable that the surface of the straightening roll 56 has a large friction coefficient.

Reference numeral 62 indicates a state in which the first and second guide rolls 50 and 54 are pressed when the rolled bodies 16 and 18 are switched, and the sheet material W between the two rolls 50 and 54 is in tension. 3 shows a press roll to be held. Reference numeral 64 denotes a rolled object 16, 18 to prevent the sheet material W wound around the core 25 from falling when the tension applied to the sheet material W becomes zero or becomes loose during a power failure or the like. The pressing roll to be pressed is shown.

In the processing apparatus 10 of the present embodiment, the straightening roll 56 is inclined in the plane P as described above, so that the driving roll 36 can be rotated forward F or reversely rotated R. When the sheet material W passes through the straightening roll 56, the sheet material W can be lifted upward to correct the downward displacement of the sheet material W.

This is because, as shown in FIG. 3, the straightening roll 56 is inclined in the plane P so that, when the forward rotation F is performed, the upper side of the sheet material Wi entering the unwinding side (drive roll). This is because, at the time of reverse rotation R, the upper side is inclined toward the unwinding side (the second guide roll 54 side) with respect to the sheet material Wo entering from the opposite side.

As described above, even when the sheet material W is driven in the forward or reverse direction, the downward shift of the sheet material W can be corrected by inclining the correction roll 56 in the same direction. The structure can prevent the sheet material W from shifting downward.

FIG. 5 is a perspective view of a straightening roll 70 used in the surface treatment apparatus according to the second embodiment of the present invention. In this embodiment, a straightening roll 70 shown in FIG. 5 is provided in place of the straightening roll 56 in the processing apparatus 10 of the first embodiment, and the other configuration is the same as that of the first embodiment.

The straightening roll 70 is a drum-shaped roll having a drum-shaped constriction 74 with respect to a cylindrical body 72 so that the diameter becomes smaller toward the center in the axial direction. 1, and is rotatably disposed at the position of the roll 56 shown in FIG. The roll 70 has a relatively slippery surface made of a metal having a relatively uneven surface.

As described above, the rotatable drum-shaped roll 70 is provided.
Are arranged vertically, and the sheet material W is passed through the drum-shaped roll 70 in contact with the predetermined distance, so that the sheet material W can be stably run to the center of the roll 70 in the vertical direction. Therefore, the downward shift of the sheet material W when the vehicle travels with the seat surface standing on a vertical surface is prevented. Further, since the straightening roll 70 has no directionality,
Regardless of whether the sheet material W travels in the forward or reverse direction, downward displacement can be prevented.

The straightening roll 70 is used when the sheet material W is a relatively slippery material such as a film or a metal foil. It is better to use a roll with a crown when running such a film).

In the above embodiment, the straightening roll 5
6, 70 are provided, but a plurality of these correction rolls may be provided.
6 and 70 may be provided in combination.

[0037]

According to the surface treatment apparatus of the present invention, even when the sheet material can be made to travel forward and backward, it is possible to prevent the sheet material from shifting downward with a simple structure.

[Brief description of the drawings]

FIG. 1 is a plan sectional view of a surface treatment apparatus according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a schematic perspective view of a straightening roll according to the embodiment.

FIG. 4 is a schematic plan view of the straightening roll.

FIG. 5 is a perspective view of a straightening roll used in a surface treatment device according to a second embodiment.

FIGS. 6A and 6B are perspective views showing a door opening and closing structure in the processing apparatus of the embodiment.

[Explanation of symbols]

 10: Surface treatment device 56, 70: Correcting roll W: Band-shaped sheet material Wi: Sheet surface on the entry side Wo: Sheet surface on the release side P: A plane that bisects both sheet surfaces

Continued on the front page (72) Inventor Akiyoshi Tsuchiya 1-6-8 Nakasankurado, Yamatotakada-shi, Nara Prefecture Nobel Kamishima B205 (72) Inventor Hiroki Sugime 236-1 Sanryo-cho, Nara-shi, Nara Sunplaza 512 F term (reference) 3F104 AA03 CA07 GA01 GA15 JB05 4F073 BB01 CA04 CA49 4G075 AA24 DA02 DA12 EA01 ED04 ED06 ED08 4K029 AA25 JA10 KA01 4K030 CA17 GA14

Claims (2)

[Claims] 1. A surface treatment for performing a surface treatment on a sheet material while continuously running the band-shaped sheet material with a plurality of rolls having roll axes oriented in a vertical direction so that a width direction of the sheet material is a vertical direction. In the apparatus, a straightening roll for correcting a downward shift of the running sheet material is provided, and the straightening roll is configured such that the sheet material contacts a roll side surface in a circumferential direction for a predetermined distance and passes therethrough. A rotatable roll that changes the running direction of the sheet material along the side surface of the roll, and a roll shaft in a plane that substantially bisects the sheet surface on the entry side and the sheet surface on the release side with respect to the roll. A surface treatment device for a band-shaped sheet material, wherein the upper surface of the sheet material is tiltably provided so as to be inclined to a non-contact side of the sheet material. 2. A surface treatment for performing a surface treatment on a sheet material while continuously running the belt-like sheet material with a plurality of rolls having roll axes oriented in a vertical direction so that a width direction thereof is vertical. In the apparatus, a straightening roll for correcting a downward shift of the running sheet material is provided, and the straightening roll passes through the sheet material in contact with the roll side surface in a circumferential direction for a predetermined distance. A surface treatment device for a belt-shaped sheet material, wherein the device is a rotatable drum-shaped roll that changes the running direction of the sheet material along the side surface of the roll.