CN106662805B - 在柔性基板上形成电子器件的方法和包括电子器件的装置 - Google Patents

在柔性基板上形成电子器件的方法和包括电子器件的装置 Download PDF

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Publication number
CN106662805B
CN106662805B CN201580031388.4A CN201580031388A CN106662805B CN 106662805 B CN106662805 B CN 106662805B CN 201580031388 A CN201580031388 A CN 201580031388A CN 106662805 B CN106662805 B CN 106662805B
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China
Prior art keywords
electronic device
flexible substrate
porous membrane
printing
electronic
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CN201580031388.4A
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Chinese (zh)
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CN106662805A (zh
Inventor
C·C·马约尔加·马丁内斯
L·M·巴普蒂斯塔·皮雷斯
A·梅尔库奇·希卡
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Institucio Catalana de Recerca i Estudis Avancats ICREA
Institut Catala de Nanociencia i Nanotecnologia ICN2
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Institucio Catalana de Recerca i Estudis Avancats ICREA
Institut Catala de Nanociencia i Nanotecnologia ICN2
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002—Organic membrane manufacture
    • B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/021—Carbon
    • B01D71/0211—Graphene or derivates thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/08—Polysaccharides
    • B01D71/12—Cellulose derivatives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1275—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0145—Polyester, e.g. polyethylene terephthalate [PET], polyethylene naphthalate [PEN]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0736—Methods for applying liquids, e.g. spraying

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Printing Methods (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Electroluminescent Light Sources (AREA)
CN201580031388.4A 2014-06-20 2015-06-19 在柔性基板上形成电子器件的方法和包括电子器件的装置 Active CN106662805B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP14382240.1 2014-06-20
EP14382240 2014-06-20
PCT/EP2015/063842 WO2015193486A1 (en) 2014-06-20 2015-06-19 Method of forming an electronic device on a flexible substrate

Publications (2)

Publication Number Publication Date
CN106662805A CN106662805A (zh) 2017-05-10
CN106662805B true CN106662805B (zh) 2020-07-28

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Country Status (13)

Country Link
US (1) US20170123310A1 (enExample)
EP (1) EP3158397B1 (enExample)
JP (1) JP6734787B2 (enExample)
KR (1) KR102375841B1 (enExample)
CN (1) CN106662805B (enExample)
AU (1) AU2015276028A1 (enExample)
BR (1) BR112016029321A2 (enExample)
CA (1) CA2954435C (enExample)
DK (1) DK3158397T3 (enExample)
ES (1) ES2664346T3 (enExample)
IL (1) IL249534B (enExample)
SG (1) SG11201610437TA (enExample)
WO (1) WO2015193486A1 (enExample)

Families Citing this family (11)

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Publication number Priority date Publication date Assignee Title
EP3530617A1 (en) 2018-02-27 2019-08-28 Fundacio Privada Institut Catala de Nanociencia I Nanotecnologia (ICN2) Method of forming a porous graphene-based macroscopic structure
KR102130323B1 (ko) * 2018-06-04 2020-07-06 한국화학연구원 기능성 물질을 이용한 패턴 필름의 제조방법 및 기능성 물질을 이용한 패턴 필름의 전사방법
JP7190129B2 (ja) * 2018-10-01 2022-12-15 ヒューグルエレクトロニクス株式会社 イオン分布可視化装置及びイオン分布可視化システム
EP3772086A1 (en) 2019-08-01 2021-02-03 Fundació Institut Català de Nanociència i Nanotecnologia (ICN2) Method to form a laser-scribed rgo pattern on a substrate
CN110972411B (zh) * 2019-10-22 2022-12-06 深圳丹邦科技股份有限公司 基于量子碳基膜的柔性线路板基材及其制备方法
CN110658677B (zh) * 2019-11-12 2021-08-13 京东方科技集团股份有限公司 一种压印方法、压印结构及显示基板
CN111554756B (zh) * 2020-05-15 2022-04-15 京东方科技集团股份有限公司 光电探测器、显示基板
US12172576B2 (en) * 2021-10-26 2024-12-24 Ford Global Technologies, Llc System and method for approaching vehicle detection
CN114280287A (zh) * 2021-12-24 2022-04-05 杭州电子科技大学 一种基于二硫化钨的柔性生物传感器及其制备方法
CN115939409A (zh) * 2022-12-27 2023-04-07 西安交通大学 一种石墨烯集流体及锌离子微型电池的制备方法
CN118726934B (zh) * 2024-06-19 2025-05-30 浙江大学 一种二维材料微图案阵列大面积印刷及转移方法

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CN102452239A (zh) * 2010-10-22 2012-05-16 韩国科学技术院 图案转印方法和图案转印装置以及利用该方法制造的产品

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JP2003262635A (ja) * 2002-03-08 2003-09-19 Nitto Denko Corp 吸水性基材を用いた、生物学的親和性に基づく物質の測定方法およびそのためのキット
US7261852B2 (en) * 2002-07-19 2007-08-28 University Of Florida Research Foundation, Inc. Transparent electrodes from single wall carbon nanotubes
KR100719547B1 (ko) * 2005-03-24 2007-05-17 삼성에스디아이 주식회사 유기박막 패터닝방법, 이를 이용한 유기박막 트랜지스터 및그의 제조방법과 유기 박막 트랜지스터를 구비한평판표시장치
JP2009509358A (ja) 2005-09-21 2009-03-05 ユニバーシティ オブ フロリダ リサーチ ファンデーション インコーポレーティッド パターン化導電性薄膜を形成するための低温法およびそれに由来するパターン化物品
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CN102452239A (zh) * 2010-10-22 2012-05-16 韩国科学技术院 图案转印方法和图案转印装置以及利用该方法制造的产品

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Publication number Publication date
JP2017526165A (ja) 2017-09-07
EP3158397A1 (en) 2017-04-26
JP6734787B2 (ja) 2020-08-05
CN106662805A (zh) 2017-05-10
KR20170023959A (ko) 2017-03-06
IL249534A0 (en) 2017-02-28
BR112016029321A2 (pt) 2017-08-22
SG11201610437TA (en) 2017-01-27
AU2015276028A1 (en) 2017-02-02
WO2015193486A1 (en) 2015-12-23
DK3158397T3 (en) 2018-04-16
CA2954435C (en) 2023-02-14
US20170123310A1 (en) 2017-05-04
KR102375841B1 (ko) 2022-03-17
CA2954435A1 (en) 2015-12-23
IL249534B (en) 2021-12-01
EP3158397B1 (en) 2018-01-03
ES2664346T3 (es) 2018-04-19

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