CN206505942U - Full-automatic silicon wafer cleans line - Google Patents
Full-automatic silicon wafer cleans line Download PDFInfo
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- CN206505942U CN206505942U CN201720222718.4U CN201720222718U CN206505942U CN 206505942 U CN206505942 U CN 206505942U CN 201720222718 U CN201720222718 U CN 201720222718U CN 206505942 U CN206505942 U CN 206505942U
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- gaily decorated
- decorated basket
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- basket
- cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model is related to a kind of full-automatic silicon wafer cleaning line, and this full-automatic silicon wafer cleaning line includes：Inserted sheet section, cleaning section, drying section；Wherein inserted sheet section is suitable to piecewise insert stacking silicon chip in the gaily decorated basket, and the fully loaded gaily decorated basket is delivered into cleaning section cleaned, and delivers to drying section after cleaning is finished and dried；Automated by the process requirements to actual production manufacturer integrated, inserted sheet link is full-automatic, the gaily decorated basket is put into cleaning equipment cleaning by inserted sheet rear right conveying robot, the gaily decorated basket is placed through formula oven for drying by conveying robot after cleaning, then the gaily decorated basket is loaded into by five axis robot mechanisms the feeding of screening installation (follow-up equipment)；Automated production reduces loss of the silicon chip in circular flow, has saved the turnaround time in cleaning link, improves the odd-numbered day production capacity of equipment and reduces the production cost of manufacturer.
Description
Technical field
The utility model belongs to automatic field, and in particular to a kind of full-automatic silicon wafer cleans line.
Background technology
Chinese photovoltaic market installation amount demand growth is swift and violent.Labor shortage, cost of labor constantly rise, and cause solar energy
Manufacturer is lifted to automation equipment demand, to reduction production cost, improves the significant effect of the product yield person of having.
Existing cleaning equipment is using manufacturer, it is necessary to which artificial inserted sheet, which will clean basket, fills silicon chip, i.e. gaily decorated basket dress after silicon wafer stripping
It is full.Then asked by dolly week at cleaning machine charging.Baking oven is put into by artificial turnover again after to be cleaned and carries out silicon chip drying,
Go to sorter equipment after drying week again and manually put basket.
Therefore, existing production model excessively relies on tactics of human sea, and production capacity is unstable.
Utility model content
In order to improve blue silicon chip dress, cleaning and the automaticity of drying, the purpose of this utility model is to provide a kind of complete
Automatic silicon cleans line.
In order to solve the above-mentioned technical problem, the utility model provides a kind of full-automatic silicon wafer and cleans line, including：Inserted sheet
Section, cleaning section, drying section；Wherein described inserted sheet section is suitable to piecewise insert stacking silicon chip in the gaily decorated basket, and the fully loaded gaily decorated basket is delivered to
Cleaning section is cleaned, and is delivered to drying section after cleaning is finished and dried.
Further, the inserted sheet section includes：At least silicon chip burst conveying mechanism, silicon slice loading mechanism all the way, gaily decorated basket conveying
Mechanism, empty basket slew gear and feed mechanism is treated, and each mechanism is by control module control；Wherein described silicon chip burst conveyer
Structure includes：Tank, silicon chip negative pressure suction device, chip transmission device for placing stacking silicon chip；Operationally, tank is passed through
Interior injection water makes part silicon chip floating, starts silicon chip negative pressure suction device and draws the silicon chip for being located at the superiors, and passes through silicon
In the piece transmitting device feeding in-house empty gaily decorated basket of silicon slice loading；After the gaily decorated basket, which is loaded, to be finished, by gaily decorated basket conveying mechanism by the gaily decorated basket
Deliver to and treat feed mechanism, sent back to while having incited somebody to action basket by empty basket slew gear, and delivered to empty basket by gaily decorated basket conveying mechanism
Silicon slice loading mechanism.
Further, a travel(l)ing rest is provided with the tank, the travel(l)ing rest is used to stack silicon chip, and adjusts stacking silicon chip
The whole gettering site to negative pressure suction device；And the chip transmission device is provided with for detecting the whether complete detection of silicon chip
Unit, the rear end of the chip transmission device is a rollover stand, and the rollover stand controls chip transmission to fill by a lift cylinder
The rear end put is tilted down；If detection unit detect silicon chip it is bad when, the control module passes silicon chip by lift cylinder
The rear end of defeated device is tilted down, i.e., bad silicon chip drops.
