CN206685400U - Dry-wet integrated machine and production line - Google Patents
Dry-wet integrated machine and production line Download PDFInfo
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- CN206685400U CN206685400U CN201720329247.7U CN201720329247U CN206685400U CN 206685400 U CN206685400 U CN 206685400U CN 201720329247 U CN201720329247 U CN 201720329247U CN 206685400 U CN206685400 U CN 206685400U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model provides cleaning machine, automation charging and discharging mechanism, RIE dry method wool-weaving machine, automatic laminating machine and gaily decorated basket automatic rotary mechanism before a kind of dry-wet integrated machine, including inserted sheet feeder, automation；Cleaning machine, automation charging and discharging mechanism are sequentially connected before the inserted sheet feeder, automation, the RIE dry method wool-weaving machine and automatic laminating machine are connected with the automation charging and discharging mechanism respectively, and the gaily decorated basket automatic rotary mechanism is between cleaning machine before the inserted sheet feeder and the automation；Complete equipment of the present utility model is " dry method making herbs into wool " technique for realizing silicon chip, be integrated with the automatic inserted sheet of silicon chip, preceding cleaning, silicon chip automation are transformed on dry method etching device, dry method making herbs into wool, silicon chip automation technique and the technology such as lamination.The complete equipment does not need manual intervention, all using automation equipment.On this basis, the utility model additionally provides a kind of production line using the dry-wet integrated machine.
Description
Technical field
Solar cell manufacturing field is the utility model is related to, more particularly, to a kind of dry-wet integrated machine and production line.
Background technology
In solar cells, to reduce reflection of the silicon chip to sunshine, electric energy is converted light energy into as far as possible, is improved
Generating efficiency.Silicon chip is required for handling silicon chip surface before cell piece is made, to reduce the reflectivity of light, in photovoltaic
The title of the technique is called " process for etching " in industry.Because the quality of process for etching directly affects the conversion effect of solar cell
Rate, therefore the critical process that process for etching belongs to during solar silicon wafers are manufactured.In the last few years, with Buddha's warrior attendant wire cutting silicon
The cost of piece is greatly reduced, it is following the problem of be exactly the surface wool manufacturing technique of Buddha's warrior attendant wire cutting polysilicon chip with traditional
Sour process for etching does not match that, have impact on the popularization and application of technology.It is badly in need of a kind of new technology in the industry to solve the problem." dry method
Black silicon " technology is arisen at the historic moment, and conversion efficiency can be improved more than 0.5% by the cell piece by the technical finesse, be had very
Important economic value, and suitable for the silicon chip that Buddha's warrior attendant is cut, reached the double effectses of cost efficiency.
But before dry method making herbs into wool, silicon chip must carry out preceding cleaning, and the purpose of this cleaning step is by silicon chip surface
Cutting damage layer get rid of, while produce free of contamination uniform outer surface, carrying out dry method making herbs into wool immediately therewith can obtain integrally
Uniform matte and quality.Cleaning needs to complete in the solution of strong acid or highly basic before this step.The method used at present is preceding clear
Wash and completed with dry method making herbs into wool in two independent equipment, between equipment the conversion of silicon chip manually complete.So not only increase
Cost, and centre have passed through artificial intermediate links, add technique uncertain factor.
Utility model content
The purpose of this utility model is to provide a kind of dry-wet integrated machine and production line largely solve above-mentioned ask
Topic.
