CN103046015A - Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method - Google Patents
Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method Download PDFInfo
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- CN103046015A CN103046015A CN2013100224845A CN201310022484A CN103046015A CN 103046015 A CN103046015 A CN 103046015A CN 2013100224845 A CN2013100224845 A CN 2013100224845A CN 201310022484 A CN201310022484 A CN 201310022484A CN 103046015 A CN103046015 A CN 103046015A
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Abstract
The invention relates to a coating device and method for carrying out continuous magnetron sputtering on different belt material surfaces so as to prepare various films under a high vacuum condition. The vacuum coating device comprises a sputtering chamber (2) and a sampling chamber (3), wherein the sputtering chamber is internally provided with at least one target material, and a heating region is arranged in the middle in the sputtering chamber (2); an upper glue roller (9) and a lower glue roller (8) are respectively arranged above and below the heating region, so that a belt-shaped workpiece can be controllably and repeatedly wound in a come-and-go manner in the sputtering chamber (2); and the sampling chamber (3) is internally provided with a reeling device (6) and an unreeling device (7) which are driven by a motor, and at least two adjustable slits are arranged between the sputtering chamber (2) and the sampling chamber (3). According to the coating device and the coating method provided by the invention the serialization production can be realized, the production efficiency is high, the shortages in the prior art that the production efficiency is low, the preparation film quality is not uniform are overcome, and the coating device and the coating method have positive meanings on improving the quality of the sputtered film and the production efficiency.
Description
Technical field
The present invention relates to prepare at various strip surface continuous magnetron sputterings under a kind of high vacuum condition filming equipment and the method for all kinds of films, particularly the efficient magnetic control sputtering vacuum coating device of a kind of volume to volume formula and film coating method.
Background technology
Magnetron sputtering technology is at the building materials of China, decorate, optics, worker's grinding tool is strengthened, be used widely in the fields such as unicircuit, to carry out, photoelectricity, photo-thermal, magnetics, superconduction, medium, the important technical of the function films such as catalysis preparation, but equipment in the market is mainly used in the sputter coating of small area or one-piece substrate, equipment and the technology that can realize industrial continuous production are actually rare, minority can realize that the equipment that serialization is produced exists sputtering yield low equally, coating quality is poor, the shortcomings such as the process time is long, market outlook are also pessimistic, how to utilize magnetron sputtering technique to realize that the efficient of sputter coating technology is high, film quality is even, the characteristics such as adhesivity is good are the technical problems of utilizing magnetron sputtering technique to need to be resolved hurrily.
Summary of the invention
Of the present inventionly provide a kind of surface sputtering plated film for banded workpiece, production efficiency is high, the sputtered layer steady quality, evenly, the efficient magnetic control sputtering vacuum coating device of volume to volume formula and the film coating method of high conformity.
To achieve these goals, the present invention is by the following technical solutions:
The efficient magnetic control sputtering vacuum coating device of a kind of volume to volume formula comprises sputtering chamber 2 and Sample Room 3, wherein:
Described sputtering chamber 2 at least one target of interior installation, the middle part in the sputtering chamber 2 is the heating zone, the upper and lower of this heating zone has respectively upper glue roller 9 and lower rubber roller 8, and banded workpiece is reeled in sputtering chamber 2 interior controllable repeatedly contacts;
Motor-driven wrap-up 6 and unwinding device 7 are installed in the described Sample Room 3;
Be provided with at least two adjustable slits between described sputtering chamber 2 and the Sample Room 3.
Described heating zone is divided into heating zone and lower heating zone, is furnished with heating member 25 in the upper heating zone, is furnished with lower heating member 26 in the lower heating zone.
Described upper glue roller 9 is driven by upper glue roller 9 and the lower coiling motor 20 that upper coiling motor 19 links to each other respectively with lower rubber roller 8.
Slit between sputtering chamber 2 and the Sample Room 3 has slit setting device 16, is provided with unwinding device 7 corresponding positions on the slit setting device 16 and unreels slit 27, is provided with rolling slit 28 with wrap-up 6 corresponding positions.
Described slit setting device 16 can will unreel slit 27 and rolling slit 28 is closed, thereby with sputtering chamber 2 and 3 independent separating of Sample Room.
Described sputtering chamber 2 and Sample Room 3 are respectively arranged with pumped vacuum systems, and the pumped vacuum systems of sputtering chamber 2 comprises the second molecular pump 23 and the second mechanical pump 24, and the pumped vacuum systems of Sample Room 3 comprises the first molecular pump 21 and the first mechanical pump 22; Two cover pumped vacuum systems can work independently.
Described upper glue roller 9 and lower rubber roller 8 adopt stainless steel coated outside high-temperature silica gel to make.
Described wrap-up 6 is furnished with the rolling guide roller 17 of guiding, and what unwinding device 7 was furnished with guiding unreels guide roller 18; Rolling guide roller 17 can change according to the Tensity size of banded workpiece 10 with the position that unreels guide roller 18.
Be furnished with a plurality of flap devices 13,14,15 in the described heating zone.
Described target is bar shaped, comprises front target 11 and rear target 12.
The film coating method of the efficient magnetic control sputtering vacuum coating device of a kind of volume to volume formula, it comprises the steps:
A. banded workpiece 10 places on the unwinding device 7 of Sample Room 3, and its unreels slit 27 and enter sputtering chamber 2 through unreeling guide roller 18 guiding, passing;
B. then be delivered to upper glue roller 9 by lower rubber roller 8, repeatedly reel upper glue roller 9 and lower rubber roller 8, make banded workpiece controllable in sputtering chamber repeatedly contact reel, repeatedly in the winding process, the target device of strip carries out vacuum sputtering coating to banded workpiece 10 at this;
C. after sputter coating was finished, banded workpiece 10 passed rolling slit 28, by rolling guide roller 17 guiding, was wound up at last on the wrap-up 6.
Among the step b, described upper glue roller 9 and lower rubber roller 8 remain constant at the uniform velocity rotation; Distance between described target device and the banded workpiece 10 can manual regulation.
Among step a and the c, wrap-up 6 and unwinding device 7 can be adjusted rotating speed according to setting speed and spool size.
The function of described wrap-up 6 and unwinding device 7 can be exchanged as required.
Beneficial effect of the present invention is: banded workpiece of the present invention repeatedly comes and goes in sputtering chamber and reels, greatly increased the sputter area, the utilization ratio of target is higher, banded workpiece is through repeatedly reeling, the workpiece arbitrary portion is through long Distance Transmission, sputter coating repeatedly, and film quality is even, growth velocity is fast, retractable volume speed be can also regulate simultaneously, thereby sputter rate and the quality of rete adjusted.
Description of drawings
Fig. 1 is the structure front view of the efficient magnetic control sputtering vacuum coating device of volume to volume formula of the present invention;
Fig. 2 is the structure side view of the efficient magnetic control sputtering vacuum coating device of volume to volume formula of the present invention.
[primary clustering nomenclature]
1 vacuum coater 15 the 3rd flap device
2 sputtering chambers, 16 slit setting devices
3 Sample Rooms, 17 rolling guide rollers
4 winding motors 18 unreel guide roller
5 unreel the motor of reeling on the motor 19
20 times coiling motors of 6 wrap-ups
7 unwinding devices, 21 first molecular pumps
8 lower rubber rollers, 22 first mechanical pumps
9 upper glue rollers, 23 second molecular pumps
10 banded workpiece 24 second mechanical pumps
Heating member on the 11 front targets 25
26 times heating members of 12 rear targets
13 first flap devices 27 unreel slit
14 second flap devices, 28 rolling slits
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.The present invention is not limited to following examples.
As shown in Figure 1, be the structure front view of the efficient magnetic control sputtering vacuum coating device of volume to volume formula of the present invention; Fig. 2 is its structure side view.
The efficient magnetic control sputtering vacuum coating device 1 of described volume to volume formula comprises sputtering chamber 2 and Sample Room 3.
As depicted in figs. 1 and 2, both sides, described sputtering chamber 2 interior front and back are equipped with the target device of strip, and the front side is that front target 11, rear side are rear target 12; Middle part in the sputtering chamber 2 is the heating zone, is used for keeping the temperature of the banded workpiece 10 of sputter procedure; The top of heating zone is equipped with the upper glue roller 9 that links to each other with upper coiling motor 19, and the below is equipped with the lower rubber roller 8 that links to each other with lower coiling motor 20, and described upper glue roller 9 and lower rubber roller 8 adopt stainless steel coated outside high-temperature silica gel to make; The heating zone is divided into heating zone and lower heating zone, is furnished with heating member 25 in the upper heating zone, is furnished with lower heating member 26 in the lower heating zone; Also be furnished with a plurality of flap devices in the heating zone and translation in moving process, occur to prevent banded workpiece 10, thereby guarantee the sputter coating quality, it is respectively the first flap device 13 that places heating member 25 tops, the first flap device 15 that places the second flap device 14 between heating member 25 and the lower heating member 26 and place lower heating member 26 belows.
Wrap-up 6 and unwinding device 7 are installed in the described Sample Room 3; Wrap-up 6 links to each other with winding motor 4 and by its driving, unwinding device 7 with unreel that motor 5 links to each other and by its driving; Wherein, described wrap-up 6 also is furnished with the rolling guide roller 17 of guiding, and what unwinding device 7 was furnished with guiding unreels guide roller 18; Rolling guide roller 17 and unreel guide roller 18 and have tension regulating function, its position can change according to the Tensity size of banded workpiece 10, for example moves up and down, thereby adjusts so that banded workpiece 10 is kept constant at the tension force of operational process.
Be provided with slit setting device 16 between described sputtering chamber 2 and the Sample Room 3, be provided with and unreel slit 27 with unreeling guide roller 18 corresponding positions on the slit setting device 16, be provided with rolling slit 28 with rolling guide roller 17 corresponding positions; This slit setting device 16 can be as required will unreel slit 27 and rolling slit 28 is closed, thereby with sputtering chamber 2 and 3 independent separating of Sample Room.
Described sputtering chamber 2 and Sample Room 3 also are provided with respectively pumped vacuum systems, and the pumped vacuum systems of sputtering chamber 2 is comprised of the second molecular pump 23 and the second mechanical pump 24, and the pumped vacuum systems of Sample Room 3 is comprised of the first molecular pump 21 and the first mechanical pump 22; Two cover pumped vacuum systems can work independently.
During 1 operation of the efficient magnetic control sputtering vacuum coating device of volume to volume formula of the present invention, at first banded workpiece 10 places on the unwinding device 7 of Sample Room 3, and its unreels slit 27 and enter sputtering chamber 2 through unreeling guide roller 18 guiding, passing; Be delivered to upper glue roller 9 by lower rubber roller 8, repeatedly reel upper glue roller 9 and lower rubber roller 8, at this repeatedly in the winding process, the target device of strip is that the front target 11 of front side and 12 pairs of banded workpiece 10 of rear target of rear side carry out vacuum sputtering coating, and the distance between described target device and the banded workpiece 10 can manual regulation; After sputter coating was finished, banded workpiece 10 passed rolling slit 28, by rolling guide roller 17 guiding, was wound up at last on the wrap-up 6.
In above-mentioned operational process, upper glue roller 9 and lower rubber roller 8 remain constant at the uniform velocity rotation; Wrap-up 6 and unwinding device 7 can be adjusted rotating speed according to setting speed and spool size, and the function of wrap-up 6 and unwinding device 7 can be exchanged as required simultaneously.
Claims (14)
1. the efficient magnetic control sputtering vacuum coating device of volume to volume formula comprises sputtering chamber (2) and Sample Room (3), it is characterized in that:
At least one target is installed in the described sputtering chamber (2), middle part in the sputtering chamber (2) is the heating zone, the upper and lower of this heating zone has respectively upper glue roller (9) and lower rubber roller (8), and the controllable repeatedly contact in sputtering chamber (2) of banded workpiece is reeled;
Motor-driven wrap-up (6) and unwinding device (7) are installed in the described Sample Room (3);
Be provided with at least two adjustable slits between described sputtering chamber (2) and the Sample Room (3).
2. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: described heating zone is divided into heating zone and lower heating zone, be furnished with heating member (25) in the upper heating zone, be furnished with lower heating member (26) in the lower heating zone.
3. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1 is characterized in that: described upper glue roller (9) is driven by upper glue roller (9) and the lower coiling motor (20) that upper coiling motor (19) links to each other respectively with lower rubber roller (8).
4. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: the slit between sputtering chamber (2) and the Sample Room (3) has slit setting device (16), on the slit setting device (16) and unwinding device (7) corresponding position is provided with and unreels slit (27), is provided with rolling slit (28) with wrap-up (6) corresponding position.
5. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 4, it is characterized in that: described slit setting device (16) can will unreel slit (27) and rolling slit (28) is closed, thereby with sputtering chamber (2) and Sample Room (3) is independent separates.
6. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: described sputtering chamber (2) and Sample Room (3) are respectively arranged with pumped vacuum systems, the pumped vacuum systems of sputtering chamber (2) comprises the second molecular pump (23) and the second mechanical pump (24), and the pumped vacuum systems of Sample Room (3) comprises the first molecular pump (21) and the first mechanical pump (22); Two cover pumped vacuum systems can work independently.
7. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1 is characterized in that: described upper glue roller (9) and lower rubber roller (8) adopt stainless steel coated outside high-temperature silica gel to make.
8. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: described wrap-up (6) is furnished with the rolling guide roller (17) of guiding, and what unwinding device (7) was furnished with guiding unreels guide roller (18); Rolling guide roller (17) and the position that unreels guide roller (18) can change according to the Tensity size of banded workpiece (10).
9. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1 is characterized in that: be furnished with a plurality of flap devices (13,14,15) in the described heating zone.
10. the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: described target is bar shaped, comprises front target (11) and rear target (12).
11. the film coating method of the efficient magnetic control sputtering vacuum coating device of volume to volume formula as claimed in claim 1, it is characterized in that: it comprises the steps:
A. banded workpiece (10) places on the unwinding device (7) of Sample Room (3), and its unreels slit (27) and enter sputtering chamber (2) through unreeling guide roller (18) guiding, passing;
B. then be delivered to upper glue roller (9) by lower rubber roller (8), repeatedly reel upper glue roller (9) and lower rubber roller (8), controllable repeatedly the contact in sputtering chamber of banded workpiece reeled, repeatedly in the winding process, the target device of strip carries out vacuum sputtering coating to banded workpiece (10) at this;
C. after sputter coating was finished, banded workpiece (10) passed rolling slit (28), by rolling guide roller (17) guiding, was wound up at last on the wrap-up (6).
12. method as claimed in claim 11 is characterized in that: among the step b, described upper glue roller (9) and lower rubber roller (8) remain constant at the uniform velocity rotation; Distance between described target device and the banded workpiece (10) can manual regulation.
13. method as claimed in claim 11 is characterized in that: among step a and the c, wrap-up (6) and unwinding device (7) can be adjusted rotating speed according to setting speed and spool size.
14. method as claimed in claim 11 is characterized in that: the function of described wrap-up (6) and unwinding device (7) can be exchanged as required.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013100224845A CN103046015A (en) | 2013-01-22 | 2013-01-22 | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2013100224845A CN103046015A (en) | 2013-01-22 | 2013-01-22 | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method |
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| CN103046015A true CN103046015A (en) | 2013-04-17 |
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| CN2013100224845A Pending CN103046015A (en) | 2013-01-22 | 2013-01-22 | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106282958A (en) * | 2016-11-03 | 2017-01-04 | 成都捷翼电子科技有限公司 | A kind of volume to volume fine vacuum sputter system for flexible electronic component and method |
| CN109049660A (en) * | 2018-08-01 | 2018-12-21 | 嘉兴高正新材料科技股份有限公司 | A kind of high performance membrane material plasma processing equipment |
| CN110846892A (en) * | 2019-12-05 | 2020-02-28 | 浙江工业大学 | Winding type fiber film coating device in magnetron sputtering |
| CN113684462A (en) * | 2021-07-29 | 2021-11-23 | 苏州道一至诚纳米材料技术有限公司 | Double-sided reciprocating film coating device |
| CN115124031A (en) * | 2021-03-25 | 2022-09-30 | 电子科技大学 | Roll-to-roll preparation system and roll-to-roll preparation method |
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| CN2303003Y (en) * | 1997-03-31 | 1999-01-06 | 兰州真空设备厂 | Flat magnetic control sputtering indium tin oxides film type winding and coating machine |
| JP2000178717A (en) * | 1998-12-21 | 2000-06-27 | Sony Corp | Film forming device |
| CN102268643A (en) * | 2011-07-14 | 2011-12-07 | 上海交通大学 | Multi-channel laser coating method for preparing cerium dioxide seed layer |
| CN202090053U (en) * | 2011-05-04 | 2011-12-28 | 金博新能源技术（香港）有限公司 | Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings |
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2013
- 2013-01-22 CN CN2013100224845A patent/CN103046015A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2303003Y (en) * | 1997-03-31 | 1999-01-06 | 兰州真空设备厂 | Flat magnetic control sputtering indium tin oxides film type winding and coating machine |
| JP2000178717A (en) * | 1998-12-21 | 2000-06-27 | Sony Corp | Film forming device |
| CN202090053U (en) * | 2011-05-04 | 2011-12-28 | 金博新能源技术（香港）有限公司 | Reel-to-reel continuous coating film production line for solar spectrum selective-absorbing coatings |
| CN102268643A (en) * | 2011-07-14 | 2011-12-07 | 上海交通大学 | Multi-channel laser coating method for preparing cerium dioxide seed layer |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106282958A (en) * | 2016-11-03 | 2017-01-04 | 成都捷翼电子科技有限公司 | A kind of volume to volume fine vacuum sputter system for flexible electronic component and method |
| CN109049660A (en) * | 2018-08-01 | 2018-12-21 | 嘉兴高正新材料科技股份有限公司 | A kind of high performance membrane material plasma processing equipment |
| CN110846892A (en) * | 2019-12-05 | 2020-02-28 | 浙江工业大学 | Winding type fiber film coating device in magnetron sputtering |
| CN115124031A (en) * | 2021-03-25 | 2022-09-30 | 电子科技大学 | Roll-to-roll preparation system and roll-to-roll preparation method |
| CN113684462A (en) * | 2021-07-29 | 2021-11-23 | 苏州道一至诚纳米材料技术有限公司 | Double-sided reciprocating film coating device |
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Application publication date: 20130417 |