CN106115260A - Device high speed fetching device - Google Patents

Device high speed fetching device Download PDF

Info

Publication number
CN106115260A
CN106115260A CN201610674201.9A CN201610674201A CN106115260A CN 106115260 A CN106115260 A CN 106115260A CN 201610674201 A CN201610674201 A CN 201610674201A CN 106115260 A CN106115260 A CN 106115260A
Authority
CN
China
Prior art keywords
assembly
pick
microscope carrier
rotary type
type transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610674201.9A
Other languages
Chinese (zh)
Inventor
肖智轶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huatian Technology Kunshan Electronics Co Ltd
Original Assignee
Huatian Technology Kunshan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huatian Technology Kunshan Electronics Co Ltd filed Critical Huatian Technology Kunshan Electronics Co Ltd
Priority to CN201610674201.9A priority Critical patent/CN106115260A/en
Publication of CN106115260A publication Critical patent/CN106115260A/en
Priority to PCT/CN2016/108473 priority patent/WO2018032656A1/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/914Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems incorporating rotary and rectilinear movements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/915Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rotary movements only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/917Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers control arrangements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat

Abstract

The invention discloses a kind of device high speed fetching device, including rotary type transfer assembly, some pick and place assembly, be positioned at the first microscope carrier of device pick-up area, the second microscope carrier being positioned at device rest area, first, second travel mechanism that drives first, second microscope carrier to move at horizontal plane and position;Rotary type transfer assembly can arrive device pick-up area and device rest area by the periodic rotary transmission assembly that picks and places thereon;Rotary type transfer assembly and pick and place assembly at least one and can move up and down, makes to pick and place assembly and arrives the set-point preset on the pickup point and the second microscope carrier preset on the first microscope carrier, pickup device and mask placement device successively;First, second microscope carrier is under first, second travel mechanism drives, and scalable device to be picked up and position to be placed are positioned at and pick and place assembly down position.The present invention utilizes be uniformly arranged on rotary type transfer assembly multiple to pick and place assembly, and the seriality completing device picks and places at a high speed, substantially increases and picks and places efficiency and pick and place precision.

