KR100442309B1 - Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method thereof - Google Patents

Abstract

The present invention relates to a continuous surface treatment apparatus and a continuous surface treatment method for improving the antistatic and conductivity of the surface of the polymer having a film shape by plasma ion implantation by a negative voltage pulse, ion implantation by generating a plasma To this end, a high frequency power supply unit including a high frequency power supply device 27, a matching box 26, and an antenna 28, a gas introduction device 71 for supplying a process gas to be ionized for composing a plasma, and a gas connected thereto. In the surface treatment apparatus including the supply source 72 and the processing chamber 21 provided with a vacuum pump etc., the degassing drawing-in chamber 11 and the degassable which are attached adjacent to each other before and after the said processing chamber 21 are provided. The film-like polymer 52 may pass through the extraction chambers 41 and the partition walls between the extraction chamber 11 and the processing chamber 21 and the partition walls between the processing chamber 21 and the extraction chamber 41. Grooves formed The processing chamber 21 includes a cylindrical plate 25 supporting the film-like polymer 52 and a cylindrical grid 24 positioned around the cylindrical plate 25, wherein the cylindrical plate 25 is provided. And the cylindrical grid 24 is electrically connected to the high voltage pulse generator 23.

Description

Continuous surface-treating apparatus for film shape of polymer and continuous surface-treating method

The present invention relates to continuous surface treatment of film-like polymers. More specifically, the present invention relates to a continuous surface treatment apparatus and a continuous surface treatment method for improving the antistatic and conductivity of the surface of the polymer having a film shape by plasma ion implantation by a negative voltage pulse.

Polymer materials have a wide variety of applications due to their light weight, formability and processability, transparency, and electrical insulation. The polymer material needs to improve only the surface properties without changing the properties of the entire polymer material depending on the purpose of use. Particularly, the hydrophilicity or hydrophobicity of the surface may affect the wettability, printability, and colorability of the polymer material. colorability), biocompatibility, antistatic, adhesiveness, waterproof, moisture-proof, etc. have a decisive effect, various methods for improving this have been used.

Examples of the surface modification method of the polymer material include chemical treatment, corona treatment, plasma treatment, and the like. Representative examples of chemical treatment methods include fluorine-based polymer surface treatment using Na / NH ₃ (see US Pat. No. 2,789,063 and UK Pat. No. 793,731). This method has the advantage of predicting the functional groups formed on the surface by a general chemical reaction, but has the disadvantage that the treatment process is cumbersome and causes the problem of waste liquid, which is a contaminant.

Corona discharge treatment at atmospheric pressure, on the other hand, is a surface treatment of packaging materials such as polyolefin and polyethylene terephthalate films (see J. Pochan, L. Gerenser, and J. Elman, Polymer, Vol. 27, p. 1058, issued in 1986). Although the modified layer is very thin, there is a problem in that after treatment, it is easily deteriorated with time and it is difficult to optimize processing process parameters such as humidity in the air.

Polymer surface treatment method using plasma at low pressure is to improve the hydrophilicity of polypropylene, polyethylene, polystyrene, etc. using oxygen plasma (M. Morra, E. Occhiello, and F. Garbassi, Journal of Applied Polymer Science, 39, page 249, published in 1990).

Plasma is considered a fourth state of matter and means a partially ionized gas. Its constituents are electrons, cations and neutral and heavy atoms. When energy is applied to the gas particles, the gas particles have a positive charge because the outermost electrons move out of the orbit and become free electrons. Thus formed electrons and a large number of ionized gases gather to maintain electrical neutrality as a whole, by the interaction between the constituent particles emit a unique light and the particles are activated to have a high reactivity. The plasma treatment has advantages in that the reaction gas can be selected and the process pressure and the like can be adjusted as compared to the corona treatment. However, the modified surface layer is thin, and deterioration with time after the treatment is known as a problem.

In addition, recently, a method of improving hydrophilicity by injecting an ion beam of an inert element (Ar) in a polymer sample in an oxygen atmosphere has been reported (S. Koh, S. Song, W. Choi, and H. Jung, Journal of Materials Research, Vol. 10, pp. 2390, published in 1995), also suffers from a sharp drop in hydrophilicity over time and the use of ion beams, making the device complex and difficult to uniformize large areas. .

