CN202090053U - Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings - Google Patents
Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings Download PDFInfo
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- CN202090053U CN202090053U CN2011201364651U CN201120136465U CN202090053U CN 202090053 U CN202090053 U CN 202090053U CN 2011201364651 U CN2011201364651 U CN 2011201364651U CN 201120136465 U CN201120136465 U CN 201120136465U CN 202090053 U CN202090053 U CN 202090053U
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Abstract
A reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings is characterized by comprising an unreeling device, a seaming device, a compression roller device, a heating device, sputtering units, an exhaust slit device, a carrier roller device, a cooling device, a slit device, a deviation rectifying conveying device, a protecting membrane composite device and a reeling device which are placed in a vacuum chamber. The slit device is used for isolating working atmospheres of different film layers, and the vacuum chamber is further respectively connected with a vacuum system, an inflating system and an electronic control system. The working atmospheres among the different film layers among the magnetic control sputtering units are isolated from each other via slits, the magnetic control sputtering units are stable in environment atmospheres, fine in repeatability and convenient in control, the quality of coating films is excellent, and the reel-to-reel continuous coating film production line is suitable for automatic reel-to-reel continuous coating film production and is high in production efficiency.
Description
Technical field
The utility model belongs to the solar energy utilization technique field, relates to coating for selective absorption of sunlight spectrum production.Also can be used for the magnetron sputtering plating field that solar cell etc. needs flexible parent metal volume to volume continuous coating to produce.
Background technology
Existing be used to make the coating equipment that the solar heat-collection plate core is coated with coating for selective absorption and mostly be the production of single vacuum chamber plated film, although this coating equipment is simple in structure, cheap, but, its following weak point is arranged: at first, just vacuum chamber is exitted and open vacuum chamber because coating equipment is whenever finished a plated film production process because this coating equipment is the single cycle plated film mode of production, take out and small quantities of template core of packing into, the sputter ambiance is difficult to repetition and stable, and coating quality is difficult to guarantee, and efficient is low; Secondly, because many productions of unit, status of equipment is difficult to consistent, needs many people's operations again, easily causes performance difference, and need take too much production site.
Summary of the invention
The purpose of this utility model is for overcoming the prior art weak point, design a kind of new type solar collecting plate core coating for selective absorption continuous coating production line, improve quality product, improving consistence, and be convenient to automatic continuous high-efficient production.
For achieving the above object, the utility model is by the following technical solutions:
Coating for selective absorption of sunlight spectrum volume to volume continuous coating production line is characterized in that: described production line comprises that unwinding device, needle sewing device, press-roller device, heating unit, sputter unit, support roller device, refrigerating unit, tool are isolated the slit arrangement of bleeding of the different rete work atmospheres and the function of bleeding, rectify a deviation transmitting device, protective membrane set composite and wrap-up; Above-mentioned various piece all places the vacuum chamber body; The vacuum chamber body also connects vacuum system, inflation system and electrical control system respectively.
Described sputter unit is the magnetron sputtering unit.
Described sputter unit has more than 3 or 3.
The described slit arrangement of bleeding has more than 2 or 2.
The utility model has the advantages that isolate between the magnetron sputtering unit work atmosphere between different retes with slit, each magnetron sputtering unit environments atmosphere is stable, good reproducibility is convenient to control, and coating quality is excellent, is fit to the volume to volume continuous coating and produces the production efficiency height automatically.
Description of drawings:
Fig. 1 is the one-piece construction synoptic diagram of the utility model coating film production line;
Description of reference numerals:
1. unwinding device, 2. needle sewing device, 3. press-roller device, 4. heating unit, 5. sputter unit, 6. bleed slit arrangement, 7. support roller device, 8. refrigerating unit, 9. correction transmitting device, 10. protective membrane set composite, 11. wrap-ups, 12. vacuum chamber bodies, 13. vacuum systems, 14. inflation systems, 15. electrical control systems.
Embodiment:
Below in conjunction with accompanying drawing the utility model is elaborated.
Fig. 1 is the one-piece construction synoptic diagram of the utility model coating film production line, as shown in the figure, production line comprises unwinding device 1, needle sewing device 2, press-roller device 3, heating unit 4, four magnetron sputtering unit 5, the slit arrangement 6 of bleeding, support roller device 7, refrigerating unit 8, correction transmitting device 9, protective membrane set composite 10 and wrap-up 11; Above-mentioned various piece all places vacuum chamber body 12; Vacuum chamber body 12 also connects vacuum system 13, inflation system 14 and electrical control system 15 respectively.
