CN110643969A

CN110643969A - Vacuum evaporation equipment

Info

Publication number: CN110643969A
Application number: CN201810675678.8A
Authority: CN
Inventors: 陈立国
Original assignee: Beijing Apollo Ding Rong Solar Technology Co Ltd
Current assignee: Hongyi Technology Co.,Ltd.
Priority date: 2018-06-27
Filing date: 2018-06-27
Publication date: 2020-01-03

Abstract

The invention relates to the technical field of solar energy, in particular to vacuum evaporation equipment. The invention provides vacuum evaporation equipment which comprises a winding system, a fixed end and a movable end, wherein the winding system is fixed on the fixed end and extends out of the outer side of a first cavity; the movable end can move to be separated from the fixed end to open the accommodating cavity, and the winding system is fixed on the fixed end, so that the weight of the whole movable end is greatly reduced, the inertia during movement is smaller, the movement is more stable, and the vibration generated in the movement process is smaller; the winding system extends out of the first cavity, no obstacle exists between the coiled material and the winding system, and loading and unloading actions of the coiled material are simpler to realize; the application provides a vacuum evaporation equipment has realized simultaneously and has not removed winding system to the convenient quick loading of coiled material and uninstallation, equipment structure is simple, can reach the purpose of high efficiency production.

Description

Vacuum evaporation equipment

Technical Field

The invention relates to the technical field of solar cell manufacturing, in particular to vacuum evaporation equipment.

Background

Due to the high density of the stainless steel foil, a roll of stainless steel foil may weigh from 1.5 tons to 2.5 tons. Therefore, higher requirements are imposed on the design structure of roll-to-roll equipment, the loading of the substrate roll and the unloading of the processed roll.

Generally, in order to ensure the manufacturing precision of equipment, a main frame of vacuum evaporation equipment adopts a fixed mode (unmovable) as much as possible, so that the processing precision of a film and the motion control precision are easier to realize, the precision is easier to control, and the structure is relatively simpler.

In order to facilitate loading and unloading of coiled materials, most enterprises select a coating film in a translation type door opening mode, a coating system is integrated with a door, and the coating film adopting the translation type door opening mode mainly aims at loading and unloading the coiled materials outside a main cavity of a coating machine. The loading and unloading actions of the coiled materials outside the main cavity body are easier to realize, and the execution actions are simpler and easier to control. However, due to the coating machine of the translation type, the winding control part moves along with the moving door plate. The overall structure of the equipment is complex, the requirement on the manufacturing precision of the equipment is high, and the winding control structure is complex. Because the door plate needs to realize the movement of a large load, the control on the movement speed is very strict.

Fig. 1 is a schematic structural diagram of a vacuum evaporation apparatus in the prior art, wherein a winding control system 200 is designed in a main chamber 100, the winding control system 200 is immovable, when a chamber door 110 is opened, the winding control system 200 needs to load and unload a coil on the door opening side, and the loading and unloading of the coil are completed in an apparatus chamber 120. The equipment has simple structure and is difficult to load and unload the coiled materials.

Fig. 2 is a schematic structural diagram of another vacuum evaporation apparatus in the prior art, wherein the winding control system 200 is movably designed, and the winding control system 200 can move in and out of the main cavity 120 along with the translation of the main door panel 110. This allows the film to be loaded and unloaded in a suspended manner from above the coil. The loading and unloading actions are relatively simple to implement. However, since the winding control system itself is heavy (18 to 15 tons), the moving speed of the movable door panel is set to minimize the generation of inertia and to prevent the generation of vibration. Therefore, the moving speed is guaranteed to be low and constant.

With the solution according to fig. 1, the loading and unloading of the coil is relatively complex, and the loading and unloading of the coil is very difficult, regardless of which direction the door is opened around.

By adopting the scheme of fig. 2, although the loading and unloading of the coiled material outside the cavity are realized, the action is realized in a vacuum environment, and the load carried by the movable door plate is large, so that the opening and closing movement safety and reliability of the door are low.

Disclosure of Invention

The invention aims to provide a novel vacuum evaporation device, which realizes the fixation of a winding system of the device in a main cavity without moving the winding system. The device has simple design structure, and can simply and conveniently realize convenient and quick loading and unloading of the coiled materials.

