CN106413986A - 具有结构化表面的磨料 - Google Patents

具有结构化表面的磨料 Download PDF

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Publication number
CN106413986A
CN106413986A CN201580005532.7A CN201580005532A CN106413986A CN 106413986 A CN106413986 A CN 106413986A CN 201580005532 A CN201580005532 A CN 201580005532A CN 106413986 A CN106413986 A CN 106413986A
Authority
CN
China
Prior art keywords
abrasive material
less
bigger
patterned surface
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201580005532.7A
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English (en)
Chinese (zh)
Inventor
南秀树
渡濑稔彦
中村阳子
增田祥
增田祥一
服部二郎
M·M·戴维
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN106413986A publication Critical patent/CN106413986A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Inorganic Chemistry (AREA)
CN201580005532.7A 2014-01-24 2015-01-21 具有结构化表面的磨料 Pending CN106413986A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461931136P 2014-01-24 2014-01-24
US61/931,136 2014-01-24
PCT/US2015/012158 WO2015112540A1 (en) 2014-01-24 2015-01-21 Abrasive material having a structured surface

Publications (1)

Publication Number Publication Date
CN106413986A true CN106413986A (zh) 2017-02-15

Family

ID=53681879

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580005532.7A Pending CN106413986A (zh) 2014-01-24 2015-01-21 具有结构化表面的磨料

Country Status (6)

Country Link
US (1) US20170008143A1 (enrdf_load_stackoverflow)
JP (1) JP2017503670A (enrdf_load_stackoverflow)
KR (1) KR20160114627A (enrdf_load_stackoverflow)
CN (1) CN106413986A (enrdf_load_stackoverflow)
TW (1) TW201538272A (enrdf_load_stackoverflow)
WO (1) WO2015112540A1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110065011A (zh) * 2018-01-23 2019-07-30 项刚 金刚石砂轮及其制备方法
CN110530313A (zh) * 2019-07-26 2019-12-03 西安交通大学 一种跨量级多尺度线宽标准器及其制备方法
CN110869206A (zh) * 2017-07-11 2020-03-06 3M创新有限公司 包括可适形涂层的磨料制品和由此形成的抛光系统

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5921790B1 (ja) * 2014-07-07 2016-05-24 バンドー化学株式会社 研磨フィルム
US10967399B2 (en) * 2016-06-30 2021-04-06 3M Innovative Properties Company Fluorocarbon release coating
JP6925699B2 (ja) * 2016-10-04 2021-08-25 株式会社ディスコ 平面研削砥石
SG11202000259RA (en) * 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom
JP7198801B2 (ja) * 2017-07-11 2023-01-04 スリーエム イノベイティブ プロパティズ カンパニー 適合性コーティングを含む研磨物品及びそれによる研磨システム
US12048980B2 (en) * 2017-08-25 2024-07-30 3M Innovative Properties Company Surface projection polishing pad
TWI649775B (zh) * 2018-01-02 2019-02-01 台灣積體電路製造股份有限公司 離子佈植機及離子佈植機腔室的製造方法
US11331767B2 (en) 2019-02-01 2022-05-17 Micron Technology, Inc. Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
US20210040608A1 (en) * 2019-08-05 2021-02-11 GM Global Technology Operations LLC Method for bonding a polymeric material to a substrate
KR102298114B1 (ko) * 2019-11-05 2021-09-03 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법
KR102287923B1 (ko) * 2019-10-30 2021-08-09 에스케이씨솔믹스 주식회사 연마패드, 이의 제조방법, 및 이를 이용한 반도체 소자의 제조방법
TWI761921B (zh) 2019-10-30 2022-04-21 南韓商Ｓｋｃ索密思股份有限公司 研磨墊、製造該研磨墊之方法及使用該研磨墊以製造半導體裝置之方法
US20210185793A1 (en) * 2019-12-13 2021-06-17 Applied Materials, Inc. Adhesive material removal from photomask in ultraviolet lithography application
US20220178017A1 (en) * 2020-12-03 2022-06-09 Applied Materials, Inc. Cfx layer to protect aluminum surface from over-oxidation
TWI779728B (zh) * 2021-07-20 2022-10-01 大陸商廈門佳品金剛石工業有限公司 鑽石修整碟及其製造方法
CN116652825B (zh) * 2023-07-24 2023-11-10 北京寰宇晶科科技有限公司 一种金刚石cmp抛光垫修整器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6015597A (en) * 1997-11-26 2000-01-18 3M Innovative Properties Company Method for coating diamond-like networks onto particles
US6458018B1 (en) 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
JP4519970B2 (ja) 1999-12-21 2010-08-04 スリーエム イノベイティブ プロパティズ カンパニー 研磨層が立体構造を有する研磨材料
US6821189B1 (en) * 2000-10-13 2004-11-23 3M Innovative Properties Company Abrasive article comprising a structured diamond-like carbon coating and method of using same to mechanically treat a substrate
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
EP2240298A4 (en) * 2007-12-31 2014-04-30 3M Innovative Properties Co PLASMA TREATED ABRASIVE ARTICLE AND PROCESS FOR PRODUCING THE SAME

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110869206A (zh) * 2017-07-11 2020-03-06 3M创新有限公司 包括可适形涂层的磨料制品和由此形成的抛光系统
TWI784027B (zh) * 2017-07-11 2022-11-21 美商3M新設資產公司 包括可適形塗層之磨料物品及來自其之拋光系統
CN110065011A (zh) * 2018-01-23 2019-07-30 项刚 金刚石砂轮及其制备方法
CN110530313A (zh) * 2019-07-26 2019-12-03 西安交通大学 一种跨量级多尺度线宽标准器及其制备方法

Also Published As

Publication number Publication date
KR20160114627A (ko) 2016-10-05
US20170008143A1 (en) 2017-01-12
TW201538272A (zh) 2015-10-16
WO2015112540A1 (en) 2015-07-30
JP2017503670A (ja) 2017-02-02

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Application publication date: 20170215