Further, the silicon slice loading mechanism includes：Gaily decorated basket clamping device, gaily decorated basket screw lift structure；The silicon chip is passed
Belt wheel excessive device is additionally provided with rear side of defeated device；The chip transmission device is suitable to complete silicon chip passing through belt wheel excessive device
It is delivered in the gaily decorated basket；And after the every silicon chip feeding gaily decorated basket, the gaily decorated basket screw lift structure controls gaily decorated basket lifting certain
Highly.
Further, it is described to treat that feed mechanism includes：L bracket for placing the gaily decorated basket, changement；The L bracket
It is controlled to topple over by a tumble cylinder；The changement is suitable to the gaily decorated basket jacking after toppling over and laterally arranged after being rotated by 90 °
Row.
Further, the cleaning section includes：Some rinse baths being arranged in order according to matting, for controlling rinse bath
The throwing mechanism rocked back and forth, the Manipulator Transportation mechanism of each rinse bath is sequentially entered for capturing the transversely arranged gaily decorated basket, and
Slow drawing mechanism is provided with a last rinse bath；The slow drawing mechanism is suitable to enter the gaily decorated basket in the last rinse bath and holds up progress
Dehydration；The slow drawing mechanism includes：Bracket positioned at last rinse bath both sides, and the rack-and-pinion for rising or falling bracket
Mechanism a, motor is suitable to drive pinion and rack to make bracket synchronously rising simultaneously by synchronizing shaft, belt or so.
Further, the drying section includes：Chain transfer mechanism, and the hot air circulation being erected on chain transfer mechanism
Mechanism；The Manipulator Transportation mechanism is suitable to that chain transfer mechanism will be put into after the gaily decorated basket clamping on bracket；Followed in hot blast
After ring mechanism is dried to silicon chip, by drying section gaily decorated basket lifting body by gaily decorated basket jacking；And also set after drying section
There is transfer section；The transfer section includes：Five axis robot mechanisms；The five axis robots mechanism is by gaily decorated basket grasp handling to follow-up
At the feeding of equipment, the empty basket of discharging is fetched and is put on the feed back lifting body of sky basket slew gear, deliver to silicon chip dress
Mounted mechanism.
Further, the Manipulator Transportation mechanism includes：A pair of handgrips, the handgrip is provided with conductive track, the flower
Basket is built-in with electrified wire；After the handgrip clamping gaily decorated basket, electrified wire constitutes loop with conductive track conducting, and the manipulator is removed
Transport and energization detection module is provided with mechanism, and the loop current detected by the energization detection module judges whether the gaily decorated basket falls
Fall.
The beneficial effects of the utility model：Integrated, inserted sheet is automated by the process requirements to actual production manufacturer
Link is full-automatic, and the gaily decorated basket is put into cleaning equipment and cleaned by inserted sheet rear right conveying robot, will flower by conveying robot after cleaning
Basket is placed through formula oven for drying, then the gaily decorated basket is loaded into by five axis robot mechanisms the feeding of screening installation (follow-up equipment)
Place；Automated production reduces loss of the silicon chip in circular flow, has saved the turnaround time in cleaning link, has improved and set
Standby odd-numbered day production capacity reduces the production cost of manufacturer.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the overall structure diagram that full-automatic silicon wafer of the present utility model cleans line；
Fig. 2 is the partial illustrations of inserted sheet section of the present utility model；
Fig. 3 is the side view of inserted sheet section of the present utility model；
Fig. 4 is the configuration diagram of silicon chip burst conveying mechanism of the present utility model；
Fig. 5 is the side view diagram of cleaning section of the present utility model；
Fig. 6 is another side view of cleaning section of the present utility model；
Fig. 7 is the configuration diagram of throwing mechanism of the present utility model；
Fig. 8 is the configuration diagram of slow drawing mechanism of the present utility model；
Fig. 9 is the side view of drying section of the present utility model；
Figure 10 is the top view of drying section of the present utility model；
Figure 11 is the side view of transfer section of the present utility model；
Figure 12 is the configuration diagram of five axis robots mechanism of the present utility model.