Cleaning machine, automation loading and unloading before dry-wet integrated machine provided by the utility model, including inserted sheet feeder, automation
Mechanism, RIE dry method wool-weaving machine, automatic laminating machine and gaily decorated basket automatic rotary mechanism；
Cleaning machine, automation charging and discharging mechanism are sequentially connected before the inserted sheet feeder, automation, the RIE dry method systems
Suede machine and automatic laminating machine are connected with the automation charging and discharging mechanism respectively, and the gaily decorated basket automatic rotary mechanism is arranged on described
Before inserted sheet feeder and the automation between cleaning machine；
The inserted sheet feeder is used to a whole folded silicon chip being inserted into the sky gaily decorated basket and cleaned before being sent into the automation
Machine；
Cleaning machine is used to carry out silicon chip damage cleaning before the automation；
The automation charging and discharging mechanism takes out the silicon chip through over cleaning from the gaily decorated basket to be put on RIE dry method wool-weaving machines,
And the silicon chip after making herbs into wool is removed from RIE dry method wool-weaving machines；
The RIE dry method wool-weaving machine is used to etch to form antireflection layer matte on crystal silicon cell surface；
The automatic laminating machine removes the silicon chip of making herbs into wool, builds up certain amount；
The empty gaily decorated basket for taking silicon chip away is transported to the discharge outlet of inserted sheet feeder by the gaily decorated basket automatic rotary mechanism.
Further, the inserted sheet feeder includes silicon chip storing unit, silicon wafer conveying device, gaily decorated basket hoisting mechanism, taken
Expect manipulator and silicon chip lifting device；
The silicon chip storing unit, silicon wafer conveying device and gaily decorated basket hoisting mechanism are sequentially connected；
The reclaimer robot is arranged on above the silicon chip storing unit；
The silicon chip lifting device is arranged on below the silicon chip storing unit and is connected with the silicon chip storing unit, from
And change the height of silicon chip storing unit.
Further, cleaning machine includes truss robot, cell body mechanism, the drier being sequentially connected before the automation
And articulated robot；
The truss robot is placed on the feeding station of cleaning machine before the automation after the gaily decorated basket for filling with silicon chip is captured
On；
The cell body mechanism is made up of multiple cell bodies, contains process liquid inside each cell body, each cell body is internally integrated
Automatic temperature-controlled unit and automatic liquid-feeding unit, the cell body mechanism top set manipulator to capture transplanting mechanism；
The manipulator crawl transplanting mechanism is used to be placed on the gaily decorated basket for filling with silicon chip in the cell body of each cell body mechanism, and
Residence time of the gaily decorated basket of silicon chip in each cell body is filled with control；
The drier is used to dry the silicon chip surface soaked by the liquid in cell body mechanism；
The articulated robot places the gaily decorated basket for filling with silicon chip on the automation charging and discharging mechanism.
Further, it is described automation charging and discharging mechanism include the feeding gaily decorated basket disengaging module, the feeding gaily decorated basket lifting module, on
Expect chip feeding module, feeding transfer module, feeding support plate positioning conveying module, lifting module, blanking chip feeding module, under
Expect transfer module and blanking support plate positioning conveying module；
The feeding gaily decorated basket disengaging module is used to the gaily decorated basket for filling with silicon chip being put into feeding gaily decorated basket lifting module and spends sky
Basket removes；
The feeding gaily decorated basket lifting module is used to the gaily decorated basket for filling with silicon chip being moved into gaily decorated basket position, and the full gaily decorated basket enters,
The empty gaily decorated basket for taking silicon chip away is moved to out gaily decorated basket position, empty gaily decorated basket outflow；
Silicon chip is moved to position corresponding to support plate room and correcting by the feeding chip feeding module；
Silicon chip is moved to support plate position by the feeding transfer module, puts silicon chip；
The feeding support plate positioning conveying module, positioning is clamped to support plate, is transported to lifting module；
The lifting module will put the carrier plate transmission of silicon chip well to RIE dry method wool-weaving machines；
The blanking support plate positioning conveying module is clamped positioning to the support plate after RIE dry method wool-weaving machine making herbs into wool, conveys
Support plate is to the blanking transfer module；
Silicon chip on support plate on support plate is placed on chip feeding streamline by the blanking transfer module；
Silicon chip on streamline is transported on packing production line by the blanking chip feeding module.
Further, the RIE dry method wool-weaving machine includes transmission mechanism and load on cavity systems, ion source system, support plate
Transmission mechanism under plate, the cavity systems, ion source system, transmission mechanism is sequentially connected on support plate；
Under the support plate transmission mechanism be arranged on the cavity systems, ion source system, on support plate transmission mechanism lower section.
