JPH08134645A - Vacuum treating device for plastic film - Google Patents

Abstract

PURPOSE: To provide a vacuum treating device for plastic films with which well treated articles are obtainable by suppressing the wrinkling, deviating and meandering of the films particularly on an un-winding side and/or taking-up side with a device for executing prescribed treatment within this vacuum treating device. CONSTITUTION: Opposite rollers 22, 32 which are disposed on the unwinding side and/or taking-up side of the device for treating the plastic film 8 in a vacuum vessel 61 and are proximate to product rolls 21, 31 are composed of rollers which are smaller in the outside diameter in the central parts of the longitudinal direction of the rollers than the outside diameter at both ends and are approximated in the changing curve of the outside diameter by a curve of quadratic or higher order in the longitudinal direction of the rollers. Simultaneously, the outside surface shape lines in the longitudinal direction of the opposite rollers 22, 32 in the position A where the plastic film 8 spanned between the opposite rollers 22, 32 and the product rolls 21, 31 substantially begins to come into contact with the opposite rollers 22, 32 are substantially paralleled with the product rolls 21, 31 the vacuum treating device for the plastic film is constituted in such a manner.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for subjecting a plastic film to a treatment such as vapor deposition in a vacuum container. More specifically, the present invention relates to a vacuum processing apparatus for a plastic film, which can be unwound well, processed well, and wound well after the processing without causing wrinkles, meandering, misalignment and the like on the plastic film.

[0002]

2. Description of the Related Art Among plastic films, based on polyethylene terephthalate, polyethylene 2,6 naphthalate, polypropylene, polystyrene, polyphenylene sulfide, aramid, etc., which are highly functional plastics in terms of mechanical properties, thermal properties, electrical properties, etc. The film is widely used for magnetic tapes, capacitors, thermal transfer ribbons, stencil printing, etc. Further, in these applications, plastic films having a thickness of several μm to submicron are produced and used with the progress of ultra-thin film thickness technology.

In particular, a vacuum processing apparatus is used to increase the magnetic recording density and to form a thin film electrode of a capacitor element by using a technique such as vapor deposition or sputtering. The product rolls processed by these devices may be wound at normal pressure (atmospheric pressure) at the manufacturing stage, and the air trapped between the plastic film winding layers is a problem when processed in the vacuum processing device. May become. A typical example thereof is that when the product roll is unwound, the entrained air expands to cause wrinkles in the plastic film, and the film meanders or shifts.

Such a phenomenon is caused by a method of reducing the amount of air entrained in the manufacturing stage of the product roll, for example, winding while removing air by increasing winding tension or surface pressure,
At the stage of winding the product roll, it is alleviated by winding it in a vacuum device similar to that used in processing, or leaving it in a vacuum container before use to remove as much air as possible. However, there are problems such as the narrow range that can be taken, the large scale of equipment, and the decrease in productivity.

On the other hand, it is known that a winding defect occurs when the plastic film is wound in a vacuum container while being processed by vapor deposition or sputtering for the opposite reason to the winding at normal pressure. That is, since there is substantially no air in the processing container, the appearance of the rolled product may be deteriorated. This is because when the plastic film is transported in the machine, friction with the transport roller is increased and wrinkles occur, or there is no air layer between the wound layers of the wound plastic film. It is thought to be easier to enter. This phenomenon becomes particularly noticeable when a thin plastic film having a thickness of 4 μm or less is processed and wound.

Further, in an apparatus for performing processing such as vapor deposition in a vacuum container, generally, a cooling drum is installed in the vacuum vessel, and the plastic film is transported on the cooling drum, and the vapor deposition or the like is performed on the surface of the plastic film. I often do it. That is, when the vapor-deposited metal or the like adheres to the plastic film, heat is applied to the plastic film, but the plastic film is cooled from the back surface side (contact surface side to the cooling drum) simultaneously with vapor deposition or the like.

In such an apparatus, the adhesion of the plastic film to the cooling drum is improved as much as possible to prevent wrinkles from forming on the plastic film. The heat generated may cause the plastic film to slightly expand and contract, which may cause wrinkles, so-called "heat wrinkles".

[0008]

In view of the above problems, the inventors of the present invention, in an apparatus for performing processing such as vapor deposition of a plastic film in a vacuum container, particularly in transporting the plastic film in unwinding and winding of the plastic film. The present invention has been accomplished as a result of intensive research on an apparatus capable of obtaining a good vacuum-processed product while suppressing the occurrence of inner deviation, meandering, and wrinkling.

