CN106699150B - 一种低温烧结低介c0g微波介质材料及其制备方法 - Google Patents
一种低温烧结低介c0g微波介质材料及其制备方法 Download PDFInfo
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- 239000003989 dielectric material Substances 0.000 title claims abstract description 25
- 238000009766 low-temperature sintering Methods 0.000 title claims abstract description 17
- 238000002360 preparation method Methods 0.000 title claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000005245 sintering Methods 0.000 claims abstract description 19
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 18
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 18
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 18
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 18
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 17
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910016064 BaSi2 Inorganic materials 0.000 claims abstract description 10
- 229910052844 willemite Inorganic materials 0.000 claims abstract description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims abstract description 7
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 7
- 239000004615 ingredient Substances 0.000 claims abstract description 7
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 claims abstract description 7
- 229910052808 lithium carbonate Inorganic materials 0.000 claims abstract description 7
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 7
- 239000000654 additive Substances 0.000 claims abstract description 6
- 230000000996 additive effect Effects 0.000 claims abstract description 6
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000498 ball milling Methods 0.000 claims description 18
- 238000001035 drying Methods 0.000 claims description 11
- 238000007873 sieving Methods 0.000 claims description 11
- 238000001354 calcination Methods 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229910003641 H2SiO3 Inorganic materials 0.000 claims description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Inorganic materials [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010792 warming Methods 0.000 claims description 2
- 239000011667 zinc carbonate Substances 0.000 claims description 2
- 229910000010 zinc carbonate Inorganic materials 0.000 claims description 2
- 229910016066 BaSi Inorganic materials 0.000 claims 1
- 229910052909 inorganic silicate Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract description 2
- 239000006185 dispersion Substances 0.000 abstract description 2
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract description 2
