CN208315521U - A kind of tube furnace loading and unloading system - Google Patents

Abstract

The utility model discloses a kind of tube furnace loading and unloading system, including feeding device, blanking device, manipulator；Transmission device in the feeding device is used to for the silicon wafer on guide card gaily decorated basket device being sequentially delivered to caching gaily decorated basket device, transfer platform device, and the transmission device in blanking device is used to for the silicon wafer on transfer platform device to be sequentially delivered to caching gaily decorated basket device, guide card gaily decorated basket device；The manipulator is used to draw silicon wafer feeding from transfer stage apparatus or puts silicon wafer to transfer platform device blanking.The utility model can realize the loading and unloading simultaneously of multi-disc silicon wafer, shorten the loading and unloading time, while can meet more silicon wafers before feeding while position, structure is simple, high-efficient.

Description

A kind of tube furnace loading and unloading system

Technical field

The utility model relates to solar battery or technical field of manufacturing semiconductors more particularly to a kind of tube furnace loading and unloading System.

Background technique

Tube furnace is used for diffusion, the coating process of semicon industry and photovoltaic industry.The feeding side of horizontal pipe furnace at present Formula have developed rapidly, high-efficient, and production capacity is high；Vertical tubular furnace slowly falls behind relatively relatively since loading and unloading mode develops.But it is vertical Formula tube furnace relative to horizontal pipe furnace have the advantages that plant area occupy it is small, fragment rate is extremely low, around plate it is small, without card slot print.? Silicon wafer is more and more thinner, and battery efficiency requires under higher and higher trend, and the market of vertical tubular furnace is increasing.

For horizontal pipe furnace, the production capacity of vertical tubular furnace is general at present, wherein the work effect of loading and unloading system Not high rate is its main cause.Most of handling equipment grabs silicon wafer by a manipulator one by one and is put into boiler tube or from furnace It is taken out in pipe.This handling equipment is able to achieve function, but opposite at high cost, and capacity efficiency is low.

Utility model content

The purpose of the utility model is to provide a kind of tube furnace loading and unloading system, multi-disc silicon wafer loading and unloading simultaneously, in shortening The blanking time, while more silicon wafers before feeding can be met while being positioned, structure is simple, high-efficient.

To achieve the above object, using following technical scheme:

A kind of tube furnace loading and unloading system, including feeding device, blanking device, manipulator；The feeding device, blanking dress Set includes guide card gaily decorated basket device, caching gaily decorated basket device, transfer platform device, transmission device；The feeding device or blanking dress Guide card gaily decorated basket device, caching gaily decorated basket device, the transfer platform device set are distributed on straight line in a first direction；The biography Send device for transmitting silicon wafer between guide card gaily decorated basket device, caching gaily decorated basket device, transfer platform device；The manipulator is used It puts in the absorption silicon wafer feeding from transfer stage apparatus or by silicon wafer to transfer platform device blanking；The transfer platform device packet Include the first platform board, several positioning mechanisms, the first driving mechanism；The first platform board top layout has several first conveyer belts Mechanism, the first conveyer mechanism are used to accept the silicon wafer of transmission device transmission or silicon wafer are sent to transmission device；Every 1 One conveyer mechanism corresponds to a positioning mechanism；First driving mechanism is for driving the first platform board mobile and driving localization machine Structure positions the silicon wafer on the first conveyer mechanism.

Preferably, first conveyer mechanism, positioning mechanism are respectively set as four, the movement of 4 first conveyer mechanisms Direction is arranged along first direction；Every two first conveyer mechanism is one group, two group of first conveyer mechanism parallel arrangement.

Preferably, first driving mechanism includes studdle, rotation driving mould group, the first X-axis driving mould group, first Y-axis drives mould group, the first Z axis to drive mould group；The studdle is set in the middle part of the first platform board, with each positioning mechanism through one It is driven band connection；The rotation driving mould group is for driving studdle rotation that positioning mechanism is driven to realize positioning；First X Axis driving mould group, the first Y-axis driving mould group, the first Z axis driving Mo Zu be used to driving respectively the first platform board along the x axis, Y-axis Direction, Z-direction are mobile.