The workflow of the utility model coating film production line is:
The utility model continuous coating production line is formed and abbreviated functional description:
Unwinding device 1: be used for cooperating the transmission of correction transmitting device to unreel;
Needle sewing device 2: be used for sewing up newly pack into coiled material and original equipment middle part base band material;
Press-roller device 3: be used to sew up or when transmitting fixedly pressing flatten coiled material;
Heating unit 4: be used for adding the hot basal body coiled material, requirement can be heated to more than 150 ℃;
Sputter unit 5: be used for being coated with desired coating, the sputter unit can be monoplane negative electrode, biplane negative electrode, single rotating cathode, dual rotary negative electrode, but planar cathode both the assembled integral target also can assemble the inserted target of differing materials combination;
The slit arrangement 6 of bleeding: be used for extracting the vacuum indoor gas and play the different rete work atmospheres of isolation;
Support roller device 7: be used for holding coiled material in order to avoid base material is too sagging;
Refrigerating unit 8: be used for cooling off superheated coiled material behind the coated rete, so that follow-up composite protection film and rolling;
Correction transmitting device 9: the transmission coiled material is used for rectifying a deviation;
Protective membrane set composite 10: be used for to the compound layer protecting film of the coiled material of coated;
Wrap-up 11: be used for cooperating correction transmitting device transmission rolling;
Vacuum chamber body 12: be used for holding vacuum cavity of above-mentioned each device, move under desired vacuum environment to guarantee above-mentioned each device, vacuum chamber can integral body or split production;
Vacuum system 13: form by black vacuum pump, intermediate pump, high-vacuum pump, be used for extracting out the intravital gas of vacuum chamber;
Inflation system 14: by cut down, mass flowmeter (MFC) and pipe fitting etc. form, be used for providing required working gas to the sputter unit;
Electrical control system 15: form by various automatically controlled components and parts, computer and control software, be used for whole production line is controlled.
In the embodiment shown in fig. 1, each position is equipped with identical or different vacuum pump and forms vacuum system 13, control of the different requirements of each position respectively to vacuum tightness, and in each sputter unit 5 one or more slit arrangements 6 of bleeding of configuration are implemented effective next doors, the function of each sputter unit 5 can be controlled respectively, to satisfy the requirement of the 5 pairs of different process atmosphere in different sputters unit, make that the quality of coating is easier to obtain regulation and control.
Each sputter unit 5 all be equipped with by a plurality of mass flowmeter segmentations control advance the gas distribution pipeline, the process gas sectional subregion that charges into control can realize the inhomogeneity regulation and control of sputter coating.
Each coiled material sputter coating process is not stopped continuously, so the repeatability of sputter ambiance, stability, consistence and coating quality guarantee the production efficiency height easily.
In the present embodiment, can be according to the characteristics of coating, the sputtering target material of each sputter unit 5 both can be made of differing materials, for example aluminium, stainless steel, nickel, molybdenum, titanium, silicon etc., and same negative electrode also can assemble the inserted target of differing materials combination, therefore can be easily decide multiple combinations matches, have good handiness according to infrared external reflection, composite absorption, translucent, different requirements of antireflection film layer; And can be adapted to other Application Areass.
Continuous coating production line described in the utility model can adopt a plurality of vacuum chambers, and each vacuum chamber can have a plurality of sputters unit or a plurality of slit arrangement of bleeding (realization is bled and isolating function) again; Therefore, in the utility model, (1) vacuum chamber, sputter element number can be decided according to the processing requirement of need splash coating; (2) by the technology difference, each sputter unit can adopt the differing materials target, also can assemble the inserted target of differing materials combination, to satisfy the demand of different films system to film material; (3) each vacuum chamber also can dispose vacuum pump composition vacuum system dissimilar, model on demand, to satisfy the optimised process requirement; (4) continuous coating production line described in the utility model also can be used for similar other Application Areass that need flexible strip volume to volume plated film to produce, and makes the field as flexible solar battery.
Claims (4)
1. coating for selective absorption of sunlight spectrum volume to volume continuous coating production line is characterized in that: described production line comprises that unwinding device (1), needle sewing device (2), press-roller device (3), heating unit (4), sputter unit (5), tool isolate the slit arrangement of bleeding (6) of the different rete work atmospheres and the function of bleeding, support roller device (7), refrigerating unit (8), correction transmitting device (9), protective membrane set composite (10) and wrap-up (11); Above-mentioned various piece all places vacuum chamber body (12); Vacuum chamber body (12) also connects vacuum system (13), inflation system (14) and electrical control system (15) respectively.
2. according to the described coating for selective absorption of sunlight spectrum volume to volume of claim 1 continuous coating production line, it is characterized in that: described sputter unit (5) is the magnetron sputtering unit.
3. according to claim 1 or 2 described coating for selective absorption of sunlight spectrum volume to volume continuous coating production lines, it is characterized in that: described sputter unit (5) has more than 3 or 3.