(II) technical scheme

In order to achieve the technical problem, the invention provides vacuum evaporation equipment which comprises a winding system, a fixed end and a movable end, wherein the fixed end and the movable end are connected in an openable and closable manner, the fixed end and the movable end jointly enclose a closed accommodating cavity when in a connected state, the accommodating cavity comprises a first cavity body located in the fixed end and a second cavity body located in the movable end, and the winding system is fixed on the fixed end and extends out of the first cavity body.

Furthermore, a plurality of winding systems are fixed on the fixed end, and at least two winding systems extend out of the second cavity.

Furthermore, the first cavity and the second cavity are both cavities with one open end, the opening direction of the first cavity inclines upwards, the opening direction of the second cavity inclines downwards, and the open ends of the first cavity and the second cavity are connected to form the closed accommodating cavity.

Further, the fixed end comprises a first vertical plate, a bottom plate and two first side plates, and the lower end of the first vertical plate is connected with the rear end of the bottom plate;

the two first side plates are oppositely arranged on two sides of the bottom plate, the lower ends of the two first side plates are respectively connected with two opposite side edges of the bottom plate, and the rear ends of the two first side plates are respectively connected with two opposite side edges of the first vertical plate.

Furthermore, the moving end comprises a second vertical plate, a top plate and two second side plates, and the upper end of the second vertical plate is connected with the front end of the top plate;

the two second side plates are arranged on two sides of the bottom plate relatively, the upper ends of the two second side plates are connected with the two opposite side edges of the top plate respectively, and the front ends of the two second side plates are connected with the two opposite side edges of the second vertical plate respectively.

Further, the top plate, the bottom plate, the first vertical plate and the second vertical plate are all rectangular plate-shaped structures, and the first side plate and the second side plate are both right-angled triangular plate-shaped structures;

the hypotenuse of first curb plate sets up, the hypotenuse of second curb plate sets up down, just the hypotenuse of first curb plate with the hypotenuse of second curb plate is parallel to each other.

Furthermore, a first sealing flange is arranged at the opening end of the first cavity, and a second sealing flange matched with the first sealing flange is arranged at the opening end of the second cavity.

Further, at least one sealing ring is arranged between the first sealing flange and the second sealing flange; the sealing ring is fixed on the first sealing flange or the second sealing flange.

Furthermore, the first sealing flange and the second sealing flange are both inclined rectangular frame structures, and the first sealing flange and the second sealing flange are parallel to each other; the included angle between the first sealing flange and the horizontal direction is 30-60 degrees.

Further, the vacuum evaporation equipment further comprises a sliding rail, wherein the moving end is connected with the sliding rail in a sliding mode and can slide along the sliding rail to open or close the accommodating cavity.

Further, the slide rail level sets up, the stiff end is fixed on the slide rail, it is in to remove the end slide in order to open or close along the horizontal direction on the slide rail hold the chamber.

Further, the removal end with the stiff end is articulated, the removal end rotates in order to open or close around articulated department the holding chamber.

Further, the device also comprises an evaporation mechanism and a vacuum exhaust system; the evaporation mechanism is fixed on the fixed end and is positioned in the first cavity; the vacuum exhaust system is arranged on the fixed end or the movable end and is communicated with the accommodating cavity.

The invention has the beneficial effects that: the invention provides vacuum evaporation equipment which comprises a winding system, a fixed end and a movable end, wherein the fixed end and the movable end jointly enclose a closed accommodating cavity when in a connected state, the accommodating cavity comprises a first cavity positioned in the fixed end and a second cavity positioned in the movable end, and the winding system is fixed on the fixed end and extends out of the first cavity; the movable end can move to be separated from the fixed end to open the accommodating cavity, and the winding system is fixed on the fixed end, so that the weight of the whole movable end is greatly reduced, the inertia during movement is smaller, the movement is more stable, the vibration generated in the movement process is smaller, and the control during movement of the movable end is easier to control; the winding system extends out of the first cavity, no obstacle exists between the coiled material and the winding system, and the operating space for matching the coiled material and the winding system is larger; therefore, the film can be loaded and unloaded from the upper part of the coiled material in a hoisting mode, and the loading and unloading actions are simpler to realize; the application provides a vacuum evaporation equipment has realized simultaneously and has not removed winding system to the convenient quick loading of coiled material and uninstallation, equipment structure is simple, can reach the purpose of high efficiency production.