That is, the object of the present invention is to improve the structure of the opposed roller portion provided on the unwinding side and / or the winding side in an apparatus for performing a predetermined processing in a vacuum processing apparatus, thereby improving the film quality. It is an object of the present invention to provide a vacuum processing apparatus for a plastic film which can suppress wrinkles, shifts and meandering and can obtain a good processed product.

Another object of the present invention is that the improvement of the structure of the facing roller portion on the unwinding side and / or the winding side is also effective for the facing roller for the cooling drum in the vacuum container. Focusing on this, it is to improve the adhesion of the plastic film to the cooling drum so that the generation of heat wrinkles can be suppressed as much as possible.

[0011]

A vacuum processing apparatus for a plastic film according to the present invention for this purpose is a product roll provided on an unwinding side and / or a winding side of an apparatus for processing a plastic film in a vacuum container. The outer diameter of the opposing roller close to the roller is smaller than the outer diameter of the both ends in the central portion in the roller longitudinal direction, and the change curve of the outer diameter is approximated by a higher-order curve of quadratic or higher in the roller longitudinal direction. At a position at which the plastic film, which is formed of a roller and is spread over between the facing roller and the product roll, starts substantially contacting the facing roller,
It is characterized in that the longitudinal outer surface profile line of the facing roller is substantially parallel to the product roll.

Further, in the vacuum processing apparatus for a plastic film according to the present invention, the opposing roller provided in the apparatus for processing the plastic film in the vacuum container having the cooling drum in the vicinity of the cooling drum is located at the central portion in the roller longitudinal direction. The outer diameter of the roller is smaller than the outer diameters of both ends, and the outer diameter change curve is composed of a roller approximated to a secondary or higher-order curve in the roller longitudinal direction. The longitudinal outer surface profile line of the opposed roller is substantially parallel to the cooling drum at a position where the plastic film passed between the cooling drums substantially starts contact with the opposed roller. Consists of.

The vacuum processing apparatus refers to an apparatus which performs vapor deposition, sputtering processing, or other processing in a vacuum container. Further, the degree of vacuum (degree of reduced pressure) in the vacuum container is not particularly limited, and includes all that is reduced from normal pressure (atmospheric pressure) to high or low.

In the apparatus of the present invention, the facing roller may be brought into contact with the product roll or the cooling drum, or may have a substantially constant distance from the product roll or the cooling drum. In the latter case, and in the case where a counter roller is provided for the product roll, the contact start position of the plastic film on the counter roller changes according to the change in the winding diameter of the unwinding or winding product roll. However, the "position at which the plastic film substantially starts contact with the facing roller" may be set to the average position of the contact start positions of the changing plastic film with the facing roller.

Further, as a change curve of the outer diameter of the opposed roller, that is, the degree of change of the outer diameter of the opposed roller, for example, the outer diameter of the portion through which the edge portion of the plastic film of the opposed roller passes is the roller longitudinal direction. It is preferable that the diameter is set to be 0.05 to 3% larger than the minimum outer diameter in the central portion in the direction.

The surface roughness of the opposing roller is 0.1.
It is preferably in the range of s to 3s, and the wrap angle of the plastic film on the facing roller is 90.
It is preferably at least a degree. Further, the surface material of the facing roller is not particularly limited, and can be appropriately selected from a suitable metal or its plating, rubber, ceramics and the like.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows a vacuum processing apparatus for a plastic film according to an embodiment of the present invention, and shows a case where the present invention is applied to a vacuum deposition machine for a plastic film. In the figure, reference numeral 61 denotes a vacuum container, and the inside of the vacuum container 61 is maintained in a substantially vacuum state (highly depressurized state) by an appropriate exhaust device (not shown). The vacuum container 61 is provided with viewing windows 62 and 63. The evaporation device 52 for performing the vapor deposition process on the plastic film 8 puts a vapor deposition metal M such as aluminum in a crucible 53 and heats it to a high temperature to evaporate it and attach it to the object to be treated, that is, the surface of the plastic film 8. It is a device. The cooling drum 51 is a device for processing an object to be processed while cooling it. Here, the unwinding product roll 21 is a roll-shaped roll of the plastic film 8 to be vapor-deposited, and the winding product roll 31 is a rolled roll of the processed product, and the core 23, It has been wound up using 33. These are unwound or wound by using a driving device for controlling the speed, unwinding, and winding tension, and its control device (neither shown).

