CN106435516B - Magnetic control evaporation multifunctional winding film coating machine - Google Patents
Magnetic control evaporation multifunctional winding film coating machine Download PDFInfo
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- CN106435516B CN106435516B CN201610956595.7A CN201610956595A CN106435516B CN 106435516 B CN106435516 B CN 106435516B CN 201610956595 A CN201610956595 A CN 201610956595A CN 106435516 B CN106435516 B CN 106435516B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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Abstract
The invention relates to a magnetic control evaporation multifunctional winding film coating machine, which comprises a vacuum chamber, wherein two ends of the vacuum chamber are provided with vacuum pumping systems for maintaining a high vacuum environment in the vacuum chamber, the bottom of the vacuum chamber is connected with an evaporation assembly through a flange, and a winding film coating working system with a flexible winding substrate is also arranged in the vacuum chamber; the planar target can be used for independently performing magnetron coating, the evaporation assembly can be used for independently performing evaporation coating, and the invention can also be used for simultaneously performing magnetron coating and evaporation coating, so that the problem that the coating binding force and the components of a coating are influenced because a coating machine is replaced for realizing different coating methods to cause that an uncoated film layer is exposed in the air in the past is solved.
Description
Technical Field
The invention relates to the field of winding coating, in particular to a magnetic control evaporation multifunctional winding coating machine integrating evaporation coating and magnetic control coating.
Background
At present, the traditional winding coating technology only has single function, such as only evaporation coating or only magnetic control coating, if different coating methods are required to be realized for coating, only a coating machine can be replaced, and a non-coated film layer is exposed in the air to adsorb the air in the process of replacing the machine, so that the binding force and the components of the coating are influenced, and therefore, the design of the magnetic control evaporation multifunctional winding coating machine which can meet the multifunctional coating mode is urgently needed.
Disclosure of Invention
The applicant carries out research and improvement aiming at the existing problems and provides a magnetic control evaporation multifunctional winding film coating machine, compared with the traditional magnetic control evaporation multifunctional winding film coating machine, the magnetic control evaporation multifunctional winding film coating machine not only has an evaporation film coating function, but also can carry out magnetic control film coating simultaneously, so that the problems of film layer exposure and coating bonding force and component reduction caused by the need of changing machines for realizing different film coating methods in the past are avoided, and the film coating efficiency is greatly improved.
The technical scheme adopted by the invention is as follows:
a magnetic control evaporation multipurpose magnetic control evaporation multifunctional winding film coating machine comprises a vacuum chamber, wherein two ends of the vacuum chamber are provided with vacuum pumping systems used for maintaining a high vacuum environment in the vacuum chamber, the bottom of the vacuum chamber is connected with an evaporation assembly through a flange, and a winding film coating working system with a flexible winding base material is also arranged in the vacuum chamber;
the evaporation assembly adopts any one of induction type evaporation, resistance type evaporation or electron beam evaporation to realize that the material to be plated is deposited on the surface of the flexible winding substrate in the vacuum chamber in a gaseous state after being evaporated upwards;
the winding working system comprises a first winding and unwinding roller and a second winding and unwinding roller, wherein the first winding and unwinding roller and the second winding and unwinding roller are sequentially connected with a first guide roller, a tension roller, a second guide roller and a third guide roller through the same group of flexible winding base materials to be coated from top to bottom and then are connected with a coating roller; and a plurality of plane targets are also arranged in the vacuum chamber along the periphery of the coating roller.
The further technical scheme is as follows:
the vacuum pumping system is formed by connecting a rough pumping pump, a booster pump, a fine pumping pump, a maintaining pump, a valve and a plurality of pipelines; the rough pumping pump adopts any one of a rotary vane pump or a slide valve pump; the booster pump is a roots pump; the fine pumping pump adopts any one of a diffusion pump or a molecular pump; the maintaining pump adopts a rotary vane pump;
a first vacuum chamber door and a second vacuum chamber door are respectively and movably connected to two sides of the vacuum chamber, and the vacuum chamber is sealed when the first vacuum chamber door and the second vacuum chamber door are closed;
a fixed water-cooling baffle plate for preventing the induction evaporation part from polluting the vacuum chamber is arranged along the periphery of the coating roller in the vacuum chamber;
the plane target is fixed on the inner wall of the vacuum chamber through a support plate;
a movable water-cooling baffle is arranged at the lower part of the coating roller and at the upper part of the evaporation assembly, the movable water-cooling baffle is controlled to be opened and closed by an external motor and a gear transmission mechanism, and when the movable water-cooling baffle is opened, the evaporation assembly carries out evaporation coating on the surface of the flexible winding substrate in the vacuum chamber;
the coating roller is of a liquid cooling structure, a refrigerator is connected outside the coating roller, and the refrigerator controls the temperature of the coating roller within a range from-15 ℃ to room temperature.