Drawings

The advantages of the above and/or additional aspects of the present invention will become apparent and readily appreciated from the following description of the embodiments taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural diagram of a vacuum evaporation apparatus in the prior art;

FIG. 2 is a schematic structural diagram of another vacuum evaporation apparatus in the prior art;

FIG. 3 is a schematic structural view of the vacuum evaporation apparatus of the present application, in which a movable end and a fixed end are engaged in translation;

FIG. 4 is a schematic structural diagram of a vacuum evaporation apparatus according to the present application, in which a movable end and a fixed end are rotatably engaged;

FIG. 5 is a schematic structural diagram of a sealing ring of the vacuum evaporation apparatus of the present application fixed on a first sealing flange;

FIG. 6 is a schematic structural diagram of a sealing ring of the vacuum evaporation apparatus of the present application fixed on a second sealing flange;

FIG. 7 is a schematic view of the first side panel in one embodiment of the present application;

FIG. 8 is a schematic view of the first side panel in another embodiment of the present application;

FIG. 9 is a schematic view of the first side panel in yet another embodiment of the present application;

FIG. 10 is a schematic view of the second side plate in one embodiment of the present application;

FIG. 11 is a schematic view of the second side plate in another embodiment of the present application;

fig. 12 is a schematic view of the second side plate in yet another embodiment of the present application.

Wherein the correspondence between the reference numbers and the names of the components in fig. 1 to 12 is:

100. main cavity, 110, cavity door, 120, equipment cavity, 200, around rolling up control system, 1, the stiff end, 11, first cavity, 111, the bottom plate, 112, first riser, 113, first curb plate, 114, first sealing flange, 2, remove the end, 21, the second cavity, 211, the roof, 212, the second riser, 213, the second curb plate, 214, the second sealing flange, 3, the sealing washer, 4, the slide rail, 5, the winding system, 6, evaporation mechanism, 7, vacuum exhaust system.

Detailed Description

In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

As shown in fig. 3 and 4, the present invention provides a vacuum evaporation apparatus, which includes a winding system 5, a fixed end 1, and a movable end 2, where the fixed end 1 and the movable end 2 are connected in an openable and closable manner, the fixed end 1 and the movable end 2 jointly enclose a closed accommodating cavity when in a connected state, the accommodating cavity includes a first cavity 11 located in the fixed end 1 and a second cavity 21 located in the movable end 2, and the winding system 5 is fixed on the fixed end 1 and extends to the outside of the first cavity 11.

The invention provides vacuum evaporation equipment which comprises a winding system 5, a fixed end 1 and a movable end 2, wherein the fixed end 1 and the movable end 2 jointly enclose a closed accommodating cavity when in a connected state, the accommodating cavity comprises a first cavity 11 positioned in the fixed end 1 and a second cavity 21 positioned in the movable end 2, and the winding system 5 is fixed on the fixed end 1 and extends out of the first cavity 11; the movable end 2 can move to be separated from the fixed end 1 to open the accommodating cavity, and the winding system 5 is fixed on the fixed end 1, so that the weight of the whole movable end 2 is greatly reduced, the inertia during movement is smaller, the movement is more stable, the vibration generated in the movement process is smaller, and the control during movement of the movable end 2 is easier to control; and the winding system 5 extends to the outside of the first cavity 11, no obstacle exists between the coiled material and the winding system 5, and the operating space for matching the coiled material and the winding system 5 is larger; therefore, the film can be loaded and unloaded from the upper part of the coiled material in a hoisting mode, and the loading and unloading actions are simpler to realize; the application provides a vacuum evaporation equipment has realized simultaneously need not remove winding system 5 to the convenient quick loading of coiled material and uninstallation, equipment structure is simple, can reach the purpose of high efficiency production.

The whole structure of the winding system 5 accounts for about 50% of the total mass of the equipment, and the structure with large mass is changed from a moving mode to a fixed mode, so that the reliability and the safety of the operation of the equipment can be improved; meanwhile, the winding system 5 is designed in the vacuum cavity, and the structural design is relatively simple. And a control circuit, a cooling water path, a control air path and the like required by the control part of the winding system 5 are designed and realized well.