On the other hand, as a technique suitable for ion implantation of a three-dimensional object, the plasma source ion implantation method and apparatus described in US Pat. No. 4,764,394 are known.

Korean Patent Laid-Open Publication No. 1987-7562 discloses various processes such as etching the surface of semiconductors, metals or insulators, modifying the surface, cleaning the surface, implanting impurities into the surface, and depositing thin films on the surface. A surface treatment method and a surface treatment apparatus for use therein are disclosed, wherein an ion beam containing at least one type of element is incident on a surface of a solid target to scatter particles forward, and include the at least one type of element. After generating the forward scattering particle beam, injecting the forward scattering particle beam toward the surface of the workpiece to etch or modify the surface of the workpiece or to deposit a film on the surface of the workpiece. It is describing.

Korean Unexamined Patent Publication No. 1997-73239 discloses a surface modification method for improving the hydrophilicity or hydrophobicity of a surface of a polymer material by plasma ion implantation, and a device used therein, wherein the sample table located in a vacuum chamber is disclosed. Positioning a plate-like polymer material thereon; introducing a plasma source gas into a vacuum chamber; generating an ion plasma from the introduced plasma source gas; a pulse voltage of -1 kV to -20 kV, the voltage at pulse-off A negative high voltage pulse having a pulse width of 0 V to -1 kV, a pulse width of 1 Hz to 50 Hz, and a pulse frequency of 10 Hz to 500 Hz is applied to the sample of the polymer material, and ions extracted from the plasma generate high energy. Method for surface modification of a polymer material, characterized in that it consists of the step of being injected to the surface of the sample while retaining There.

However, all of the above methods are intended to increase or decrease the hydrophilicity or hydrophobicity of the polymer material, and are not intended to improve antistatic properties and conductivity.

In the case of antistatic and conductive polymers, conductive carbon and carbon fiber are kneaded in the polymer, but in the case of these antistatic polymers and conductive polymers, particles of carbon and carbon fibers are peeled off after molding. As well as causing a great damage to the product, particles are stuck to electronic products, semiconductors and liquid crystal display (LCD) substrates, causing large damage to the pattern or chip. The use of an antistatic agent for antistatic may cause the antistatic effect of its own to disappear after a certain period of time, thus preventing the antistatic effect.

In the case of an aqueous solution in which a conductive polymer of polypyrrole and polyaniline is dissolved or an aromatic polymer and an atactic polymer solution, the solution is impregnated and dried to be sensitive to scratches, moisture, etc. There is a problem that causes the phenomenon.

In addition, in the case of the surface modification of the polymer using the ion beam, the product should be processed by accelerating the beam, spreading the beam, and spaced apart from the region where the neutron is present. It is used, and it is very difficult to carry out the continuous process of mass production in the yield of the product.

In addition, Korean Laid-Open Patent Publication No. 2002-20010 discloses a surface modification method and apparatus using plasma ion implantation technology to improve the surface properties and electrical conductivity of the three-dimensional solid polymer material and products, (A) placing a stereoscopic polymeric material in a grid in a vacuum chamber; (b) positioning a grid at a distance from the material surface in the vacuum chamber; (c) forming gas plasma ions to form a graphite layer having a lower resistance on the material surface in the vacuum chamber, and (d) injecting gas plasma ions to the surface of the material by applying a negative voltage pulse to the grid. A surface treatment method of a three-dimensional polymer material by plasma ion implantation of a three-dimensional polymer using a grid comprising a. However, there is a problem that the above method is not suitable for mass production.

An object of the present invention is to provide a continuous surface treatment method for improving the antistatic and conductivity of the surface of the polymer having the shape of the film by plasma ion implantation by a negative voltage pulse.

1 is a block diagram showing one specific embodiment of the continuous surface treatment apparatus of the film polymer according to the present invention.