Description

Device high speed fetching device
Technical field
The present invention relates to a kind of device fetching device, especially relate to a kind of device high speed fetching device, to improve device Pick and place speed and precision.
Background technology
Fetching device is a kind of product treatment apparatus, can pick up a product from a position, and is positioned over by this product Another location.Machine in field of semiconductor package, in fetching device such as PP machine (pick and place, or referred to as crystal picking machine) Tool arm, for the device (die, or claim chip chip) that wafer cutting is formed, be placed into charging tray (tray dish) or another On wafer support plate.Such as patent CN102983094A, the main flow that mechanical arm picks and places is, mechanical arm takes out in precalculated position One device, then, swinging arm arrives charging tray or wafer position, puts down device, then swinging arm returns to precalculated position, so Repeat this action.But, for even 12 cun wafers of 8 cun of wafers, size is relatively big, and the distance between device picks and places causes machinery Arm must lengthen, and completes once to pick and place action, picking and placeing of a device, and the time is mainly expended and swings back and forth process at arm In, efficiency can reduce, and the error picked up and put also can strengthen.
For processing this problem, it is proposed that many complicated mechanism, such as United States Patent (USP) US20080000756A1, arrange Multiple mechanical arms pick and place simultaneously, owing to mechanical arm can only move horizontally along trapped orbit and vertically move, therefore mechanical arm Need flexible or cross to realize keeping in obscurity each other, though this device increases relatively picks and places efficiency, but mechanical arm action Complexity, still can have considerable influence to picking and placeing speed.
Summary of the invention
In order to solve above-mentioned technical problem, the present invention proposes a kind of device high speed fetching device, utilizes in rotary type transmission Be uniformly arranged on assembly multiple picks and places assembly, and the seriality completing device picks and places at a high speed, substantially increase pick and place efficiency and Pick and place precision.
The technical scheme is that and be achieved in that:
A kind of device high speed fetching device, is arranged at described rotary type transmission including rotary type transfer assembly, uniform intervals Some on assembly pick and place assembly, one first microscope carrier being positioned at device pick-up area, drive described first microscope carrier to move at horizontal plane The first travel mechanism, the second microscope carrier being positioned at device rest area that move and position and drive described second microscope carrier to move at horizontal plane The second travel mechanism moved and position;Described rotary type transfer assembly can arrive device by the periodic rotary transmission assembly that picks and places thereon Part pick-up area and device rest area;Described rotary type transfer assembly and the described assembly at least one that picks and places can move up and down, and make institute State pick and place assembly arrive on the first microscope carrier preset pickup point and the second microscope carrier on preset set-point;Assembly is picked and placeed described in some Under the drive of rotary type transfer assembly, successively at pickup point pickup device, it is sequentially placed device at set-point;Described first carries Device to be picked up on first microscope carrier, under described first travel mechanism drives, can be moved to pickup point, described second microscope carrier by platform Under described second travel mechanism drives, device position to be placed on the second microscope carrier can be moved to set-point.
Further, described rotary type transfer assembly is conveyor type conveying mechanism or chain conveyor structure or rotating disc type Conveying mechanism or rotating rod type conveying mechanism.
Further, the transmission range of described rotary type transfer assembly can be carried out according to the distance between pickup point and set-point Regulation.
Further, described in pick and place assembly when can move up and down, if described rotary type transfer assembly include rotating body and The dry vertical braking device assembly being located on described rotation body of uniformly arranging, picks and places assembly described in vertical braking device Component driver Move up and down.
Further, described vertical braking device assembly simultaneously drives at least two and picks and places assembly and move up and down.
Further, described first microscope carrier and described second microscope carrier carry wafer or magazine or braid or support plate.
Further, also include for control described rotary type transfer assembly, described in pick and place assembly, described first moving machine Structure, the central control system of described second travel mechanism start.
Further, also include that a mechanical arm, described mechanical arm pick and place device on assembly described in can picking up, and will It is positioned on a substrate.
The invention has the beneficial effects as follows: the present invention provides a kind of device high speed fetching device, by traditional mechanical arm back and forth The decomposition of movement of pickup, completes with different assemblies, is divided into particularly as follows: action will be picked and placeed, and by picking and placeing, assembly execution pickup is dynamic Make, rotary type transfer assembly perform transmission action, then performed placement action by picking and placeing assembly.Device the most to be picked up is placed On the first microscope carrier, being placed on the second microscope carrier by the device after pickup, the first microscope carrier and the second microscope carrier coordinate precision mobile, will Pickup point and set-point move to pick and place assembly drop-off positions.Arrange on rotary type transfer assembly and multiple pick and place assembly, pick up successively, It is sequentially placed after arriving set-point.Rotary type transfer assembly can use the conveyer belt conveying mechanism rotated in perpendicular, also The conveyer