CN208315522U - A kind of efficient tube furnace loading and unloading system - Google Patents
A kind of efficient tube furnace loading and unloading system Download PDFInfo
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- CN208315522U CN208315522U CN201821038840.7U CN201821038840U CN208315522U CN 208315522 U CN208315522 U CN 208315522U CN 201821038840 U CN201821038840 U CN 201821038840U CN 208315522 U CN208315522 U CN 208315522U
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- decorated basket
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of efficient tube furnace loading and unloading system, conveyor-belt apparatus is used to transmit silicon wafer between guide card gaily decorated basket device, caching gaily decorated basket device, transfer gaily decorated basket device, and one end of conveyor-belt apparatus can pass in and out inside it from the first side of transfer gaily decorated basket device is flexible；The manipulator is used to be inserted into along the second direction perpendicular to first direction from the adjacent side of the first side of transfer gaily decorated basket device of each feeding device or blanking device, is disposably put into several transfer gaily decorated basket device blankings by the silicon chip extracting feeding in several transfer gaily decorated basket devices or by silicon wafer.The loading and unloading simultaneously of the utility model multiple row silicon wafer, shorten the loading and unloading time, and manipulator once picks and places, and increase the production capacity of loading and unloading, and a set of loading and unloading system can meet greater number of boiler tube, improve automation loading and unloading efficiency, increase equipment capacity.
Description
Technical field
The utility model relates to solar battery or technical field of manufacturing semiconductors more particularly to a kind of efficient tube furnaces
Loading and unloading system.
Background technique
Tube furnace is used for diffusion, the coating process of semicon industry and photovoltaic industry.The feeding side of horizontal pipe furnace at present
Formula have developed rapidly, high-efficient, and production capacity is high；Vertical tubular furnace slowly falls behind relatively relatively since loading and unloading mode develops.But it is vertical
Formula tube furnace relative to horizontal pipe furnace have the advantages that plant area occupy it is small, fragment rate is extremely low, around plate it is small, without card slot print.?
Silicon wafer is more and more thinner, and battery efficiency requires under higher and higher trend, and the market of vertical tubular furnace is increasing.
For horizontal pipe furnace, the production capacity of vertical tubular furnace is general at present, wherein the work effect of loading and unloading system
Not high rate is its main cause.Most of handling equipment grabs silicon wafer by a manipulator one by one and is put into boiler tube or from furnace
It is taken out in pipe.This handling equipment is able to achieve function, but opposite at high cost, and capacity efficiency is low.
Utility model content
The purpose of the utility model is to provide a kind of efficient tube furnace loading and unloading system, multiple row silicon wafer while loading and unloading,
Shorten the loading and unloading time, manipulator once picks and places, and increases the production capacity of loading and unloading, a set of loading and unloading system can meet greater number
Boiler tube, improve automation loading and unloading efficiency, increase equipment capacity.
To achieve the above object, using following technical scheme:
A kind of efficient tube furnace loading and unloading system, including several feeding devices, several blanking devices, manipulator；It is described
Feeding device, blanking device include guide card gaily decorated basket device, caching gaily decorated basket device, transfer gaily decorated basket device, conveyor-belt apparatus；It is same
Guide card gaily decorated basket device, caching gaily decorated basket device, transfer gaily decorated basket device in feeding device or blanking device are distributed in a first direction
On straight line；The conveyor-belt apparatus be used for by silicon wafer guide card gaily decorated basket device, caching gaily decorated basket device, transfer gaily decorated basket device it
Between transmit, and one end of conveyor-belt apparatus can be from the flexible disengaging in the first side of transfer gaily decorated basket device inside it；The manipulator is used
In the phase along the second direction perpendicular to first direction from the first side of transfer gaily decorated basket device of each feeding device or blanking device
Adjacent side insertion is disposably put into several transfer gailys decorated basket dresses by the silicon chip extracting feeding in several transfer gaily decorated basket devices or by silicon wafer
Set blanking.
Preferably, the conveyor-belt apparatus includes conveyer belt, telescoping drive mechanism, at least two deviation correction mechanisms；The transmission
Band is moved along first direction, and telescoping drive mechanism is for driving inside conveyer belt one end disengaging transfer gaily decorated basket device；The correction
Mechanism is set to transfer gaily decorated basket device and caches the conveyor belt two sides between gaily decorated basket device.
