CN205953021U - Device is put to high -speed getting of device - Google Patents

Device is put to high -speed getting of device Download PDF

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Publication number
CN205953021U
CN205953021U CN201620887891.1U CN201620887891U CN205953021U CN 205953021 U CN205953021 U CN 205953021U CN 201620887891 U CN201620887891 U CN 201620887891U CN 205953021 U CN205953021 U CN 205953021U
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assembly
microscope carrier
pick
rotary type
place
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CN201620887891.1U
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Chinese (zh)
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肖智轶
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Huatian Technology Kunshan Electronics Co Ltd
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Huatian Technology Kunshan Electronics Co Ltd
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Abstract

The utility model discloses a device is put to high -speed getting of device, including rotary type conveying subassembly, a plurality of get put the subassembly, lie in first microscope carrier that the device picked up the district, lie in that the device places that the second microscope carrier in district, drive are first, the second microscope carrier moves and first, the 2nd moving mechanism of location at the horizontal plane, rotary type conveying subassembly can periodic rotation conveying getting on it put the subassembly and reach that the device picks up the district and the district is placed to the device, rotary type conveying subassembly is put the at least one of which of subassembly and can be reciprocated with getting, make get put the subassembly arrive on the first microscope carrier predetermined pick up a little and the second microscope carrier on predetermined placing a little, picker spare and place the device in proper order, first, second microscope carrier first, the 2nd moving mechanism drive down, adjustablely treat picker spare and wait to place the position to lie in to get and put subassembly decline position. The utility model discloses the subassembly is put to utilization even a plurality of getting that sets up on rotary type conveying subassembly, and high -speed the getting of continuity of having accomplished the device is put, has improved greatly to get and has put efficiency and get the spermiation degree.

Description

Device high speed fetching device
Technical field
This utility model is related to a kind of device fetching device, especially relates to a kind of device high speed fetching device, to improve Device pick and place speed and precision.
Background technology
Fetching device is a kind of product treatment apparatus, can pick up a product from a position, and this product is positioned over Another location.Machine in field of semiconductor package, in fetching device such as PP machine (pick and place, or referred to as crystal picking machine) Tool arm, for the device (die, or claim chip chip) forming wafer cutting, is placed into charging tray (tray disk) or another On wafer support plate.As patent CN102983094A, the main flow that mechanical arm picks and places is that mechanical arm takes out in precalculated position One device, then, swinging arm reaches charging tray or wafer position, puts down device, then swinging arm returns to precalculated position, so Repeat this action.However, for even 12 cun wafers of 8 cun of wafers, size is larger, the distance between device picks and places leads to machinery Arm must lengthen, and to complete once to pick and place action, the picking and placeing an of device, and the time is mainly expended and swings back and forth process in arm In, efficiency can reduce, and the error picked up and put also can increase.
For processing this problem it is proposed that much complicated mechanism, such as United States Patent (USP) US20080000756A1, arrange Multiple mechanical arms pick and place simultaneously, because mechanical arm can only move horizontally along trapped orbit and vertically moves, therefore mechanical arm Need flexible or cross to realize keeping in obscurity each other, though this device relative increase picks and places efficiency, mechanical arm action Complexity, still can have considerable influence to picking and placeing speed.
Content of the invention
In order to solve above-mentioned technical problem, the utility model proposes a kind of device high speed fetching device, using in rotary type Be uniformly arranged on transfer assembly multiple pick and place assembly, the seriality high speed completing device picks and places, and substantially increases and picks and places effect Rate and pick and place precision.
The technical solution of the utility model is realized in:
A kind of device high speed fetching device, is arranged at described rotary type transmission including rotary type transfer assembly, uniform intervals Some on assembly pick and place assembly, one first microscope carrier being located at device pick-up area, drive described first microscope carrier to move in the horizontal plane The first travel mechanism moved and position, the second microscope carrier being located at device rest area and described second microscope carrier of driving move in the horizontal plane The second travel mechanism moved and position;Described rotary type transfer assembly can reach device by the periodic rotary transmission assembly that picks and places thereon Part pick-up area and device rest area;Described rotary type transfer assembly and the described assembly at least one that picks and places can move up and down, and make institute State and pick and place assembly and reach default set-point on default pickup point and the second microscope carrier on the first microscope carrier;Some described pick and place assembly Under the drive of rotary type transfer assembly, successively in pickup point pickup device, it is sequentially placed device in set-point;Described first load Platform, can be by device movement to be picked up on the first microscope carrier to pickup point under described first travel mechanism drives, described second microscope carrier Under described second travel mechanism drives, can be by device position movement to be placed on the second microscope carrier to set-point.