※ Explanation of code about main part of drawing ※

11: drawing room 12: vacuum pump

21: process chamber 22: vacuum pump

23: high voltage pulse generator 24: grid

25: cylindrical plate 26: matching box

27: high frequency power supply device 28: antenna

31: second processing chamber 32: vacuum pump

33: second high voltage pulse generator 34: second grid

35: second cylindrical plate 36: the second matching box

37: second high frequency power supply device 38: the second antenna

41: withdrawal chamber 42: vacuum pump

51: untreated fabric roll 52: film polymer

61: processing fabric roll 71: gas introduction device

72: gas supply source

A continuous surface treatment apparatus for a film polymer according to the present invention is to supply a high frequency power supply including a high frequency power supply, a matching box and an antenna for generating plasma and ion implantation, and supplying a process gas to be ionized to construct a plasma. A surface treatment apparatus comprising a gas introduction device, a gas supply source connected thereto, and a treatment chamber provided with a vacuum pump, the surface treatment apparatus comprising: a degassable drawing chamber and a degassing drawing chamber which are mounted adjacent to each other before and after the treatment chamber; Grooves through which the film-like polymer can pass are formed in the partition walls between the drawing chamber and the processing chamber and the partition walls between the processing chamber and the drawing chamber, and the processing chamber is formed around the cylindrical plate and the cylindrical plate supporting the film-like polymer. It includes a cylindrical grid located, the cylindrical plate and the cylindrical grid It is made is electrically connected to the high-voltage pulse generating device.

The treatment chamber may be formed in two parallel to the double-sided treatment of the film-like polymer, in addition to this treatment chamber may be provided with a second treatment chamber of the same or similar configuration as the treatment chamber.

The draw chamber is provided with an unprocessed fabric roll on which an unprocessed fabric is wound and a rotating means for rotating the film polymer to transfer the film-like polymer to the process chamber.

The withdrawal chamber is provided with a processing fabric roll on which the fabric treated in the processing chamber is wound and a rotating means for rotating it.

Preferably, the rotation means of the draw chamber and the rotation means of the draw chamber may be synchronized with each other so that the rotation speed of the draw chamber can be released and wound at a constant speed.

In addition, in the continuous surface treatment method of the film polymer according to the present invention, in the surface modification using the plasma ion implantation technique, (1) the untreated raw roll of the film polymer to be treated in the degassable draw chamber is mounted; And a drawing step of mounting a processing fabric roll on which the film-like polymer whose surface treatment is completed is wound in a degassing drawer chamber; (2) a first vacuuming step of depressurizing and degassing the inside of the drawing chamber equipped with the unprocessed fabric roll and the inside of the drawing chamber equipped with the processed fabric roll on which the surface-finished film polymer is wound; (3) a first transfer step of transferring the film-like polymer from the raw fabric roll in the draw chamber to the processing chamber; (4) a surface treatment step of surface-treating the plasma on the film-form polymer transferred into the treatment chamber; (5) a second transfer step of transferring the surface-treated film-like polymer into the evacuated drawing chamber; And (6) a withdrawal step of withdrawing the treated fabric roll mounted in the withdrawal chamber to the outside after the film-like polymer of the untreated fabric roll is exhausted.

A pretreatment step of removing moisture from the film polymer by applying hot air to the film polymer in the drawing chamber before and after the first vacuuming step of (2).

The surface treatment step (4) is a pulse width of 15 to 25 kHz, a high frequency frequency 500 for plasma generation while continuously supplying a process gas consisting of argon, nitrogen or mixtures thereof in an amount of 15 to 100 sccm. To surface treatment at a process condition of 1 to 1500 kHz and a high voltage pulse of 26 to 30 KV.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, the continuous surface treatment apparatus of the film polymer according to the present invention includes a high frequency power supply device 27, a matching box 26, and an antenna 28 for generating plasma and ion implantation. And a high frequency supply unit, a gas introduction unit 71 for supplying a process gas to be ionized to construct a plasma, a gas supply source 72 connected thereto, and a processing chamber 21 including a vacuum pump. In the above, the degassing drawing chamber 11 and the degassing drawing chamber 41 which are mounted adjacent to each other before and after the processing chamber 21, and the partition wall between the drawing chamber 11 and the processing chamber 21. And grooves through which the film-like polymer 52 can pass through the partition walls between the processing chamber 21 and the drawing chamber 41, and the film-forming polymer 52 is supported in the processing chamber 21. The cylindrical plate 25 and the cylindrical plate 25 PL is included in a cylindrical grid 24, the cylindrical plate 25 and the grid 24 of the cylinder is characterized by being electrically connected to the high voltage pulse generating device yirueojim 23.