Preferably, the deviation correction mechanism includes deviation rectifying leather belt, correction column spinner, correction driving motor；The correction rotation
Column is for being tensioned and being oriented to deviation rectifying leather belt, the guide direction fortune that correction driving motor is used to drive deviation rectifying leather belt along correction column spinner
It is dynamic, and its movement velocity is consistent with the movement velocity of conveyer belt.
Preferably, the transfer gaily decorated basket device includes the transfer gaily decorated basket, the first driving mechanism；The transfer gaily decorated basket is in vertical side
It is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；During first driving mechanism is installed on
Turn at the top of the gaily decorated basket, for driving the transfer gaily decorated basket mobile.
Preferably, first driving mechanism includes the first drive rod, the first X-axis driving mould group, the first Y-axis driving mould
Group, the first Z axis drive mould group；First drive rod is set to the top of the transfer gaily decorated basket, and the first X-axis drives mould group for driving the
One drive rod is moved along the direction of motion for being parallel to conveyer belt, and the first Y-axis drives mould group for driving the first drive rod along vertical
Mobile in the direction of motion of transmission belt, the first Z axis driving mould group is for driving the first drive rod to go up and down in the vertical direction.
Preferably, the transfer gaily decorated basket device further includes plectrum device；The plectrum device includes four plectrum bars, four plectrums
Bar driving mechanism；The four plectrums bar is respectively arranged in four sides of the transfer gaily decorated basket, and each plectrum bar driving mechanism is for driving one
Plectrum bar is stirred to correct the position of silicon wafer of the transfer gaily decorated basket.
Preferably, the transfer gaily decorated basket device further includes four detectors, four sides of the transfer gaily decorated basket are respectively arranged on, for detecting
The situation in place of silicon wafer.
Preferably, the guide card gaily decorated basket device includes the second driving mechanism, the guide card gaily decorated basket；The guide card gaily decorated basket is in vertical side
It is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；The other end of the conveyer belt, which is placed in, leads
In the piece gaily decorated basket, the second driving mechanism is used to that the guide card gaily decorated basket to be driven to go up and down the height so that the silicon wafer in the guide card gaily decorated basket adapts to conveyer belt
Degree.
Preferably, the caching gaily decorated basket device includes third driving mechanism, the caching gaily decorated basket；The caching gaily decorated basket is in vertical side
It is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；The conveyer belt passes through caching gaily decorated basket cloth
It sets, third driving mechanism is used to that the caching gaily decorated basket to be driven to go up and down so that the silicon wafer in the caching gaily decorated basket adapts to the height of conveyer belt.
Preferably, the manipulator includes mechanical arm driving mechanism, mechanical arm, several flat suckers；The mechanical arm drives
Motivation structure is for driving mechanical armband to move flat sucker movement；The quantity of the flat sucker and the horizontal bearing in the transfer gaily decorated basket
Slot number is consistent, several flat sucker parallel arrangements, and suction nozzle direction is consistent.
Using the above scheme, the beneficial effects of the utility model are:
Multiple row silicon wafer can be once gone up, each column silicon wafer quantity depends on the flat sucker quantity in manipulator.On each column silicon wafer
Material or blanking need a conveyor-belt apparatus, a caching gaily decorated basket device, a transfer gaily decorated basket device, a guide card gaily decorated basket device to complete, more
The loading and unloading simultaneously of column silicon wafer, shorten the loading and unloading time, and manipulator once picks and places, and increase the production capacity of loading and unloading, a set of loading and unloading
System can meet greater number of boiler tube, improve automation loading and unloading efficiency, increase equipment capacity.Compared to monolithic feeding, originally
Utility model structure is simple, it is high-efficient, at low cost, occupy little space, be more suitable for the use of vertical thick boiler tube (high production capacity) type equipment.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the feeding device of the utility model and the perspective view of manipulator；
Fig. 3 is that the manipulator of the utility model is inserted into the perspective view of transfer gaily decorated basket device；
Fig. 4 is the transfer gaily decorated basket of the utility model and the perspective view of silicon wafer；
Wherein, description of drawing identification:
1-feeding device, 2-blanking devices,
3-manipulators, 4-silicon wafers,
11-guide card gaily decorated basket devices, 12-caching gaily decorated basket devices,
13-transfer gaily decorated basket devices, 14-conveyor-belt apparatus,
31-mechanical arms, 32-flat suckers,
131-transfer the gailys decorated basket, the 132-the first driving mechanism,
133-plectrum devices, 134-detectors,
141-conveyer belts, 142-deviation correction mechanisms.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Shown in 4, the utility model provides a kind of efficient tube furnace loading and unloading system, including several feedings
Device 1, several blanking devices 2, manipulator 3；The feeding device 1, blanking device 2 include guide card gaily decorated basket device 11, caching
Gaily decorated basket device 12, transfer gaily decorated basket device 13, conveyor-belt apparatus 14；Guide card gaily decorated basket dress in same feeding device 1 or blanking device 2
Set 11, caching gaily decorated basket device 12, transfer gaily decorated basket device 13 is distributed on the straight line of (as shown in Figure 1) in a first direction；It is described
Conveyor-belt apparatus 14 is used to pass silicon wafer 4 between guide card gaily decorated basket device 11, caching gaily decorated basket device 12, transfer gaily decorated basket device 13
It send, and one end of conveyor-belt apparatus 14 can pass in and out inside it from the first side of transfer gaily decorated basket device 13 is flexible；The manipulator 3 is used
In along the second direction perpendicular to first direction from 13 first side of transfer gaily decorated basket device of each feeding device 1 or blanking device 2
The insertion of adjacent side, the silicon wafer 4 in several transfer gaily decorated basket devices 13 is disposably taken out into feeding or silicon wafer 4 is put into several
Turn 13 blanking of gaily decorated basket device.