Further, described rotary type transfer assembly is conveyor type conveying mechanism or chain conveyor structure or rotating disc type Conveying mechanism or rotating rod type conveying mechanism.
Further, the transmission range of described rotary type transfer assembly can be carried out according to the distance between pickup point and set-point Adjust.
Further, described when picking and placeing assembly and can move up and down, if described rotary type transfer assembly include rotating body and Dry uniformly arrangement, located at the described vertical braking device assembly rotating on body, picks and places assembly described in vertical braking device assembly drives Move up and down.
Further, described vertical braking device assembly simultaneously drives at least two to pick and place assembly and moves up and down.
Further, described first microscope carrier and described second microscope carrier carry wafer or magazine or braid or support plate.
Further, also include for controlling described rotary type transfer assembly, described picking and placeing assembly, described first moving machine Structure, the central control system of described second travel mechanism start.
Further, also include a mechanical arm, described mechanical arm can pick up described in pick and place device on assembly, and will It is positioned on a substrate.
The beneficial effects of the utility model are:This utility model provides a kind of device high speed fetching device, by traditional mechanical The decomposition of movement that arm picks up back and forth, completes, specially with different assemblies:Action will be picked and placeed be divided into, be held by picking and placeing assembly Row picking action, executes transmission action by rotary type transfer assembly, then executes placement action by picking and placeing assembly.Simultaneously to be picked up Device is placed on the first microscope carrier, and the device after pickup is placed on the second microscope carrier, and the first microscope carrier and the cooperation of the second microscope carrier are smart Close movement, pickup point and set-point is moved to and picks and places assembly drop-off positions.Arrange on rotary type transfer assembly multiple pick and place assembly, Pick up successively, be sequentially placed after reaching set-point.Rotary type transfer assembly can be defeated using the conveyer belt rotating in perpendicular Send mechanism, the conveyer belt conveying mechanism that in the horizontal plane rotate may also be employed, can also be using the rotating disk rotating in the horizontal plane Formula conveying mechanism is realizing.So, with the rotation of rotary type transfer assembly, can pass in pickup point successively continuous pickup device Deliver to and reach set-point and be sequentially placed device, and control the first microscope carrier and the second microscope carrier to move horizontally, by device to be picked up and can treat Mask placement device position is moved respectively to pickup point and set-point, makes pickup and placement action almost synchronous, therefore, this utility model Pickup and placement cycle can significantly be shortened, be greatly improved and pick and place efficiency.The conveyer belt of conveyer belt conveying mechanism can achieve farther out The continuous conveying of distance, fully meets device and the distance between picks and places needs, solves mechanical arm and lengthens, and completes once to pick and place dynamic Make, the time is mainly expended during arm swings back and forth, the problem that efficiency can reduce;And pick and place the movement of assembly only up and down Mobile, microscope carrier cooperation moves in the horizontal direction, and action is simple, improves the overall speed of service and picks and places precision, solves machine Tool arm action is complicated, can have the problem of considerable influence to picking and placeing speed.More preferably, the transmission range of conveyer belt conveying mechanism can It is adjusted according to the distance between pickup point and set-point, application is more flexible, more improve and pick and place efficiency and pick and place precision.
Brief description
Fig. 1 a is rotation work schematic diagram in this utility model embodiment one device high speed fetching device vertical plane;
Fig. 1 b picks and places assembly and is vertically hung in vertical plane for this utility model embodiment one device high speed fetching device and turns Dynamic conveyer belt side operating diagram;
Fig. 1 c simultaneously drives for this utility model embodiment one vertical braking device assembly and multiple picks and places component diagram;
Fig. 2 is this utility model embodiment two device high speed fetching device operating diagram;
Fig. 3 is respectively to pick and place assembly relative status in the operation of this utility model embodiment two device high speed fetching device to illustrate Figure;
Fig. 4 is the operating diagram of this utility model embodiment two device high speed fetching device flip-chip;
Fig. 5 is this utility model embodiment three device high speed fetching device operating diagram;
In conjunction with accompanying drawing, it is explained as follows:
1- rotary type transfer assembly, 11- conveyer belt, 12- vertical braking device assembly, 13- rotating disk, 14- drive mechanism, 2- takes Put assembly, 3- first microscope carrier, 31- pickup point, 4- first travel mechanism, 5- second microscope carrier, 51- set-point, 6- second moving machine Structure, 7- device, 8- mechanical arm, 81- picks and places part, 9- substrate.