Preferably, the positioning mechanism includes four locating pieces, four drive rods, a positioning rod；Four locating piece distinguishes cloth It sets in four sides of the first conveyer mechanism, locating rod is located at the centre of four locating pieces, locating rod and every a positioning block through a transmission Bar connection；The studdle and locating rod are driven band connection, and rotation driving mould group is for driving studdle to drive positioning Bar rotation is to realize four locating piece clampings or unclamp silicon wafer.

Preferably, the transfer platform device further includes the second platform board；It is flat that second platform board is set to first in parallel Below platen, the first platform board engages to form interlayer with the second platform board, and rotation driving mould group, the first X-axis drive mould group, first Y-axis driving mould group, the first Z axis driving mould group, drive rod, transmission belt, locating rod are contained in the interlayer；First platform board pair Locating piece is answered to be equipped with chute hole, corresponding studdle is equipped with movable through-hole.

Preferably, the manipulator includes mechanical arm driving mechanism, mechanical arm, sucker；The sucker bottom is equipped with several Adsorption potential, each adsorption potential are equipped with several suction nozzles；The quantity of the adsorption potential and the first conveyer mechanism and position one are a pair of It answers；The mechanical arm driving mechanism is for driving mechanical armband to move sucker movement.

Preferably, the transmission device includes the second conveyer mechanism, at least two deviation correction mechanisms；The second conveyer belt machine Structure is moved along first direction, and deviation correction mechanism is set to transfer platform device and caches the second conveyer mechanism two between gaily decorated basket device Side.

Preferably, the deviation correction mechanism includes deviation rectifying leather belt, correction column spinner, correction driving motor；The correction rotation Column is for being tensioned and being oriented to deviation rectifying leather belt, the guide direction fortune that correction driving motor is used to drive deviation rectifying leather belt along correction column spinner It is dynamic, and its movement velocity is consistent with the movement velocity of the second conveyer mechanism.

Preferably, the guide card gaily decorated basket device includes the second driving mechanism, the guide card gaily decorated basket；The guide card gaily decorated basket is in vertical side It is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；One end of second conveyer mechanism It is placed in the guide card gaily decorated basket, the second driving mechanism is used to that the guide card gaily decorated basket to be driven to go up and down so that the silicon wafer in the guide card gaily decorated basket adapts to the second biography The height of tape-feed.

Preferably, the caching gaily decorated basket device includes third driving mechanism, the caching gaily decorated basket；The caching gaily decorated basket is in vertical side It is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；Second conveyer mechanism passes through slow Gaily decorated basket arrangement is deposited, third driving mechanism is used to that the caching gaily decorated basket to be driven to go up and down so that the silicon wafer in the caching gaily decorated basket adapts to the second conveyer belt The height of mechanism.

Using the above scheme, the beneficial effects of the utility model are:

1) multi-disc silicon wafer can be once gone up, the piece number of each feeding depends on the quantity of the first conveyer mechanism and adsorption potential. The loading and unloading simultaneously of multi-disc silicon wafer, shorten the loading and unloading time, and manipulator once picks and places, and increase the production capacity of loading and unloading, a set of upper and lower Material system can meet greater number of boiler tube, improve automation loading and unloading efficiency, increase equipment capacity.Compared to monolithic feeding, The utility model structure is simple, it is high-efficient, at low cost, occupy little space, be more suitable for the use of thick boiler tube (high production capacity) type equipment；

2) it is acted on by the linkage of the first driving mechanism, the silicon wafer on several first conveyer mechanisms may be implemented in feeding extremely It is positioned while before boiler tube.