Wherein, the conveyor-belt apparatus 14 is entangled including conveyer belt 141, telescoping drive mechanism (not shown), at least two
Inclined mechanism 142；The conveyer belt 141 is moved along first direction, and telescoping drive mechanism is for driving in the disengaging of 141 one end of conveyer belt
Turn inside gaily decorated basket device 13；The deviation correction mechanism 142 is set to transfer gaily decorated basket device 13 and caches the transmission between gaily decorated basket device 12
141 two sides of band.The deviation correction mechanism 142 includes deviation rectifying leather belt, correction column spinner, correction driving motor；The correction column spinner
For being tensioned and being oriented to deviation rectifying leather belt, the guide direction fortune that correction driving motor is used to drive deviation rectifying leather belt along correction column spinner
It is dynamic, and its movement velocity is consistent with the movement velocity of conveyer belt 141.
The transfer gaily decorated basket device 13 includes the transfer gaily decorated basket 131, the first driving mechanism 132；The transfer gaily decorated basket 131 is perpendicular
Histogram is equipped at intervals with several gaily decorated basket teeth upwards, forms several horizontal bearing slots for placing silicon wafer；First driving mechanism 132 is pacified
Loaded on 131 top of the transfer gaily decorated basket, for driving the transfer gaily decorated basket 131 mobile.First driving mechanism 132 includes the first driving
Bar, the first X-axis driving mould group, the first Y-axis driving mould group, the first Z axis drive mould group；First drive rod is set to the transfer gaily decorated basket
131 top, the first X-axis driving mould group are used to that the first drive rod to be driven to move along the direction of motion for being parallel to conveyer belt 141, the
One Y-axis driving mould group is used to that the first drive rod to be driven to move along the direction of motion perpendicular to transmission belt 141, and the first Z axis drives mould
Group is for driving the first drive rod to go up and down in the vertical direction.The transfer gaily decorated basket device 13 further includes plectrum device 133；It is described
Plectrum device 133 includes four plectrum bars, four plectrum bar driving mechanisms；The four plectrums bar is respectively arranged in the transfer gaily decorated basket 131
Four sides, each plectrum bar driving mechanism is for driving a plectrum bar to stir to correct the position of silicon wafer of the transfer gaily decorated basket 131.In described
Turning gaily decorated basket device 13 further includes four detectors 134, is respectively arranged on four sides of the transfer gaily decorated basket 131, for detecting the shape in place of silicon wafer 4
Condition.
The guide card gaily decorated basket device 11 includes the second driving mechanism (not shown), the guide card gaily decorated basket；The guide card gaily decorated basket
It is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several horizontal bearing slots for placing silicon wafer；The conveyer belt 141 it is another
One end is placed in the guide card gaily decorated basket, and the second driving mechanism is for driving the lifting of the guide card gaily decorated basket so that the silicon wafer 4 in the guide card gaily decorated basket adapts to
The height of conveyer belt 141.
The caching gaily decorated basket device 12 includes third driving mechanism (not shown), the caching gaily decorated basket；The caching gaily decorated basket
It is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several horizontal bearing slots for placing silicon wafer；The conveyer belt 141 passes through
Gaily decorated basket arrangement is cached, third driving mechanism is used to that the caching gaily decorated basket to be driven to go up and down so that the silicon wafer 4 in the caching gaily decorated basket adapts to conveyer belt
141 height.