Specific embodiment
For enabling this utility model more understandable, below in conjunction with the accompanying drawings specific embodiment of the present utility model is done in detail Thin explanation.For convenience of description, in the structure of embodiment accompanying drawing, each ingredient does not press normal rates scaling, therefore does not represent enforcement The actual relative size of each structure in example.
Embodiment 1
Referring to Fig. 1 a, it is the side view of this utility model one device high speed fetching device, this device high speed fetching device bag Include rotary type transfer assembly 1, uniform intervals are arranged on described rotary type transfer assembly some pick and place assembly 2, is located at device One first microscope carrier 3 of pick-up area, drive described first microscope carrier move in the horizontal plane and position the first travel mechanism 4, be located at Second microscope carrier 5 and second travel mechanism 6 driving described second microscope carrier to move in the horizontal plane and position of device rest area.
As a kind of preferred embodiment, used here as conveyer belt conveying mechanism as rotary type transfer assembly.Conveyer belt is defeated Mechanism is sent to include bracing frame, the conveyer belt 11 being installed on bracing frame and drive this conveyer belt periodic rotary on bracing frame Power source (such as motor), motor can be real through decelerator, driving gear set (driving gear and driven gear etc.) etc. Now drive the function of conveyer belt periodic rotary, this is conveyer belt conveying mechanism common technology, will not be described here.Conveyer belt is defeated The kind of drive sending mechanism is not limited with driving gear set, as long as conveyer belt can be driven to rotate and stop.As one kind Preferred embodiment, conveyer belt is set to periodic rotary in vertical plane, and the top positioned at pick-up area and rest area, ascends the throne In the top of the first microscope carrier and the second microscope carrier, some assemblies 2 that pick and place are uniformly arranged on transmission belt surface, and power source is passed by driving Turning of moving gear group stops, and realizes conveyer belt rotating counterclockwise in perpendicular and stops, so that carrying device 7 reaches first The top of the set-point 51 on pickup point 31 top and the second microscope carrier on microscope carrier.Pick and place the pickup point that assembly reaches the first microscope carrier Behind the top of set-point on top and the second microscope carrier, need descending pickup and mask placement device, this function can adopt rotary type Transfer assembly and pick and place assembly at least one and can move up and down to realize, so that picking and placeing assembly to reach the pickup point on the first microscope carrier Set-point 51 position on 31 positions and the second microscope carrier, as a kind of preferred implementation, respectively picking and placeing assembly 2 can pass through respectively One vertical braking device assembly 12, picks and places assembly by the driving of vertical braking device assembly and moves up and down, to reach target area (pickup point or set-point) pickup and mask placement device.Vertical braking device assembly can adopt straight line cylinder, straight line electric cylinders, linear module Deng, such as adopt straight line cylinder, cylinder body is fixedly connected with transmission belt by mounting seat, the power output shaft of cylinder by turn Joint chair is fixedly connected with picking and placeing assembly, and the expanding-contracting action of cylinder can drive and pick and place assembly and move up and down.
Some assemblies that pick and place, can be successively in pickup point pickup device 7, in set-point under the drive of rotary type transfer assembly It is sequentially placed device 7;As a kind of preferred embodiment, pick and place the pickup of assembly and placement function can be realized by vacuum slot, In other embodiments, pick and place assembly to realize by the adsorption-type workpiece such as sucker, suction pad, Magnet, can also be other The assembly having pickup and placing function, such as clamp assemblies such as jaw, chuck or glutinous take assembly etc..