Detailed description of the invention

Fig. 1 is the perspective view of the utility model；

Fig. 2 is the perspective view of the transfer platform device of the utility model；

Fig. 3 is the perspective view that Fig. 2 saves the first conveyer mechanism, the first platform board；

Wherein, description of drawing identification:

1-feeding device, 2-blanking devices,

3-manipulators, 11-guide card gaily decorated basket devices,

12-caching gaily decorated basket devices, 13-transfer platform devices,

14-transmission devices, 31-mechanical arms,

32-suckers, the 131-the first platform board,

132-positioning mechanisms, the 133-the first driving mechanism,

134-the first conveyer mechanism, the 135-the second platform board,

141-the second conveyer mechanism, 142-deviation correction mechanisms,

1321-locating pieces, 1322-drive rods,

1323-locating rods, 1331-studdles,

1332-transmission belts.

Specific embodiment

Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.

Shown in 3, the utility model provides a kind of tube furnace loading and unloading system, including feeding device 1, blanking Device 2, manipulator 3；The feeding device 1, blanking device 2 include guide card gaily decorated basket device 11, caching gaily decorated basket device 12, transfer Stage apparatus 13, transmission device 14；Guide card gaily decorated basket device 11, caching gaily decorated basket device in the feeding device 1 or blanking device 2 12, on the straight line of the distribution of transfer platform device 13 in a first direction；The transmission device 14 is used for silicon wafer in guide card flower Basket device 11, caching gaily decorated basket device 12 transmit between transfer platform device 13, when feeding by silicon wafer from guide card gaily decorated basket device 11 according to It is secondary to be sent to caching gaily decorated basket device 12 (keep in, may be directly over), transfer platform device 13；When blanking therefrom by silicon wafer Turn stage apparatus 13 and is sequentially delivered to caching gaily decorated basket device 12 (may keep in, may be directly over), guide card gaily decorated basket device 11；Institute Manipulator 3 is stated for drawing silicon wafer feeding from transfer stage apparatus 13 or putting silicon wafer to 13 blanking of transfer platform device；Institute Stating transfer platform device 13 includes the first platform board 131, several positioning mechanisms 132, the first driving mechanism 133；Described first is flat 131 top layout of platen has several first conveyer mechanisms 134, and the first conveyer mechanism 134 is for accepting the biography of transmission device 14 Silicon wafer is sent on transmission device 14 by the silicon wafer that send；The corresponding positioning mechanism 132 of every one first conveyer mechanism 134；Institute State the first driving mechanism 133 for drive the first platform board 131 it is mobile and drive positioning mechanism 132 to the first conveyer mechanism Silicon wafer positioning on 134.

Wherein, first conveyer mechanism 134, positioning mechanism 132 are respectively set as four, 4 first conveyer mechanisms 134 direction of motion is arranged along first direction；Every two first conveyer mechanism 134 is one group, two group of first conveyer mechanism 134 Parallel arrangement.First driving mechanism 133 includes studdle 1331, rotation driving mould group (not shown), the first X-axis Mould group (not shown), the first Y-axis driving mould group (not shown), the first Z axis is driven to drive mould group (not shown)； The studdle 1331 is set to 131 middle part of the first platform board, connect with each positioning mechanism 132 through a transmission belt 1332；Institute Rotation driving mould group is stated for driving the rotation of studdle 1331 that positioning mechanism 132 is driven to realize positioning；The first X-axis driving Mould group, the first Y-axis driving mould group, the first Z axis driving Mo Zu be used to driving respectively the first platform board 131 along the x axis, Y-axis side It is mobile to, Z-direction.

The positioning mechanism 132 includes four locating pieces 1321, four drive rods 1322, a positioning rod 1323；Four positioning Block 1321 is arranged in four sides of the first conveyer mechanism 134, and locating rod 1323 is located at the centre of four locating pieces 1321, positioning Bar 1323 is connect with every a positioning block 1321 through a drive rod 1322；The studdle 1331 is with locating rod 1323 through transmission belt 1332 connections, rotation driving mould group is for driving studdle 1331 to drive the rotation of locating rod 1323 to realize four locating pieces 1321 Silicon wafer is unclamped in clamping.The transfer platform device 13 further includes the second platform board 135；Second platform board 135 is set in parallel In the lower section of the first platform board 131, the first platform board 131 engage to form interlayer with the second platform board 135, rotates and drives mould group, the One X-axis drives mould group, the first Y-axis driving mould group, the first Z axis to drive mould group, drive rod 1322, transmission belt 1332, locating rod 1323 are contained in the interlayer；The corresponding locating piece 1321 of first platform board 131 is equipped with chute hole, and corresponding studdle 1331 is set There is movable through-hole.

