CN113684462A

CN113684462A - Double-sided reciprocating film coating device

Info

Publication number: CN113684462A
Application number: CN202110866446.2A
Authority: CN
Inventors: 钱若棨; 钱敬吉
Original assignee: Wuxi Riji Micro Electromechanical Equipment Co ltd; Suzhou Daoyizhicheng Nano Material Technology Co ltd
Current assignee: Wuxi Riji Micro Electromechanical Equipment Co ltd; Suzhou Daoyizhicheng Nano Material Technology Co ltd
Priority date: 2021-07-29
Filing date: 2021-07-29
Publication date: 2021-11-23
Anticipated expiration: 2041-07-29
Also published as: CN113684462B; CN116770258A

Abstract

The invention discloses a double-sided reciprocating film coating device, which comprises a vacuum chamber, an emission source system, at least one set of winding equipment and a driving mechanism, wherein the winding equipment comprises a first winding roller, a first tension elastic roller, a first constant-speed transmission roller, a second tension elastic roller and a second winding roller which are sequentially arranged on a transmission path of a flexible strip, and the first winding roller and the second winding roller are mutually winding (unwinding) roller and are mutually main (auxiliary) power rollers; the first and second constant-speed transmission rollers are mutually driven constant-speed transmission rollers, and a first surface of the flexible strip between the first and second constant-speed transmission rollers and a second surface of the flexible strip between the first winding roller and the first tension elastic roller face the emission source system. The invention can solve the problems of low utilization rate of effective space in a vacuum chamber, high cost, low efficiency, small capacity and the like caused by the fact that the existing coating device needs to be provided with at least two evaporation sources (groups) for realizing double-sided coating.

Description

Double-sided reciprocating film coating device

Technical Field

The invention relates to the field of coating equipment, in particular to a double-sided reciprocating coating device.

Background

Vacuum coating technologies generally fall into two broad categories, namely Physical Vapor Deposition (PVD) technologies and Chemical Vapor Deposition (CVD) technologies, and no matter PVD technologies or CVD technologies, single-sided coating winding systems corresponding to a single evaporation source (group) of a flexible winding system are mature technologies at present and are widely applied to the flexible substrate coating industry. When double-sided coating is needed, only one side of the film is coated, then the machine is stopped for blanking, and the whole roll of film coated with one side is subjected to surface changing and film reversing on a film reversing machine, and then the film is charged again for secondary coating. The structures are produced in such a way, the time and labor are consumed, the efficiency is low, and the coated surface is scratched and the material is lost due to repeated loading and unloading of the film material and turnover film reversing, so that the problems of low yield, high manufacturing cost and the like exist when a common winding film coating factory is used for coating double-sided products. In addition, some claim that the double-sided coating winding system is also a single-sided coating winding system corresponding to a single evaporation source (group), but only one evaporation source (group) is additionally arranged on the back surface of the flexible substrate, so as to realize simultaneous double-sided reciprocating coating. The structure can not efficiently utilize the effective space in the vacuum chamber, and has low efficiency, high cost and small capacity, thus leading to overhigh cost of finished products.

In addition, in recent years, in many countries around the world, especially developed countries, a great deal of manpower and material resources are put into research and development of efficient nano heterogeneous thin film catalysts based on the d-band center theory, but at present, for various technical reasons, no country has yet realized industrialized mass production of heterogeneous nano thin film catalysts, and how to realize double-sided coating by using a single emission source system is a technical problem.

Disclosure of Invention

Therefore, an object of the present invention is to provide a double-sided reciprocating coating apparatus, so as to solve the problems of low utilization rate of effective space in a vacuum chamber, high cost, low efficiency, low productivity, etc. caused by the need of multiple evaporation sources or the need of a film-reversing operation in order to realize double-sided coating in the conventional coating apparatus.

The invention provides a double-sided reciprocating film coating device, which is used for coating a first surface and a second surface of a flexible strip opposite to each other. The emission source system is arranged in the vacuum chamber. At least one set of winding devices is arranged in the vacuum chamber and around the emission source system, and each set of winding devices comprises: the winding device comprises a first winding roller and a second winding roller, wherein one of the first winding roller and the second winding roller is a winding roller, the other of the first winding roller and the second winding roller is an unwinding roller, and the first winding roller and the second winding roller are a driving roller and a driven roller; the first tension elastic roller and the second tension elastic roller are used for changing the moving direction of the flexible belt material and adjusting the tension of the flexible belt material by elastic force to avoid deviation; at least one guiding roller for changing the moving direction of the flexible belt material; the first constant-speed transmission roller and the second constant-speed transmission roller are mutually a main constant-speed transmission roller and a secondary constant-speed transmission roller and are used for adjusting the constant linear speed of the flexible strip during movement. And an output shaft of the driving mechanism is connected with a power shaft of the winding device. The first winding roller, the first tension elastic roller, the first constant-speed transmission roller, the second tension elastic roller and the second winding roller are sequentially arranged on a transmission path of the flexible strip material and are connected through the flexible strip material, and the guide roller is arranged on the transmission path; a first surface of the flexible strip between the first constant-speed conveying roller and the second constant-speed conveying roller faces the emission source system, and a second surface of the flexible strip between the first winding roller and the first tension elastic roller faces the emission source system; and the flexible strip between the first constant-speed conveying roller and the second constant-speed conveying roller and the flexible strip between the first winding roller and the first tension elastic roller are both positioned in the emission range of the emission source system.

Preferably, the flexible strip between the first and second constant speed drive rollers has a first length, and the flexible strip between the first winding roller and the first tension spring roller has a second length, the second length being greater than the first length.

Preferably, the ratio of the first length to the second length is 1:1.1 to 1: 1.30.

Preferably, the axis of the second winding roller is a first height from the bottom of the vacuum chamber, the axis of the second constant speed transmission roller is a second height from the bottom of the vacuum chamber, and the first height is smaller than the second height.

Preferably, the first height is greater than 270mm, and the height difference between the axis of the second winding roller and the axis of the second constant speed transmission roller is greater than 130 mm.

Preferably, a third distance is arranged between the first tension elastic roller and a central shaft of the emission source system, a fourth distance is arranged between the axis of the second constant speed transmission roller and the central shaft of the emission source system, the third distance is greater than 150mm, and the fourth distance is greater than 350 mm.

Preferably, the edge of the emission range of the emission source system forms a first angle with the plane of the bottom of the vacuum chamber, and the first angle is 30-60 degrees.

Preferably, the first constant speed transmission roller and the second constant speed transmission roller are both pressure type constant speed transmission rollers.

Preferably, the middle area and the area near the two ends of the pressure type constant speed conveying roller are provided with anti-slip pattern structures.

Preferably, the first winding roller and the second winding roller are both bidirectional elastic damping interval sliding rollers.