Described first microscope carrier, can be by mobile for device to be picked up on the first microscope carrier to picking up under described first travel mechanism drives Take a little, the device at set-point on the second microscope carrier, under described second travel mechanism drives, can be removed by described second microscope carrier.This Sample, carries device 7 to be picked up by the first microscope carrier 3 of pick-up area, and the second microscope carrier 5 carries device to be placed, the first microscope carrier and Second microscope carrier cooperation picks and places assembly and smoothly picks and places device and finishes, and both realize level by first, second travel mechanism respectively Movement in face and positioning.So, pick and place assembly pickup/place and during next picks and places assembly pickup/place upper one, the First, the second travel mechanism respectively real-time regulation device to be picked up and position to be placed be located at pick and place assembly down position (pickup point/ Set-point), realize continuously picking and placeing of device.For example, the first microscope carrier carries is wafer or the magazine after scribing, the second microscope carrier Upper carrying is another wafer, or substrate/support plate, or magazine, or braid.Put wafer after a scribing as on the first microscope carrier, the Another support plate wafer is placed on two microscope carriers, restructuring on wafer for the device can be completed by device high speed fetching device.
Above-mentioned first, second travel mechanism can be realized using two axial lines module, such as by the linear module of X-axis and Y-axis line Property module composition, the linear module of X-axis realizes the movement in left and right directions for the pickup point/set-point, and the linear module of Y-axis realizes pickup Point/set-point is in the movement of fore-and-aft direction.But it is not limited to this two axial lines module, other such as cylinder or electric cylinders may also be employed The mode promoting is realized.
To sum up, the operation principle of the present embodiment device high speed fetching device is as follows:
The transmission belt of transmission belt conveying mechanism rotates, and drives some vertical braking device assemblies thereon and some picks and places assembly Rotate, when picking and placeing assembly and reaching pickup point for first, rotary type transfer assembly stops operating, and vertical braking device assembly is driven simultaneously Move its corresponding pick and place assembly vertical drop, pickup device, then rise, rotary type transfer assembly is rotated further, and works as the next one When picking and placeing assembly arrival pickup point, rotary type transfer assembly here stops, and repeats above-mentioned picking action.Equally, when first When picking and placeing assembly arrival set-point of pickup device, rotary type transfer assembly stops operating, and vertical braking device assembly drives it right That answers picks and places assembly vertical drop, mask placement device, then rises, and rotary type transfer assembly is rotated further, when the next one picks and places group When part reaches set-point, rotary type transfer assembly here stops, and repeats above-mentioned placement action.When being embodied as, can be to pickup point It is adjusted with set-point, make pickup and place synchronous carrying out.While pickup and placement, the first microscope carrier of pick-up area is Move horizontally under the driving of one travel mechanism, device to be picked up is moved successively to pickup point, the second microscope carrier of rest area is the Move horizontally under the driving of two travel mechanisms, will device position movement be put to set-point.So, with the rotation of conveyer belt, Can be in pickup point successively continuous pickup device, transmission reaches set-point and is sequentially placed device, and the first microscope carrier and the second microscope carrier water Translation is dynamic, and device to be picked up and device position to be placed are moved respectively to pickup point and set-point, and pickup and placement action are same Step, significantly shorten pickup and placement cycle, is greatly improved and picks and places efficiency.Here, the conveyer belt of conveyer belt conveying mechanism can be real Existing longer-distance continuous conveying, fully meets device and the distance between picks and places needs, solve mechanical arm lengthening, complete Once pick and place action, the time is mainly expended during arm swings back and forth, the problem that efficiency can reduce;And pick and place the shifting of assembly Move and only move up and down, microscope carrier cooperation moves in the horizontal direction, and action is simple, improves the overall speed of service and picks and places essence Degree, solves mechanical arm action complexity, can have the problem of considerable influence to picking and placeing speed.More preferably, conveyer belt conveying mechanism Transmission range can be adjusted according to the distance between pickup point and set-point, application is more flexible, more improves and picks and places effect Rate and pick and place precision.
In other embodiment, conveyer belt is set to rotate in perpendicular, picks and places assembly and keeps vertically being hung on conveyer belt A side, referring to Fig. 1 b.
In other embodiment, conveyer belt is set to periodic rotary in the horizontal plane, and is located at pick-up area and rest area Top, that is, be located at the top of the first microscope carrier and the second microscope carrier, and some assemblies that pick and place are uniformly arranged on conveyer belt side.