A high frequency power supply unit including a high frequency power supply device 27, a matching box 26 and an antenna 28 to generate plasma and ion implantation therein, and a gas introduction device supplying a process gas to be ionized to construct a plasma. Surface treatment apparatus including the 71 and the gas supply source 72 connected thereto, and the processing chamber 21 provided with a vacuum pump, etc. can be understood to be known to those skilled in the art to be commercially available. The surface treatment apparatus using such a plasma supplies the process gas to be ionized in the vacuumized processing chamber 21 and applies high frequency power in a strong magnetic field to partially ionize the process gas to form a plasma called a fourth material state. The workpiece is placed on a specimen table charged with a high voltage, or the workpiece is placed in the grid 24, and the polarity of the current applied to the specimen table or the grid 24 among the ions constituting the plasma is opposed to the workpiece. The ions to be applied are mainly electrostatically induced by applying a high voltage pulse to the grid 24 to be applied to the surface of the workpiece so that ion implantation is performed on the surface of the workpiece. That is, in the present invention, in order to be able to continuously process the workpiece, in particular the film-like polymer 52, in such a known surface treatment apparatus, a degassing draw-in chamber installed adjacent to each other before and after the treatment chamber 21. (11) and degassing extraction chambers (41) are provided, and the extraction chamber (11) is equipped with an unprocessed fabric roll (51) wound with a film-like polymer (52) as a work piece, and the extraction chamber (41) The processing fabric roll 61 in which the surface-treated film-like polymer 52 is wound is mounted, and then the drawing chamber 11, the processing chamber 21, and the drawing chamber 41 are respectively vacuum pump 12 and vacuum. After being evacuated by the pump 22 and the vacuum pump 32, the polymer film 52 is released from the raw fabric roll 51, and the partition wall between the drawing chamber 11 and the processing chamber 21 and the Through the grooves through which the film-like polymer 52 can pass through the partition walls between the processing chamber 21 and the drawing chamber 41. After passing through the surface treatment by plasma ion implantation in the processing chamber 21, the film-like polymer 52 was wound on the processing fabric roll 61 in the extraction chamber 41. This feature is characterized in that (52) is continuously surface treated.

The treatment chamber 21 includes a cylindrical plate 25 for supporting the film-like polymer 52 and a cylindrical grid 24 positioned around the cylindrical plate 25, and the film-like polymer 52 to be surface treated. While being transported in the state interviewed with the cylindrical plate 25, the ions induced by the grid 24 are implanted while passing under the grid 24 to be surface treated.

The cylindrical plate 25 and the cylindrical grid 24 are electrically connected to the high voltage pulse generator 23. As a result, ions in the plasma are electrostatically induced by the grid 24 and the cylindrical plate 25 to be injected into the surface of the film-like polymer passing between the grid 24 and the cylindrical plate 25.

In addition, the draw chamber 11 further includes a pretreatment apparatus for spraying and pretreating dry hot air at a temperature of 70 to 85 ° C. to the film-like polymer 52 to be surface treated, and the pretreatment apparatus for supplying hot air. It may be a blower, the pre-treatment device may be connected to an intermittent valve for regulating the flow of hot air and an air compressor for generating hot air. Pretreatment by the pretreatment device preheats the film-like polymer 52 article to be surface treated to allow the implantation of ions into the surface of the film-like polymer 52 article to a deeper level. The pretreatment removes moisture by applying hot air at a temperature of 70 to 85 ° C., partially heats the film polymer 52, and the heating temperature may vary depending on the type, physical properties and size of the polymer constituting the polymer article. Those skilled in the art can determine the appropriate heating temperature experimentally by theory or by empirical rule.

The treatment chamber 21 may be formed in two parallel to the double-sided treatment of the film-like polymer 52, for this purpose, in addition to the treatment chamber 21, a second treatment chamber having the same or similar configuration as the treatment chamber 21 ( 31) may be added together. That is, in the second processing chamber 31, the vacuum pump 32, the second high voltage pulse generator 33, the second grid 34, the second cylindrical plate 35, the second matching box 36, and the second After the high frequency power supply device 37 and the second antenna 38 have the same or similar configuration as the above-described processing chamber 21, the surface of the film-like polymer 52, i.e., the upper surface of the film-like polymer 52 in the processing chamber 21, Subsequently, the second surface of the second processing chamber 31 is surface treated. Therefore, it is possible to surface-treat both surfaces by the surface treatment of only one surface by the operation of any one of the processing chambers 21 and the operation of both the processing chamber 21 and the second processing chamber 31.