As shown in fig. 3 and 4, the first cavity 11 and the second cavity 21 are both cavities with an opening at one end, the opening direction of the first cavity 11 is inclined upwards, the opening direction of the second cavity 21 is inclined downwards, and the opening ends of the first cavity 11 and the second cavity 21 are connected to form the closed accommodating cavity; the upper front part of the first cavity 11 is of an opening structure, and the upper side of the winding system 5 is not provided with a shielding object, so that a coiled material can be directly matched with the winding system 5 from the top down, the loading and unloading of a film can be realized in a hoisting mode from the top, and the loading and unloading actions are simpler to realize; the opening direction of the second cavity 21 faces to the lower rear side, and the first cavity 11 and the second cavity 21 are matched with each other to form a closed accommodating cavity.

As shown in fig. 3 to 6, the open end of the first cavity 11 is provided with a first sealing flange 114, the open end of the second cavity 21 is provided with a second sealing flange 214 matched with the first sealing flange 114, and the first sealing flange 114 and the second sealing flange 214 are matched to realize the sealing connection between the movable end 2 and the fixed end 1, so that the movable end 2 and the fixed end 1 are more conveniently connected, and the sealing performance of the whole equipment can be ensured by the matching of the first sealing flange 114 and the second sealing flange 214, and the vacuum state can be maintained in the accommodating cavity.

As shown in fig. 3 to 6, the first sealing flange 114 and the second sealing flange 214 are both inclined rectangular frame structures, and the first sealing flange 114 and the second sealing flange 214 are parallel to each other, that is, the open ends of the first cavity 11 and the second cavity 21 are both inclined plane structures, so that the first cavity 11 and the second cavity 21 are convenient to connect and mate; the included angle of first sealing flange 114 and horizontal direction is 30-60, the incline direction of first sealing flange 114 is for inclining from the rear side to the front side from top to bottom, and the inclined plane is 30-60 with the contained angle of horizontal plane, ensures that two flanges are closely laminated when sealed state.

Such an inclination angle can ensure that the opening of the first cavity 11 in the fixed end 1 faces upwards and forwards, that is, no shielding object is arranged at the upper end and the front end of the first cavity 11, which can facilitate the matching of the coiled material and the winding system 5; preferably, the first sealing flange 114 is welded at the open end of the first cavity 11, and the second sealing flange 214 is welded at the open end of the second cavity 21; therefore, the mating sealing surface of the fixed end 1 is welded to the fixed end 1 by the first sealing flange 114 corresponding to the bevel of the first cavity 11, and the mating sealing surface of the movable end 2 is welded to the movable end 2 by the second sealing flange 214 corresponding to the bevel of the second cavity.

It should be noted that, in the present application, the first sealing flange 114 and the second sealing flange 214 may also have other shapes, such as an arc frame or other irregular frame-shaped structures, and the object of the present invention can also be achieved as long as the first sealing flange 114 and the second sealing flange 214 can be sealingly engaged to form a sealed accommodating cavity.

Preferably, as shown in fig. 3 and 4, the fixing end 1 includes a first vertical plate 112, a bottom plate 111 and two first side plates 113, and a lower end of the first vertical plate 112 is connected to a rear end of the bottom plate 111; the two first side plates 113 are oppositely arranged at two sides of the bottom plate 111, the lower ends of the two first side plates are respectively connected with two opposite side edges of the bottom plate 111, and the rear ends of the two first side plates are respectively connected with two opposite side edges of the first vertical plate 112; the first cavity 11 with one open end is formed by connecting the first vertical plate 112, the bottom plate 111 and the two first side plates 113, and the opening direction of the first cavity 11 is inclined upwards, so that the loading and unloading of the film are carried out in a hoisting mode from the upper side of the coiled material, and the coiled material is matched with the winding system 5 more simply and conveniently. Preferably, the first vertical plate 112, the bottom plate 111 and the two first side plates 113 are connected and fixed in a welding manner; of course, the components may be integrally formed.

As shown in fig. 3 and 4, the moving end 2 includes a second vertical plate 212, a top plate 211 and two second side plates 213, and an upper end of the second vertical plate 212 is connected to a front end of the top plate 211; the two second side plates 213 are oppositely arranged on two sides of the bottom plate 111, the upper ends of the two second side plates are respectively connected with two opposite side edges of the top plate 211, and the front ends of the two second side plates are respectively connected with two opposite side edges of the second vertical plate 212; one end of the second cavity 21 with an opening is formed by connecting the second vertical plate 212, the top plate 211 and the two second side plates 213, the opening direction of the second cavity 21 is inclined downwards, the opening directions of the first cavity 11 and the second cavity 21 are corresponding, so that when the fixed end 1 and the movable end 2 are connected, the first cavity 11 and the second cavity 21 are communicated to form a sealed accommodating cavity. Preferably, the second vertical plate 212, the top plate 211 and the two second side plates 213 are fixedly connected by welding; of course, the components may be integrally formed.

As shown in fig. 3 and 4, the top plate 211, the bottom plate 111, the first upright plate 112, and the second upright plate 212 are all rectangular plate-shaped structures, and as shown in fig. 7 and 10, the first side plate 113 and the second side plate 213 are all right-angled triangular plate-shaped structures; as shown in fig. 7, the oblique side of the first side plate 113 is disposed upward, as shown in fig. 10, the oblique side of the second side plate 213 is disposed downward, and the oblique sides of the first side plate 113 and the second side plate 213 are parallel to each other; the lower end of the first vertical plate 112 is vertically connected with the rear end of the bottom plate 111, two side edges of the first vertical plate 112 are respectively vertically connected with right-angle edges of the two first side plates 113 positioned at the rear sides, the right-angle edges of the two first side plates 113 positioned at the lower sides are vertically connected with two side edges of the bottom plate 111, the oblique edges of the first side plates 113 are inclined from top to bottom from the first vertical plate 112 to the front side, and the first cavity 11 with an upward front opening is integrally formed; the upper end of the second vertical plate 212 is vertically connected with the lower end of the top plate 211, two side edges of the second vertical plate 212 are respectively vertically connected with right-angle edges of the two second side plates 213 positioned at the front side, the right-angle edges of the two second side plates 213 positioned at the upper side are vertically connected with two side edges of the top plate 211, and the inclined edges of the second side plates 213 are inclined from the second vertical plate 212 to the rear side from bottom to top. Thus, the first side plate 113 and the second side plate 213 have the same inclination direction, and can form a sealed accommodating cavity in a better sealing mode.

The first sealing flange 114 is welded on the front end edge of the bottom plate 111, the upper end edge of the first vertical plate 112 and the outer sides of the oblique edges of the two first side plates 113, so that the first sealing flange 114 with a rectangular frame structure is formed; the second sealing flange 214 is welded to the rear end edge of the top plate 211, the lower end edge of the second vertical plate 212 and the oblique edges of the two second side plates 213, the second sealing flange 214 forming a frame-shaped structure, and the first sealing flange 114 and the second sealing flange 214 are matched in shape and structure and can be in sealing fit.

Preferably, at least one sealing ring 3 is further arranged between the first sealing flange 114 and the second sealing flange 214, and the sealing ring 3 can provide the sealing performance of the connection between the first sealing flange 114 and the second sealing flange 214, so as to ensure the sealing performance of the accommodating cavity enclosed by the movable end 2 and the fixed end 1 after the first sealing flange 114 and the second sealing flange 214 are connected in a sealing manner. In the present application, there are one to three sealing rings 3, preferably, there are two sealing rings 3, two sealing rings 3 are fixed on the first sealing flange 114 (as shown in fig. 5), and the two sealing rings 3 have different sizes, i.e. the cross-sectional diameters are equal and the diameters are different, so that the double sealing can be realized on the sealing surface as well; of course, the sealing ring 3 can also be fixed to the second sealing flange 214 (as shown in fig. 6).

As shown in fig. 8, the first side plate 113 is not limited to the right-angled triangular plate-shaped structure, for example, the oblique side of the first side plate 113 is concave arc-shaped, and correspondingly, as shown in fig. 11, the right-angled side of the second side plate 213 is convex arc-shaped, or as shown in fig. 9, the oblique side of the first side plate 113 is step-shaped, and correspondingly, as shown in fig. 12, the oblique side of the second side plate 213 is step-shaped; the design concept of the present invention can be achieved as long as the first sealing flange 114 formed by the first side plate 113, the bottom plate 111, and the first riser can be fitted to and sealed by the second sealing flange 214 formed by the second side plate 213, the top plate 211, and the second riser, and the present invention is within the scope of the present invention. As shown in fig. 8 and 11, the mechanism using the semicircular arc can reduce the weight by more than half compared to the square cavity.