The manipulator 3 includes mechanical arm driving mechanism, mechanical arm 31, several flat suckers 32；The mechanical arm driving
Mechanism is for driving mechanical arm 31 that flat sucker 32 is driven to move；In the quantity and the transfer gaily decorated basket 131 of the flat sucker 32
Horizontal bearing slot number is consistent, and several flat suckers 32 are arranged in parallel, and suction nozzle direction is consistent.
Utility model works principle:
In the utility model, caching gaily decorated basket device 12 is mainly used for caching silicon wafer 4, and during feeding, silicon wafer 4 is through too slow
Deposit the gaily decorated basket effect be broadly divided into it is following several:
1) silicon wafer 4 flows directly into the transfer gaily decorated basket 131 by the caching gaily decorated basket (silicon wafer 4 does not stop)；
2) when manipulator 3 does not in time take the silicon wafer 4 in the transfer gaily decorated basket 131 away, the silicon wafer 4 that comes from the guide card gaily decorated basket
With regard to temporary cache in the caching gaily decorated basket；
3) after complete on the silicon wafer 4 in the guide card gaily decorated basket, during the replacement fully loaded guide card gaily decorated basket, the silicon wafer in the gaily decorated basket is cached
4 continue to flow to the transfer gaily decorated basket 131, to guarantee working continuously for feeding；
4) when the silicon wafer 4 in the transfer gaily decorated basket 131 detects abnormal inserted sheet by detector 134, transfer gaily decorated basket device 13 is reported
Alert to wait artificial treatment exception piece, 4 temporary cache of silicon wafer to come from the guide card gaily decorated basket is in the caching gaily decorated basket.
The guide card gaily decorated basket, the caching gaily decorated basket are front or back side charging, back or front discharging；The transfer gaily decorated basket 131 be front into
Material, side discharging, as shown in figure 4, the transfer gaily decorated basket 131 is that the spacing of positive two gailys decorated basket bar is greater than the length of silicon wafer 4, the back side
The spacing of two gaily decorated basket bars is less than the length of silicon wafer 4, sends out the transfer gaily decorated basket 131 to prevent silicon wafer 4 from being misinformated, but the transfer gaily decorated basket
131 side is respectively independent when transfer 131 loading and unloading of the gaily decorated basket for the disengaging of silicon wafer 4.
The length of flat sucker 21 is the length of 2~5 silicon wafers 4, can accordingly pick and place 2~5 column silicon wafers 4, and is used side by side
131 quantity of the transfer gaily decorated basket it is consistent；The horizontal bearing of multilayer flat 32 quantity of sucker and a transfer gaily decorated basket 131 in manipulator 3
The quantity of slot is consistent.Wherein, vacuum sucking holes or bernoulli gripper two ways can be used in flat sucker 32.
First driving mechanism 132, the second driving mechanism, third driving mechanism can drive the corresponding gaily decorated basket to go up and down, so as to pass
Work-feeding means 14 can one by one by silicon wafer 4 be sent to the horizontal bearing slot of the gaily decorated basket or by silicon wafer from the horizontal bearing slot of the gaily decorated basket one by one
It sends out.The structure similar to the first driving mechanism 132 can be used in second driving mechanism, third driving mechanism, can also use
The structure of lifting platform, as long as being able to satisfy the driving guide card gaily decorated basket, caching gaily decorated basket lifting.
1~5 feeding device 1 or blanking device 2, the horizontal bearing of the transfer gaily decorated basket 131 are generally used in the loading and unloading system
Slot is 5~100.In the present embodiment by taking 3 feeding devices, 1,3 blanking device 2 as an example, 3 feeding devices 1 are arranged in parallel, and 3
A blanking device 2 is also arranged in parallel.