Further, the automatic laminating machine includes conveying equipment, silicon chip discharge mechanism, straight line elevating mechanism, cylinder certainly
It is dynamic to tilt centralising device；
The silicon chip discharge mechanism is arranged in the front end of the conveying equipment, and the cylinder wing drop centralising device is set
Below the silicon chip discharge mechanism, for being corrected to the position of silicon chip；
The silicon wafer linear elevating mechanism is arranged on below the silicon chip centering body.
Further, the gaily decorated basket automatic rotary mechanism is turned over including gaily decorated basket rotating device, gaily decorated basket switching mechanism one and the gaily decorated basket
Rotation mechanism two；
For the gaily decorated basket rotating device on cleaning machine before the automation, the gaily decorated basket switching mechanism one is arranged on institute
The feed end of cleaning machine before automating is stated,
The gaily decorated basket switching mechanism two cleans motor spindle before being arranged on the automation.
Further, the cavity systems include five single cavitys, respectively loading chamaer, caching chamber, process cavity, cold
But chamber and unloading chamber.
Further, the cell body mechanism is made up of seven technology grooves.
Dry-wet integrated equipment of the present utility model has the advantages that：
To solve problem above, the utility model integrates wet-cleaning, dry method making herbs into wool, centre automation transmissions links
Dry-wet integrated machine.
Complete equipment of the present utility model is " dry method making herbs into wool " technique for realizing silicon chip, is integrated with the automatic inserted sheet of silicon chip, preceding
Technique and the technologies such as cleaning, silicon chip automation are transformed on dry method etching device, dry method making herbs into wool, silicon chip automation lamination.This is whole
Complete equipment does not need manual intervention, all using automation equipment.
In addition, the utility model additionally provides a kind of production line, including above-mentioned dry-wet integrated machine.
Brief description of the drawings
, below will be right in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
The required accompanying drawing used is briefly described in embodiment or description of the prior art, it should be apparent that, describe below
In accompanying drawing be some embodiments of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation for the dry-wet integrated machine that the utility model embodiment one provides；
Fig. 2 is the structural representation for the inserted sheet feeder that the utility model embodiment one provides；
Fig. 3 is the structure top view of cleaning machine before the automation that the utility model embodiment one provides；
Fig. 4 is the structural side view of cleaning machine before the automation that the utility model embodiment one provides；
Fig. 5 is the structural representation for the automation charging and discharging mechanism that the utility model embodiment one provides；
Fig. 6 is the structural representation for the RIE dry method wool-weaving machines that the utility model embodiment one provides；
Fig. 7 is the structural representation for the automatic laminating machine that the utility model embodiment one provides；
Fig. 8 is the structural representation for the gaily decorated basket automatic rotary mechanism that the utility model embodiment one provides.
Reference：1- inserted sheet feeders；Cleaning machine before 2- automations；3- automates charging and discharging mechanism；4-RIE is done
Method wool-weaving machine；5- automatic laminating machines；6- gaily decorated basket automatic rotaries mechanism；11- silicon chip storing units；12- silicon wafer conveying devices；
13- gaily decorated basket hoisting mechanisms；14- reclaimer robots；15- silicon chip lifting devices；21- truss robots；22- cell bodies mechanism；
23- driers；24- articulated robots；25- manipulators capture transplanting mechanism；The 31- feedings gaily decorated basket passes in and out module；
The 32- feedings gaily decorated basket lifts module；33- feedings chip feeds module；34- feeding transfer modules；35- feedings support plate positions
Convey module；36- lifts module；37- blankings chip feeds module；38- blanking transfer modules；39- blankings support plate positions
Convey module；41- cavity systems；42- ion source systems；Transmission mechanism on 43- support plates；Transmission mechanism under 44- support plates；
411- loading chamaers；412- caches chamber；413- process cavities；414- cooling chambers；415- unloads chamber；51- conveying equipments；
52- silicon chip discharge mechanisms；53- straight line elevating mechanisms；54- cylinder wing drop centralising devices；61- gaily decorated basket rotating devices；
62- gailys decorated basket switching mechanism one；63- gailys decorated basket switching mechanism two；7- silicon chips.
Embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described
Embodiment is the utility model part of the embodiment, rather than whole embodiments.Based on the embodiment in the utility model, sheet
The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality
Novel protected scope.
, it is necessary to explanation in description of the present utility model, term " " center ", " on ", " under ", it is "left", "right", " perpendicular
Directly ", the orientation of the instruction such as " level ", " interior ", " outer " or position relationship are based on orientation shown in the drawings or position relationship, are only
Described for the ease of description the utility model and simplifying, rather than instruction or imply signified device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.In addition, term " the
One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that instruction or hint relative importance.
, it is necessary to which explanation, unless otherwise clearly defined and limited, term " are pacified in description of the present utility model
Dress ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly
Connection；Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in the utility model.
Specific embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.It should be appreciated that herein
Described embodiment is merely to illustrate and explained the utility model, is not limited to the utility model.
Embodiment one
Fig. 1 is the structural representation for the dry-wet integrated machine that the utility model embodiment one provides；Fig. 2 is the utility model
The structural representation for the inserted sheet feeder that embodiment one provides；It is clear before the automation that Fig. 3 provides for the utility model embodiment one
The structure top view of washing machine；Fig. 4 is the structural side view of cleaning machine before the automation that the utility model embodiment one provides；Fig. 5
The structural representation of the automation charging and discharging mechanism provided for the utility model embodiment one；Fig. 6 is the utility model embodiment
The structural representation of the one RIE dry method wool-weaving machines provided；Fig. 7 is the knot for the automatic laminating machine that the utility model embodiment one provides
Structure schematic diagram；Fig. 8 is the structural representation for the gaily decorated basket automatic rotary mechanism that the utility model embodiment one provides；Such as Fig. 1-Fig. 8
Cleaning machine 2, automation charging ＆ discharging machine before dry-wet integrated machine shown, that the present embodiment provides, including inserted sheet feeder 1, automation
Structure 3, RIE dry method wool-weaving machine 4, automatic laminating machine 5 and gaily decorated basket automatic rotary mechanism 6；
Cleaning machine 2, automation charging and discharging mechanism 3 are sequentially connected before the inserted sheet feeder 1, automation, the RIE dry method
Wool-weaving machine 4 and automatic laminating machine 5 are connected with the automation charging and discharging mechanism 3 respectively, and the gaily decorated basket automatic rotary mechanism 6 is installed
Before the inserted sheet feeder 1 and the automation between cleaning machine 2；
The inserted sheet feeder 1 is used to a whole folded silicon chip 7 is inserted into the sky gaily decorated basket and is sent into before the automation clearly
Washing machine 2；
Cleaning machine 2 is used to carry out silicon chip 7 damage cleaning before the automation；
The automation charging and discharging mechanism 3 takes out the silicon chip through over cleaning from the gaily decorated basket is put into RIE dry method wool-weaving machine 4
On, and the silicon chip after making herbs into wool is removed from RIE dry method wool-weaving machine 4；
The RIE dry method wool-weaving machine 4 is used to etch to form antireflection layer matte on crystal silicon cell surface；
The automatic laminating machine 5 removes the silicon chip of making herbs into wool, builds up certain amount；
The empty gaily decorated basket for taking silicon chip away is transported to the discharge outlet of inserted sheet feeder 1 by the gaily decorated basket automatic rotary mechanism 6.
The inserted sheet feeder 1 includes silicon chip storing unit 11, silicon wafer conveying device 12, gaily decorated basket hoisting mechanism 13, feeding
Manipulator 14 and silicon chip lifting device 15；
The silicon chip storing unit 11, silicon wafer conveying device 12 and gaily decorated basket hoisting mechanism 13 are sequentially connected；
The reclaimer robot 14 is arranged on the top of silicon chip storing unit 11；
The silicon chip lifting device 15 be arranged on the lower section of the silicon chip storing unit 11 and with the silicon chip storing unit 11
Connection, so as to change the height of silicon chip storing unit 11.