In figure：
Inserted sheet section 1, silicon chip burst conveying mechanism 11, silicon slice loading mechanism 12, gaily decorated basket conveying mechanism 13, treat feed mechanism
14th, empty basket slew gear 15, feed back lifting body 151, stacking silicon chip 111, tank 112, travel(l)ing rest 112a, silicon chip negative pressure are inhaled
Take device 113, chip transmission device 114, rollover stand 114a, lift cylinder 114b, detection unit 115, belt wheel excessive device
116th, gaily decorated basket clamping device 121, gaily decorated basket screw lift structure 122, L bracket 141, tumble cylinder 142, changement 143；
Cleaning section 2, rinse bath 21, throwing mechanism 22, Manipulator Transportation mechanism 23, slow drawing mechanism 24, bracket 241, gear
Rackwork 242, motor 243, synchronizing shaft 244, belt 245；
Drying section 3, chain transfer mechanism 31, hot air circulating mechanism 32, drying section gaily decorated basket lifting body 33；
4, five axis robot mechanisms 41 of transfer section, manipulator 411.
Embodiment
The utility model is described in further detail presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
Embodiment 1
As shown in figure 1, the present embodiment 1, which provides a kind of full-automatic silicon wafer, cleans line, including：Inserted sheet section 1, cleaning section 2, baking
Dry section 3；Wherein described inserted sheet section 1 is suitable to insert stacking silicon chip 111 in the gaily decorated basket piecewise, and the fully loaded gaily decorated basket is delivered into cleaning section 2
Cleaned, and drying section 3 is delivered to after cleaning is finished and dried.
As shown in Figures 2 and 3, as inserted sheet section 1 it is a kind of preferred embodiment, the inserted sheet section 1 includes：At least one
Road silicon chip burst conveying mechanism 11 (two-way silicon chip burst conveying mechanism 11 be arranged in parallel in Fig. 2), silicon slice loading mechanism 12, the gaily decorated basket
Conveying mechanism 13, feed mechanism 14 and empty basket slew gear 15 are treated, and each mechanism is by control module control；Wherein described silicon chip
Burst conveying mechanism 11 includes：Tank 112, silicon chip negative pressure suction device 113, chip transmission for placing stacking silicon chip 111
Device 114.
Operationally, part silicon chip is floated by the injection water in tank 112, start silicon chip negative pressure suction device
113 draw the silicon chip positioned at the superiors, and the empty gaily decorated basket (Fig. 2 sent into by chip transmission device 114 in silicon slice loading mechanism 12
In do not show) in；After the gaily decorated basket, which is loaded, to be finished, the gaily decorated basket is delivered to by gaily decorated basket conveying mechanism 13 and treats feed mechanism 14, is passed through simultaneously
Empty basket slew gear 15 has been incited somebody to action basket and sent back to, and empty basket is delivered into silicon slice loading mechanism 12 by gaily decorated basket conveying mechanism 13.
Transmission line connection inserted sheet section 1, cleaning section 2, drying section 3 and the follow-up transfer section of the empty basket slew gear 15
4, suitable for the empty basket of drying section 3 or transfer section 4 is sent back to.
A travel(l)ing rest 112a is provided with the tank 112, travel(l)ing rest 112a is used to stack silicon chip, and makes stacking silicon
Piece 111 is adjusted to the gettering site of negative pressure suction device；And the chip transmission device 114 is provided with for whether detecting silicon chip
Complete detection unit 115, the rear end of the chip transmission device 114 is a rollover stand 114a, and rollover stand 114a passes through
The rear end of one lift cylinder 114b control chip transmissions device 114 is tilted down；If it is bad that detection unit 115 detects silicon chip
When, the control module tilts down the rear end of chip transmission device 114 by lift cylinder 114b, i.e., bad silicon chip falls
Fall, after bad silicon chip drops, lift cylinder 114b resets the rear end of chip transmission device 114, chip transmission device 114
The direction of motion of rear end is as shown in arrow F in Fig. 4.
The detection unit 115 includes four photoelectric sensors, for detecting whether four angles of silicon chip are complete.
The silicon slice loading mechanism 12 includes：Gaily decorated basket clamping device 121, gaily decorated basket screw lift structure 122；The silicon chip is passed
The rear side of defeated device 114 is additionally provided with belt wheel excessive device 116；The chip transmission device 114 is suitable to complete silicon chip passing through band
Wheel excessive device 116 is delivered in the gaily decorated basket；And after the every silicon chip feeding gaily decorated basket, the gaily decorated basket screw lift structure 122 is equal
Control gaily decorated basket lifting certain altitude.