In the application, the fixed end 1 is fixed with a plurality of winding systems 5, at least two winding systems 5 extend out of the second cavity 21, that is, more than two winding systems 5 are required to be arranged in the fixed end 1 without being shielded, so that the convenient operability of loading and unloading the coiled material is realized; preferably, one end of the winding system 5 is vertically connected to the first vertical plate, and the other end extends to be a winding part and extends to the outside of the first cavity 11.

As shown in fig. 3 and 4, the vacuum evaporation apparatus provided by the present application further includes an evaporation mechanism 6 and a vacuum exhaust system 7; the evaporation mechanism 6 is fixed on the fixed end 1 and is positioned in the first cavity 11, and the winding system 5, the evaporation mechanism 6 and the like are fixed on the fixed end 1 of the cavity to facilitate the connection of a circuit control line and the access of cooling circulating water; the vacuum exhaust system 7 is arranged on the fixed end 1 or the movable end 2 and is communicated with the accommodating cavity; the movable end 2 and the fixed end 1 are hermetically connected to form a closed cavity, and the vacuum exhaust system 7 is used for exhausting gas in the closed space to form a vacuum environment in the accommodating cavity so as to meet the vacuum environment requirement of process production; the winding system 5 is responsible for controlling the movement of winding and unwinding the coiled material, the evaporation mechanism 6 is used for depositing a film material required by the process on the surface of the coiled material in the working process of the winding system 5, and the evaporation mechanism 6 can deposit one material or a plurality of materials; that is, one material may be placed on the evaporation mechanism 6, or a plurality of materials may be placed on the evaporation mechanism at the same time. The total weight of the moving end 2 is light 1/2 to 4/5 relative to the total weight of the fixed end 1. Therefore, the moving end 2 can realize the opening and closing of the accommodating cavity in a translation moving mode through the guide rail.

It should be noted that the movable end 2 and the fixed end 1 may not adopt a mechanism with a symmetrical slope. The fixed end 1 is of a square structure, the movable end 2 can adopt a semi-arc cavity structure under the condition of ensuring the consistency of sealing flanges, and the semi-arc mechanism can reduce the weight by more than one half relative to the square cavity.

Preferably, as shown in fig. 3 and 4, the evaporation mechanism 6 is disposed in the first cavity 11, the vacuum exhaust system 7 is disposed on the fixed end 1 and is communicated with the first cavity 11, and when the movable end 2 and the fixed end 1 are connected in a sealing manner, the purpose of communicating the vacuum exhaust system 7 with the closed accommodating cavity is achieved; further, the vacuum exhaust system 7 is disposed on one of the first side plates 113, and is located outside the first cavity 11 while communicating with the first cavity 11.

In the present application, the vacuum exhaust system 7 may be disposed on the moving end 2 and communicated with the second cavity 21, so as to achieve the purpose that the vacuum exhaust system 7 is communicated with the closed accommodating cavity through the second cavity 21.

In an embodiment of the present invention, as shown in fig. 3, the vacuum evaporation apparatus further includes a slide rail 4, and the moving end 2 is slidably connected to the slide rail 4 and can slide along the slide rail 4 to open or close the accommodating cavity; the utility model discloses a film coating machine, including stiff end 1, slide end 4, including the chamber of holding, the chamber of holding is equipped with the winding system 5, the evaporation plant 6, and the moving end is equipped with the winding system 5, is equipped with the membrane of unloading, and the moving end is equipped with the winding system 5, is equipped with the membrane of unloading, and the membrane of unloading is equipped with the membrane of unloading, and the moving end is equipped with the membrane of unloading, and.

As shown in fig. 3, the slide rail 4 is horizontally arranged, the fixed end 1 is fixed on the slide rail 4, the movable end 2 slides on the slide rail 4 along the horizontal direction to open or close the accommodating cavity, the opening or closing of the sealed accommodating cavity is realized by the translation of the movable end 2, the friction force can be reduced by adopting the slide rail 4, the difficulty in moving the movable end 2 is reduced, and meanwhile, the slide rail 4 also plays a role in bearing the fixed end 1 and the movable end 2; preferably, a sliding groove matched with the sliding rail 4 can be arranged on the moving end 2, and the moving end 2 can slide through the matching of the sliding rail 4 and the sliding groove. As shown in fig. 3, in the present application, the bottom plate 111 of the fixed end 1 is fixed on the slide rail 4, and the lower end of the second riser of the movable end 2 slides on the slide rail 4.