The manipulator 3 includes mechanical arm driving mechanism, mechanical arm 31, sucker 32；32 bottom of sucker is equipped with several Adsorption potential, each adsorption potential are equipped with several suction nozzles；The quantity of the adsorption potential and the first conveyer mechanism 134 and position are one by one It is corresponding；The mechanical arm driving mechanism is for driving mechanical arm 31 that sucker 32 is driven to move.The transmission device 14 includes second Conveyer mechanism 141, at least two deviation correction mechanisms 142；Second conveyer mechanism 141 is moved along first direction, deviation correction mechanism 142 are set to transfer platform device 13 and cache 141 two sides of the second conveyer mechanism between gaily decorated basket device 12.The deviation correction mechanism 142 include deviation rectifying leather belt, correction column spinner, correction driving motor；The correction column spinner is used to being tensioned and being oriented to deviation rectifying leather belt, Correction driving motor is used to that deviation rectifying leather belt to be driven to move along the guide direction of correction column spinner, and its movement velocity and the second transmission Movement velocity with mechanism 141 is consistent.

The guide card gaily decorated basket device 11 includes the second driving mechanism, the guide card gaily decorated basket；The guide card gaily decorated basket is in the vertical direction Several gaily decorated basket teeth are equipped at intervals with, several horizontal bearing slots for placing silicon wafer are formed；It sets one end of second conveyer mechanism 141 In in the guide card gaily decorated basket, the second driving mechanism is used to that the guide card gaily decorated basket to be driven to go up and down so that the silicon wafer in the guide card gaily decorated basket adapts to the second transmission Height with mechanism 141.

The caching gaily decorated basket device 12 includes third driving mechanism, the caching gaily decorated basket；The caching gaily decorated basket is in the vertical direction Several gaily decorated basket teeth are equipped at intervals with, several horizontal bearing slots for placing silicon wafer are formed；Second conveyer mechanism 141 passes through caching Gaily decorated basket arrangement, third driving mechanism are used to that the caching gaily decorated basket to be driven to go up and down so that the silicon wafer in the caching gaily decorated basket adapts to the second conveyer belt machine The height of structure 141.

Utility model works principle:

In the utility model, caching gaily decorated basket device 12 is mainly used for caching silicon wafer, and during feeding, silicon wafer is by caching The effect of the gaily decorated basket is broadly divided into following several:

1) silicon wafer flows directly into transfer platform device 13 by caching gaily decorated basket device 12 (silicon wafer does not stop)；

2) when manipulator 3 does not in time take the silicon wafer in transfer platform device 13 away, from 11 mistake of guide card gaily decorated basket device The silicon wafer come is with regard to temporary cache in caching gaily decorated basket device 12；

3) after complete on the silicon wafer in guide card gaily decorated basket device 11, during replacement fully loaded guide card gaily decorated basket device 11, caching Silicon wafer in gaily decorated basket device 12 continues to flow to transfer platform device 13, to guarantee working continuously for feeding.

The adsorption potential of sucker 32 is consistent with 134 quantity of the first conveyer mechanism in transfer platform device 13, and sucker 32 can Use vacuum sucking holes or bernoulli gripper two ways.Second driving mechanism (not shown), third driving mechanism are (in figure not Show) the corresponding gaily decorated basket can be driven to go up and down so that transmission device 14 can one by one by silicon wafer be sent to the gaily decorated basket horizontal bearing slot or Silicon wafer is sent out one by one from the horizontal bearing slot of the gaily decorated basket.Top lifting can be used in second driving mechanism, third driving mechanism The structure of the gaily decorated basket, can also be using the structure in gaily decorated basket bottom mounting lifting platform, as long as being able to satisfy driving gaily decorated basket lifting.