Preferably, the bidirectional elastic damping sliding roller comprises a first shaft, the first shaft is provided with two opposite first end faces, and each first end face is provided with at least one pair of v-shaped spring clip ports, and each pair of v-shaped spring clip ports is arranged symmetrically by taking the circle center of the first end face as the center; wherein, the gliding roller still includes corresponding every first terminal surface between two-way elastic damping: the diameter of the middle part of the shaft head is larger than the sizes of the two ends of the shaft head, one end of the shaft head is connected with an output shaft of the driving mechanism, the other end of the shaft head is rotatably matched with the first shaft, and a v-21274is arranged on the middle part corresponding to the v-21274; and a v-spring fixing part is arranged on the middle part; the end of the v-shaped spring is fixed on the v-shaped spring 21274, the other end of the v-shaped spring is clamped with the corresponding v-shaped spring 21274snap; when the first tension between the first constant-speed conveying roller and the first winding roller is larger than the maximum fixed damping of the first winding roller, the other end of the v-shaped spring is separated from the corresponding v-shaped 21274, the other end of the v-shaped spring is clamped with the next v-shaped 21274in the rotating direction of the first shaft, and the first shaft rotates to the v-shaped 21274and the other end of the v-shaped spring is clamped with the next v-shaped 21274in the rotating direction of the first shaft.

Preferably, the v-21274h-shaped spring fixing part comprises a v-21274h-shaped spring pressing hole and a pressing groove, the bidirectional elastic damping sliding type rolling shaft further comprises a pressing plate, one end of the v-21274h-shaped spring is fixed to the v-21274h-shaped spring pressing hole, connecting parts of two ends of the v-21274h-shaped spring are accommodated in the pressing groove and are positioned between the pressing plate and the middle part of the shaft head through the pressing plate.

Preferably, four pairs of the 21274; shaped springs are uniformly arranged on the first end surface of the first shaft of the bidirectional elastic damping sliding roller.

Preferably, the v-shaped spring 21274is made of tungsten wire.

Preferably, the winding apparatus further comprises a first tensioning shaft and a second tensioning shaft, the first tensioning shaft being disposed between the first winding roller and the first constant speed drive roller for adjusting the amount of slack taken up by the first winding roller; the second tensioning shaft is arranged between the second winding roller and the second constant-speed transmission roller and used for adjusting and absorbing the looseness generated by the second winding roller.

Preferably, the first tensioning shaft and the second tensioning shaft are self-operated tensioning shafts.

Preferably, the self-operated tensioning shaft includes second shaft and two mounts that set up relatively, is provided with the guide slot on each mount, the guide slot is followed vacuum chamber's direction of height sets up, the both ends of second shaft set up respectively in two in the guide slot, the second shaft in follow in the guide slot direction of height is portable.

Preferably, a movable structure is fixedly arranged at the end of the second shaft, the movable structure comprises a ball and a first spring fixedly connected with the ball, the ball is slidably arranged in the guide groove, and the first spring is embedded at the end of the second shaft.

Preferably, the first winding roller, the second winding roller, the first constant speed drive roller and the second constant speed drive roller have the same outer diameter; the outer diameters of the guide rollers are the same; the outer diameters of the first tension elastic roller and the second tension elastic roller are the same; the first tensioning shaft and the second tensioning shaft have the same outer diameter.

Preferably, the first and second elastic rollers have a pattern structure for preventing slippage in the middle and in the vicinity of the two ends.

Preferably, the first tension elastic roller comprises a third shaft, a second spring, a first spring box and a second spring box, wherein the third spring is arranged oppositely, the second spring is arranged in the first spring box, a first end of the second spring is connected with a first end of the first spring box, and a first end of the third shaft is arranged in the first spring box and is connected with a second end of the second spring; the third spring set up in the second spring box, just the first end of third spring with the first end of second spring box is connected, the second end of third axle set up in the second spring box, and connect the second end of third spring.

Preferably, the double-sided reciprocating film coating device comprises two sets of winding devices, and the two sets of winding devices are oppositely arranged on two opposite sides of the emission source system; or the double-sided coating equipment comprises three sets of winding equipment which are distributed in a triangular manner around the emission source system; or the double-sided coating equipment comprises four sets of winding equipment, and the four sets of winding equipment are distributed around the emission source system in a quadrilateral manner.

Preferably, the power shaft of the winding device comprises a first power shaft and a second power shaft, the first winding roller and the first constant-speed transmission roller are connected with the first power shaft, and the second winding roller and the second constant-speed transmission roller are connected with the second power shaft.

Preferably, the driving mechanism is a first servo motor, and the first servo motor is hermetically connected with a power shaft of the winding device by adopting a magnetic fluid.

Preferably, the driving mechanism includes a revolution system and a second servo motor, the second servo motor is hermetically connected with a power shaft of the revolution system by using a magnetic fluid, the power shaft of the revolution system includes a first output shaft and a second output shaft, the first output shaft is connected with the first power shaft, and the second output shaft is connected with the second power shaft.

Preferably, the revolution system comprises a clutch, the clutch is connected with the first output shaft and the second output shaft, the clutch is clockwise engaged, the first power shaft is a main power shaft, and the second power shaft is a secondary power shaft; the clutch is closed anticlockwise, the second power shaft is a main power shaft, and the first power shaft is a secondary power shaft.

Preferably, the cross-section of the vacuum chamber is circular, square or rectangular.

Preferably, the emission source system is an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system or an arc evaporation system; and the double-sided reciprocating film coating device also comprises a reaction gas ionization system consisting of an ion source and a plurality of gas pipes.

Compared with the prior art, the double-sided reciprocating film coating device is a real single-emission-source double-sided reciprocating film coating device, not only can reduce the cost and the energy consumption, but also can greatly improve the effective utilization space of the vacuum chamber and avoid overlong system vacuumizing time caused by increasing the volume of the vacuum chamber; but also to achieve reciprocating winding. In addition, the constant-speed transmission roller is arranged, so that the problems that the plating time of different sections of the flexible strip is different and the thickness of a film layer is greatly different due to the change of the linear speed of the flexible strip caused by the change of the winding thickness of the flexible strip on the winding roller are solved. The revolution system is used for providing power, so that the winding equipment can realize revolution and autorotation, can reduce the thickness difference of a transversely-coated layer, and effectively controls the error ratio. Therefore, the invention can realize large-scale batch double-sided coating only by a single emission source device and can also realize large-scale batch production of a novel functional nano two-dimensional film material taking a flexible base material as a framework.

The advantages and spirit of the present invention will be further understood by the following detailed description of the invention and the accompanying drawings.

Drawings

FIG. 1 is a schematic view of a double-sided reciprocating coating apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic view of a pressure-type constant velocity drive roller according to the present invention;

FIG. 3 is a schematic view of a double-sided reciprocating plating apparatus according to another embodiment of the invention;

FIG. 4A is a schematic view of a two-way elastically damped roll shaft according to the present invention;

FIG. 4B is a side view of a portion of the structure of the dual direction resilient damping roller assembly of the present invention;

FIG. 4C is a schematic view of the stub shaft of FIG. 4B;

FIG. 4D is a schematic view of the end face of the first shaft of FIG. 4B;

FIG. 5A is a schematic view of a self-powered tensioning shaft of the present invention;

FIG. 5B is a schematic partial cross-sectional view of the self-powered tensioning shaft of FIG. 5A;

FIG. 6 is a schematic view of a first tension spring roller of the present invention;

FIG. 7 is a schematic diagram showing the arrangement positions of some components of the double-sided reciprocating coating apparatus of the present invention;

FIG. 8 is a block diagram schematically illustrating a power system of the double-sided reciprocating coating apparatus of the present invention;

fig. 9A-9C are schematic views of the double-sided reciprocating coating device of the present invention having two, three and four sets of winding devices, respectively.

Detailed Description

Referring to fig. 1, fig. 1 is a schematic view illustrating a double-sided reciprocating plating apparatus according to an embodiment of the invention. The invention provides a double-sided reciprocating coating device which is used for coating a first surface 21 and a second surface 22 of a flexible strip 20, wherein the flexible strip 20 is made of cloth, a stainless steel wire mesh, a resin flexible base material and the like. The double-sided reciprocating coating device can be used for producing a novel functional nanometer two-dimensional film material.

The double-sided reciprocating film coating device comprises an emission source system 100, a vacuum chamber 200, at least one set of winding equipment 300 and a driving mechanism, wherein an output shaft of the driving mechanism is connected with a power shaft of the winding equipment 300. The vacuum chamber 100 has, for example, a cylindrical, square or rectangular structure. An emission source system 100 is disposed in the vacuum chamber 200, and the emission source system 100 is used for vaporizing the film material and depositing a substance formed by reacting the vaporized film material with a specific gas on the first surface 21 and the second surface 22 of the flexible strip 20. The emission source system is, for example, an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system, or an arc evaporation system. The double-sided reciprocating film coating device can further comprise a reaction gas ionization system consisting of an ion source and a plurality of gas pipes. Moreover, the single-emission source system not only can reduce the cost and the energy consumption, but also can greatly improve the effective utilization space of the vacuum chamber and avoid overlong system vacuumizing time caused by increasing the volume of the vacuum chamber.

The winding devices 300 are disposed in the vacuum chamber 200 and around the emission source system 100, and each set of winding devices 300 includes a first winding roller 12, a second winding roller 2, a first tension elastic roller 11, a second tension elastic roller 3, at least one guiding roller, a first constant speed transmission roller 8, and a second constant speed transmission roller 7. The first winding roller 12, the first tension elastic roller 11, the first constant speed transmission roller 8, the second constant speed transmission roller 7, the second tension elastic roller 3 and the second winding roller 2 are sequentially arranged on a transmission path of a flexible belt material 20 and connected through the flexible belt material 20, and the guide roller is arranged on the transmission path.

One of the first winding roller 12 and the second winding roller 2 is a winding roller, the other is an unwinding roller, and the first winding roller 12 and the second winding roller 2 are a driving roller and a driven roller. Specifically, for example, when the first winding roller 12 is a winding roller, the second winding roller 2 is an unwinding roller; when the first winding roller 12 is an unwinding roller, the second winding roller 2 is a winding roller. When the first winding roller 12 is a main power roller, the first winding roller 12 provides power, the second winding roller 2 is a driven power roller, and the second winding roller 2 does not provide power; when the second winding roller 2 is a main power roller, the second winding roller 2 is powered, the first winding roller 12 is a driven roller, and the first winding roller 12 is not powered.

The first tension roller 11 and the second tension roller 3 are used for changing the moving direction of the flexible band material 20 and adjusting the tension of the flexible band material 20 by elasticity to prevent deviation. That is, the first tension roller 11 and the second tension roller 3 absorb a small amount of tensile deformation generated by the flexible band 20 under tension by adjusting the elastic force while changing the moving direction of the flexible band 20, and simultaneously ensure the uniformity of the tensile force distributed in the axial direction of the flexible band 20, thereby preventing the flexible band 20 from being deviated. The guiding rollers are also used to change the moving direction of the flexible strip 20, so the specific number and position thereof can be determined according to the position of the coated strip relative to the emission source system, which is obtained according to the actual needs, for example, in this embodiment, the guiding

rollers

10, 9, 6, 5 and 4 are disposed on the conveying path of the flexible strip 20.

The first constant speed transmission roller 8 and the second constant speed transmission roller 7 are a master constant speed transmission roller and a slave constant speed transmission roller, and are used for adjusting the constant linear speed of the flexible strip 20 during movement. The first constant speed transmission roller 8 and the second constant speed transmission roller 7 have the functions of centering, positioning and deviation rectifying when the strip material is rolled. As the flexible strip wound by the winding wheel is thicker and thicker, the linear speed of the strip close to the winding wheel is larger and larger, different sections of the strip are different in plating (sputtering) time, and the thickness of the film layer is greatly different. This problem cannot be completely avoided if a variable speed servo motor is used. However, the first constant speed drive roller 8 and the second constant speed drive roller 7 are adopted in the present invention, which completely avoids the problem.

Moreover, the first surface 21 of the flexible strip between the first constant-speed transport roller 8 and the second constant-speed transport roller 7 faces the emission source system 100, and the second surface 22 of the flexible strip between the first winding roller 12 and the first tension-elastic roller 11 faces the emission source system 100; and the flexible strip between the first constant speed feed roller 8 and the second constant speed feed roller 7 and the flexible strip between the first winding roller 12 and the first tension spring roller 11 are both located within the emission range of the emission source system 100.

The first winding roller 12, the second winding roller 2, the first constant speed drive roller 8, and the second constant speed drive roller 7 have the same outer diameter; the outer diameters of the plurality of

guide rollers

10, 9, 6, 5, 4 are the same; the first elastic tension roller 11 and the second elastic tension roller 3 have the same outer diameter.

With continued reference to fig. 1, the first winding roller 12 and the first constant speed driving roller 8 are main power shafts, and assuming that the second winding roller 2 is an unwinding shaft of a full roll of the flexible band material 20, the first winding roller 12 is an empty winding shaft. The winding device 300 is activated and the first constant velocity driving roller 8 rotates counterclockwise while the first winding roller 12 rotates clockwise. The second constant speed drive roller 7 does not have power to roll along with the first constant speed drive roller 8 and the first winding roller 12, and the second winding roller 2 does not have power to roll clockwise.

Along with the continuous rolling of the first winding roller (winding roller) 12, the more the flexible belt material 20 winds, the larger the diameter is, and because the rotation angular velocity omega of the flexible belt material is the same as the rotation angular velocity omega of the first constant-speed transmission roller 8, the linear velocity of the first winding roller 12 is larger than that of the first constant-speed transmission roller 8, at the moment, the first tension elastic roller 11 absorbs a small amount of stretching deformation generated under the tension effect of the flexible belt material through elastic force adjustment, and meanwhile, the uniformity of the axial distribution pulling (tension) force of the flexible belt material is ensured, and the flexible belt material is prevented from deviating. In the process, the first constant-speed transmission roller 8 stably controls the linear speed of the coiled material of the whole system, so that the evaporation (sputtering) time of the coated surface of the flexible strip material 20 is stabilized, and the uniform film forming of each part in the moving process of the coiled flexible strip material 20 is ensured.

A length of flexible strip between the first constant speed drive roller 8 and the second constant speed drive roller 7 and a length of flexible strip between the first tension spring roller 11 and the first winding roller 12 are coated. Assuming that the flexible strip between the first constant speed driving roller 8 and the second constant speed driving roller 7 is the front side, the flexible strip between the first tension roller 11 and the first winding roller 12 is the back side by the direction change action of the guiding roller 9, the guiding roller 10 and the first tension roller 11. Thereby realizing the simultaneous double-sided coating of the flexible strip under the condition of one emission source system.

Furthermore, assuming that the length of the flexible strip between the first constant speed driving roller 8 and the second constant speed driving roller 7 has a first length L1, and the length of the flexible strip between the first tension spring roller 11 and the first winding roller 12 has a second length L2, since the length of the flexible strip between the first tension spring roller 11 and the first winding roller 12 is farther from the emission source system 100 than the length of the flexible strip between the first constant speed driving roller 8 and the second constant speed driving roller 7 is from the emission source system 100, the difference between the thicknesses of the film layers on the front and back sides of the flexible strip is small when L2 is larger than L1. And (3) calculating the data of multipoint distribution thickness measurement of the 1.6-meter diameter prototype machine, wherein the L1: l2 is preferably 1:1.1 to 1:1.3, which ensures that the difference in film thickness between the front and back sides of the flexible strip is less than 5%.

Moreover, in order to enable the first constant speed driving roller 8 and the second constant speed driving roller 7 to better bite or position the flexible strip 20 and prevent slipping when the flexible strip 20 is conveyed, preferably, the first constant speed driving roller 8 and the second constant speed driving roller 7 are both pressure type constant speed driving rollers. Referring to fig. 2, fig. 2 is a schematic view of the pressure-type constant-speed driving roller of the present invention, and further, the middle region 81 and the regions adjacent to the two ends 82, 83 of the pressure-type constant-speed driving roller are provided with anti-slip pattern structures 84, such as dense pockmarked anti-slip ring belts.

Referring to fig. 3, fig. 3 is a schematic view illustrating a double-sided reciprocating plating apparatus according to another embodiment of the invention. In the present embodiment, the first winding roller 12 and the second winding roller 2 are both bidirectional elastic damping intermittent sliding rollers, and the first winding roller 12 and the second winding roller 2 have a bidirectional damping function, so that the flexible band 20 can have a certain tension during winding, and overlapping, pinching, or deflection of winding can be prevented. In order to better achieve the winding of the flexible band 20 and the reciprocal winding movement of the winding device, preferably, the winding device 300' further comprises a first tensioning shaft 19 and a second tensioning shaft 15, the first tensioning shaft 19 being arranged between said first winding roller 12 and said first constant speed transmission roller 8 for adjusting the amount of slack taken up by said first winding roller 12; the second tensioning shaft 15 is arranged between the second winding roller 2 and the second constant speed transmission roller 7 and is used for adjusting and absorbing the looseness generated by the second winding roller 2. Also, the first tensioning shaft 19 has the same outer diameter as the second tensioning shaft 15.

As shown in fig. 4A-4D, fig. 4A is a schematic view of a two-way resilient damping roller according to the present invention; FIG. 4B is a side view of a portion of the structure of the dual direction resilient damping roller assembly of the present invention;

FIG. 4C is a schematic view of the stub shaft of FIG. 4B; FIG. 4D is a schematic view of the end face of the first shaft of FIG. 4B; the bidirectional elastic damping sliding type rolling shaft comprises a first shaft 121, wherein the first shaft 121 is provided with two opposite first end surfaces 1211, each first end surface 1211 is provided with at least one pair of v-shaped

spring clip ports

1212 and 1213, and each pair of v-shaped spring clip ports 212741212 and 1213 are symmetrically arranged by taking the circle center of the first end surface 1211 as the center; the sliding roller between the two-way elastic damping further comprises a shaft head 1214 and a v-21274formed spring 1220 corresponding to each first end surface 1211. The diameter of the middle part 1215 of the shaft head 1214 is larger than the size of the two ends of the shaft head 1214, one end 1216 of the shaft head 1214 is connected with the output shaft of the driving mechanism, the other end 1217 of the shaft head 1214 is rotatably matched with the first shaft 121, and the middle part 1215 is provided with a v-21274h-shaped spring clip mouth 1212 and a v-shaped spring fixing part 1218 and a v-1219 corresponding to the v-21274h-shaped spring clip mouth 1212 and the first shaft 1213. One end 1221 of the v-shaped spring 1220 is fixed to the v-shaped spring 21274, and the other end 1222 of the v-shaped spring 1220 is snap-engaged with the corresponding v-shaped spring 21274. As shown in fig. 4D, wherein the other end 1222 of the v-shaped spring 1220 is disengaged from the corresponding v-shaped 21274, the v-shaped spring snap-in port 1212, the first shaft 121 is turned back to the v-shaped 21274, and the other end 1222 of the v-shaped spring 1220 is snapped in with the next v-shaped 21274h-shaped spring snap-in port in the turning direction, when the first tension between the first constant speed transport roller 8 and the first winding roller 7 is greater than the maximum fixed damping of the first winding roller 12. Such as shown in fig. 4B, a v-21274a next v-21274in the direction of rotation of the shaped spring snap opening 1212, a v-21274a shaped spring snap opening 1232; correspondingly, the v-shaped spring clip opening 1213 is next v-shaped 21274in the rotation direction, and the v-shaped spring clip opening is 21274h and the v-shaped spring clip opening 1233. In the present embodiment, four pairs of the 21274; -shaped springs are uniformly disposed on the first end surface 1214 of the first shaft 121 of the two-way elastic damping sliding roller, and thus the 21274; -shaped springs of the two-way elastic damping sliding roller slip once, i.e., 1/8 turns. However, the present invention is not limited thereto, and the number of the 21274; the number of the zigzag springs may be set according to actual requirements.

In addition, the sliding roller between two-way elastic dampers further comprises a shaft cover 1240 for fixing end parts of the sliding roller between two-way elastic dampers. The v-21274, -shaped spring fixing portion 1218 comprises a v-21274, a v-shaped spring pressing hole 12181 and a pressing groove 12182, the bidirectional elastic damping sliding roller further comprises a pressing plate 1230, one end 1221 of the v-21274, -shaped spring 1220 is fixed to the v-21274, -shaped spring pressing hole 12181, the connecting portions of the two ends of the v-21274, -shaped spring 1220 are accommodated in the pressing groove 12182 and are positioned between the pressing plate 1230 and the middle portion 1215 of the shaft head 1214 through the pressing plate 1230.

In addition, the v-21274h-shaped spring is made of tungsten wires, for example, because the tungsten wires have high melting points and can bear high temperature of about 350 ℃, the elastic modulus of the spring is basically not changed at the temperature, and the situation that the winding equipment is blocked in the operation process due to the change of the elastic modulus of the material caused by the influence of the temperature change can be effectively avoided.

Referring to fig. 5A and 5B, fig. 5A is a schematic view of a self-operated tensioning shaft according to the present invention; fig. 5B is a partial cross-sectional view of the self-operated tensioning shaft of fig. 5A. The first tensioning shaft 19 and the second tensioning shaft 15 are self-operated tensioning shafts. The self-operated tensioning shaft comprises a second shaft 191 and two fixing frames 192 which are oppositely arranged, a guide groove 193 is arranged on each fixing frame 192, the guide grooves 193 are arranged in the height direction of the vacuum chamber, two ends of the second shaft 191 are respectively arranged in the two guide grooves 193, and the second shaft 191 can move in the height direction in the guide grooves 193. The end of the second shaft 191 is fixedly provided with a movable structure, the movable structure comprises a ball 194 and a first spring 195 fixedly connected with the ball 194, the ball 194 is slidably arranged in the guide groove 193, and the first spring 195 is embedded in the end of the second shaft 191. The balls 194 can smoothly slide in the guide grooves 193, and the balls 194 are connected with the first spring 195 to ensure the moving range of the balls, thereby preventing the balls from being stuck due to excessive tension. The self-contained tensioning shaft includes a shaft cap 196 to protect and position the end of the second shaft 191. In addition, the first tensioned elastic roller 11 and the second tensioned elastic roller 3 have a pattern structure for preventing slippage, such as a dense pockmarked anti-slippage loop tape, in the middle area and in the areas adjacent to the two ends.

As shown in fig. 6, fig. 6 is a schematic view of a first tension elastic roller according to the present invention; the first tension elastic roller 11 and the second tension elastic roller have similar or identical structures, the first tension elastic roller 11 includes a third shaft 40, a second spring 41, a third spring 42, a first spring box 43 and a second spring box 44, the first spring box 43 and the second spring box 44 are oppositely disposed, the second spring 41 is disposed in the first spring box 43, a first end of the second spring 41 is connected with a first end of the first spring box 43, a first end 401 of the third shaft 40 is disposed in the first spring box 43 and is connected with a second end of the second spring 41; the third spring 42 is disposed in the second spring case 44 with a first end of the third spring 42 connected to a first end of the second spring case 44 and the second end 402 of the third shaft 40 is disposed in the second spring case 44 and connected to a second end of the third spring 42. When the third shaft 40 receives a force in the first direction in which the second spring 41 or the third spring 42 is compressed, the third shaft 40 moves in the first direction, and the second spring 41 and the third spring 42 are compressed.

Referring to fig. 7, fig. 7 is a schematic diagram illustrating the arrangement positions of some components of the double-sided reciprocating film coating apparatus according to the present invention; in order to ensure the film coating effect, the axial center of the second winding roller 2 is away from the bottom 201 of the vacuum chamber 200 by a first height h1, the axial center of the second constant speed transmission roller 7 is away from the bottom of the vacuum chamber by a second height h2, and the first height h1 is smaller than the second height h 2. The first height h1 is greater than 270mm, and the height difference h3 between the axis of the second winding roller 2 and the axis of the second constant speed drive roller 7 is greater than 130 mm. A third distance L3 is provided between the first tension elastic roller 11 and the central axis 101 of the emission source system 100, a fourth distance L4 is provided between the axis of the second constant speed transmission roller 7 and the central axis 101 of the emission source system 100, the third distance is greater than 150mm, and the fourth distance is greater than 350 mm. The edge AA of the emission range of the emission source system 100 and the plane of the bottom of the vacuum chamber 200 form a first angle a, and the first angle a is 30-60 degrees. The position arrangement of each roller can ensure that the coated surface of the flexible strip between the first constant-speed transmission roller 8 and the second constant-speed transmission roller 7 and the coated surface of the flexible strip between the first tension elastic roller 11 and the first winding roller 12 can be in the emission range of an emission source system, and the coating effect is ensured.

Referring to fig. 8, fig. 8 is a block diagram illustrating a power system of a double-sided reciprocating film coating apparatus according to the present invention, wherein the power shafts of the winding device include a first power shaft 50 and a second power shaft 60, the first winding roller 12 and the first constant speed transmission roller 8 are both connected to the first power shaft 50, and the second winding roller 2 and the second constant speed transmission roller 7 are both connected to the second power shaft 60.

In one embodiment, the driving mechanism is a first servo motor, and the first servo motor is hermetically connected with a power shaft of the winding device by using a magnetic fluid. For example, when using servo motors to provide power, each set of winding apparatus is individually provided with a servo motor outside the vacuum chamber. The transmission system in the mode has a simple structure and is convenient to manufacture and assemble.

In another embodiment, the driving mechanism 80 includes a revolution system and a second servo motor, the second servo motor is hermetically connected to the power shaft of the revolution system by using a magnetic fluid, the power shaft of the revolution system includes a first output shaft 71 and a second output shaft 72, the first output shaft 71 is connected to the first power shaft 50, and the second output shaft 72 is connected to the second power shaft 60. The revolution system further includes a clutch 70, the clutch 70 is connected to the first output shaft 71 and the second output shaft 72, and the first output shaft 71 or the second output shaft 72 is controlled to be the main power output shaft by the clutch of the clutch 70. The clutch 70 is clockwise closed, the first power shaft 50 is a main power shaft, and the second power shaft 60 is a secondary power shaft; the clutch 70 is closed anticlockwise, the second power shaft 60 is a main power shaft, and the first power shaft is a 50-secondary power shaft.

In the actual use production process, if the revolution system is adopted to provide power, each set of winding equipment is respectively and independently meshed with the revolution system gear. The revolution system is driven by a second servo motor. The second servo motor is connected with the power shaft of the winding and revolution system in a magnetic fluid sealing mode. The distance between each transverse part of the flexible strip and the emission source is uniformly changed, and the evaporation (splashing) rate and time of the plasma in the vacuum chamber to the flexible strip are consistent according to the calculation of one rotation period (one revolution). Meanwhile, the revolution of each winding device generates uniform disturbance to plasma state substances in the vacuum cavity, so that the thickness of the generated transverse film layer is uniform. Taking the prototype of the vacuum chamber with the diameter of 1.6 meters as an example, the thickness error of the transverse middle position and the edge position of the film layer is not more than 2.4 percent. The rate of qualified products is high.

Moreover, the double-sided reciprocating coating device of the present invention can realize reciprocating winding, and the working principle of reciprocating winding of the double-sided reciprocating coating device of the present invention is described in detail below with reference to fig. 3.

(1) Upward winding: assuming that the second winding roller 2 is an unwinding spool of a full roll of flexible web material, the first winding roller 12 is an empty winding spool.

The winding apparatus is started, the first constant speed driving roller 8 is a power shaft and rotates counterclockwise, and the first winding roller 12 is also a power shaft and rotates clockwise. The second constant speed drive roller 7 does not roll along with the first constant speed drive roller 8 and the first winding roller 12, and the second winding roller 2 does not roll clockwise with a damping belt (for example, a reverse damping force is about 0.5N).

As the first winding roller 12 is continuously wound, the diameter of the flexible belt material increases more and more, since the angular velocity ω of the rotation is the same as the angular velocity ω of the rotation of the first constant speed driving roller 8 (pressure type constant speed driving roller), so that the linear velocity of the first winding roller 12 is greater than the linear velocity of the first constant speed driving roller 8, at this time, the first tensioning shaft 19 is lifted, the first tension elastic roller 11 is compressed in the direction of spring compression, the tension of the flexible belt material 20 is increased in the roller section from the first constant speed driving roller 8 to the first tensioning shaft 19 to the guiding roller 10 to the first tension elastic roller 11 to the first winding roller 12, and when the tension is greater than the fixed maximum damping force of the first winding roller 12 (for example, 1.2N), the damping spring of the first winding roller 12 slips once (we set to 1/8 turns). When slipping, the tension of the flexible belt material is released to an equilibrium state (for example, set to 1N), the first tensioning shaft 19 moves downwards along with gravity, and the first tension elastic roller 11 moves to the right along with the elastic force, so that the tension of the flexible belt material maintains the original equilibrium tension (1N). The thicker the first winding roller 12 is wound, the more frequently the number of slips is until the winding is completed.

In the process, the first constant-speed transmission roller 8 stably controls the linear speed of the flexible strip of the whole system, so that the evaporation (sputtering) time of the coated surface of the flexible strip is stabilized, and each part of the flexible strip can be uniformly formed into a film in the moving process.

As shown in fig. 3, a length of the flexible strip between the second constant speed drive roller 7 and the first constant speed drive roller 8 and a length of the flexible strip between the first tension spring roller 11 and the first winding roller 12 are steamed (splashed). Assuming that the flexible strip between the steamed (splashed) second constant speed driving roller 7 and the first constant speed driving roller 8 is the front side, the flexible strip between the steamed (splashed) first tension elastic roller 11 and the first winding roller 12 is the back side by the action of the first tension shaft 19, the guide roller 10 and the direction changing wheel of the first tension elastic roller 11. Thereby realizing the simultaneous double-sided steaming (splashing) of the flexible strip under the condition of one emission source device.

(2) Downward winding: assuming that the first winding roller 12 is an unwinding spool of a full roll of flexible web material, the second winding roller 2 is an empty winding spool.

The winding device is started, the second constant speed transmission rolling shaft 7 is a power shaft and rotates anticlockwise, and meanwhile, the second winding rolling shaft 2 is also a power shaft and rotates clockwise. The first constant speed drive roller 8 does not power to roll along with the second constant speed drive roller 7 and the second winding roller 2, and the first winding roller 12 does not power to roll clockwise with damping (reverse damping force is about 0.5N).

As the second winding roller 2 is continuously wound, the diameter of the flexible belt material 20 increases as the winding is increased, because the rotational angular velocity ω is the same as the rotational angular velocity ω of the second constant speed driving roller, so that the linear velocity of the second winding roller 2 is greater than the linear velocity of the second constant speed driving roller 7, at this time, the second tensioning shaft 15 is lifted, the second tension elastic roller 3 is compressed in the spring compression direction, the tension of the flexible belt material 20 is increased in the roller section from the second constant speed driving roller 7 to the guiding roller 6 to the second tensioning shaft 15 to the guiding roller 4 to the second tension elastic roller 3 to the second winding roller 2, and when the tension in this section is greater than the fixed maximum damping force of the second winding roller 2 (for example, 1.2N), the damping spring of the second winding roller 2 slips once (we set to 1/8 turns). When slipping, the tension of the flexible belt material is released to an equilibrium state (for example, set to 1N), the second tensioning shaft 15 moves downwards along with gravity, and the second tension elastic roller 3 moves to the right along with the elastic force, so that the tension of the flexible belt material keeps the original equilibrium tension (1N). The thicker the second winding roller 2 is wound, the more frequent the number of slips until the winding is completed.

In the process, the second constant-speed transmission roller 7 stably controls the linear speed of the flexible strip of the whole system, so that the evaporation (sputtering) time of the coated surface of the flexible strip is stabilized, and each part of the flexible strip can be uniformly formed into a film in the moving process.

As seen in fig. 3, the length of flexible strip between the second constant speed roller 7 and the first constant speed roller 8 and the length of flexible strip between the first tension spring roller 11 and the first winding roller 12 are steamed (splashed). Assuming that the flexible strip between the steamed (splashed) second constant speed driving roller 7 and the first constant speed driving roller 8 is the front side, the flexible strip between the steamed (splashed) first tension elastic roller 11 and the first winding roller 12 is the back side through the action of the first tension shaft 19, the guide roller 10 and the direction changing wheel of the first tension elastic roller 1. Thereby realizing the simultaneous double-sided evaporation (splashing) of the coiled material under the condition of one emission source device.

Namely, the double-sided reciprocating coating device can realize double-sided coating of the flexible strip under a single emission source system, can realize reciprocating winding, and can effectively improve the coating efficiency.

Referring to fig. 9A-9C, fig. 9A-9C are schematic views of the double-sided reciprocating coating apparatus of the present invention having two, three and four sets of winding devices, respectively. In fig. 9A, the double-sided reciprocating film coating apparatus includes two sets of winding devices 301, and the two sets of winding devices are oppositely disposed on two opposite sides of the emission source system 100. In fig. 9B, the double-sided coating apparatus comprises three sets of the winding apparatus 302, which are distributed triangularly around the emission source system. In fig. 9C, the double-sided coating device includes four sets of the winding devices 303, and the four sets of the winding devices are distributed in a quadrilateral shape around the emission source system, and the quadrilateral shape may be a parallelogram or a square.

The invention is further illustrated by the following specific examples.

Example 1

The winding device of the invention is configured in 2 sets of cylindrical vacuum chambers, the winding breadth (transverse width) of the flexible strip material is the same as that of the existing single-side winding device, therefore, the production efficiency of the winding device of the embodiment is 4 times of that of the existing single-side winding device in one cylindrical vacuum chamber with the same size, wherein the double-side steaming (splashing) is 2 times, and the 2 sets of winding devices are 2 times.

Example 2

The winding device of the invention is configured in a cylindrical vacuum chamber, the winding width (transverse width) of the flexible strip material is smaller than that of the existing single-sided winding device (the winding width is configured according to the vacuum chamber with the diameter of 1.6 meters, the width dimension of the single-sided winding device of the embodiment is 1.0 meter), therefore, the production efficiency of the winding device of the embodiment is 5 times of that of the existing single-sided winding device in a cylindrical vacuum chamber with the same dimension, wherein the double-sided steaming (splashing) is 2 times, the 3 sets of winding devices are 3 times, the width is 1.0 meter, and the efficiency ratio is 2 x 3 x 1.0/1.2 x 5.

Example 3

The winding device of the invention is configured in a cylindrical vacuum chamber, the winding width (transverse width) of the flexible strip material is smaller than that of the existing single-sided winding device (the width of the single-sided winding device is 0.75 times of the width of the single-sided winding device according to the configuration of the vacuum chamber with the diameter of 1.6 meters), therefore, the production efficiency of the winding device of the embodiment is 6 times of that of the existing single-sided winding device in a cylindrical vacuum chamber with the same size, wherein the double-sided steaming (sputtering) is 2 times, the width of the 4 sets of winding devices is 0.83, and the efficiency ratio is 2 x 4 x 0.83/1.2 x 5.53.

Table 1 comparison of the number of winding plants according to the invention with the productivity of a single-side winding plant

Number of sets allocated	Width length (m)	Wide total length (rice)	Multiple of efficiency	Remarks for note
					1 set (Single-side coil)	1.2	1.2	1	1.2/1.2＝1
1 set (double-sided roll)	1.2	1.2*2＝2.4	2	2.4/1.2＝2
					2 set (double-sided roll)	1.2	1.222＝4.8	4	4.8/1.2＝4
3 sets (double-sided roll)	1.0	1.023＝6	5	6/1.2＝5
					4 sets (double-sided roll)	0.83	0.8324＝6.64	5.53	6.64/1.2＝5.53

In the above embodiments, the vacuum chamber has a diameter of 1.6 m and a height of 1.6 m as an example, and as can be seen from table 1, if 2 sets of the winding apparatus of the present invention are disposed in the vacuum chamber, the efficiency is 4 times that of the current single-sided steaming (sputtering) system, and if 3 sets or 4 sets of the winding apparatus of the present invention are disposed, the efficiency is not less than 5 times that of the single-sided steaming (sputtering) system.

In conclusion, the double-sided reciprocating film coating device is a real single-emission-source double-sided reciprocating film coating device, so that the cost can be reduced, the energy consumption can be reduced, the effective utilization space of the vacuum chamber can be greatly improved, and the phenomenon that the system vacuumizing time is too long due to the increase of the volume of the vacuum chamber is avoided; but also to achieve reciprocating winding. In addition, the constant-speed transmission roller is arranged, so that the problems that the plating time of different sections of the flexible strip is different and the thickness of a film layer is greatly different due to the change of the linear speed of the flexible strip caused by the change of the winding thickness of the flexible strip on the winding roller are solved. The revolution system is used for providing power, so that the winding equipment can realize revolution and autorotation, can reduce the thickness difference of a transversely-coated layer, and effectively controls the error ratio. Therefore, the invention can realize large-scale batch double-sided coating only by a single emission source device and can also realize large-scale batch production of a novel functional nano two-dimensional film material taking a flexible base material as a framework.

The above detailed description of the preferred embodiments is intended to more clearly illustrate the features and spirit of the present invention, and is not intended to limit the scope of the present invention by the preferred embodiments disclosed above. On the contrary, it is intended to cover various modifications and equivalent arrangements included within the scope of the appended claims. The scope of the claims to be accorded the invention is therefore to be accorded the broadest interpretation so as to encompass all such modifications and equivalent arrangements as is known in the art.

Claims

1. A double-sided reciprocating coating device is used for coating a first surface and a second surface of a flexible strip, which are opposite to each other, and is characterized by comprising:

a vacuum chamber;

a radiation source system disposed in the vacuum chamber;

at least one set of winding devices disposed in the vacuum chamber and around the source system, each set of winding devices comprising:

the winding device comprises a first winding roller and a second winding roller, wherein one of the first winding roller and the second winding roller is a winding roller, the other of the first winding roller and the second winding roller is an unwinding roller, and the first winding roller and the second winding roller are a driving roller and a driven roller;

the first tension elastic roller and the second tension elastic roller are used for changing the moving direction of the flexible belt material and adjusting the tension of the flexible belt material by elastic force to avoid deviation;

at least one guiding roller for changing the moving direction of the flexible belt material;

the first constant-speed transmission roller and the second constant-speed transmission roller are mutually a main constant-speed transmission roller and a secondary constant-speed transmission roller and are used for adjusting the constant linear speed of the flexible strip during movement; and

an output shaft of the driving mechanism is connected with a power shaft of the winding device;

the first winding roller, the first tension elastic roller, the first constant-speed transmission roller, the second tension elastic roller and the second winding roller are sequentially arranged on a transmission path of the flexible strip material and are connected through the flexible strip material, and the guide roller is arranged on the transmission path; a first surface of the flexible strip between the first constant-speed conveying roller and the second constant-speed conveying roller faces the emission source system, and a second surface of the flexible strip between the first winding roller and the first tension elastic roller faces the emission source system; and the flexible strip between the first constant-speed conveying roller and the second constant-speed conveying roller and the flexible strip between the first winding roller and the first tension elastic roller are both positioned in the emission range of the emission source system.

2. The double-sided reciprocating plating apparatus of claim 1, wherein the distance from the flexible strip between the first constant velocity roller and the second constant velocity roller to the emission source system is less than the distance from the flexible strip between the first winding roller and the first tension spring roller to the emission source system, the flexible strip between the first constant velocity roller and the second constant velocity roller has a first length, and the flexible strip between the first winding roller and the first tension spring roller has a second length, the second length being greater than the first length.

3. The double-sided reciprocating plating device of claim 2, wherein the ratio of the first length to the second length is 1:1.1-1: 1.3.

4. The double-sided reciprocating plating device of claim 1, wherein the axis of the second winding roller is a first height from the bottom of the vacuum chamber, the axis of the second constant speed driving roller is a second height from the bottom of the vacuum chamber, and the first height is smaller than the second height.

5. The double-sided reciprocating plating device of claim 4, wherein the first height is larger than 270mm, and the height difference between the axis of the second winding roller and the axis of the second constant speed transmission roller is larger than 130 mm.

6. The double-sided reciprocating plating device of claim 4, wherein the first tension elastic roller has a third distance from the central axis of the emission source system, the axis of the second constant speed transmission roller has a fourth distance from the central axis of the emission source system, the third distance is greater than 150mm, and the fourth distance is greater than 350 mm.

7. The double-sided reciprocating plating device of claim 6, wherein the edge of the emission range of the emission source system forms a first angle with the plane of the bottom of the vacuum chamber, and the first angle is 30-60 °.

8. The double-sided reciprocating plating device of claim 1, wherein the first constant-speed transmission roller and the second constant-speed transmission roller are both pressure type constant-speed transmission rollers.

9. The double-sided reciprocating plating device of claim 8, wherein the middle area and the area near the two ends of the pressure type constant-speed conveying roller are provided with anti-slip patterns.

10. The double-sided reciprocating plating device of claim 1, wherein the first winding roller and the second winding roller are both two-way elastic damping sliding rollers.

11. The double-sided reciprocating plating device of claim 10, wherein the bidirectional elastic damping sliding roller comprises a first shaft, the first shaft is provided with two opposite first end faces, each first end face is provided with at least one pair of v-21274; -shaped spring clip ports, and each pair of v-21274; -shaped spring clip ports are arranged symmetrically with the center of the first end face as the center; wherein, the gliding roller still includes corresponding every first terminal surface between two-way elastic damping:

the diameter of the middle part of the shaft head is larger than the sizes of the two ends of the shaft head, one end of the shaft head is connected with an output shaft of the driving mechanism, the other end of the shaft head is rotatably matched with the first shaft, and a v-21274is arranged on the middle part corresponding to the v-21274; and a v-spring fixing part is arranged on the middle part; and

the clip comprises a v-shaped spring, an 21274, a v-shaped spring fixing part and a v-shaped spring fixing part, wherein one end of the v-shaped spring is fixed to the v-shaped spring, and the other end of the v-shaped spring is clamped with the corresponding v-shaped spring clip of the 21274;

when the first tension between the first constant-speed conveying roller and the first winding roller is larger than the maximum fixed damping of the first winding roller, the other end of the v-shaped spring is separated from the corresponding v-shaped 21274, the other end of the v-shaped spring is clamped with the next v-shaped 21274in the rotating direction of the first shaft, and the first shaft rotates to the v-shaped 21274and the other end of the v-shaped spring is clamped with the next v-shaped 21274in the rotating direction of the first shaft.

12. The double-sided reciprocating plating device of claim 11, wherein the v-shaped 21274spring fixing part comprises a v-shaped 21274, a shaped spring pressing hole and a pressing groove, the bidirectional elastic damping sliding roller further comprises a pressing plate, one end of the v-shaped 21274spring is fixed to the v-shaped 21274, the shaped spring pressing hole is formed in the portion, connected with two ends of the v-shaped 21274spring, of the v-shaped 21274is accommodated in the pressing groove and is positioned between the pressing plate and the middle portion of the shaft head through the pressing plate.

13. The double-sided reciprocating plating device of claim 11, wherein four pairs of said v-21274h-shaped springs are uniformly arranged on the first end surface of the first shaft of the bidirectional elastic damping sliding roller.

14. The double-sided reciprocating plating device of claim 11, wherein the v-shaped 21274spring is made of tungsten wire.

15. The double-sided reciprocating plating device of claim 10, wherein the winding apparatus further comprises a first tensioning shaft and a second tensioning shaft, the first tensioning shaft is disposed between the first winding roller and the first constant speed driving roller for adjusting and absorbing the amount of slack generated by the first winding roller; the second tensioning shaft is arranged between the second winding roller and the second constant-speed transmission roller and used for adjusting and absorbing the looseness generated by the second winding roller.

16. The double-sided reciprocating plating device of claim 15, wherein the first tensioning shaft and the second tensioning shaft are self-operated tensioning shafts.

17. The double-sided reciprocating plating device of claim 16, wherein the self-operated tensioning shaft comprises a second shaft and two opposite fixed frames, each fixed frame is provided with a guide groove, the guide grooves are arranged along the height direction of the vacuum chamber, two ends of the second shaft are respectively arranged in the two guide grooves, and the second shaft is movable in the guide grooves along the height direction.

18. The double-sided reciprocating plating device of claim 17, wherein a movable structure is fixedly arranged at the end of the second shaft, the movable structure comprises a ball and a first spring fixedly connected with the ball, the ball is slidably arranged in the guide groove, and the first spring is embedded at the end of the second shaft.

19. The double-sided reciprocating plating device of claim 15, wherein the first winding roller, the second winding roller, the first constant speed driving roller and the second constant speed driving roller have the same outer diameter; the outer diameters of the guide rollers are the same; the outer diameters of the first tension elastic roller and the second tension elastic roller are the same; the first tensioning shaft and the second tensioning shaft have the same outer diameter.

20. The double-sided reciprocating plating device of claim 1, wherein the first tension elastic roller and the second tension elastic roller have anti-slip patterns in the middle area and the areas adjacent to the two ends.

21. The double-sided reciprocating plating device of claim 20, wherein the first tension elastic roller comprises a third shaft, a second spring, a first spring box and a second spring box, wherein the first spring box and the second spring box are oppositely arranged, the second spring is arranged in the first spring box, a first end of the second spring is connected with a first end of the first spring box, and a first end of the third shaft is arranged in the first spring box and is connected with a second end of the second spring; the third spring set up in the second spring box, just the first end of third spring with the first end of second spring box is connected, the second end of third axle set up in the second spring box, and connect the second end of third spring.

22. The double-sided reciprocating plating device of claim 1, wherein the double-sided reciprocating plating device comprises two sets of the winding devices, and the two sets of the winding devices are oppositely arranged at two opposite sides of the emission source system; or the double-sided coating equipment comprises three sets of winding equipment which are distributed in a triangular manner around the emission source system; or the double-sided coating equipment comprises four sets of winding equipment, and the four sets of winding equipment are distributed around the emission source system in a quadrilateral manner.

23. The double-sided reciprocating plating device of claim 1, wherein the power shafts of the winding device comprise a first power shaft and a second power shaft, the first winding roller and the first constant speed transmission roller are both connected with the first power shaft, and the second winding roller and the second constant speed transmission roller are both connected with the second power shaft.

24. The double-sided reciprocating plating device of claim 23, wherein the driving mechanism is a first servo motor, and the first servo motor is hermetically connected with a power shaft of the winding device by adopting magnetic fluid.

25. The double-sided reciprocating plating device of claim 23, wherein the driving mechanism comprises a revolution system and a second servo motor, the second servo motor is hermetically connected with a power shaft of the revolution system by a magnetic fluid, the power shaft of the revolution system comprises a first output shaft and a second output shaft, the first output shaft is connected with the first power shaft, and the second output shaft is connected with the second power shaft.

26. The double-sided reciprocating coating device of claim 25, wherein the revolution system comprises a clutch, the clutch connects the first output shaft and the second output shaft, the clutch is clockwise engaged, the first power shaft is a master power shaft, and the second power shaft is a slave power shaft; the clutch is closed anticlockwise, the second power shaft is a main power shaft, and the first power shaft is a secondary power shaft.

27. The double-sided reciprocating plating device of claim 1, wherein the cross section of the vacuum chamber is circular, square or rectangular.

28. The double-sided reciprocating plating device of claim 1, wherein the emission source system is an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system or an arc evaporation system; and the double-sided reciprocating film coating device also comprises a reaction gas ionization system consisting of an ion source and a plurality of gas pipes.