Feeding process:
1) the communicated band 141 of silicon wafer 4 transmits, and reaches the transfer gaily decorated basket 131 from the guide card gaily decorated basket by the caching gaily decorated basket；Wherein in
141 two sides of conveyer belt for turning the gaily decorated basket 131 and caching between the gaily decorated basket are equipped with deviation correction mechanism 142, when silicon wafer 4 has on conveyer belt 141
When offset, deviation correction mechanism 142 and silicon wafer 4 are gradually touched to correct the position of silicon wafer 4, the revolving speed and conveyer belt 141 of deviation rectifying leather belt
Speed is consistent, reduces the friction of silicon wafer 4 and deviation rectifying leather belt；
2) telescoping drive mechanism driving conveyer belt 141 exits inside the transfer gaily decorated basket 131, to facilitate the first driving mechanism 132
Drive the transfer gaily decorated basket 131 mobile；
3) one silicon wafer 4 of every inflow, detector 134 (infrared sensor can be used) have detected whether silicon in the transfer gaily decorated basket 131
4 exception of piece, which is inserted into and will test signal, feeds back to master control, is such as detected with the abnormal insertion alarm pause inserted sheet of silicon wafer 4, waits
Artificial treatment；
4) after the transfer gaily decorated basket 131 is fully loaded, master control controls plectrum device 133 (as shown in Fig. 2, plectrum bar driving mechanism can
Drive plectrum bar along the x axis, Y direction, Z-direction it is mobile) by the silicon wafer 4 in the transfer gaily decorated basket 131, (normal inserted sheet is inclined
In poor range, but irregular) push correct position；If the detection of previous step does not carry out plectrum, plectrum bar is difficult to root
According to needing to control along the x axis or the displacement of Y direction, may be the silicon being inserted into extremely along Z-direction moving process
Piece 4 crushes；
5) the first X-axis driving mould group, the first Y-axis driving mould group drive the corresponding transfer gaily decorated basket 131 along the x axis, Y-axis side
To movement, so that three transfer gailys decorated basket 131 are close and are aligned；
6) suction nozzle of flat sucker 32 upward, is inserted into three transfer gailys decorated basket from the upper piece adjacent side of the transfer gaily decorated basket 131
131；
7) silicon wafer 4 is held up the gaily decorated basket tooth that a small distance makes silicon wafer 4 be detached from the transfer gaily decorated basket 131 by manipulator 3 from lower to upper
After be sucked and exit；
8) mechanical arm 31 drives flat sucker 32 to spin upside down, and makes the face-up intercalation reaction boiler tube to be processed of silicon wafer 4
In multilayered structure.
Blanking process (it is similar with feeding process, there can be deviation correction mechanism 142 in blanking device 2, can also there is no deviation correction mechanism
142):
After the completion of boiler tube process, three column silicon wafers 4 will be taken out from the high production capacity boiler tube for completing process by manipulator 3, be inserted into
In three transfer gailys decorated basket 131 of blanking device 2, the air valve of flat sucker 32 is closed, puts down 4 backed off after random of silicon wafer, the first driving machine
Structure 132 drives the transfer gaily decorated basket 131 to be moved to corresponding conveyer belt 141, is sequentially transmitted caching flower by corresponding conveyer belt 141
In basket, the guide card gaily decorated basket.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (10)
1. a kind of efficient tube furnace loading and unloading system, which is characterized in that including several feeding devices, several blanking devices, machine
Tool hand；The feeding device, blanking device include guide card gaily decorated basket device, caching gaily decorated basket device, transfer gaily decorated basket device, conveyer belt
Device；Guide card gaily decorated basket device in same feeding device or blanking device, caching gaily decorated basket device, transfer gaily decorated basket device are distributed in the
On the straight line in one direction；The conveyor-belt apparatus is used for silicon wafer in guide card gaily decorated basket device, caching gaily decorated basket device, transfer flower
It is transmitted between basket device, and one end of conveyor-belt apparatus can pass in and out inside it from the first side of transfer gaily decorated basket device is flexible；It is described
Manipulator is used for along the second direction perpendicular to first direction from the transfer gaily decorated basket device of each feeding device or blanking device the
The adjacent side of side is inserted into, and is disposably put into several by the silicon chip extracting feeding in several transfer gaily decorated basket devices or by silicon wafer
Turn gaily decorated basket device blanking.
2. efficient tube furnace loading and unloading system according to claim 1, which is characterized in that the conveyor-belt apparatus includes
Conveyer belt, telescoping drive mechanism, at least two deviation correction mechanisms；The conveyer belt is moved along first direction, and telescoping drive mechanism is used for
It drives inside conveyer belt one end disengaging transfer gaily decorated basket device；The deviation correction mechanism is set to transfer gaily decorated basket device and caching gaily decorated basket device
Between conveyor belt two sides.
3. efficient tube furnace loading and unloading system according to claim 2, which is characterized in that the deviation correction mechanism includes entangling
Inclined belt, correction column spinner, correction driving motor；The correction column spinner is for being tensioned and being oriented to deviation rectifying leather belt, correction driving
Motor is used to that deviation rectifying leather belt to be driven to move along the guide direction of correction column spinner, and the movement velocity of its movement velocity and conveyer belt
Unanimously.