The draw chamber 11 is provided with an unprocessed fabric roll 51 on which an unprocessed fabric is wound so as to transfer the film-like polymer 52 to the process chamber 21, and a rotating means for rotating the film 42, and the draw chamber 41. In the processing chamber 21 is provided a processing fabric roll 61 is wound around the fabric treated surface and the rotating means for rotating it. The rotating means may be composed of a conventional geared motor or the like. Such a geared motor can also be understood to be well known to those skilled in the art to purchase and use it commercially. Preferably, the rotating means of the drawing chamber 11 and the rotating means of the drawing chamber 41 may be synchronized with each other so that the rotating means may unwind and wind the film-like polymer 52 at a constant speed. By synchronizing, the film-like polymer 52 is constantly wound on the processing fabric roll 61 via the processing chamber 21 (and the second processing chamber 31).

Referring to FIG. 1, the raw fabric roll 51 on which the film-like polymer 52 is wound is mounted in the drawing chamber 11 by the above-described configuration, and the film-like polymer 52 on which the surface-treated polymer is wound may be wound. The processing fabric roll 61 is mounted in the withdrawal chamber 41, and the drawing chamber 11, the processing chamber 21, and the drawing chamber 41 are all evacuated, and then the film polymer 52 is drawn into the drawing chamber ( 11) the surface treatment process is performed while passing between the cylindrical plate 25 and the grid 24 in the processing chamber 21 via the pretreatment apparatus and wound around the processing fabric roll 61 in the drawing chamber 41. Plasma processing is the same as or similar to that of the conventional plasma processing. The processing gas is introduced, and the high frequency power supply device 27, the matching box 26, the high voltage pulse generator 23, and the like are driven through the antenna 28. The high frequency power is supplied to generate a plasma to electrostatically attract positive ions toward the grid 24 to which the high voltage pulse is applied, and to inject the cations into the surface of the film-like polymer 52 located in the grid 24. Subsequently, when the raw fabric roll 51 in the draw chamber 11 is exhausted, the film-like polymer 52 may be continuously surface-treated by taking out the processed fabric roll 61 mounted on the drawing chamber 41. It becomes possible.

In addition, the continuous surface treatment method of the film polymer according to the present invention, in the surface modification using the plasma ion implantation technique, (1) the form in which the film polymer 52 to be treated in the degassing draw chamber 11 is wound An unprocessed fabric roll 51 of the unprocessed fabric roll and a process fabric roll 61 on which the film-like polymer 52 whose surface treatment is completed is wound in a degassing drawer chamber 41; (2) Pressure-reducing the inside of the drawing chamber 11 equipped with the raw fabric roll 51 and the inside of the drawing chamber 41 equipped with the processing fabric roll 61 on which the film-like polymer 52 on which surface treatment is completed is wound. , Degassing the first vacuuming step; (3) a first transfer step of transferring the film polymer (52) from the raw fabric roll (51) in the drawing chamber (11) to the processing chamber (21); (4) a surface treatment step of performing surface treatment on the film-like polymer 52 transferred into the treatment chamber 21 by using plasma; (5) a second transfer step of transferring the surface-treated film-like polymer 52 into the evacuated drawing chamber 41; And (6) a withdrawal step of withdrawing the treated fabric roll 61 mounted in the drawing chamber 41 to the outside after the film-like polymer 52 of the raw fabric roll 51 is exhausted. It is characterized by.

In the drawing step of (1), the untreated raw roll 51 having the form in which the film-like polymer 52 to be treated is wound in the degassing drawing chamber 11 is mounted, and the surface treatment is carried out in the degassing drawing chamber 41. The finished film-like polymer 52 is a step of mounting the processing roll 61 is wound.

In the first vacuuming step of (2), the processing fabric roll 61 in which the unprocessed fabric roll 51 is mounted inside the drawing chamber 11 and the surface-finished film-like polymer 52 is wound is mounted. A step of depressurizing and degassing the inside of the drawing chamber 41 is a step of achieving a vacuum for surface treatment by plasma.