The invention has the following beneficial effects:
the invention has simple structure and convenient use, can independently carry out magnetic control coating by utilizing the plane target, can independently carry out evaporation coating by utilizing the evaporation assembly, and can simultaneously carry out magnetic control coating and evaporation coating, thereby avoiding the problem that the coating binding force and the components of the coating are influenced because the coating machine is replaced for realizing different coating methods to cause the coating which is not coated to be exposed in the air. According to the invention, the first vacuum chamber door and the second vacuum chamber door which can be opened and closed are arranged at the two ends of the vacuum chamber, so that the convenience of loading, unloading and maintenance in the actual operation process is improved. In addition, the invention is also provided with a movable water-cooling baffle plate, when evaporation coating is not needed or the evaporation assembly is not preheated, the movable water-cooling baffle plate is closed, and when the evaporation assembly is preheated, the movable water-cooling baffle plate is driven to move and open by an external motor and a gear transmission mechanism, so that evaporation coating can be carried out.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is a top view of fig. 1.
FIG. 3 is a schematic view showing the structure of the winding work system of the present invention.
Fig. 4 is a schematic structural view of the movable water-cooling baffle.
Wherein: 1. a vacuum pumping system; 2. a vacuum chamber; 3. an evaporation assembly; 4. a first vacuum chamber door; 5. a second vacuum chamber door; 6. a first take-up and pay-off roller; 7. a second take-up and pay-off roller; 801. a first guide roller; 802. a second guide roller; 9. a tension roller; 10. a planar target; 11. coating a film roller; 12. fixing a water-cooling baffle; 13. a third guide roller; 14. a movable water-cooling baffle.
Detailed Description
The following describes specific embodiments of the present invention.
As shown in fig. 1 and 2, the multifunctional winding coater for magnetron evaporation according to the present invention comprises a vacuum chamber 2, vacuum pumping systems 1 for maintaining a high vacuum environment in the vacuum chamber 2 are provided at both ends of the vacuum chamber 2, the bottom of the vacuum chamber 2 is connected to an evaporation assembly 3 through a flange, and a winding coating work system with a flexible winding substrate is further provided inside the vacuum chamber 2. The vacuum system 1 is formed by connecting a rough pump, a booster pump, a fine pump, a maintaining pump, a valve and a plurality of pipelines; the rough pumping pump adopts any one of a rotary vane pump or a slide valve pump; the booster pump is a roots pump; the fine pumping pump adopts any one of a diffusion pump or a molecular pump; the maintaining pump adopts a rotary vane pump. As shown in fig. 2, a first vacuum chamber door 4 and a second vacuum chamber door 5 are movably connected to both sides of the vacuum chamber 2, and the vacuum chamber 2 is sealed when the first vacuum chamber door 4 and the second vacuum chamber door 5 are closed.
The evaporation component 3 adopts any one of induction type evaporation, resistance type evaporation or electron beam evaporation to realize that the material to be plated is deposited to the surface of the flexible winding base material in the vacuum chamber 2 in a gaseous state after being evaporated upwards. The above-mentioned induction type evaporation or resistance type evaporation or electron beam evaporation are all the known techniques.
As shown in fig. 3, the winding work system of the invention comprises a first winding and unwinding roller 6 and a second winding and unwinding roller 7, the maximum winding diameter of the first winding and unwinding roller 6 is the same as that of the second winding and unwinding roller 7, the first winding and unwinding roller 6 and the second winding and unwinding roller 7 are sequentially connected with a first guide roller 801, a tension roller 9, a second guide roller 802 and a third guide roller 13 through the same group of flexible winding base materials to be coated from top to bottom and then connected with a coating roller 11; a plurality of planar targets 10 are also provided in the vacuum chamber 2 along the outer periphery of the coating roller 11. The planar target 10 is fixed to the support plate of the vacuum chamber 2 by the support plate.
In the vacuum chamber 2, a fixed water-cooled baffle plate 12 for preventing the induction evaporation portion from contaminating the vacuum chamber 2 is further provided along the outer periphery of the coating roller 11. And a movable water-cooling baffle plate 14 is arranged at the lower part of the coating roller 11 and the upper part of the evaporation assembly 3, the movable water-cooling baffle plate 14 is controlled by an external motor and a gear transmission mechanism to be opened and closed, and when the movable water-cooling baffle plate 14 is opened, the evaporation assembly 3 carries out evaporation coating on the surface of the flexible winding substrate in the vacuum chamber 2.