Opposed rollers 22 and 32 are provided close to the product rolls 21 and 31, respectively. The transport rollers 54, 55, 56, 57 are metal rolls or rubber rolls, and are appropriately transported using the expander roll 41 shown in FIG. 5 or the wrinkle removing roll 42 made up of a plurality of divided rollers shown in FIG. The wrinkles of the plastic film 8 can be removed. Also,
A roller 55 provided close to the cooling drum 51,
It is possible to configure 56 as an opposed roller according to the present invention, and in the vacuum processing apparatus of the present embodiment, both the opposed rollers 22, 32 and the opposed rollers 55, 56 have the predetermined values according to the present invention. It is configured as an opposed roller having a secondary or higher-order outer shape change curve.

A masking device 58 for forming a portion called a margin, which is not vapor-deposited in the longitudinal direction, is installed in front of the evaporation device 52. The masking device 58 is
The device comprises a device for sticking a narrow tape to the plastic film 8 or a device for applying a special oil onto the plastic film 8.

FIG. 2 is a partially enlarged view showing the positional relationship between the product rolls 21 and 31 and the facing rollers 22 and 32 in the winding or unwinding portion. FIG. 3 is a partial cross-sectional plan view of the same portion. The facing rollers 22 and 32 according to the present invention, which face the unwinding product roll 21 or the winding product roll 31, are the product rolls 21 and 3, respectively.
1 is installed in contact with or at a constant distance (interval). When they are brought into contact with each other, they are pressed against the product rolls 21 and 31 by the pressing device 5 so that an appropriate surface pressure is applied. For the pressure device 5, pneumatic pressure, hydraulic pressure, or any other pressing method can be used. In addition, the product roll 21,
The pressing force may be changed according to the winding diameter of 31 to change the surface pressure.

On the other hand, in the case where the product rolls 21 and 31 are unwound or wound at a certain distance, the winding diameters of the product rolls 21 and 31 may be calculated or calculated to retract the product roll side or the opposing roller side.

FIG. 4 shows opposed rollers 22 and 32 according to the present invention in which the central portion of the roller in the longitudinal direction is made thin, and is approximated by a higher-order curve of quadratic or higher order with the longitudinal center as the starting point. The roller is configured to have a curve 3 of change in outer diameter, and FIG. 4 is a sectional view of the roller in its free state. Here, the outer diameter of the rollers 22 and 32 is 0.0005 to 0.03, that is, 0.05% to the edge passage portion of the plastic film, with the center in the roller longitudinal direction being a small diameter (minimum diameter).
3% larger. If it is less than 0.0005, the effect of the present invention is difficult to be obtained, and if it is more than 0.03, the speed difference in the width direction of the plastic film becomes too large, and scratches and static electricity occur, which is not preferable. Also, it is preferable that the change curve of the outer diameter be a curve approximated by a higher-order curve of quadratic or higher order, and it is experience that it is thin and narrow although it depends on the width and thickness of the plastic film to be processed. It is preferable to use a higher-order curve (surface). For example, if the thickness is about 2 μm and the width is about 350 mm, the fourth-order curve (surface) is about 4 μm and the width is about 550 mm. A quadratic curve is preferable as long as it has a width of about 1000 mm, but the curve is not limited to this and may be determined by trial and error.

The material of the surface forming material 4 of the opposed rollers 22, 32 is not particularly limited, and may be metal, rubber, ceramic or the like. Product roll 21,
When used in contact with 31, a roll having a surface covered with elastic rubber is preferable. In that case, the rubber hardness is preferably 35 ° to 90 ° shore, but is not limited thereto. In the case of metal or ceramic, the outer diameter of the roller may be approximated to the higher-order curve 3 and cut at the stage of forming the cylindrical core. In the case of rubber, the outer diameter of the roller after vulcanization and molding of the rubber may be cut by approximating the higher-order curve 3.

In each case, the surface roughness is 0.1.
s to 3s are preferred. Considering the friction with the plastic film 8 in a vacuum, if the roughness is smaller than 0.1 s, the friction in a vacuum increases and wrinkles are likely to occur, which is not preferable. Then, in a device such as the present invention which gives a speed difference to the outer peripheral surface of the roller to remove wrinkles, scratches are likely to occur on the film surface, which is not preferable.

As shown in FIG. 3, the opposing rollers 22 and 32 have the cylindrical core 6 of the roller, the shaft 7 and the bearing 9,
9'supports and gives a deflection by means of a device 11 for applying a pushing / pulling force to the roller shaft 7 to bend the shaft 7 and / or the cylindrical core 6, and a bearing 10, 10 'receiving the force.
One point A on the circumference of the roller, that is, the product rolls 21 and 3
1 and the opposing rollers 22, 32, the opposing roller 2 at the position A (FIG. 2) at which the plastic film 8 that starts to substantially contact the opposing rollers 22, 32 starts.
2, 32 longitudinal outer surface shape lines are product rolls 21, 31
The amount of bending of the cylindrical core 6 is adjusted by the pushing / pulling force so that the bending is parallel to. The pushing / pulling force can be generated by screws, springs, hydraulic pressure, pneumatic pressure, or the like.

Due to the bending of the cylindrical core 6, the outer surface shape lines of the facing rollers 22 and 32 are moved to the product roll 2 as described above.
Since it can be adjusted parallel to 1 and 31, it is important to have a flexible cylindrical core, and it is preferable to use a material having high rigidity such as iron, aluminum, glass fiber reinforced plastic, and carbon fiber reinforced plastic. Also, these materials may be used in combination.

Further, here, pushing / pulling force is applied to the roller shaft 7 to bend the cylindrical core 6, and the outer peripheral surfaces of the rollers 22 and 32 having the outer diameter variation curve approximated by the higher-order curve 3 are removed. The force applied to make the product rolls 21 and 31 parallel to each other at the position A may be obtained by calculation or by repeating trial and error.

When the product rolls 21 and 31 and the facing rollers 22 and 32 are in contact with each other, the position A is determined as the contact position, but there is no problem. Alternatively, when the diameters of the rolled product rolls 21 and 31 are changed, the positions at which the plastic film 8 starts to contact are displaced, so an average position is preferable. The average position is an intermediate position between the maximum and the minimum of the changing positions.

Further, the plastic film 8 when the plastic film 8 is wound around the opposed rollers 22 and 32.
The roller diameter and its winding angle θ (FIG. 2) are important because the rigidity of the roller itself has the effect of straightening wrinkles. It is preferable to make the roller diameter smaller, but since the width of the plastic film 8 (roller surface length) restricts the roller production, it is not always possible to satisfy the condition for making the diameter small, but the roller production is allowed. It is preferable that the diameter is as small as possible. For example, if the film has a thickness of 4 μm or less,
The outer diameter is preferably 80 mm or less, but not limited to this. On the other hand, the winding angle θ is preferably 90 degrees or more. More preferably, it is 135 degrees or more. If it is less than 90 degrees, the wrinkle-stretching effect becomes small depending on the changing product roll diameter, which is not preferable.

Considering the functions of the opposed rollers 22 and 32 of the present invention, first, in the unwinding, the air caught in the product roll 21 expands in a vacuum to cause the plastic film 8 to meander. Since the deviation easily occurs, it is to suppress this. Here, the outer surface shape line at the position A of the facing roller 22 is the product roll 21.
The film is unwound from above the product roll 21 in parallel. In addition, the product roll 21
Since the unwinding start position B (FIG. 2) from the roller 22 is made constant and the outer diameter of the plastic film 8 on the edge passage side is increased, the plastic film 8 is pulled out in the longitudinal direction on the roller 22 and It is pulled to the outside on both the left and right due to the changing outer diameter, so it is stable at a position just centered on the center of the roller. That is, even if the unwinding of the plastic film 8 is swayed to the left or right, the next opposing roller 22 brings the film 8 to the center, so that misalignment and meandering will not occur in the subsequent steps.

On the winding side, there is a problem of wrinkling at the time of winding, but this wrinkling often occurs mainly at the edge part of the wound product, and electrostatic charging etc. occur at the same time. There is also. As mentioned above, air intervenes at normal pressure to help slip between the films to some extent, but under vacuum, there is no air intervening, so slip between films becomes worse and wrinkles tend to occur. It is thought that this is due to the difference in expansion and contraction of the plastic film due to the vapor deposition. That is, it is considered that the high-temperature metal evaporates and adheres to cause a minute dimensional difference in the plastic film 8, and the plastic film 8 is wound while remaining as dimensional expansion and contraction.

The facing roller 32 is a roll of rolled product 31.
Even if wrinkles occur due to a minute dimensional change caused by vapor deposition before entering, the film 8 is stretched to both edge sides by the changing outer diameter, and the wrinkles are thereby stretched. Since the outer surface shape line at the position A on the facing roller 32 is parallel to the position B of the winding roll,
Can be wound up without wrinkles.

The facing roller 32 is the roll 3 of the rolled product.
It is effective to be separated from 1 by a certain distance, preferably several mm, and more preferably about 2 to 5 mm, but most effectively, it is preferable to wind the product roll 31 while contacting it with a surface pressure. By doing so, the opposing roller 32
This is very effective because the product roll 31 can be wound up as it is without the minute dimensional change stretched above returning to the original.

Here, when the apparatus according to the present invention is compared with the conventional apparatus, it has not been possible to place the wrinkle removing roller immediately before winding. This is because the wrinkle-removing roller basically has a shape as shown in FIGS. 5 and 6, so that the tangent positions of the product roll and the roll are not parallel to each other. A dimensional difference occurs in the width direction, and it becomes impossible to wind the film uniformly, and the winding shape deteriorates.

Therefore, in the present invention, the plastic film is centered at the same time while increasing the speed on the edge side to remove wrinkles, and the product roll does not generate extra tension in the longitudinal direction at the center of the product roll. As a result of diligent research on a method of uniformly feeding and winding a plastic film on both sides, it is possible to make both ends thicker and to make a widening action, and to make the outer surface shape line at the position A on the opposite roller parallel to the product roll. , These problems can be solved and a good winding shape is obtained.

On the other hand, the rollers 55, 56 provided close to the cooling drum 51 are constituted as opposed rollers having a predetermined secondary or higher higher-order outer shape change curve according to the present invention, and the winding or By adopting the same configuration as applied to the unwinding side, the longitudinal outer surface shape lines of the facing rollers 55, 56 are substantially parallel to the cooling drum 51,
By causing the above-described widening action associated with the change in the predetermined outer diameter, it is possible to prevent wrinkles, meandering, and displacement of the plastic film, and to adhere the plastic film to the cooling drum 51 satisfactorily. The generation of "heat wrinkles" can be suppressed.

[0038] Hereinafter, more specific examples will be described, but the evaluation in the present invention was carried out by the following method. (1) Defects in winding shape The plastic film is observed on the unwinding, winding product roll and conveying roller sections, and winding deviation, wrinkles and meandering are judged according to the criteria shown in Table 1.

[0038]

[Table 1]

(2) Margin runout A vapor deposition of 4.5 mm width is performed, a margin of 0.25 mm width is taken, and the variation of this margin in the width direction is observed from the viewing window of the vacuum container. "○", 0.1m
Deflection of m or more and less than 0.2 mm was defined as “Δ”, and deflection of 0.2 mm or more was defined as “x”.

Examples 1 to 4 and Comparative Examples 1 to 8 Carbon fiber reinforced plastic was used as the material of the cylindrical core of the roller. This roller cylindrical core is surface-treated according to the present invention and chrome-plated on the surface (Example 1,
2), whose surface is sprayed with ceramic (Example 3),
Then, a chloroprene rubber was wound on the surface and surface-treated according to the present invention (Example 4). The rubber hardness was 65 ° Shore. The device shown in FIG. 3 was used as a device for aligning the contour line on the roller circumference with the product roll. Table 2 shows the specifications of the roller. The distance between the facing roller and the product roll was 3 mm.

As the plastic film, a polyethylene terephthalate film heat-treated after biaxial stretching is used, and the thickness is 4 μm and the width is 650 mm (Example 1), 3 μm.
The film having a thickness of 500 mm (Example 2), 2 μm (Example 3) and 1.5 μm (Example 4) had a width of 315 mm. The vapor-deposited lengths are 36000m, 30000m, 24000m, 15 respectively.
Aluminum was vapor-deposited at a vacuum degree of 10 ^-4 Torr (10 ^-2 Pa) to obtain a vapor deposition film for capacitors, and the results are shown in Table 3 together with Comparative Examples.