The first transfer step of (3) is a step of transferring the film-like polymer 52 from the raw fabric roll 51 in the draw chamber 11 to the processing chamber 21, and then the surface treatment step of (4) In the surface treatment is performed using a plasma to the film-like polymer 52 transferred into the treatment chamber 21 in the.

Subsequently, in the second transfer step (5), the film-like polymer 52 on which the surface treatment is completed is transferred into the evacuated drawing chamber 41, and in the withdrawal step (6), the raw fabric roll ( After the film-like polymer 52 of 51 is exhausted, the process fabric roll 61 mounted in the drawing chamber 41 is taken out to the outside, whereby the continuous wound on the raw fabric roll 51 is carried out. The film-like polymer 52 thus obtained can be continuously surface treated.

Before and after the first vacuuming step of (2), a pretreatment step of removing moisture and the like by applying hot air to the polymer article in the drawing chamber 11 may be further performed. The pretreatment step preheats the polymer article in the draw chamber 11 to allow the implantation of ions into the surface of the polymer article to a deeper level. In the pretreatment step, hot air at a temperature of 70 to 85 ° C. is applied to remove moisture, and the film polymer 52 is partially heated, and the heating temperature varies depending on the type, physical properties and size of the polymer constituting the polymer article. Those skilled in the art can determine the appropriate heating temperature experimentally by theory or by empirical rule.

Surface treatment step (4) is a high-frequency for generating a pulse width of 15 to 25 kHz, while supplying a process gas consisting of argon, nitrogen or mixtures thereof to the processing chamber 21 continuously in an amount of 15 to 100 sccm The surface treatment is performed under process conditions of a frequency of 500 to 1,500 kHz and a high voltage pulse of 26 to 30 kV. These process conditions may vary depending on the type, size and shape of the film-like polymer 52, and those skilled in the art can be understood that the appropriate process conditions can be theoretically and empirically determined to perform ion implantation by surface treatment. It is.

As the film-like polymer 52 as the workpiece to be processed by the surface treatment apparatus and the surface treatment method according to the present invention as described above, all kinds of known polymers are possible, and preferably, low density polyethylene (LDPE), linear low density Vinyl polymers 41 such as polyethylene (LLDPE), high density polyethylene (HDPE), polypropylene (PP), polystyrene (PS), nylon 6 such as nylon 6, nylon 11, nylon 12, nylon 66, and other polycarbonates PC), polyethylene terephthalate (PET), acrylonitrile-butadiene-styrene copolymer (ABS), styrene-acrylonitrile copolymer (SAN), polyphenylene sulfide (PPS), polyetherimide resin (PEI), Polyimide (PI), modified polyphenylene oxide (MPPO), modified polysulfone (MPSU; Modified polysulfone), modified polyether (MPES) and polyether ether ketone (PEEK).

Hereinafter, preferred embodiments and comparative examples of the present invention will be described.

The following examples are intended to illustrate the invention and should not be understood as limiting the scope of the invention.

Examples 1 to 3

A film-like polymer 52 made of polyethylene is mounted in the unprocessed fabric roll 51 as a workpiece to be processed into the drawing chamber 11 using the apparatus as shown in FIG. After attaching the processing fabric roll 61 on which the surface-treated film-like polymer 52 is wound, the inside of the drawing chamber 11, the processing chamber 21, and the drawing chamber 41 are vacuum-depressurized, degassed, and vacuumed. After finishing, the surface treatment is carried out while releasing the film-like polymer 52 from the raw fabric roll 51 in the drawing chamber 11 and passing between the cylindrical plate 25 and the grid 24 of the processing chamber 21. However, after performing the process conditions of the surface treatment as shown in Table 1, when the unprocessed fabric roll 51 in the draw chamber 11 is exhausted, the vacuum state is released, the processing fabric roll 61 from the take-out chamber 41 The surface treatment was carried out by extracting, and as a result, the ion density during the process and the workpiece after the treatment The surface resistance of water was measured and also shown in Table 1.

division Process gas (argon, sccm) Process gas (nitrogen, sccm) Pulse width Frequency High voltage (KV) Ion Density (ea / ㎠) Surface resistance (Ω / ㎠) Example 1 15 - 20 500 28 10 ¹⁰ 10 ^{7-10 8} Example 2 25 9 20 750 26.5 10 ¹¹ 10 ^{7-10 8} Example 3 38 - 20 500 30 10 ¹¹ 10 ^{7-10 8}