The specific working process of the invention is as follows:
as shown in fig. 1 and 2, the three-stage system including the rough pump, the booster pump, and the fine pump in the vacuum system 1 pumps gas in the working environment at the start of operation, and pumps the gas to the high-vacuum working environment from the atmospheric pressure, and the two-stage system including the maintenance pump and the fine pump operates at the operation of the present invention, thereby maintaining the required high-vacuum working environment. When evaporation coating is carried out, after the evaporation assembly is preheated, the external motor drives the gear transmission mechanism to open the movable water-cooling baffle 14, and when the evaporation assembly 3 adopts a resistance type evaporation mode, the evaporation assembly heats the resistance in the evaporation assembly 3 to evaporate the material to be coated and then the material to be coated is deposited on the surface of the flexible windable substrate in the vacuum chamber 2, so that evaporation coating is realized; when the evaporation assembly 3 adopts an induction type evaporation mode, the material to be coated is induced by a high-frequency electromagnetic field, is vaporized and evaporated and then is upwards deposited on the surface of the flexible windable substrate in the vacuum chamber 2, so that evaporation coating is also realized; when the evaporation assembly 3 adopts an electron beam evaporation mode, the material to be coated is heated by the electron beam to be evaporated and then is upwards deposited on the surface of the flexible windable substrate in the vacuum chamber 2, so that evaporation coating is also realized. When magnetron coating is needed, negative bias is applied on the planar target 10 under the high vacuum environment of the vacuum chamber 2 to ionize the inert gas in the vacuum chamber, the ionized gas ions bombard the metal target material on the planar target 10, and the bombarded particles are deposited on the surface of the flexible windable substrate to form a film.
When the first take-in and pay-off roller 6 operates, the second take-in and pay-off roller 7 operates, and similarly, when the first take-in and pay-off roller 6 operates, the second take-in and pay-off roller 7 operates.
The invention can realize that the surface of the flexible base material firstly rotates forwards and uses a plane target for sputtering coating, and then rotates backwards and evaporates coating; or the film is evaporated and coated in forward rotation, and then the film is coated in reverse rotation by using a planar target magnetron sputtering; or sputtering and coating the film by a plane target and evaporating the film; or the three modes are laminated or intermingled with the coating, and the layer number and the components are set according to the requirements.
The compact structure is designed by utilizing the characteristic that the winding and unwinding rollers are not the maximum winding diameter at the same time, taking the maximum winding diameter of the film coating machine of 700mm as an example, the characteristic that the first winding and unwinding roller is certainly unwound when the second winding and unwinding roller is wound is utilized, the center distance between the first winding and unwinding roller and the second winding and unwinding roller can be designed to be slightly larger than 400mm of one-half maximum winding diameter instead of 700mm when the first winding and unwinding roller and the second winding and unwinding roller are both the theoretical maximum winding diameter, and the design saves space.
The foregoing description is illustrative of the present invention and is not to be construed as limiting thereof, the scope of the invention being defined by the appended claims, which may be modified in any manner without departing from the basic structure thereof.
Claims (6)
1. A magnetic control evaporation multipurpose winding film coating machine is characterized in that: the vacuum coating device comprises a vacuum chamber (2), wherein a vacuum pumping system (1) for maintaining a high-vacuum environment in the vacuum chamber (2) is arranged at two ends of the vacuum chamber (2), the bottom of the vacuum chamber (2) is connected with an evaporation assembly (3) through a flange, and a winding coating working system with a flexible winding substrate is also arranged in the vacuum chamber (2);
the evaporation assembly (3) adopts any one of induction type evaporation, resistance type evaporation or electron beam evaporation to realize that the material to be plated is deposited to the surface of the flexible winding base material in the vacuum chamber (2) in a gaseous state after being evaporated upwards;
the winding working system comprises a first winding and unwinding roller (6) and a second winding and unwinding roller (7), wherein the first winding and unwinding roller (6) and the second winding and unwinding roller (7) are sequentially connected with a first guide roller (801), a tension roller (9), a second guide roller (802) and a third guide roller (13) through the same group of flexible winding base materials to be coated from top to bottom and then are connected with a coating roller (11); a plurality of plane targets (10) are arranged in the vacuum chamber (2) along the periphery of the coating roller (11);
a movable water-cooling baffle (14) is further arranged at the lower part of the coating roller (11) and the upper part of the evaporation assembly (3), the movable water-cooling baffle (14) is controlled to be opened and closed by an external motor and a gear transmission mechanism, and when the movable water-cooling baffle (14) is opened, the evaporation assembly (3) carries out evaporation coating on the surface of the flexible winding substrate in the vacuum chamber (2);
the winding film plating machine has an independent working state and a simultaneous working state;
the independent working state is as follows: the surface of the flexible base material is firstly positively rotated by a winding working system and is sputtered and coated by using a plane target, and then the surface of the flexible base material is overturned for evaporation coating; or when the flexible substrate surface works independently, the flexible substrate surface rotates forwards through the winding working system and passes through the evaporation assembly to realize evaporation coating, and then the flexible substrate surface rotates backwards through the winding working system and is sputtered and coated by using the plane target;
and simultaneously, the working state is as follows: the surface of the flexible base material rotates through the winding working system, and is sputtered and coated by the planar target and evaporated and coated by the evaporation assembly at the same time.