4. efficient tube furnace loading and unloading system according to claim 2, which is characterized in that the transfer gaily decorated basket device packet
Include the transfer gaily decorated basket, the first driving mechanism；The transfer gaily decorated basket is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several put
Set the horizontal bearing slot of silicon wafer；First driving mechanism is installed at the top of the transfer gaily decorated basket, for driving the transfer gaily decorated basket mobile.
5. efficient tube furnace loading and unloading system according to claim 4, which is characterized in that the first driving mechanism packet
Include the first drive rod, the first X-axis driving mould group, the first Y-axis driving mould group, the first Z axis driving mould group；First drive rod is set
In the top of the transfer gaily decorated basket, the first X-axis driving mould group is used to that the first drive rod to be driven to move along the direction of motion for being parallel to conveyer belt
Dynamic, the first Y-axis driving mould group is used to that the first drive rod to be driven to move along the direction of motion perpendicular to transmission belt, the driving of the first Z axis
Mould group is for driving the first drive rod to go up and down in the vertical direction.
6. efficient tube furnace loading and unloading system according to claim 5, which is characterized in that the transfer gaily decorated basket device is also
Including plectrum device；The plectrum device includes four plectrum bars, four plectrum bar driving mechanisms；The four plectrums bar be respectively arranged in
Four sides of the transfer gaily decorated basket, each plectrum bar driving mechanism is for driving a plectrum bar to stir to correct the silicon wafer position of the transfer gaily decorated basket
It sets.
7. efficient tube furnace loading and unloading system according to claim 6, which is characterized in that the transfer gaily decorated basket device is also
Including four detectors, four sides of the transfer gaily decorated basket are respectively arranged on, for detecting the situation in place of silicon wafer.
8. efficient tube furnace loading and unloading system according to claim 2, which is characterized in that the guide card gaily decorated basket device packet
Include the second driving mechanism, the guide card gaily decorated basket；The guide card gaily decorated basket is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several put
Set the horizontal bearing slot of silicon wafer；The other end of the conveyer belt is placed in the guide card gaily decorated basket, and the second driving mechanism is for driving guide card
The gaily decorated basket is gone up and down so that the silicon wafer in the guide card gaily decorated basket adapts to the height of conveyer belt.
9. efficient tube furnace loading and unloading system according to claim 2, which is characterized in that the caching gaily decorated basket device packet
Include third driving mechanism, the caching gaily decorated basket；The caching gaily decorated basket is equipped at intervals with several gaily decorated basket teeth in the vertical direction, forms several put
Set the horizontal bearing slot of silicon wafer；The conveyer belt passes through caching gaily decorated basket arrangement, and third driving mechanism is for driving caching gaily decorated basket liter
It drops so that the silicon wafer in the caching gaily decorated basket adapts to the height of conveyer belt.
10. efficient tube furnace loading and unloading system according to claim 4, which is characterized in that the manipulator includes machine
Tool arm driving mechanism, mechanical arm, several flat suckers；The mechanical arm driving mechanism is for driving mechanical armband to move flat sucker
Movement；The quantity of the flat sucker is consistent with the horizontal bearing slot number in the transfer gaily decorated basket, several flat sucker parallel arrangements,
And suction nozzle direction is consistent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821038840.7U CN208315522U (en) | 2018-06-29 | 2018-06-29 | A kind of efficient tube furnace loading and unloading system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821038840.7U CN208315522U (en) | 2018-06-29 | 2018-06-29 | A kind of efficient tube furnace loading and unloading system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208315522U true CN208315522U (en) | 2019-01-01 |
Family
ID=64717915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821038840.7U Active CN208315522U (en) | 2018-06-29 | 2018-06-29 | A kind of efficient tube furnace loading and unloading system |
Country Status (1)
| Country | Link |
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| CN (1) | CN208315522U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111769064A (en) * | 2020-06-18 | 2020-10-13 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN116103635A (en) * | 2022-12-12 | 2023-05-12 | 浙江求是半导体设备有限公司 | Deposition furnace production line and production process thereof |
-
2018
- 2018-06-29 CN CN201821038840.7U patent/CN208315522U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111769064A (en) * | 2020-06-18 | 2020-10-13 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN111769064B (en) * | 2020-06-18 | 2023-07-14 | 无锡先导智能装备股份有限公司 | Loading and unloading device |
| CN116103635A (en) * | 2022-12-12 | 2023-05-12 | 浙江求是半导体设备有限公司 | Deposition furnace production line and production process thereof |
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Address after: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |