JP4958010B2 - Thin film laminate manufacturing equipment - Google Patents

Description

  The present invention is applied to a thin film laminate or the like that forms a photoelectric conversion unit of a thin film solar cell that generates power using sunlight by installing it on the roof of a house, the roof of a building, etc. The present invention relates to an apparatus for manufacturing a thin film laminate in which a flexible film substrate is run and a thin film is continuously formed on the flexible film substrate in the film forming chamber.

  As a substrate for a thin film laminate such as a semiconductor thin film, a highly rigid substrate is usually used. However, a flexible substrate such as a resin is also used for a substrate of a photoelectric conversion element used for, for example, a solar cell for convenience such as light weight and easy handling and cost reduction due to mass production. .

As an apparatus for manufacturing a thin film laminate using such a flexible substrate, Patent Document 1 (Japanese Patent Application Laid-Open No. 2005-72408) discloses a strip-like structure in a plurality of continuously formed film forming chambers. The film is formed on the surface of the substrate stopped in each film formation chamber through the flexible substrate, and then the operation of transporting the flexible substrate to the position of the next film formation chamber is repeated. There has been provided a film forming apparatus in which a plurality of thin films having different properties are stacked on a substrate.
JP 2005-72408 A

As such a film forming apparatus, there are a type in which the width direction of the belt-like flexible substrate is held in the horizontal direction and the belt-like flexible substrate is transported in the horizontal direction to form a film, and a belt-like flexible substrate There is a type in which film formation is performed by holding the width direction in the vertical direction and transporting the belt-like flexible substrate in the horizontal direction.
The latter type has an advantage over the former type in that the surface of the strip-shaped flexible substrate is less likely to be contaminated. However, when the number of film forming chambers increases, the flexibility increases due to gravity and the elongation of the flexible substrate. There is a problem that wrinkles occur on the surface of the conductive substrate, the flexible substrate meanders in the width direction, or hangs downward.

In order to solve such a problem, an intermediate chamber is disposed between two film forming chambers located at the center of a plurality of film forming chambers, and contacts the substrate surface over the entire surface in the width direction of the substrate. It has been proposed to provide side end position control (EPC) rollers.
However, since the film formation is usually performed at a relatively high temperature, when such a stainless steel EPC roller is disposed between the film formation chambers, the flexible substrate is rapidly cooled by the EPC roller, and the wrinkles are generated. There are problems such as occurring.

  The present invention has been made in view of such a situation, and an object of the present invention is to convey the strip-shaped flexible substrate over a long distance in the horizontal direction while directing the width direction of the strip-shaped flexible substrate in the vertical direction. However, an apparatus for manufacturing a thin film laminate that can prevent wrinkles from occurring on the surface of the strip-shaped flexible substrate, meandering the strip-shaped flexible substrate in the width direction, or drooping downward. Is to provide.

  In order to solve the above-described problems of the prior art, the present invention provides an apparatus for manufacturing a thin film laminate by laminating a plurality of thin films on the surface of a strip-shaped flexible substrate, the width of the strip-shaped flexible substrate being The belt-like flexible substrate is arranged continuously along the carrying direction of the belt-like flexible substrate, and a substrate carrying means for carrying the belt-like flexible substrate in the horizontal direction so that the direction is vertical. In a manufacturing apparatus for a thin film stack including a plurality of film forming chambers for forming a film on a surface of a substrate, the thin film stack body is disposed between each of the plurality of film forming chambers, A plurality of pairs of spiral rollers sandwiching both end surfaces are provided.

In the said invention, Preferably it comprises as follows.
(1) Two or more pairs of spiral rollers sandwiching the upper end are continuously provided between two film forming chambers located in the center of the plurality of film forming chambers.
(2) The spiral roller has a form of a spiral groove or protrusion formed from an end of the roller, and the inclination angle of the spiral groove or protrusion with respect to a line perpendicular to the conveying direction is 1 ° to 6 °. It is in the range of °.

As described above, according to the present invention, a thin film laminate is manufactured by laminating a plurality of thin films on the surface of a strip-shaped flexible substrate, and the width direction of the strip-shaped flexible substrate is a vertical direction. In this way, the substrate transport means for transporting the belt-like flexible substrate in the horizontal direction and the belt-like flexible substrate are continuously arranged along the transport direction of the belt-like flexible substrate, and are formed on the surface of the belt-like flexible substrate. A plurality of film forming chambers, and a plurality of pairs of spiral rollers disposed between each of the plurality of film forming chambers and sandwiching both end surfaces on the upper side in the vertical direction of the belt-like flexible substrate. Therefore, when the strip-shaped flexible substrate is transported in the horizontal direction, a force for lifting the strip-shaped flexible substrate is generated, and the position of the strip-shaped flexible substrate in the vertical direction is maintained with high accuracy. Can do.
Thereby, even if the belt-like flexible substrate is transported over a long distance through a plurality of film formation chambers, wrinkles occur in the belt-like flexible substrate, the belt-like flexible substrate meanders in the width direction, It is possible to prevent the belt-like flexible substrate from hanging down.

  Further, the book film laminate manufacturing apparatus according to the present invention includes a pair of spiral rollers sandwiching the upper end portion between two film forming chambers located in the center of the plurality of film forming chambers. Two or more pairs in succession, or having a spiral groove or protrusion formed from the end of the roller, and the inclination angle of the spiral groove or protrusion with respect to a line perpendicular to the conveying direction is: Since it is in the range of 1 ° to 6 °, the effect of preventing wrinkles of the strip-shaped flexible substrate, meandering in the width direction of the strip-shaped flexible substrate, and drooping down of the strip-shaped flexible substrate is further enhanced. be able to.

Hereinafter, the manufacturing apparatus of the thin film laminated body of this invention is demonstrated still in detail based on the embodiment with reference to drawings.
In addition, although it does not mention in particular here about the specific structure of a thin film laminated body, this invention is applied to manufacture of thin film laminated bodies, such as a semiconductor thin film, such as a photoelectric conversion element for solar cells, and organic EL, for example. be able to.

  FIG. 1 is a plan view schematically showing an embodiment of a thin film laminate manufacturing apparatus according to the present invention. FIG. 2 is a front view taken along line AA in FIG. The drawings are deformed and are not drawn to scale.

  As shown in FIG. 1 and FIG. 2, the apparatus for manufacturing a thin film laminate (for example, a thin film photoelectric conversion element) of this embodiment includes an unwinding unit 10 that sends out a strip-shaped flexible substrate 1, and a strip-shaped flexible substrate 1. A meandering control unit 20 for controlling meandering, a guide unit 30 for defining the transport direction of the strip-shaped flexible substrate 1, a film forming unit 40 for laminating a plurality of thin films on the strip-shaped flexible substrate 1, and a strip-shaped flexible substrate The transport unit 60 that controls transport of the conductive substrate 1 and a winding unit 70 that winds the strip-shaped flexible substrate 1 on which the thin film laminate is formed are mainly configured. In addition, the strip | belt-shaped flexible board | substrate 1 is conveyed by the horizontal direction, while the width direction faces a perpendicular direction.

The unwinding section 10 includes an unwinding core 11 that feeds out the band-shaped flexible substrate 1 from the original roll on which the band-shaped flexible substrate 1 is wound in a roll shape, and a band-shaped flexible member that is fed out from the unwinding core 11 Tension rollers 12 and 13 for controlling the tension of the flexible substrate 1 are provided. The unwinding roller 11 and the tension rollers 12 and 13 are installed such that the axial direction is the vertical direction, and the tension rollers 12 and 13 are disposed on the downstream side of the unwinding core 11.
Each roller described below is also installed so that the axial direction is the vertical direction unless otherwise specified.

  The meander control unit 20 includes three side end position control (EPC) rollers 21 to 23 to prevent the belt-like flexible substrate 1 from the unwinding unit 10 from meandering in the vertical direction, that is, the width direction. Is provided. These EPC rollers 21 to 23 have a roller surface wider than the width of the strip-shaped flexible substrate 1.

  The guide unit 30 is provided with guide rollers 31 and 32 that receive the strip-shaped flexible substrate 1 from the meandering control unit 20 and change the traveling direction of the strip-shaped flexible substrate 1 to the film forming unit 40 by changing it by 90 °. Yes. The guide roller 32 on the downstream side is provided with an EPC meandering sensor (not shown) that detects the side end position of the strip-shaped flexible substrate 1. The EPC meandering sensor can be appropriately provided in the transport path of the strip-shaped flexible substrate 1 as necessary.

In the film forming unit 40, a plurality of film forming chambers 42 a to 42 m are arranged in a straight line in order to sequentially stack thin films on the surface of the strip-shaped flexible substrate 1. A pair of spiral rollers 44a to 44m sandwiching the belt-like flexible substrate 1 are provided on the front side of the substrate entrance of these film forming chambers 42a to 42m, respectively.
As shown in FIG. 2, the spiral rollers 44 a to 44 m are arranged at both the upper end portion and the lower end portion of the strip-like flexible substrate 1 in the vertical direction. As will be described in detail later, the spiral rollers 44a to 44m are basically horizontally installed or inclined with respect to the horizontal direction as shown in FIG.

FIGS. 1 and 2 show thirteen film forming chambers 42a to 42m. The center positions of the plurality of film forming chambers, that is, the seventh film forming chamber 42g and the eighth film forming chamber are shown. A plurality of pairs of spiral rollers 52a and 52b are provided continuously between 42h. In this way, by providing a plurality of pairs of spiral rollers 52a and 52b continuously at the center position, it is possible to perform mass support and conveyance accuracy adjustment of the film substrate.
Also, a plurality of pairs of spiral rollers 52c and 52d are continuously provided outside the substrate outlet of the last film forming chamber, that is, the thirteenth film forming chamber 42m. As described above, by providing a plurality of pairs of spiral rollers 52c and 52d continuously after the last film formation chamber 42m, it is possible to perform mass support and conveyance accuracy adjustment of the film substrate.

The transport unit 60 is provided with a hood roller 61 that changes the traveling direction of the strip-shaped flexible substrate 1 from the film forming chamber 40 by 90 °, and winding rolls 62 and 63 that send the strip-shaped flexible substrate 1 in the transport direction. The winding rolls 62 and 63 are arranged on the downstream side of the hood roller 61.
The winding unit 70 includes tension rollers 71 and 72 for controlling the tension of the strip-shaped flexible substrate 1 and a winding core 71 that winds the strip-shaped flexible substrate 1 on which the thin film laminate is formed in a roll shape. The tension rollers 71 and 72 are disposed on the upstream side of the winding core 71.

Next, the structure of the film forming chamber 42 will be described in more detail.
Since a plurality of thin films having different properties are laminated on the surface of the strip-shaped flexible substrate 1, the structure of each film forming chamber varies depending on the type of thin film to be formed. Here, an amorphous silicon layer is formed by plasma CVD. A film formation chamber for film formation will be described. Even when other types of thin films are formed, the same structure can be adopted as long as the film forming chamber is hermetically sealed.

FIG. 3A is a cross-sectional plan view schematically enlarging the film formation chamber 42 shown in FIG. FIG. 3B is a front view as seen from the line BB in FIG.
As shown in FIGS. 3A and 3B, the walls 80 a and 80 b of the film forming chamber 42 having a U-shaped cross section are arranged on both sides of the belt-like flexible substrate 1 so as to face each other. These walls 80 a and 80 b are configured to move until the tip of the wall is in close contact with the surface of the strip-shaped flexible substrate 1 during film formation. A sealing material (not shown) for attaching the inside of the film forming chamber 42 to the airtight state is attached to the tip of the wall 80 (80a, 80b).