Feeding process:

1) silicon wafer is transmitted through the second conveyer mechanism 141, reaches first group of first biography from the guide card gaily decorated basket by the caching gaily decorated basket Tape-feed 134；Wherein, 141 two sides of the second conveyer mechanism between transfer platform device 13 and caching gaily decorated basket device 12 Equipped with deviation correction mechanism 142, when silicon wafer is offset on the second conveyer mechanism 141, deviation correction mechanism 142 is gradually touched with silicon wafer To correct the position of silicon wafer；The revolving speed of deviation rectifying leather belt is consistent with 141 speed of the second conveyer mechanism, to reduce silicon wafer and correction skin The friction of band；

2) the first X-axis driving mould group (X-direction is parallel to 141 direction of motion of the second conveyer mechanism), the driving of the first Y-axis Mould group drives studdle 1331 to drive first/second platform board 131/135 mobile, so that second group of first conveyer mechanism 134 alignment 141 feedings of the second conveyer mechanism；

3) the first Z axis driving mould group driving studdle 1331 rise in movable through-hole, with drive locating piece 1321 from Rise in through-hole (because being connected between studdle 1331 and locating rod 1323 through transmission belt 1332, locating rod 1323 and locating piece 1321 connect through drive rod 1322), the height after the rising of locating piece 1321 is more than the height of silicon wafer；

4) rotation driving mould group driving studdle 1331 rotates, to drive locating rod 1323 to rotate, in locating rod Drive rod 1322 is driven to move in 1323 rotary courses, locating rod 1323 involves the movement of locating piece 1321 to reduce locating rod 1323 With the spacing of locating piece 1321, locating piece 1321 is slided in chute hole to realize and position to silicon wafer clamping；

5) after the completion of to silicon wafer positioning, the rotation of studdle 1331 drives locating piece 1321 to unclamp, decline resets；

6) mechanical arm 31 drives the adsorption potential of sucker 32 downward on the first conveyer mechanism 134 of transfer platform device 13 Four silicon wafers are picked up；

7) mechanical arm 31 drives sucker 32 will be in the multilayered structure of silicon wafer intercalation reaction boiler tube.

Blanking process (it is similar with the inverted order of feeding process, there can be deviation correction mechanism 142 in blanking device, can also not rectify a deviation Mechanism 142):

After the completion of boiler tube process, one layer of four silicon wafer will be taken out from the high production capacity boiler tube for completing process by manipulator 3, put Enter on the transfer platform device 13 of blanking device 2, closes the air valve of sucker 32, lifted after putting down silicon wafer, the first driving mechanism 133 First/second platform board 131/135 is driven to move, so that two group of first conveyer mechanism 134 is successively directed at the second conveyer belt machine 141 blanking of structure, by the caching gaily decorated basket into the guide card gaily decorated basket.

The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle Within the scope of shield.

Claims (10)

1. a kind of tube furnace loading and unloading system, which is characterized in that including feeding device, blanking device, manipulator；The feeding dress It sets, blanking device includes guide card gaily decorated basket device, caching gaily decorated basket device, transfer platform device, transmission device；The feeding device Or guide card gaily decorated basket device, caching gaily decorated basket device, the straight line of transfer platform device distribution in a first direction in blanking device On；The transmission device is used to transmit silicon wafer between guide card gaily decorated basket device, caching gaily decorated basket device, transfer platform device；Institute Manipulator is stated for drawing silicon wafer feeding from transfer stage apparatus or putting silicon wafer to transfer platform device blanking；The transfer Stage apparatus includes the first platform board, several positioning mechanisms, the first driving mechanism；The first platform board top layout has several First conveyer mechanism, the first conveyer mechanism are used to accept the silicon wafer of transmission device transmission or silicon wafer are sent to transmission device On；The corresponding positioning mechanism of every one first conveyer mechanism；First driving mechanism for driving the first platform board mobile and Positioning mechanism is driven to position the silicon wafer on the first conveyer mechanism.