- 229910052573 porcelain Inorganic materials 0.000 abstract description 2
- 239000000843 powder Substances 0.000 abstract description 2
- 238000000280 densification Methods 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
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- 238000004321 preservation Methods 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
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- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
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Abstract
本发明涉及微波介质材料技术领域,具体涉及一种低温烧结低介电常数C0G特性微波介质材料,主料为BaSi2O5;副料为Zn2SiO4;改性添加剂为Al2O3、MnO、CeO2、CoO、Nb2O5、ZrO2的一种或多种;烧结助剂为B2O3、SiO2、ZnO、Li2CO3、MgO中的一种或多种。能够在较低温度(850~950℃)下烧结,陶瓷粉具备成分均一、粒度分布窄、分散性好、成型性工艺好,烧结后瓷体致密、无杂质和缺陷少,其相对介电常数在10±2系列变化、室温损耗角正切<4×10‑4、绝缘电阻>1×1012Ω、容量温度特性稳定、品质因数Q·f值高。
Description
技术领域
本发明涉及微波介质材料技术领域,具体涉及一种低温烧结低介C0G微波介质材料及其制备方法。
背景技术
近年来,随着微波通讯技术的发展,对元器件的小型化、集成化以及模块化的要求也越来越迫切。低温共烧陶瓷LTCC以其优异的电学、机械、热学及工艺特性,已经成为电子器件模块化的主要技术之一,要实现无源元件的集成化、模块化,必须开发新的LTCC材料体系。LTCC技术必须满足以下几点要求:
首先烧结温度要低于960℃以便与银电极共烧,拥有一个低的介电常数避免信号传输延迟,其次需要拥有高的Q·f值以便满足工作频率的要求,最后温度系数要接近于0实现系数的稳定性。
射频微波多层片式电容器广泛应用于移动通讯的基站,直放站,军用电台、雷达,广播电视发射机,MRI磁共振医疗设备,大功率激光设备,同步加速器,高速铁路应答等设备,设备、微波多层片式瓷介电容器的特点是高Q值、低ESR、高FER(自谐振频率)、高可靠。
通常εr、Q·f和τf之间存在一定相互制约关系,高介电常数与高Q·f和低τf是相互矛盾的,器件的小型化要求材料的介电常数能够提高,材料的Q·f值将会降低,τf绝对值也会随之而增大。电容器的损耗由两部分组成,即介质损耗和金属损耗。30MHz以下介质损耗占主导地位,30MHz以上由于“趋肤效应”金属损耗变大,逐渐占主导地位。为了获得高频下更低的ESR,必须降低金属损耗,因此现在开始采用方阻更低的Ag或Cu作内部电极材料,由于Ag的熔点低(961℃),必须要求陶瓷的烧结温度降低到950℃以下。因此低温烧结的高Q值、低介电常数介质材料成为材料研发工作者的一个热点研发方向。
发明内容
针对上述问题中存在的不足之处,本发明提供一种低温烧结低介电常数C0G特性微波介质材料。
为实现上述目的,本发明提供一种低温烧结低介电常数C0G特性微波介质材料,包括:主料、副料、改性添加剂和烧结助剂;其中,
所述主料为BaSi2O5;
所述副料为Zn2SiO4;
所述改性添加剂为Al2O3、MnO、CeO2、CoO、Nb2O5、ZrO2的一种或多种;
所述烧结助剂为B2O3、SiO2、ZnO、Li2CO3、MgO中的一种或多种。
上述的低温烧结低介电常数C0G特性微波介质材料中,优选为,各成分摩尔份数为:
所述BaSi2O5为65~85份;
所述Zn2SiO4为2~10份;
所述Al2O3为0~4份;
所述MnO为0.1~0.5份;
所述CeO2为0~0.5份;
所述CoO为0.1~1份;
所述Nb2O5为0~5份;
所述ZrO2为0~4份;
所述烧结助剂共6~20份。
上述的低温烧结低介电常数C0G特性微波介质材料中,优选为,各成分摩尔份数为:
所述BaSi2O5为70~75份;
所述Zn2SiO4为4~8份;
所述Al2O3为2份;
所述MnO为0.3份;
所述CeO2为0.3份;
所述CoO为0.5份;
所述Nb2O5为2份;
所述ZrO2为2份;
所述烧结助剂共10~15份。
一种低温烧结低介电常数C0G特性微波介质材料的制备方法,包括如下步骤:
将BaO的前驱体、SiO2的前驱体按比例混合,进行球磨、烘干、过筛后在1000℃~1100℃煅烧2.5~5小时后获得BaSi2O5;
将ZnO的前驱体、SiO2的前驱体按比例混合,进行球磨、烘干、过筛后在1150℃~1250℃煅烧2.5~5小时后获得Zn2SiO4;
所述BaSi2O5与所述Zn2SiO4,所述Al2O3、所述MnO、所述CeO2、所述CoO、所述Nb2O5、所述ZrO2的一种或多种,由所述B2O3、所述SiO2、所述ZnO、所述Li2CO3、所述MgO中的一种或多种,按比例混合、球磨、烘干、过筛后获得微波介质材料;
将微波介质材料造粒后在4~6MPa压力下制成坯体,再将坯体排胶,排胶温度为500℃、升温速率为2℃/min、保温1小时,再以3~8℃/min升温至850~950℃对排胶后的坯体进行烧结保温2~5小时后随炉自然冷却。
上述的低温烧结低介电常数C0G特性微波介质材料的制备方法中,优选为,
所述BaO的前驱体为BaO、Ba(OH)2、BaCO3中的一种或多种;
所述SiO2的前驱体为SiO2、H2SiO3中的一种或两种;