It is described to treat that feed mechanism 14 includes：L bracket 141 for placing the gaily decorated basket, changement 143；The L bracket
141 control it to topple over by a tumble cylinder 142；The changement 143 is suitable to the gaily decorated basket jacking after toppling over and is rotated by 90 °
After to be delivered to feeding area transversely arranged according to a determining deviation.
As shown in Fig. 5 to Fig. 8, the cleaning section 2 includes：Some rinse baths 21 being arranged in order according to matting, institute
State and supersonic generator is provided with rinse bath 21, for the throwing mechanism 22 for controlling rinse bath 21 back and forth to lift, for capturing horizontal stroke
The Manipulator Transportation mechanism 23 of each rinse bath 21 is sequentially entered to the arrangement gaily decorated basket, and provided with slow drawing at a last rinse bath 21
Mechanism 24；The slow drawing mechanism 24 is suitable to enter gaily decorated basket picking-up in the last rinse bath 21 and is dehydrated；The slow drawing mechanism
24 include：Bracket 241 positioned at the last both sides of rinse bath 21, and the pinion and rack for rising or falling bracket 241
242, a motor 243 is suitable to drive pinion and rack 242 to make bracket simultaneously by synchronizing shaft 244, belt 245 or so
241 synchronous risings.
The throwing mechanism 22 makes rinse bath 21 that reciprocal liter occur in cleaning process using motor driving eccentric mechanism
Drop is moved, and the throwing mechanism 22 is controlled by control module, and the motor 243 in the slow drawing mechanism 24 also has control
Molding block is controlled；
Also, a public groove is additionally provided with above-mentioned some rinse baths (such as, but not limited to from 10 rinse baths), will
Each rinse bath is divided into front and rear rinse bath, and the Manipulator Transportation mechanism 23 includes forward and backward manipulator mechanism, preceding manipulator mechanism
The gaily decorated basket is sequentially passed through into each preceding rinse bath the gaily decorated basket is put into public groove, and picked up the gaily decorated basket out of common public groove by rear manipulator mechanism
Rise and sequentially pass through each rear rinse bath and cleaned.
As shown in Figures 9 to 11, the drying section 3 includes：Chain transfer mechanism 31, and it is erected at chain transfer mechanism
Hot air circulating mechanism 32 on 31；The Manipulator Transportation mechanism 23 is further adapted for put after the gaily decorated basket clamping on bracket 241
Enter chain transfer mechanism 31；After hot air circulating mechanism 32 is dried to silicon chip, the gaily decorated basket is passed by chain transfer mechanism 31
Deliver to predetermined position and gaily decorated basket jacking is waited to the upper material process of follow-up crawl afterwards in place by drying section gaily decorated basket lifting body 33 again；With
And transfer section 4 is additionally provided with after drying section 3；The transfer section 4 includes：Five axis robot mechanisms 41；Five axis robot
Mechanism 41 is by the feeding of gaily decorated basket grasp handling to follow-up equipment, then the empty basket of discharging is fetched is put into sky basket slew gear 15
Feed back lifting body 131 on, lifting body 131, which has obtained basket signal, to be fallen after rise and leads to so as to which the gaily decorated basket is placed into empty basket slew gear 15
Cross Chain conveyer and deliver to silicon slice loading mechanism 12.
The Manipulator Transportation mechanism 23 includes：A pair of handgrips, the handgrip is provided with conductive track, built in the gaily decorated basket
There is electrified wire；After the handgrip clamping gaily decorated basket, electrified wire constitutes loop, the Manipulator Transportation mechanism with conductive track conducting
Energization detection module is provided with 23, and the loop current detected by the energization detection module judges whether the gaily decorated basket drops,
When loop current disappears, then judge that the gaily decorated basket drops；And the energization detection module is also connected with control module, and when judgement
After the gaily decorated basket drops, control handgrip stops.
The control module is such as, but not limited to use PLC module.Involved controlling organization, lifting in the present embodiment 1
Mechanism and tumble cylinder are by PLC module control, specifically, the I/O port of connection PLC module.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this utility model technological thought completely.This reality
The content on specification is not limited to new technical scope, it is necessary to its technology is determined according to right
Property scope.