2. The multipurpose winding film coating machine of claim 1, wherein: the vacuum pumping system (1) is formed by connecting a rough pumping pump, a booster pump, a fine pumping pump, a maintaining pump, a valve and a plurality of pipelines; the rough pumping pump adopts any one of a rotary vane pump or a slide valve pump; the booster pump is a roots pump; the fine pumping pump adopts any one of a diffusion pump or a molecular pump; the maintaining pump adopts a rotary vane pump.
3. The multipurpose winding film coating machine of claim 1, wherein:
a first vacuum chamber door (4) and a second vacuum chamber door (5) are respectively movably connected to two sides of the vacuum chamber (2), and the vacuum chamber (2) is sealed when the first vacuum chamber door (4) and the second vacuum chamber door (5) are closed.
4. The multipurpose winding film coating machine of claim 1, wherein:
and a fixed water-cooling baffle (12) for preventing the induction evaporation part from polluting the vacuum chamber (2) is arranged along the periphery of the coating roller (11) in the vacuum chamber (2).
5. The multipurpose winding film coating machine of claim 1, wherein:
the planar target (10) is fixed on the inner wall of the vacuum chamber (2) through a support plate.
6. The multipurpose winding film coating machine of claim 1, wherein: the coating roller (11) is of a liquid cooling structure, a refrigerator is connected outside the coating roller (11), and the refrigerator controls the temperature of the coating roller within a range from-15 ℃ to room temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610956595.7A CN106435516B (en) | 2016-10-27 | 2016-10-27 | Magnetic control evaporation multifunctional winding film coating machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610956595.7A CN106435516B (en) | 2016-10-27 | 2016-10-27 | Magnetic control evaporation multifunctional winding film coating machine |
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| CN106435516A CN106435516A (en) | 2017-02-22 |
| CN106435516B true CN106435516B (en) | 2020-04-21 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835051B (en) * | 2017-03-31 | 2023-07-11 | 无锡光润真空科技有限公司 | Wire winding film plating machine |
| CN107236933B (en) * | 2017-08-03 | 2024-02-02 | 肇庆市科润真空设备有限公司 | Coating equipment and method for thick film coating of flexible substrate |
| CN107557735A (en) * | 2017-10-17 | 2018-01-09 | 东莞市典雅五金制品有限公司 | Cathode arc target assembly and vacuum multi-arc ion plating machine |
| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| CN108642469A (en) * | 2018-07-09 | 2018-10-12 | 布勒莱宝光学设备（北京）有限公司 | Flexible product winding-type vacuum coater |
| CN110791744A (en) * | 2019-11-27 | 2020-02-14 | 无锡光润真空科技有限公司 | Split type multi-process vacuum coating device |
| CN111378952A (en) * | 2020-04-29 | 2020-07-07 | 义乌市森煌科技有限公司 | Winding type film coating machine |
| CN118497698B (en) * | 2024-07-19 | 2024-09-17 | 成都国泰真空设备有限公司 | Multifunctional winding film plating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001303249A (en) * | 2000-04-19 | 2001-10-31 | Hirano Koon Kk | Surface treatment apparatus for strip-like sheet |
| CN2844137Y (en) * | 2005-08-25 | 2006-12-06 | 北京有色金属研究总院 | Multifunctional continuous film plating device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104674182B (en) * | 2015-02-09 | 2017-03-08 | 常州工学院 | A kind of reciprocal continuous coating magnetic-control sputtering coiling film coating machine of one side |
| CN104674176B (en) * | 2015-02-09 | 2017-06-09 | 常州工学院 | A kind of two-sided reciprocal continuous coating magnetic-control sputtering coiling film coating machine of high efficiency |
| CN104674175B (en) * | 2015-02-09 | 2017-03-22 | 常州工学院 | High-efficiency single-side reciprocating continuous-coating magnetron sputtering winding coating machine |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001303249A (en) * | 2000-04-19 | 2001-10-31 | Hirano Koon Kk | Surface treatment apparatus for strip-like sheet |
| CN2844137Y (en) * | 2005-08-25 | 2006-12-06 | 北京有色金属研究总院 | Multifunctional continuous film plating device |
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