所述ZnO的前驱体为ZnO、Zn(OH)2、ZnCO3中的一种或多种。
上述的C0G微波介质材料的制备方法中,优选为,
将所述B2O3、所述SiO2、所述ZnO、所述Li2CO3、所述MgO中的一种或多种按比例混合,进行球磨、烘干、过筛后在500~700℃煅烧2.5~5小时后获得烧结助剂。
在上述技术方案中,本发明实施例提供的低温烧结低介电常数C0G特性微波介质材料及制备方法,与现有技术相比具有以下优点:
1、能够在较低温度(850~950℃)下烧结,陶瓷粉具备成分均一、粒度分布窄、分散性好、成型性工艺好,烧结后瓷体致密、无杂质和少缺陷,其相对介电常数在8~12系列变化、室温损耗角正切<4×10-4、绝缘电阻>1×1012Ω、在-55~125℃范围内电容温度系数为0±30ppm/℃、容量温度特性稳定、品质因数Q·f值很高。
2、此C0G微波介质材料制备方法及工艺简单、设备成熟及投入成本较低、易于实现工业化生产,可快捷、稳定实现从材料配方向微波介质材料产品批量生产转化。
具体实施方式
下面结合具体实施方式对本发明做进一步说明。应该强调的是,下述说明仅仅是示例性的,而不是为了限制本发明的范围及其应用。
(1)主料的制备
主料BaSi2O5的制备方法:将纯度均为99.0%以上的BaCO3 0.1mol、SiO20.2mol混合,加入氧化锆球和去离子水进行球磨混合,球磨时间8小时,在120℃烘5小时至干燥,过40目筛后,在1050±50℃煅烧混合物2.5h,即得主成分BaSi2O5。
(2)副料的制备
副料Zn2SiO4的制备方法:将纯度均为99.0%以上的ZnO 0.2mol、SiO20.1mol混合,加入氧化锆球和去离子水进行球磨混合,球磨时间8小时,在120℃烘5小时至干燥,过40目筛后,在1200±50℃煅烧混合物2.5h,即得主成分Zn2SiO4。
(3)烧结助剂的制备
LBS烧结助剂的制备方法:按质量比例为1.5:1:1称取原料Li2CO3、H3BO3、SiO2混合,加入氧化锆球进行球磨,球磨时间为6小时,在80℃烘10小时至干燥,过100目筛后,在600℃煅烧4小时后获得。
LMZBS烧结助剂的制备方法:按质量比例为2.5:2.5:2:1:1称取原料Li2CO3、Mg(OH)2、H3BO3、ZnO、SiO2混合,加入氧化锆球进行球磨,球磨时间为6小时,在80℃烘10小时至干燥,过100目筛后,在560℃煅烧4小时后获得。
(4)配方设计及圆片性能
本低温烧结C0G特性微波介质材料配方如表1所示,按设计比例在主/副料中添加烧结助剂和改性添加剂,加入氧化锆球进行球磨,球磨时间为5小时,在120℃烘6小时至干燥,过100目筛后获得。
微波介质陶瓷材料的制备:将微波介质材料加入6.5wt%的PVA(聚乙烯醇)水溶液粘合造粒;分别在4Mpa和6MPa压力下压制成圆片和圆柱坯体,将坯体排胶,排胶温度为500℃、升温速率为2℃/min、保温1小时,去除粘合剂;将排胶后的坯体在850~950℃下烧结,保温2~5小时,随炉自然冷却降至室温,制得微波介质陶瓷材料。
将烧制完的圆片两表面涂覆银浆、烧制银电极,制成电容器后测试其室温电学性能,结果见表2:相对介电常数10±2,损耗角正切<4×10-4,绝缘电阻>1×1012Ω,在-55~125℃范围内电容温度系数为-30~30ppm/℃。
所述圆柱样品的直径为8.4±0.5mm,厚度为5.0±1.0mm,圆柱样品的Q·f值为18296~38157GHz。
表1低温烧结C0G特性微波介质材料配方(mol%)
表2微波介质陶瓷材料的性能
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。
Claims (4)
1.一种低温烧结低介电常数C0G特性微波介质材料,其特征在于,包括:主料、副料、改性添加剂和烧结助剂;其中,
所述主料BaSi2O5为65~85份;
所述副料Zn2SiO4为2~10份;
所述改性添加剂为Al2O3 0~4份、MnO 0.1~0.5份、CeO2 0~0.5份、CoO 0.1~1份、Nb2O5 0~5份、ZrO2 0~4份;
所述烧结助剂为B2O3、SiO2、ZnO、Li2CO3、MgO中的一种或多种,所述烧结助剂共6~20份。
2.一种如权利要求1所述的低温烧结低介电常数C0G特性微波介质材料的制备方法,其特征在于,包括如下步骤:
将BaO的前驱体、SiO2的前驱体按比例混合,进行球磨、烘干、过筛后在1000℃~1100℃煅烧2.5~5小时后获得BaSi2O5;
将ZnO的前驱体、SiO2的前驱体按比例混合,进行球磨、烘干、过筛后在1150℃~1250℃煅烧2.5~5小时后获得Zn2SiO4;
所述BaSi2O5与所述Zn2SiO4,所述Al2O3、所述MnO、所述CeO2、所述CoO、所述Nb2O5、所述ZrO2的一种或多种,所述B2O3、所述SiO2、所述ZnO、所述Li2CO3、所述MgO中的一种或多种,按比例混合、球磨、烘干、过筛后获得微波介质材料;
将微波介质材料造粒后在4~6MPa压力下制成坯体,再将坯体排胶,排胶温度为500℃、升温速率为2℃/min、保温1小时,再以3~8℃/min升温至850~950℃对排胶后的坯体进行烧结保温2~5小时后随炉自然冷却。
3.根据权利要求2所述的低温烧结低介电常数C0G特性微波介质材料的制备方法,其特征在于:
所述BaO的前驱体为BaO、Ba(OH)2、BaCO3中的一种或多种;
所述SiO2的前驱体为SiO2、H2SiO3中的一种或两种;
所述ZnO的前驱体为ZnO、Zn(OH)2、ZnCO3中的一种或多种。
4.根据权利要求2所述的低温烧结低介电常数C0G特性微波介质材料的制备方法,其特征在于:
将所述B2O3、所述SiO2、所述ZnO、所述Li2CO3、所述MgO中的一种或多种按比例混合,进行球磨、烘干、过筛后在500~700℃煅烧2.5~5小时后获得烧结助剂。
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