Claims (8)
1. a kind of full-automatic silicon wafer cleans line, it is characterised in that including：
Inserted sheet section, cleaning section, drying section；Wherein
The inserted sheet section is cleaned suitable for being inserted stacking silicon chip piecewise in the gaily decorated basket, and the fully loaded gaily decorated basket being delivered into cleaning section, and
Drying section is delivered to after cleaning is finished to be dried.
2. full-automatic silicon wafer according to claim 1 cleans line, it is characterised in that
The inserted sheet section includes：At least silicon chip burst conveying mechanism, silicon slice loading mechanism all the way, gaily decorated basket conveying mechanism, empty basket are returned
Rotation mechanism and feed mechanism is treated, and each mechanism is by control module control；Wherein
The silicon chip burst conveying mechanism includes：Tank, silicon chip negative pressure suction device, chip transmission for placing stacking silicon chip
Device；
Operationally, part silicon chip is floated by the injection water in tank, start the absorption of silicon chip negative pressure suction device and be located at
The silicon chip of the superiors, and sent into by chip transmission device in the in-house empty gaily decorated basket of silicon slice loading；
After the gaily decorated basket, which is loaded, to be finished, the gaily decorated basket is delivered to by gaily decorated basket conveying mechanism and treats feed mechanism, while passing through empty basket slew gear
Basket is incited somebody to action to send back to, and empty basket is delivered to by silicon slice loading mechanism by gaily decorated basket conveying mechanism.
3. full-automatic silicon wafer according to claim 2 cleans line, it is characterised in that
A travel(l)ing rest is provided with the tank, the travel(l)ing rest is used to stack silicon chip, and stacking silicon chip is adjusted to negative pressure and inhaled
Take the gettering site of device；And
The chip transmission device, which is provided with, to be used to detect after the whether complete detection unit of silicon chip, the chip transmission device
Hold as a rollover stand, and the rollover stand controls the rear end of chip transmission device to tilt down by a lift cylinder；
If detection unit detect silicon chip it is bad when, the control module by lift cylinder make the rear end of chip transmission device to
Lower to tilt, i.e., bad silicon chip drops.
4. full-automatic silicon wafer according to claim 3 cleans line, it is characterised in that
The silicon slice loading mechanism includes：Gaily decorated basket clamping device, gaily decorated basket screw lift structure；
Belt wheel excessive device is additionally provided with rear side of the chip transmission device；
The chip transmission device is suitable to complete silicon chip being delivered in the gaily decorated basket by belt wheel excessive device；And
After the every silicon chip feeding gaily decorated basket, the gaily decorated basket screw lift structure controls the gaily decorated basket to lift certain altitude.
5. full-automatic silicon wafer according to claim 4 cleans line, it is characterised in that
It is described to treat that feed mechanism includes：L bracket for placing the gaily decorated basket, changement；The L bracket passes through a upset gas
Cylinder controls it to topple over；
The changement is suitable to the gaily decorated basket jacking after toppling over and is rotated by 90 ° rear transversely arranged.
6. full-automatic silicon wafer according to claim 5 cleans line, it is characterised in that
The cleaning section includes：Some rinse baths being arranged in order according to matting, are back and forth lifted for controlling rinse bath
Throwing mechanism, the Manipulator Transportation mechanism of each rinse bath is sequentially entered for capturing the transversely arranged gaily decorated basket, and
Slow drawing mechanism is provided with a last rinse bath；
The slow drawing mechanism is suitable to enter gaily decorated basket picking-up in the last rinse bath and is dehydrated；
The slow drawing mechanism includes：Bracket positioned at last rinse bath both sides, and the rack-and-pinion for rising or falling bracket
Mechanism,
One motor is suitable to drive pinion and rack to make bracket synchronously rising simultaneously by synchronizing shaft, belt or so.