4. according to the described coating for selective absorption of sunlight spectrum volume to volume of claim 1 continuous coating production line, it is characterized in that: the described slit arrangement of bleeding (6) has more than 2 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201364651U CN202090053U (en) | 2011-05-04 | 2011-05-04 | Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201364651U CN202090053U (en) | 2011-05-04 | 2011-05-04 | Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings |
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| CN202090053U true CN202090053U (en) | 2011-12-28 |
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| CN2011201364651U Expired - Lifetime CN202090053U (en) | 2011-05-04 | 2011-05-04 | Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618839A (en) * | 2012-03-22 | 2012-08-01 | 威海金博新能源科技有限公司 | Roll-to-roll continuous vacuum coating production machine |
| CN102936719A (en) * | 2012-11-30 | 2013-02-20 | 上海子创镀膜技术有限公司 | Magnetron sputtering coating system |
| CN103046015A (en) * | 2013-01-22 | 2013-04-17 | 安泰科技股份有限公司 | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method |
| CN103361603A (en) * | 2012-03-29 | 2013-10-23 | 常熟卓辉光电科技有限公司 | Vacuum evaporation equipment of semiconductor film material and preparation method of OLED (Organic Light Emitting Diode) conductive layer |
| CN103849851A (en) * | 2012-12-03 | 2014-06-11 | 三星康宁精密素材株式会社 | Roll-to-roll sputtering method |
| CN104404474A (en) * | 2014-12-26 | 2015-03-11 | 辽宁北宇真空科技有限公司 | Continuous vacuum ion plating machine |
| CN104775102A (en) * | 2015-05-04 | 2015-07-15 | 上海产业技术研究院 | Vacuum coating system combining reel-to-reel magnetron sputtering cathode and columnar multi-arc source |
| CN105296953A (en) * | 2015-12-01 | 2016-02-03 | 肇庆市科润真空设备有限公司 | Film coating device for solar heat absorption films |
| CN106282958A (en) * | 2016-11-03 | 2017-01-04 | 成都捷翼电子科技有限公司 | A kind of volume to volume fine vacuum sputter system for flexible electronic component and method |
| CN113416941A (en) * | 2021-06-29 | 2021-09-21 | 辽宁分子流科技有限公司 | A device is changed to winding up roller for roll-to-roll equipment |
-
2011
- 2011-05-04 CN CN2011201364651U patent/CN202090053U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618839A (en) * | 2012-03-22 | 2012-08-01 | 威海金博新能源科技有限公司 | Roll-to-roll continuous vacuum coating production machine |
| CN103361603A (en) * | 2012-03-29 | 2013-10-23 | 常熟卓辉光电科技有限公司 | Vacuum evaporation equipment of semiconductor film material and preparation method of OLED (Organic Light Emitting Diode) conductive layer |
| CN102936719A (en) * | 2012-11-30 | 2013-02-20 | 上海子创镀膜技术有限公司 | Magnetron sputtering coating system |
| CN103849851A (en) * | 2012-12-03 | 2014-06-11 | 三星康宁精密素材株式会社 | Roll-to-roll sputtering method |
| CN103046015A (en) * | 2013-01-22 | 2013-04-17 | 安泰科技股份有限公司 | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method |
| CN104404474A (en) * | 2014-12-26 | 2015-03-11 | 辽宁北宇真空科技有限公司 | Continuous vacuum ion plating machine |
| CN104775102A (en) * | 2015-05-04 | 2015-07-15 | 上海产业技术研究院 | Vacuum coating system combining reel-to-reel magnetron sputtering cathode and columnar multi-arc source |
| CN105296953A (en) * | 2015-12-01 | 2016-02-03 | 肇庆市科润真空设备有限公司 | Film coating device for solar heat absorption films |
| CN106282958A (en) * | 2016-11-03 | 2017-01-04 | 成都捷翼电子科技有限公司 | A kind of volume to volume fine vacuum sputter system for flexible electronic component and method |
| CN113416941A (en) * | 2021-06-29 | 2021-09-21 | 辽宁分子流科技有限公司 | A device is changed to winding up roller for roll-to-roll equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: WEIHAI LANMO OPTOTHERMAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: GEM-PORT PHOTOVOLTAICS TECHNOLOGY (HONG KONG) CO., LTD. Effective date: 20140829 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: HONG KONG, CHINA TO: 264200 WEIHAI, SHANDONG PROVINCE |
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| TR01 | Transfer of patent right |
Effective date of registration: 20140829 Address after: 264200 Huancui, Shandong City, the town of sheep pavilion scenic mountain road Patentee after: WEIHAI LANMO PHOTO-THERMAL TECHNOLOGY CO., LTD. Address before: Hongkong Chinese marble Road No. 41-47 Warburg commercial building room 905 Patentee before: Golden Eagle energy technology (Hongkong) Co., Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20180920 Address after: 312400 Zhejiang No. 8 Pu Hui new energy Co., Ltd., Shengzhou Economic Development Zone, Zhejiang Patentee after: Zhejiang Younite New Energy Co., Ltd. Address before: 264200 Jingshan Road, Yang Ting Town, Huancui District, Weihai, Shandong Patentee before: WEIHAI LANMO PHOTO-THERMAL TECHNOLOGY CO., LTD. |
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| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111228 |
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| CX01 | Expiry of patent term |