2. tube furnace loading and unloading system according to claim 1, which is characterized in that first conveyer mechanism, positioning Mechanism is respectively set as four, and the direction of motion of 4 first conveyer mechanisms is arranged along first direction；Every two first conveyer mechanism It is one group, two group of first conveyer mechanism parallel arrangement.

3. tube furnace loading and unloading system according to claim 1, which is characterized in that first driving mechanism includes platform Pillar, rotation driving mould group, the first X-axis driving mould group, the first Y-axis driving mould group, the first Z axis drive mould group；The platform branch Column is set in the middle part of the first platform board, with each positioning mechanism through a transmission band connection；The rotation driving mould group is flat for driving The rotation of platform pillar drives positioning mechanism to realize positioning；The first X-axis driving mould group, the first Y-axis driving mould group, the first Z axis drive Dynamic model group be respectively used for driving the first platform board along the x axis, Y direction, Z-direction it is mobile.

4. tube furnace loading and unloading system according to claim 3, which is characterized in that the positioning mechanism includes four positioning Block, four drive rods, a positioning rod；Four locating piece is arranged in four sides of the first conveyer mechanism, and locating rod is located at four The centre of locating piece, locating rod are connect with every a positioning block through a drive rod；The studdle and locating rod connect through transmission belt It connects, rotation driving mould group realizes four locating piece clampings for driving studdle to drive locating rod rotation or unclamps silicon wafer.

5. tube furnace loading and unloading system according to claim 4, which is characterized in that the transfer platform device further includes Two platform boards；Second platform board is set in parallel below the first platform board, and the first platform board engages to be formed with the second platform board Interlayer, rotation driving mould group, the first X-axis driving mould group, the first Y-axis driving mould group, the first Z axis drive mould group, drive rod, transmission Band, locating rod are contained in the interlayer；First platform board corresponds to locating piece equipped with chute hole, and corresponding studdle is equipped with activity Through-hole.

6. tube furnace loading and unloading system according to claim 2, which is characterized in that the manipulator includes mechanical arm driving Mechanism, mechanical arm, sucker；The sucker bottom is equipped with several adsorption potentials, and each adsorption potential is equipped with several suction nozzles；The absorption Position is corresponded with the quantity of the first conveyer mechanism and position；The mechanical arm driving mechanism is for driving mechanical armband is dynamic to inhale Disk movement.

7. tube furnace loading and unloading system according to claim 1, which is characterized in that the transmission device includes the second transmission Band mechanism, at least two deviation correction mechanisms；Second conveyer mechanism is moved along first direction, and deviation correction mechanism is filled set on transfer platform Set and cache the second conveyer mechanism two sides between gaily decorated basket device.

8. tube furnace loading and unloading system according to claim 7, which is characterized in that the deviation correction mechanism includes correction skin Band, correction column spinner, correction driving motor；The correction column spinner is for being tensioned and being oriented to deviation rectifying leather belt, driving motor of rectifying a deviation For driving deviation rectifying leather belt to move along the guide direction of correction column spinner, and the movement of its movement velocity and the second conveyer mechanism Speed is consistent.

9. tube furnace loading and unloading system according to claim 7, which is characterized in that the guide card gaily decorated basket device includes second Driving mechanism, the guide card gaily decorated basket；The guide card gaily decorated basket is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several placement silicon wafers Horizontal bearing slot；One end of second conveyer mechanism is placed in the guide card gaily decorated basket, and the second driving mechanism is for driving guide card The gaily decorated basket is gone up and down so that the silicon wafer in the guide card gaily decorated basket adapts to the height of the second conveyer mechanism.

10. tube furnace loading and unloading system according to claim 7, which is characterized in that the caching gaily decorated basket device includes the Three driving mechanisms, the caching gaily decorated basket；The caching gaily decorated basket is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several placement silicon The horizontal bearing slot of piece；Second conveyer mechanism passes through caching gaily decorated basket arrangement, and third driving mechanism is for driving caching flower Basket is gone up and down so that the silicon wafer in the caching gaily decorated basket adapts to the height of the second conveyer mechanism.