7. full-automatic silicon wafer according to claim 6 cleans line, it is characterised in that
The drying section includes：Chain transfer mechanism, and the hot air circulating mechanism being erected on chain transfer mechanism；
The Manipulator Transportation mechanism is suitable to that chain transfer mechanism will be put into after the gaily decorated basket clamping on bracket；In hot air circulation
After mechanism is dried to silicon chip, by drying section gaily decorated basket lifting body by gaily decorated basket jacking；And
Transfer section is additionally provided with after drying section；
The transfer section includes：Five axis robot mechanisms；
The empty basket of discharging is fetched at the feeding of gaily decorated basket grasp handling to follow-up equipment and put by the five axis robots mechanism
On the feed back lifting body for entering sky basket slew gear, silicon slice loading mechanism is delivered to.
8. full-automatic silicon wafer according to claim 7 cleans line, it is characterised in that
The Manipulator Transportation mechanism includes：A pair of handgrips, the handgrip is provided with conductive track,
The gaily decorated basket is built-in with electrified wire；After the handgrip clamping gaily decorated basket, electrified wire constitutes loop, institute with conductive track conducting
State and energization detection module is provided with Manipulator Transportation mechanism, and the loop current detected by the energization detection module judges
Whether the gaily decorated basket drops.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720222718.4U CN206505942U (en) | 2017-03-08 | 2017-03-08 | Full-automatic silicon wafer cleans line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720222718.4U CN206505942U (en) | 2017-03-08 | 2017-03-08 | Full-automatic silicon wafer cleans line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206505942U true CN206505942U (en) | 2017-09-19 |
Family
ID=59841905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720222718.4U Active CN206505942U (en) | 2017-03-08 | 2017-03-08 | Full-automatic silicon wafer cleans line |
Country Status (1)
| Country | Link |
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| CN (1) | CN206505942U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107051966A (en) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | Full-automatic silicon wafer cleans line and its method of work |
| CN107993969A (en) * | 2017-12-13 | 2018-05-04 | 昆山豪恩特机器人自动化科技有限公司 | A kind of offline PECVD plug-in sheet machines |
| CN108336004A (en) * | 2018-04-18 | 2018-07-27 | 冠礼控制科技（上海）有限公司 | A kind of full-automatic wet process equipment of four gaily decorated basket of single batch synchronous operation |
| CN108461578A (en) * | 2018-04-09 | 2018-08-28 | 绍兴文理学院 | A kind of photovoltaic panel cleaning integrated apparatus |
| CN110328166A (en) * | 2019-07-19 | 2019-10-15 | 浙江科技学院 | A kind of full-automatic silicon wafer cleaning device |
| CN116259564A (en) * | 2023-05-15 | 2023-06-13 | 苏州昊建自动化系统有限公司 | Cleaning system of photovoltaic silicon wafer |
-
2017
- 2017-03-08 CN CN201720222718.4U patent/CN206505942U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107051966A (en) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | Full-automatic silicon wafer cleans line and its method of work |
| CN107993969A (en) * | 2017-12-13 | 2018-05-04 | 昆山豪恩特机器人自动化科技有限公司 | A kind of offline PECVD plug-in sheet machines |
| CN108461578A (en) * | 2018-04-09 | 2018-08-28 | 绍兴文理学院 | A kind of photovoltaic panel cleaning integrated apparatus |
| CN108336004A (en) * | 2018-04-18 | 2018-07-27 | 冠礼控制科技（上海）有限公司 | A kind of full-automatic wet process equipment of four gaily decorated basket of single batch synchronous operation |
| CN108336004B (en) * | 2018-04-18 | 2023-09-08 | 冠礼控制科技（上海）有限公司 | Full-automatic wet processing equipment with single batch of four-flower basket synchronous operation |
| CN110328166A (en) * | 2019-07-19 | 2019-10-15 | 浙江科技学院 | A kind of full-automatic silicon wafer cleaning device |
| CN116259564A (en) * | 2023-05-15 | 2023-06-13 | 苏州昊建自动化系统有限公司 | Cleaning system of photovoltaic silicon wafer |
| CN116259564B (en) * | 2023-05-15 | 2023-07-21 | 苏州昊建自动化系统有限公司 | Cleaning system of photovoltaic silicon wafer |
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| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 213000 299 Fu Min Road, Lucheng street, Wujin District, Changzhou, Jiangsu Patentee after: Changzhou chemical cleaning technology Limited by Share Ltd Address before: 213025 299 Fu Min Road, Lucheng street, Wujin District, Changzhou, Jiangsu Patentee before: Kepeida Ultrasonic Engineering Equipment (Changsha) Co., Ltd. |