[0042]

[Table 2]

[0043]

[Table 3]

[0044]

As described above, according to the vacuum processing apparatus for a plastic film of the present invention, by applying a specific facing roller structure to the winding or unwinding portion in the vacuum container, a thin plastic material is applied. It is possible to wind the film in a meandering manner and without deviation, and to wind up the plastic film after the treatment such as vapor deposition without being entangled with wrinkles and the like, and to obtain a processed product of good quality with less margin shake.

Further, by applying this specific opposing roller structure to the cooling drum portion, the occurrence of inconvenience such as so-called "heat wrinkle" is suppressed, and the processing such as vapor deposition is performed more appropriately and the processing is performed. The quality of the product can be further improved.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a vacuum processing apparatus for a plastic film according to an embodiment of the present invention.

FIG. 2 is a partially enlarged configuration diagram of an unwinding / winding unit of the apparatus of FIG.

FIG. 3 is a schematic plan view of a partial cross section of the device of FIG.

FIG. 4 is a cross-sectional view of a roll ring portion of a facing roller of the apparatus of FIG.

FIG. 5 is a front view of a general expander roll.

FIG. 6 is a front view of a general divided roll.

[Explanation of symbols]

3 Curve of change of outer diameter of opposed roller 4 Roller surface forming material 5 Pressurizing device 6 Cylindrical core 7 Roller shaft 8 Plastic film 9, 9'bearing 10, 10 'Bearing part 11 Device for bending shaft 21 Rolled product roll 22 Counter roller on unwinding side 23 Core 31 Rolling product roll 32 Counter roller on winding side 33 Core 51 Cooling drum 52 Evaporator 53 Crucible 54, 57 Conveying roller 55, 56 Conveying roller close to the cooling drum (opposing Roller) 58 Masking device 61 Vacuum container 62, 63 Viewing window A Position where the plastic film comes into contact with the opposing roller θ Wrapping angle

Claims (9)

[Claims] 1. A counter roller, which is provided on the unwinding side and / or the winding side of a device for processing a plastic film in a vacuum container and is close to the product roll, has an outer diameter at the center in the roller longitudinal direction at both ends. A plastic which is smaller than the outer diameter and whose outer diameter change curve is approximated to a secondary or higher-order curve in the roller longitudinal direction and which is passed over between the facing roller and the product roll. A vacuum processing apparatus for a plastic film, characterized in that a line of a longitudinal outer surface of the opposed roller is substantially parallel to a product roll at a position where the film substantially starts contact with the opposed roller. 2. A counter roller provided in the vicinity of a cooling drum of an apparatus for processing a plastic film in a vacuum container having a cooling drum, wherein the outer diameter of the central portion in the roller longitudinal direction is larger than the outer diameter of both ends. The roller, which is small and whose outer diameter change curve is approximated to a secondary or higher order curve in the longitudinal direction of the roller, has a plastic film that is passed between the facing roller and the cooling drum. A vacuum processing apparatus for a plastic film, characterized in that a line of a longitudinal outer surface of the opposing roller at a position where the contact with the cooling roller substantially starts is substantially parallel to the cooling drum. 3. The vacuum processing apparatus for a plastic film according to claim 1, wherein the facing roller is brought into contact with a product roll or a cooling drum. 4. A substantially constant spacing is provided between the opposing roller and the product roll or cooling drum.
The vacuum processing device for a plastic film according to claim 1 or 2. 5. The position at which the plastic film substantially starts contact with an opposed roller provided in close proximity to the unwinding or winding product roll is in accordance with a change in the winding diameter of the unwinding or winding product roll. The vacuum processing apparatus for a plastic film according to claim 4, which is set at an average position of contact start positions of the changing plastic film to the facing roller. 6. The outer diameter of a portion through which the edge portion of the plastic film of the opposing roller passes, which is 0.05 to 3% larger than the minimum outer diameter in the central portion in the longitudinal direction of the roller. A vacuum processing apparatus for plastic film as described in 1. 7. The surface roughness of the facing roller is 0.1 s.
The vacuum processing apparatus for a plastic film according to any one of claims 1 to 6, wherein the vacuum processing apparatus is for 3s. 8. The vacuum processing apparatus for a plastic film according to claim 1, wherein a wrap angle of the plastic film around the facing roller is 90 degrees or more. 9. The surface of the facing roller is made of any one of metal, rubber and ceramics.
The vacuum processing apparatus for a plastic film according to any one of 1.