A high voltage electrode 81 and a ground electrode 82 equipped with a substrate heater are installed in the inner space of the film forming chamber 42 so as to face each other with the belt-like flexible substrate 1 interposed therebetween. An exhaust pipe 83 that exhausts the inside of the film forming chamber 42 to make a vacuum atmosphere is provided on the wall 80 b constituting the film forming chamber 42.
Further, an introduction pipe (not shown) for introducing a reactive gas such as silane to be decomposed by plasma generated between the high voltage electrode 81 and the ground electrode 82 to form a thin film is formed on the wall 80 of the film forming chamber 42. Is provided.

  The length in the width direction of the high-voltage electrode 81 and the ground electrode 82 is such that the strip-like flexibility is formed so that a blank 90 is formed at both ends of the strip-like flexible substrate 1 as shown in FIG. It is shorter than the width of the substrate 1. Then, a pair of spiral rollers 44B and 44B1 are arranged on the upper side and the lower side of the strip-like flexible substrate 1 so that the strip-like flexible substrate 1 is sandwiched between the margins 90. By sandwiching the upper and lower portions of the margin 90 where the thin film is not formed between the spiral rollers 44B and 44B1, wrinkles occur in the portion where the thin film of the strip-shaped flexible substrate 1 is formed, or the formed thin film is damaged. Can be prevented.

The upper spiral roller 44B is basically horizontally installed with respect to the direction of conveyance of the belt-shaped flexible substrate 1 (that is, the horizontal direction), but may be inclined.
As shown in FIG. 5, a spiral groove formed from the end of the roller with reference to the end face of the spiral roller 44B between the rotational direction of the upper spiral roller 44B and the transport direction of the belt-like flexible substrate 1 When the belt-shaped flexible substrate 1 is transported in the horizontal direction by having 44x or the protrusion, a force for lifting the belt-shaped flexible substrate 1 upward is generated, and the position of the belt-shaped flexible substrate 1 in the vertical direction is generated. Can be maintained with high accuracy.

  The inclination angle θsp of the groove 44x formed on the spiral roller 44B is preferably in the range of 0.1 ° to 6 °. As the inclination angle θsp of the spiral roller groove 44x is larger, the force for lifting the belt-shaped flexible substrate 1 becomes higher. However, when the inclination angle θsp of the groove 44x exceeds 6 ° or exceeds the static frictional force of the roller itself, the belt-like shape is increased. The force for lifting the flexible substrate 1 hardly improves.

The lower spiral roller 44 </ b> B <b> 1 is basically horizontally installed with respect to the conveyance direction (that is, the horizontal direction) of the belt-shaped flexible substrate 1, but may be inclined.
By having a spiral groove 44x or a protrusion formed from the end of the roller with reference to the end face of the spiral roller 44B1, the belt-like flexible substrate 1 is transported when the belt-like flexible substrate 1 is conveyed in the horizontal direction. When the belt-like flexible substrate 1 is transported in the horizontal direction, it is possible to prevent wrinkles from being generated on the surface of the belt-like flexible substrate 1. θsp is preferably in the range of 0.1 ° to 6 °.

Next, the configuration of the spiral roller 44B and its attached devices will be described.
FIG. 4 is a perspective view schematically showing an example of the upper spiral roller 44B and its attached device. FIG. 5 is a front view of the spiral roller of FIG.
As shown in FIGS. 4 and 5, the pair of spiral rollers 44 </ b> B is rotatably provided at the lower end of the roller fixing shaft 91. The upper end of one roller fixing shaft 91 is fixed to the lower surface of the roller fixing portion 92, and the upper end of the other roller fixing shaft 91 is fixed to the lower surface of the roller movable portion 93.