It is also possible to control overall the moving up and down of conveyer belt in other embodiment, reach target to specify and to pick and place assembly Region (pickup point or set-point) pickup and mask placement device.
In other embodiments, at least two can be had to pick and place assembly decline pickup simultaneously and/or place many devices, with Increase pickup and/or place speed;At least two can also be simultaneously driven to pick and place on assembly by a vertical braking device assembly Lower movement, referring to Fig. 1 c, when this vertical braking device assembly declines, picks up simultaneously/places many devices, improve pickup and/or put Put speed.
In other embodiments, conveyer belt could alternatively be transmission chain, and that is, rotary type transfer assembly adopts chain-type defeated Send mechanism, chain conveyor structure is prior art, will not be described here.
Above-mentioned rotary type transfer assembly, vertical braking device assembly, pick and place assembly, first, second travel mechanism by one central authorities Control system controls its operating or stops.Central control system such as computer system, embedded system etc., in figure is not shown.
Embodiment 2
Referring to Fig. 2, it is the side view of another embodiment of this utility model device high speed fetching device, it is with embodiment 1 not It is with part, conveyer belt direction of transfer is to rotate clockwise, in pick-up area with rest area relative direction (as Fig. 1 a, Fig. 1 b, figure 2), in the case of constant, this load mode contained device transport distance is more than counterclockwise.The phase can be picked and placeed according to a device Interior, if to need to do other operations or test stops, and select different load modes.
As shown in figure 3, respectively picking and placeing assembly relative status in the operation of this utility model embodiment 2 device high speed fetching device Schematic diagram, this embodiment by vertical braking assembly corresponding one pick and place assembly as a example.In the t1 moment, a picks and places assembly and moves To above the device to be taken of pick-up area, conveyer belt stops;T2 moment a picks and places assembly corresponding vertical braking assembly and will pick and place under assembly Move on device, and hold device;T3 moment a picks and places assembly corresponding vertical braking assembly and will pick and place and moves to initial height on assembly Degree;Power source drives conveyer belt to move clockwise, and t4 moment b picks and places assembly movement to above the device to be taken of pick-up area, conveyer belt Stop, the r simultaneously picking up device picks and places assembly movement to above the position to be placed of rest area, conveyer belt stops;T5 moment b takes Put assembly and r is picked and placeed assembly and moved down by respective vertical braking assembly, b picks and places assembly and picks up next device, and r picks and places assembly and releases Put contained device;T6 moment b picks and places assembly and r picks and places assembly and rises to elemental height by respective vertical braking assembly, transmission Band logical over-driving device continues to move clockwise, repeats the action of t4 to t6 period.
In the present embodiment, a mechanical arm 8 can be added, as shown in Figure 4.As in pick-up area, device is the back of the body of wafer-level packaging Cut chip, that is, chip soldered ball faces up and is arranged in pick-up area, pick and place the soldered ball face of assembly absorption chip, transmitted by conveyer belt, attached Plus mechanical arm end setting one pick and place part 81, such as suction nozzle or sucker, mechanical arm 8 draws a chip, is placed directly into Another substrate such as pcb board 9, the flip chip bonding of achievable chip, it is to avoid chip rotary movement.
Embodiment 3
Referring to Fig. 5, it is the side view of the another embodiment of this utility model device high speed fetching device, with embodiment 1 not It is with part, the rotary transfer machine structure that use level direction rotates is as rotary type transfer assembly, rotary transfer machine structure Including the drive mechanism 14 of rotating disk 13 and driving rotating disk rotation, so, some assemblies 2 that pick and place can be uniformly arranged on disk lower surface Or side.The rotation in the horizontal plane of drive mechanism driving rotating disk and stopping, so that carrying device reaches pickup point and placement Point.Equally, respectively pick and place assembly can realize moving up and down by a vertical braking device assembly respectively, to reach target area (pickup point or set-point) pickup and mask placement device.
It is also possible to control overall the moving up and down of rotating disk in other embodiment, reach target area to specify and to pick and place assembly Domain (pickup point or set-point) pickup and mask placement device.
In other embodiment, rotary transfer machine structure can be deformed into rotating rod type conveying mechanism, if that is, include rotate body and Dry uniformly arrangement located at the described bull stick rotating on body, vertical braking device assembly and pick and place assembly and be installed on this bull stick.Logical Cross vertical braking device assembly and drive and pick and place assembly and move up and down.
Above example is referring to the drawings, and preferred embodiment of the present utility model is described in detail.The skill of this area Art personnel by above-described embodiment is carried out with the modification on various forms or change, but without departing substantially from substantive feelings of the present utility model Under condition, all fall within protection domain of the present utility model.

Claims (8)

1. a kind of device high speed fetching device it is characterised in that:It is arranged at institute including rotary type transfer assembly (1), uniform intervals That states on rotary type transfer assembly some pick and place assembly (2), is located at one first microscope carrier (3) of device pick-up area, drives described the The first travel mechanism (4), the second microscope carrier (5) being located at device rest area and driving that one microscope carrier moves in the horizontal plane and positions The second travel mechanism (6) that described second microscope carrier moves in the horizontal plane and positions;Described rotary type transfer assembly can be periodically Rotate the transmission assembly that picks and places thereon and reach device pick-up area and device rest area;Described rotary type transfer assembly and described pick and place Assembly at least one can move up and down, make described in pick and place assembly reach the first microscope carrier on default pickup point (31) and the second microscope carrier Upper default set-point (51);Some described assemblies that pick and place, under the drive of rotary type transfer assembly, pick up dot picking successively Device (7), is sequentially placed device in set-point;Described first microscope carrier, under described first travel mechanism drives, can carry first On platform, to pickup point, described second microscope carrier, can be by the second microscope carrier under described second travel mechanism drives for device movement to be picked up Upper device position movement to be placed is to set-point.
2. device high speed fetching device according to claim 1 it is characterised in that:Described rotary type transfer assembly is transmission Belt type conveying mechanism or chain conveyor structure or rotary transfer machine structure or rotating rod type conveying mechanism.
3. device high speed fetching device according to claim 1 it is characterised in that:The transmission of described rotary type transfer assembly Distance can be adjusted according to the distance between pickup point and set-point.
4. device high speed fetching device according to claim 1 it is characterised in that:The described assembly that picks and places can move up and down When, described rotary type transfer assembly includes rotating body and some uniform arrangements located at the described vertical braking device rotating on body Assembly (12), picks and places assembly described in vertical braking device assembly drives and moves up and down.
5. device high speed fetching device according to claim 4 it is characterised in that:Described vertical braking device assembly is driven simultaneously Dynamic at least two pick and place assembly moves up and down.
6. device high speed fetching device according to claim 1 it is characterised in that:Described first microscope carrier and described second load Wafer or magazine or braid or support plate are carried on platform.
7. device high speed fetching device according to claim 1 it is characterised in that:Also include for controlling described rotary type Transfer assembly, described pick and place assembly, described first travel mechanism, the central control system of described second travel mechanism start.
8. device high speed fetching device according to claim 1 it is characterised in that:Also include a mechanical arm (8), described Mechanical arm picks and places device on assembly described in can picking up, and is placed on a substrate (9).
CN201620887891.1U 2016-08-17 2016-08-17 Device is put to high -speed getting of device Active CN205953021U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106115260A (en) * 2016-08-17 2016-11-16 华天科技(昆山)电子有限公司 Device high speed fetching device
CN107265097A (en) * 2017-06-26 2017-10-20 北京林业大学 A kind of ferromagnetism plate parts turn-over rig
CN110137120A (en) * 2018-02-02 2019-08-16 盟立自动化股份有限公司 Layout system is transported in automation
TWI834323B (en) * 2022-09-30 2024-03-01 鴻勁精密股份有限公司 Processing device having tray-transporting mechanism and processing machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106115260A (en) * 2016-08-17 2016-11-16 华天科技(昆山)电子有限公司 Device high speed fetching device
CN107265097A (en) * 2017-06-26 2017-10-20 北京林业大学 A kind of ferromagnetism plate parts turn-over rig
CN107265097B (en) * 2017-06-26 2019-10-25 北京林业大学 A kind of ferromagnetism plate parts turn-over rig
CN110137120A (en) * 2018-02-02 2019-08-16 盟立自动化股份有限公司 Layout system is transported in automation
TWI834323B (en) * 2022-09-30 2024-03-01 鴻勁精密股份有限公司 Processing device having tray-transporting mechanism and processing machine

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