belt conveying mechanism at horizontal rotation in surface can be used, it is also possible to use the rotary transfer machine structure at horizontal rotation in surface Realize.So, along with the rotation of rotary type transfer assembly, can be at pickup point successively pickup device, transmission arrival placement continuously Point is sequentially placed device, and controls the first microscope carrier and the second microscope carrier moves horizontally, can be by device to be picked up and device position to be placed Putting and be moved respectively to pickup point and set-point, make pickup and placement action almost synchronize, therefore, the present invention can significantly shorten and picks up Take and the placement cycle, be greatly improved and pick and place efficiency.The conveyer belt of conveyer belt conveying mechanism can realize longer-distance continuous conveying, Fully meet device pick and place between distance needs, solve mechanical arm lengthen, complete once to pick and place action, the time is mainly expended During arm swings back and forth, the problem that efficiency can reduce;And the movement picking and placeing assembly only moves up and down, microscope carrier coordinates Horizontal direction moves, and action is simple, improves the speed of service of entirety and picks and places precision, solves mechanical arm action complicated, Can be to picking and placeing the problem that speed has considerable influence.More preferably, the transmission range of conveyer belt conveying mechanism can according to pickup point with put Distance between putting a little is adjusted, and application is more flexible, more improves and picks and places efficiency and pick and place precision.
Accompanying drawing explanation
Fig. 1 a is rotation work schematic diagram in the embodiment of the present invention one device high speed fetching device vertical plane;
Fig. 1 b is that the embodiment of the present invention one device high speed fetching device picks and places assembly and is vertically hung in vertical plane and rotates Conveyer belt side operating diagram;
Fig. 1 c is that the embodiment of the present invention one vertical braking device assembly simultaneously drives and multiple picks and places component diagram;
Fig. 2 is the embodiment of the present invention two device high speed fetching device operating diagram;
Fig. 3 is respectively to pick and place assembly relative status schematic diagram in the operation of the embodiment of the present invention two device high speed fetching device;
Fig. 4 is the operating diagram of the embodiment of the present invention two device high speed fetching device flip-chip;
Fig. 5 is the embodiment of the present invention three device high speed fetching device operating diagram;
In conjunction with accompanying drawing, it is explained as follows:
1-rotary type transfer assembly, 11-conveyer belt, 12-vertical braking device assembly, 13-rotating disk, 14-drive mechanism, 2-takes Put assembly, 3-the first microscope carrier, 31-pickup point, 4-the first travel mechanism, 5-the second microscope carrier, 51-set-point, 6-the second moving machine Structure, 7-device, 8-mechanical arm, 81-picks and places part, 9-substrate.
Detailed description of the invention
More understandable for enabling the invention to, below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is done specifically Bright.For convenience of description, in the structure of embodiment accompanying drawing, each ingredient does not presses normal rates scaling, therefore does not represent in embodiment each The actual relative size of structure.
Embodiment 1
Seeing Fig. 1 a, for the side view of the present invention one device high speed fetching device, this device high speed fetching device includes turning Dynamic formula transfer assembly 1, uniform intervals be arranged on described rotary type transfer assembly some pick and place assembly 2, be positioned at device pickup One first microscope carrier 3 in district, drive the first travel mechanism 4 that described first microscope carrier moves in horizontal plane and position, be positioned at device The second travel mechanism 6 that second microscope carrier 5 of rest area and described second microscope carrier of driving move in horizontal plane and position.
As a kind of preferred embodiment, used here as conveyer belt conveying mechanism as rotary type transfer assembly.Conveyer belt is defeated The conveyer belt 11 that send mechanism to include bracing frame, to be installed on bracing frame and drive this conveyer belt periodic rotary on bracing frame Power source (such as drives motor), and driving motor can be real through decelerator, driving gear set (driving gear and driven gear etc.) etc. Now driving the function of conveyer belt periodic rotary, this is conveyer belt conveying mechanism common technology, does not repeats them here.Conveyer belt is defeated The kind of drive sending mechanism is not limited with driving gear set, as long as conveyer belt can be driven to rotate and stop.As one Preferred embodiment, conveyer belt is set to rotate in vertical plane periodically, and is positioned at the top of pick-up area and rest area, ascends the throne In the first microscope carrier and the top of the second microscope carrier, some assemblies 2 that pick and place are uniformly arranged on conveyer belt surface, and power source is passed by driving Turning of moving gear group stops, it is achieved conveyer belt rotating counterclockwise and stopping in perpendicular, in order to carrying device 7 reaches first The top of the set-point 51 above the pickup point 31 on microscope carrier and on the second microscope carrier.Pick and place assembly and arrive the pickup point of the first microscope carrier Behind the top of the set-point on top and the second microscope carrier, needing descending pickup and mask placement device, this function can use rotary type Transfer assembly and pick and place assembly at least one and can move up and down and realize, so that picking and placeing assembly to arrive the pickup point on the first microscope carrier Set-point 51 position on 31 positions and the second microscope carrier, as a kind of preferred implementation, respectively picking and placeing assembly 2 can pass through respectively One vertical braking device assembly 12, picks and places assembly by vertical braking device Component driver and moves up and down, in order to arrive target area (pickup point or set-point) pickup and mask placement device.Vertical braking device assembly can use straight line cylinder, straight-line electric cylinder, linear module Deng, such as using straight line cylinder, cylinder body is connected by mounting seat and transmission band are fixing, and the power output shaft of cylinder is by turning Joint chair with pick and place that assembly is fixing to be connected, the expanding-contracting action of cylinder can drive and pick and place assembly and move up and down.
Some assemblies that pick and place, can be successively at pickup point pickup device 7 under the drive of rotary type transfer assembly, at set-point It is sequentially placed device 7;As a kind of preferred embodiment, the pickup and the placement function that pick and place assembly can be realized by vacuum slot, In other embodiments, pick and place assembly and can also pass through the adsorption-type workpiece realizations such as sucker, suction pad, Magnet, it is also possible to for other There is pickup and place the assembly of function, such as the clamp assemblies such as jaw, chuck or glutinous take assembly etc..
Device to be picked up on first microscope carrier, under described first travel mechanism drives, can be moved to picking up by described first microscope carrier Taking a little, the device at set-point on the second microscope carrier, under described second travel mechanism drives, can be removed by described second microscope carrier.This Sample, is carried device 7 to be picked up by the first microscope carrier 3 of pick-up area, and the second microscope carrier 5 carries device to be placed, the first microscope carrier and Second microscope carrier cooperation picks and places assembly and is picked and placeed by device complete smoothly, and both realize level by first, second travel mechanism respectively Movement in face and location.So, pick and place assembly pickup/place and during next picks and places assembly pickup/place upper one, the One, the second travel mechanism regulate device to be picked up the most in real time and position to be placed be positioned at pick and place assembly down position (pickup point/ Set-point), it is achieved picking and placeing continuously of device.Such as, on the first microscope carrier carrying be the wafer after scribing or magazine, the second microscope carrier Upper carrying is another wafer, or substrate/support plate, or magazine, or braid.As put wafer after a scribing on the first microscope carrier, Place another support plate wafer on two microscope carriers, device restructuring on wafer can be completed by device high speed fetching device.
Above-mentioned first, second travel mechanism can use two axial lines module to realize, such as by the linear module of X-axis and Y-axis line Property module composition, the linear module of X-axis realizes the movement at left and right directions of the pickup point/set-point, the linear module of Y-axis realize pickup Point/set-point is in the movement of fore-and-aft direction.But it is not limited to this two axial lines module, it is possible to use other such as cylinders or electricity cylinder The mode promoted realizes.
To sum up, the operation principle of the present embodiment device high speed fetching device is as follows:
The transmission band of transmission belt conveyor structure rotates, and drives some vertical braking device assemblies thereon and some picks and places assembly Rotating, when picking and placeing assembly arrival pickup point for first, rotary type transfer assembly stops operating, and vertical braking device assembly drives simultaneously That moves its correspondence picks and places assembly vertical drop, pickup device, then rises, and rotary type transfer assembly is rotated further, and works as the next one When picking and placeing assembly arrival pickup point, rotary type transfer assembly stops at this, repeats above-mentioned picking action.Equally, when first Pickup device pick and place assembly when arriving set-point, rotary type transfer assembly stops operating, and it is right for vertical braking device Component driver That answers picks and places assembly vertical drop, mask placement device, then rises, and rotary type transfer assembly is rotated further, when the next one picks and places group When part arrives set-point, rotary type transfer assembly stops at this, repeats above-mentioned placement action.When being embodied as, can be to pickup point It is adjusted with set-point, makes pickup and placement synchronization carry out.While pickup and placing, the first microscope carrier of pick-up area is the Moving horizontally under the driving of one travel mechanism, moved to pickup point successively by device to be picked up, the second microscope carrier of rest area is the Move horizontally under the driving of two travel mechanisms, device position to be put is moved to set-point.So, along with the rotation of conveyer belt, Can transmit and arrive set-point at pickup point successively continuous pickup device and be sequentially placed device, and the first microscope carrier and the second microscope carrier water Translation is dynamic, and device to be picked up and device position to be placed are moved respectively to pickup point and set-point, picks up and place action same Step, significantly shorten pickup and placement cycle, is greatly improved and picks and places efficiency.Here, the conveyer belt of conveyer belt conveying mechanism can be real Existing longer-distance continuous conveying, fully meet device pick and place between distance needs, solve mechanical arm lengthening, complete Once picking and placeing action, the time is mainly expended during arm swings back and forth, the problem that efficiency can reduce;And pick and place the shifting of assembly Moving and only move up and down, microscope carrier cooperation moves in the horizontal direction, and action is simple, improves the speed of service of entirety and picks and places essence Degree, solves mechanical arm action complicated, can be to picking and placeing the problem that speed has considerable influence.More preferably, conveyer belt conveying mechanism Transmission range can be adjusted according to the distance between pickup point and set-point, application is more flexible, more improves and picks and places effect Rate and pick and place precision.
In other embodiments, conveyer belt is set in perpendicular rotate, and picks and places assembly and keeps vertically being hung on conveyer belt A side, see Fig. 1 b.
In other embodiments, conveyer belt is set to rotate in horizontal plane periodically, and is positioned at pick-up area and rest area Top, is i.e. positioned at the first microscope carrier and the top of the second microscope carrier, and some assemblies that pick and place are uniformly arranged on conveyer belt side.
In other embodiments, it is also possible to control overall the moving up and down of conveyer belt, in order to specify and pick and place assembly arrival target Region (pickup point or set-point) pickup and mask placement device.
In other embodiments, at least two can be had to pick and place assembly and to decline pickup simultaneously and/or place many devices, with Increase pickup and/or place speed;At least two can also be simultaneously driven by a vertical braking device assembly to pick and place on assembly Lower movement, sees Fig. 1 c, when this vertical braking device assembly declines, picks up simultaneously/places many devices, improve pickup and/or put Put speed.
In other embodiments, conveyer belt could alternatively be transmission chain, i.e. rotary type transfer assembly uses chain-type defeated Sending mechanism, chain conveyor structure is prior art, does not repeats them here.
Above-mentioned rotary type transfer assembly, vertical braking device assembly, pick and place assembly, first, second travel mechanism by one central authorities Control system controls its operating or stops.Central control system such as computer system, embedded system etc., not shown in figure.
Embodiment 2
See Fig. 2, for the side view of device high speed another embodiment of fetching device of the present invention, its different from embodiment 1 it Place is, conveyer belt direction of transfer is for rotating clockwise, in pick-up area with rest area relative direction (such as Fig. 1 a, Fig. 1 b, Fig. 2) no In the case of change, this load mode contained device transport distance is more than counterclockwise.Can according to a device pick and place period in, The need of doing other operations or test stop, and select different load modes.
As it is shown on figure 3, respectively pick and place the signal of assembly relative status for the embodiment of the present invention 2 device high speed fetching device in operating Figure, this embodiment is as a example by a vertical braking assembly correspondence one picks and places assembly.In the t1 moment, a picks and places assembly and moves to picking up Taking above district's device to be taken, conveyer belt stops;T2 moment a picks and places vertical braking assembly corresponding to assembly and will pick and place assembly and be displaced downwardly to On device, and hold device;T3 moment a picks and places vertical braking assembly corresponding to assembly and will pick and place and move to elemental height on assembly; Power source drives conveyer belt to move clockwise, and t4 moment b picks and places assembly and moves above the device to be taken of pick-up area, and conveyer belt stops Only, picking up the r of device simultaneously and pick and place assembly and move above position to be placed, rest area, conveyer belt stops;T5 moment b picks and places Assembly and r are picked and placeed assembly and are moved down by respective vertical braking assembly, and b picks and places assembly and picks up next device, and r picks and places assembly release Contained device;T6 moment b picks and places assembly and r picks and places assembly and rises to elemental height, conveyer belt by respective vertical braking assembly Continued by driving means the most mobile, repeat the action of t4 to t6 period.
In the present embodiment, a mechanical arm 8 can be added, as shown in Figure 4.As in pick-up area, device is the back of the body of wafer-level packaging Cut chip, i.e. chip soldered ball faces up and is arranged in pick-up area, picks and places the soldered ball face of assembly absorption chip, conveyer belt transmits, attached The mechanical arm end added arranges one and picks and places part 81, such as suction nozzle or sucker, and mechanical arm 8 is drawn a chip, is placed directly into Another substrate such as pcb board 9, can realize the flip chip bonding of chip, it is to avoid chip rotary movement.
Embodiment 3
See Fig. 5, for the side view of the another embodiment of device high speed fetching device of the present invention, different from embodiment 1 it Place is, the rotary transfer machine structure using horizontal direction to rotate includes as rotary type transfer assembly, rotary transfer machine structure Rotating disk 13 and drive the drive mechanism 14 of turntable rotation, so, some pick and place assembly 2 can be uniformly arranged on disk lower surface or Side.Drive mechanism drives rotating disk rotation in the horizontal plane and stopping, in order to carrying device arrives pickup point and set-point.With Sample, respectively picking and placeing assembly can realize moving up and down by a vertical braking device assembly respectively, in order to arrive target area (pickup Point or set-point) pick up and mask placement device.
In other embodiments, it is also possible to control overall the moving up and down of rotating disk, in order to specify and pick and place assembly arrival target area Territory (pickup point or set-point) pickup and mask placement device.
In other embodiments, rotary transfer machine structure can be deformed into rotating rod type conveying mechanism, if i.e. include rotate body and The bull stick on described rotation body is located in dry uniformly arrangement, vertical braking device assembly and pick and place assembly and be installed on this bull stick.Logical Cross vertical braking device Component driver to pick and place assembly and move up and down.
Above example is referring to the drawings, to a preferred embodiment of the present invention will be described in detail.Those skilled in the art Member by above-described embodiment being carried out the amendment on various forms or change, but without departing substantially from the essence of the present invention in the case of, all Fall within the scope and spirit of the invention.

Claims (8)

1. a device high speed fetching device, it is characterised in that: include that rotary type transfer assembly (1), uniform intervals are arranged at institute That states on rotary type transfer assembly some picks and places assembly (2), is positioned at one first microscope carrier (3) of device pick-up area, drives described The first travel mechanism (4) that one microscope carrier moves in horizontal plane and positions, the second microscope carrier (5) being positioned at device rest area and driving The second travel mechanism (6) that described second microscope carrier moves in horizontal plane and positions;Described rotary type transfer assembly can be periodically Rotate the transmission assembly that picks and places thereon and arrive device pick-up area and device rest area;Described rotary type transfer assembly and described pick and place Assembly at least one can move up and down, make described in pick and place assembly arrive on the first microscope carrier preset pickup point (31) and the second microscope carrier The upper set-point (51) preset;Pick and place assembly described in some under the drive of rotary type transfer assembly, pick up at pickup point successively Device (7), is sequentially placed device at set-point;Described first microscope carrier, under described first travel mechanism drives, can carry first On platform, device to be picked up moves to pickup point, and described second microscope carrier, can be by the second microscope carrier under described second travel mechanism drives Upper device position to be placed moves to set-point.
Device high speed fetching device the most according to claim 1, it is characterised in that: described rotary type transfer assembly is for transmitting Belt type conveying mechanism or chain conveyor structure or rotary transfer machine structure or rotating rod type conveying mechanism.
Device high speed fetching device the most according to claim 1, it is characterised in that: the transmission of described rotary type transfer assembly Distance can be adjusted according to the distance between pickup point and set-point.
Device high speed fetching device the most according to claim 1, it is characterised in that picking and placeing assembly described in: can move up and down Time, described rotary type transfer assembly includes rotating body and the vertical braking device on described rotation body is located in some uniform arrangements Assembly (12), is moved up and down by picking and placeing assembly described in vertical braking device Component driver.
Device high speed fetching device the most according to claim 4, it is characterised in that: described vertical braking device assembly drives simultaneously Dynamic at least two picks and places assembly and moves up and down.
Device high speed fetching device the most according to claim 1, it is characterised in that: described first microscope carrier and described second carries Wafer or magazine or braid or support plate is carried on platform.
Device high speed fetching device the most according to claim 1, it is characterised in that: also include for controlling described rotary type Transfer assembly, described in pick and place assembly, described first travel mechanism, the central control system of described second travel mechanism start.
Device high speed fetching device the most according to claim 1, it is characterised in that: also include a mechanical arm (8), described Mechanical arm picks and places device on assembly described in can picking up, and is placed on a substrate (9).
CN201610674201.9A 2016-08-17 2016-08-17 Device high speed fetching device Pending CN106115260A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201610674201.9A CN106115260A (en) 2016-08-17 2016-08-17 Device high speed fetching device
PCT/CN2016/108473 WO2018032656A1 (en) 2016-08-17 2016-12-04 High-speed component pickup-and-place device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610674201.9A CN106115260A (en) 2016-08-17 2016-08-17 Device high speed fetching device

Publications (1)

Publication Number Publication Date
CN106115260A true CN106115260A (en) 2016-11-16

Family

ID=57259297

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610674201.9A Pending CN106115260A (en) 2016-08-17 2016-08-17 Device high speed fetching device

Country Status (2)

Country Link
CN (1) CN106115260A (en)
WO (1) WO2018032656A1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956075A (en) * 2017-03-28 2017-07-18 武汉振鹏科技有限公司 A kind of welding equipment of data connector High-speed assembly
CN107082277A (en) * 2017-06-08 2017-08-22 东莞阿李自动化股份有限公司 One kind caching feed device
CN107093574A (en) * 2017-04-02 2017-08-25 华天恒芯半导体(厦门)有限公司 A kind of chip bonding device with chip turning function
WO2018032656A1 (en) * 2016-08-17 2018-02-22 华天科技(昆山)电子有限公司 High-speed component pickup-and-place device
CN110217587A (en) * 2019-06-12 2019-09-10 昆山微容电子企业有限公司 A kind of rotary capacitor suction means
CN113428573A (en) * 2021-06-28 2021-09-24 青岛科技大学 Cell turnover mechanism and method for solar cell module production line
CN113479545A (en) * 2021-07-16 2021-10-08 山东宏葵医学检验实验室股份有限公司 Automatic sorting and classifying storage device for medical inspection samples
CN113649851A (en) * 2021-10-20 2021-11-16 徐州科美瑞门窗科技有限公司 Processing method and processing device for metal fittings of guardrail

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111153208A (en) * 2020-01-09 2020-05-15 杭州中奥自动化科技有限公司 Vacuum cup 3-axis taking and placing device and method

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191901A (en) * 1984-03-10 1985-09-30 Kyoto Seisakusho:Kk Sucking device
US4914808A (en) * 1987-10-16 1990-04-10 Sanyo Electric Co., Ltd Automatic electronic parts mounting apparatus for repeatedly mounting in forward and reverse sequences
JPH04286515A (en) * 1991-03-18 1992-10-12 Matsushita Electric Ind Co Ltd Plate transferring device
EP1000879A1 (en) * 1998-11-16 2000-05-17 Neuhäuser GMBH + CO. Conveyor belt unit for transporting workpieces
JP2003137424A (en) * 2001-11-01 2003-05-14 Techno Polymer Co Ltd Carrying device
EP1892204A1 (en) * 2006-08-25 2008-02-27 Christian Beer Vacuum conveyor for transport, depositing and stacking of flat objects
CN102427095A (en) * 2011-08-11 2012-04-25 浙江大学台州研究院 Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof
CN203638561U (en) * 2013-11-14 2014-06-11 西安启源机电装备股份有限公司 Vacuum belt conveying device
CN104085685A (en) * 2014-06-27 2014-10-08 汕头高新区嘉逸包装技术有限公司 Manipulator for household appliance inner container packaging
CN204847101U (en) * 2015-08-10 2015-12-09 常州市天之立纺织有限公司 High -efficient plastic bottle - feeding device
CN105151646A (en) * 2015-09-18 2015-12-16 佛山市顺德区捷嘉机器人科技有限公司 High-speed circulating type robot
CN205328198U (en) * 2015-12-28 2016-06-22 东莞市亿鑫丰精密机械设备科技有限公司 Rapid blanking device
CN205953021U (en) * 2016-08-17 2017-02-15 华天科技(昆山)电子有限公司 Device is put to high -speed getting of device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080000756A1 (en) * 2006-06-30 2008-01-03 Behnke Merlin E High speed linear pick-and-place
US8037996B2 (en) * 2009-01-05 2011-10-18 Asm Assembly Automation Ltd Transfer apparatus for handling electronic components
SG170645A1 (en) * 2009-11-02 2011-05-30 Semiconductor Tech & Instr Inc System and method for flexible high speed transfer of semiconductor components
US20110248738A1 (en) * 2010-04-12 2011-10-13 Sze Chak Tong Testing apparatus for electronic devices
JP2013046026A (en) * 2011-08-26 2013-03-04 Fujitsu Frontech Ltd Collet
CN106115260A (en) * 2016-08-17 2016-11-16 华天科技(昆山)电子有限公司 Device high speed fetching device

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191901A (en) * 1984-03-10 1985-09-30 Kyoto Seisakusho:Kk Sucking device
US4914808A (en) * 1987-10-16 1990-04-10 Sanyo Electric Co., Ltd Automatic electronic parts mounting apparatus for repeatedly mounting in forward and reverse sequences
JPH04286515A (en) * 1991-03-18 1992-10-12 Matsushita Electric Ind Co Ltd Plate transferring device
EP1000879A1 (en) * 1998-11-16 2000-05-17 Neuhäuser GMBH + CO. Conveyor belt unit for transporting workpieces
JP2003137424A (en) * 2001-11-01 2003-05-14 Techno Polymer Co Ltd Carrying device
EP1892204A1 (en) * 2006-08-25 2008-02-27 Christian Beer Vacuum conveyor for transport, depositing and stacking of flat objects
CN102427095A (en) * 2011-08-11 2012-04-25 浙江大学台州研究院 Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof
CN203638561U (en) * 2013-11-14 2014-06-11 西安启源机电装备股份有限公司 Vacuum belt conveying device
CN104085685A (en) * 2014-06-27 2014-10-08 汕头高新区嘉逸包装技术有限公司 Manipulator for household appliance inner container packaging
CN204847101U (en) * 2015-08-10 2015-12-09 常州市天之立纺织有限公司 High -efficient plastic bottle - feeding device
CN105151646A (en) * 2015-09-18 2015-12-16 佛山市顺德区捷嘉机器人科技有限公司 High-speed circulating type robot
CN205328198U (en) * 2015-12-28 2016-06-22 东莞市亿鑫丰精密机械设备科技有限公司 Rapid blanking device
CN205953021U (en) * 2016-08-17 2017-02-15 华天科技(昆山)电子有限公司 Device is put to high -speed getting of device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
帕尔涅斯: "《无线电设备装配和安装的机械化和自动化》", 31 March 1984 *

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018032656A1 (en) * 2016-08-17 2018-02-22 华天科技(昆山)电子有限公司 High-speed component pickup-and-place device
CN106956075A (en) * 2017-03-28 2017-07-18 武汉振鹏科技有限公司 A kind of welding equipment of data connector High-speed assembly
CN107093574A (en) * 2017-04-02 2017-08-25 华天恒芯半导体(厦门)有限公司 A kind of chip bonding device with chip turning function
CN107082277A (en) * 2017-06-08 2017-08-22 东莞阿李自动化股份有限公司 One kind caching feed device
CN107082277B (en) * 2017-06-08 2023-10-27 江苏四达重工有限公司 Cache feeding device
CN110217587A (en) * 2019-06-12 2019-09-10 昆山微容电子企业有限公司 A kind of rotary capacitor suction means
CN113428573A (en) * 2021-06-28 2021-09-24 青岛科技大学 Cell turnover mechanism and method for solar cell module production line
CN113428573B (en) * 2021-06-28 2022-07-12 青岛科技大学 Cell turnover mechanism and method for solar cell module production line
CN113479545A (en) * 2021-07-16 2021-10-08 山东宏葵医学检验实验室股份有限公司 Automatic sorting and classifying storage device for medical inspection samples
CN113649851A (en) * 2021-10-20 2021-11-16 徐州科美瑞门窗科技有限公司 Processing method and processing device for metal fittings of guardrail

Also Published As

Publication number Publication date
WO2018032656A1 (en) 2018-02-22

Similar Documents

Publication Publication Date Title
CN106115260A (en) Device high speed fetching device
CN106373914B (en) Chip bonding device
WO2016150080A1 (en) Flip chip bonding device
JP4713596B2 (en) Electronic component mounting apparatus and mounting method
SG173943A1 (en) Rotary die bonding apparatus and methodology thereof
KR102050004B1 (en) Silicon Wafer Transfer System
CN104752283B (en) Flip-chip device
CN205953021U (en) Device is put to high -speed getting of device
KR102291299B1 (en) chip bonding device
KR20110037646A (en) Die bonding apparatus of semiconductor
CN108565241B (en) Chip flip-chip micro-assembling machine
TWI645489B (en) Wafer bonding device and bonding method
CN114261564A (en) Grab bottle and go into support device and automatic grab bottle and go into support equipment
JP3497078B2 (en) Die bonder
CN110970322A (en) Chip mounting equipment and chip mounting method
CN210443533U (en) Double-station die bonder
CN204632732U (en) Flip-chip device
CN209981257U (en) Battery piece placing device
JP4234300B2 (en) Chip transfer device
CN104828528A (en) Assembling device of flexible materials
CN109461688A (en) Wafer conveying device and its working method
SG152128A1 (en) Chip transporting method and the device thereof
CN112349636A (en) High-precision large-board-level micro-assembly equipment
JP4862872B2 (en) Component mounting equipment
JP2016115887A (en) Transfer robot including multiple arm

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20161116

RJ01 Rejection of invention patent application after publication