A rotation support portion 94 is provided on the upper surface of the roller fixing portion 92, and one end of a U-shaped handle portion 95 having an opening facing downward is provided on the upper surface of the roller movable portion 93. The other end of the handle portion 95 is supported so as to be rotatable about a rotation support portion 94 and a hinge 96.
Then, by rotating the roller movable portion 93 with the hinge 96 as a fulcrum, the belt-like flexible substrate 1 can be sandwiched between the pair of spiral rollers 44B, or the distance between the spiral rollers 44B can be increased. ing. The rotation support portion 94 and the other end side of the handle portion 95 are connected by a tension spring 96b, and when the belt-like flexible substrate 1 is sandwiched between a pair of spiral rollers 44B, the tension spring 96b. Is configured to be the shortest.

The pressure applied by the spiral roller 44B to the belt-like flexible substrate 1 can be adjusted by the strength of the tension spring 96b. The applied pressure of the spiral roller 44B is preferably 1 to 40N. Further, when the pressure applied to the spiral roller 44B is lowered to 1 to 4N, even when the spiral spiral roller angle θsp of the spiral roller 44B is as large as 40 or more, for example, the force for lifting the belt-shaped flexible substrate 1 can be reduced.
On the other hand, when the pressing force of the spiral roller 44B is increased to 20 to 40 N, even when the spiral roller angle θsp of the spiral roller 44B is as small as 2 ° or less, for example, the force for lifting the belt-shaped flexible substrate 1 can be increased. it can.

One end of a lever 98 is attached to one end side of the handle portion 95 so as to be rotatable about a hinge 97 as a fulcrum. The rotation axis of the hinge 97 is arranged perpendicular to the rotation axis of the hinge 96. The roller fixing portion 92 is fixed to the surface of the fixing plate 90, and a bar 99 is provided on the surface of the fixing plate 90 so as to protrude to the handle portion 95.
The bar 99 is positioned on the track of the other end of the lever 98 when the handle portion 95 is rotated with the hinge 96 as a fulcrum. That is, the bar 99 contacts the other end of the lever 98 and is in a position that prevents the handle portion 95 from rotating. Further, when the lever 98 is rotated with the hinge 97 as a fulcrum and the other end of the lever 98 is released from the bar 99, the handle portion 95 can be freely rotated.
As shown in FIG. 5, the spiral roller 44 </ b> B is installed such that the rotation direction of the roller is horizontal with respect to the transport direction of the belt-like flexible substrate 1.

In the above, the configuration of the upper spiral roller 44B and its attachment device has been taxed, but the lower spiral roller 44B1 and its attachment device are also upside down, but can have the same configuration. Further, the spiral rollers provided in a plurality of pairs in succession can also have the same configuration.
In the spiral rollers 44B and 44B1, the contact surface with the belt-like flexible substrate 1 is preferably made of a heat-resistant rubber such as silicon rubber or fluorine, or a synthetic resin such as PTFE or polyimide. Moreover, even if it is the raw material which gave chromium plating to stainless steel or iron, a predetermined performance is obtained.

  Further, the manufacturing apparatus of the present embodiment is provided with a control means (not shown) for controlling the transport and stop of the belt-like flexible substrate 1 and the movement of the walls 80a and 80b of each film forming chamber 42. This control means can perform control to change the spiral rollers 44B and 44B1 and the spiral roller angle θsp according to the degree of meandering of the belt-like flexible substrate 1 as necessary.

  In the manufacturing apparatus having the above configuration, first, the winding core 71 is rotated, and the belt-like flexible substrate 1 passing through the first to thirteenth film forming chambers 42 a to 42 m is transferred from the unwinding core 11 to the winding core 71. Transport horizontally in the direction of. When film formation is performed, the winding core 71 is stopped to stop the belt-like flexible substrate 1, and then the walls 80 a and 80 b of the film-forming chambers 42 a to 42 m are connected to the belt-like flexible substrate 1. The film forming chamber is moved until it is in close contact with the inside of the film forming chamber. Then, a thin film is formed on the surface of the strip-shaped flexible substrate 1 in each film forming chamber.

After film formation, the walls 80a and 80b of the film formation chamber are returned to their original positions to release the airtight state. The winding core 71 is rotated again, and the belt-shaped flexible substrate 1 is conveyed to the position of the adjacent film forming chamber. Then, the film-forming chamber is again air-tightly formed on the strip-shaped flexible substrate 1 in a stopped state.
Thus, by repeatedly carrying the strip-shaped flexible substrate 1 and forming a film, it is possible to manufacture a thin film laminate on the surface of the strip-shaped flexible substrate 1.

As described above, the belt-shaped flexible substrate 1 moves a long distance from the first film formation chamber 42a to the thirteenth film formation chamber 42m. However, the belt-shaped flexible substrate 1 is positioned at both ends of this section. When supported only by the guide roller 32 of the section 30 and the feed roller 61 of the transport section 60, it may hang down due to gravity or the extension of the strip-shaped flexible substrate 1, or meander in the width direction of the strip-shaped flexible substrate 1. Problem arises.
However, according to the manufacturing apparatus of the present embodiment, the upper ends of the strip-shaped flexible substrate 1 are formed by the spiral rollers 44a to 44m provided on the front side of the substrate entrances of the first to thirteenth film forming chambers 42a to 42m. Therefore, it is possible to prevent the strip-shaped flexible substrate 1 from drooping downward, and the strip-shaped flexible substrate 1 has a long distance from the first film forming chamber 42a to the thirteenth film forming chamber 42m. Even if is moved, meandering and wrinkles can be prevented.

  In addition, although the stepping roll type film-forming apparatus which repeats conveyance and a stop of the strip | belt-shaped flexible board | substrate 1 was demonstrated, this invention makes strip | belt-shaped flexible, directing the width direction of the strip | belt-shaped flexible board | substrate 1 to a perpendicular direction. Any device that transports the conductive substrate 1 over a long distance in the horizontal direction can be widely applied without being limited to the stepping roll method.

  While the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made based on the technical idea of the present invention.

It is a top view which shows typically the manufacturing apparatus of the thin film laminated body which concerns on embodiment of this invention. It is the front view seen from the AA line of FIG. (A) is the cross-sectional top view which expanded the film-forming chamber shown in FIG. 1 typically, (B) is the front view seen from the BB line of (A). It is a perspective view which shows typically an example of a spiral roller and its attachment apparatus. It is a front view which shows the spiral roller of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Strip | belt-shaped flexible substrate 10 Unwinding part 11 Unwinding core 20 Drive part 30 Guide part 40 Film-forming part 42 Film-forming chamber 44, 44B, 44B1 Spiral roller 44x Spiral groove | channel or protrusion 60 Conveying part 70 Winding part 81 High voltage electrode 82 Ground electrode 91 Roller fixing shaft 92 Roller fixing portion 93 Roller movable portion 94 Rotation support portion 95 Handle portion 96, 97 Hinge 98 Lever 99 Bar

Claims (3)

An apparatus for manufacturing a thin film laminate by laminating a plurality of thin films on a surface of a strip-shaped flexible substrate, wherein the strip-shaped flexible substrate is arranged such that a width direction of the strip-shaped flexible substrate is a vertical direction. And a plurality of film forming chambers that are continuously arranged along the transport direction of the strip-shaped flexible substrate and perform film deposition on the surface of the strip-shaped flexible substrate. In a manufacturing apparatus for a thin film laminate,
An apparatus for manufacturing a thin film laminate, comprising a plurality of pairs of spiral rollers arranged between each of the plurality of film forming chambers and sandwiching both ends of the upper end of the belt-like flexible substrate in the vertical direction.   Two or more pairs of spiral rollers sandwiching the upper end between the two film forming chambers located in the center of the plurality of film forming chambers are continuously installed. The apparatus for manufacturing a thin film laminate according to claim 1.   The spiral roller has a shape of a spiral groove or protrusion formed from an end of the roller, and an inclination angle with respect to a line perpendicular to the conveying direction of the spiral groove or protrusion is in a range of 1 ° to 6 °. The apparatus for producing a thin film laminate according to claim 1 or 2, wherein

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