Of course, in the present application, the slide rail 4 may be vertically disposed, and the moving end 2 vertically moves on the slide rail 4 in the up-down direction, or the slide rail 4 may be obliquely disposed, so long as the purpose of opening or closing the accommodating cavity by moving the moving end 2 through the slide rail 4 can be achieved, the purpose of the present application can also be achieved, and the purpose does not depart from the protection scope of the present invention.

In an embodiment of the present invention, as shown in fig. 4, the movable end 2 is hinged to the fixed end 1, the movable end 2 rotates around the hinge to open or close the accommodating cavity, and the accommodating cavity can be opened in a rotating manner due to the light weight of the movable end 2, in this application, the movable end 2 and the fixed end 1 are hinged to each other in a door-hinge manner, that is, the movable end 2 and the fixed end 1 are hinged to each other through a rotating shaft, wherein the front end of the bottom plate 111 and the lower end of the second vertical plate are hinged to each other through a rotating shaft, so that the movable end 2 rotates around the hinge shaft to open or close the accommodating cavity.

In the description of the present invention, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the communication may be direct, indirect via an intermediate medium, or internal to both elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims

1. A vacuum evaporation equipment is characterized in that: including winding system, stiff end and removal end, the stiff end with removal end openable and closeable connects, the stiff end with remove and enclose jointly when the end is in connected state and enclose into an inclosed chamber that holds, hold the chamber including being located the first cavity of stiff end and being located remove the second cavity in the end, winding system fixes on the stiff end and stretch out to the outside of first cavity.

2. A vacuum evaporation apparatus according to claim 1, wherein: the fixed end is fixed with a plurality of winding systems, and at least two winding systems extend out of the first cavity.

3. A vacuum evaporation apparatus according to claim 1, wherein: the first cavity and the second cavity are both cavities with one open ends, the opening direction of the first cavity inclines upwards, the opening direction of the second cavity inclines downwards, and the open ends of the first cavity and the second cavity are connected to form the closed accommodating cavity.

4. A vacuum evaporation apparatus according to claim 1, wherein: the fixed end comprises a first vertical plate, a bottom plate and two first side plates, and the lower end of the first vertical plate is connected with the rear end of the bottom plate;

5. A vacuum evaporation apparatus according to claim 4, wherein: the movable end comprises a second vertical plate, a top plate and two second side plates, and the upper end of the second vertical plate is connected with the front end of the top plate;

6. A vacuum evaporation apparatus according to claim 5, wherein: the top plate, the bottom plate, the first vertical plate and the second vertical plate are all rectangular plate-shaped structures, and the first side plate and the second side plate are all right-angled triangular plate-shaped structures;

7. A vacuum evaporation apparatus according to claim 3, wherein: the opening end of the first cavity is provided with a first sealing flange, and the opening end of the second cavity is provided with a second sealing flange matched with the first sealing flange.

8. A vacuum evaporation apparatus according to claim 7, wherein: at least one sealing ring is arranged between the first sealing flange and the second sealing flange; the sealing ring is fixed on the first sealing flange or the second sealing flange.

9. A vacuum evaporation apparatus according to claim 7, wherein: the first sealing flange and the second sealing flange are both of inclined rectangular frame structures, and are parallel to each other; the included angle between the first sealing flange and the horizontal direction is 30-60 degrees.

10. Vacuum evaporation apparatus according to any one of claims 1 to 9, wherein: the vacuum evaporation equipment further comprises a sliding rail, wherein the moving end is connected with the sliding rail in a sliding mode and can slide along the sliding rail to open or close the accommodating cavity.

11. A vacuum evaporation apparatus according to claim 10, wherein: the slide rail level sets up, the stiff end is fixed on the slide rail, it is in to remove the end slide in order to open or close along the horizontal direction on the slide rail hold the chamber.

12. Vacuum evaporation apparatus according to any one of claims 1 to 9, wherein: remove the end with the stiff end is articulated, remove the end and rotate in order to open or close around articulated department hold the chamber.

13. Vacuum evaporation apparatus according to any one of claims 1 to 9, wherein: the device also comprises an evaporation mechanism and a vacuum exhaust system;

the evaporation mechanism is fixed on the fixed end and is positioned in the first cavity; the vacuum exhaust system is arranged on the fixed end or the movable end and is communicated with the accommodating cavity.