Therefore, according to the present invention, a low surface resistance of 10 ⁷ to 10 ^{8 kW} / cm 2 can be achieved to improve the antistatic property and conductivity of the surface of the polymer, and in particular, it is possible to continuously surface-treat the film-like polymer 52. By doing so, there is an effect of facilitating mass production.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (8)

A high frequency power supply unit including a high frequency power supply device, a matching box and an antenna to generate plasma and ion implantation, a gas introduction device supplying a process gas to be ionized to construct a plasma, a gas supply source connected thereto, a vacuum pump, etc. In the surface treatment apparatus including the processing chamber provided, Degassing and roll-shaped film polymers, which are mounted adjacent to each other before and after the treatment chamber, are supplied in accordance with the rotation of the geared motor, and degassable and film-form polymers which have undergone ion implantation process are rotated by the geared motor. Grooves through which the film-like polymer can pass are formed in the drawing chambers wound in a roll shape, the partition walls between the drawing chamber and the processing chamber, and the partition walls between the processing chamber and the drawing chamber. Cylindrical plate for inducing the transfer of polymer and a cylindrical grid is arranged at a certain distance from the outer peripheral surface of the cylindrical plate, the high voltage pulse generator for supplying a high voltage pulse for focusing the ions of the cylindrical plate and the cylindrical grid Characterized in that it is electrically connected to In the surface treatment apparatus. The method of claim 1, A second processing chamber for implanting ions into another side of the film-like polymer implanted with ions on one side of the processing chamber at the rear end of the processing chamber, wherein the second processing chamber, the film-like polymer implanted in the processing chamber Is disposed to be transported while wrapping the surface of the cylindrical plate to touch the outer circumferential surface of the cylindrical plate, and a cylindrical grid is installed at a predetermined distance from the cylindrical plate, and a high voltage pulse generator is connected to the cylindrical plate and the grid to form the plasma. Apparatus for continuous surface treatment of the film-like polymer, characterized in that configured to be applied to the process gas and high frequency power. delete delete The method of claim 1, The geared motor of the drawer chamber and the geared motor of the drawer chamber is a continuous surface treatment apparatus of the film-like polymer, characterized in that the rotational speed is synchronized with each other so as to release and wind the film-like polymer at a constant speed. In surface modification using plasma ion implantation technology, (1) The film-like polymer to be treated in the degassing drawer chamber is wound in the form of an unprocessed fabric roll and mounted to rotate in accordance with the rotation of the geared motor. A first step of being mounted to be wound in the form of a processing roll; (2) a second step of depressurizing and degassing the inside of the drawing chamber equipped with the unprocessed fabric roll and the inside of the drawing chamber equipped with the treated fabric roll to which the film-like polymer whose surface treatment is completed is wound; (3) a third motor for rotating the geared motor mounted on the raw fabric roll of the drawing chamber and the processing fabric roll of the drawing chamber to transfer the film-like polymer wound on the raw fabric roll to the space between the cylindrical plate and the grid in the processing chamber. step; (4) a fourth process of introducing a process gas into the processing chamber to which the film polymer is transferred, applying high frequency power to form a plasma, and then applying high voltage pulses to the cylindrical plate and the grid to focus ions to treat the surface of the film polymer. step; (5) a fifth step of rotating the geared motor mounted on the raw fabric roll of the drawing chamber and the processing fabric roll of the drawing chamber to transfer the film-treated polymer having the surface treatment from the processing chamber to the drawing chamber and winding it to the processing fabric roll; And (6) a sixth step of drawing out the treated fabric roll mounted in the drawing chamber after the film-like polymer of the raw fabric roll is exhausted; Continuous surface treatment method of the film-like polymer, characterized in that consisting of. The method of claim 6, And removing the water from the film-like polymer by applying hot air to the film-like polymer in the draw chamber before and after the second step. The method of claim 6, The fourth step is to supply a process gas consisting of argon, nitrogen or a mixture thereof to the process chamber continuously in an amount of 15 to 100 sccm, pulse width 15 to 25 ms, high frequency frequency 500 to 1,500 kHz and high voltage for plasma generation Process for the surface treatment of the film-like polymer, characterized in that the surface treatment is performed under a pulse condition of 26 to 30KV.