During operation, operating personnel only need whole folded silicon chip to be put into silicon chip storing unit 11.Silicon chip storing unit therein
11 are mainly made up of eight pieces of nylon baffles.
It is convenient to be picked up silicon chip with sucker in order to which several layers of silicon chips above whole folded silicon chip are separated, fixed in silicon chip both sides
Blowning installation.Due to being sucked away for silicon chip, the height of whole folded silicon chip declines, it is necessary to will using silicon chip lifting device 15 therewith
The certain height of whole folded silicon chip lifting, makes the silicon chip of the superiors be highly consistent with sucker.
Reclaimer robot 14 is mainly made up of the vacuum cup of a two axle robots and bottom.Its effect is exactly by silicon chip
Take out, be placed on silicon wafer conveying device 12 from silicon chip storing unit 11.
Silicon wafer conveying device 12 is exactly mainly to be used for conveying silicon chip, by a piece of insertion sky gaily decorated basket of silicon chip.In order to smooth
The defined position that silicon chip is transported to the gaily decorated basket, the front portion of silicon wafer conveying device 12 is equipped with a set of conveyer that can be stretched,
After empty gaily decorated basket lifting to defined position, in the telescopic conveyer insertion gaily decorated basket, silicon chip is smoothly inserted into flower to facilitate
Assigned position in basket.
Cleaning machine 2 includes truss robot 21, cell body mechanism 22, the and of drier 23 being sequentially connected before the automation
Articulated robot 24；
The truss robot 21 is placed on the feeding work of cleaning machine 2 before the automation after the gaily decorated basket for filling with silicon chip is captured
On position；
The cell body mechanism 22 is made up of seven cell bodies, and process liquid is contained inside each cell body, is collected inside each cell body
Into automatic temperature-controlled unit and automatic liquid-feeding unit, can make the process liquid inside cell body keep temperature as defined in technological requirement and
Concentration, the top of cell body mechanism 22 set manipulator to capture transplanting mechanism 25；
The manipulator crawl transplanting mechanism 25 is used for the cell body that the gaily decorated basket for filling with silicon chip is placed on to each cell body mechanism 22
It is interior, and control residence time of the gaily decorated basket for filling with silicon chip in each cell body；
The drier 23 is used to dry the silicon chip surface soaked by the liquid in cell body mechanism 22；
The articulated robot 24 places the gaily decorated basket for filling with silicon chip on the automation charging and discharging mechanism 3.
During work, manipulator crawl transplanting mechanism 25, which grasps, sticks with the gaily decorated basket of silicon chip being put into each technology groove in turn,
Complete cleaning.
Manipulator captures transplanting mechanism 25, two long guideways in cell body top layout, can above cell body any position
Stop is put, bottom is mounted with that the device of the gaily decorated basket can be picked and placeed.
Manipulator crawl transplanting mechanism 25 can will stick with silicon chip under PLC control according to the technological requirement of program setting
The gaily decorated basket each cell body kind profit reduction and reserving as defined in the time.
Drier 23：The silicon chip surface that drier 23 is mainly used to soak by liquid in technique cell body dries
It is dry, to meet follow-up technological requirement.It is mainly made up of heater and air-blast device.Cardinal principle is exactly that having heaters will
Air heats, and has extracted hot-air by air blower and has blowed to silicon chip surface, has accelerated the drying of silicon chip.
It is brilliant that the automation charging and discharging mechanism 3 includes feeding gaily decorated basket disengaging module 31, feeding gaily decorated basket lifting module 32, feeding
Piece feeding module 33, feeding transfer module 34, feeding support plate positioning conveying module 35, lifting module 36, blanking chip feeding mould
Group 37, blanking transfer module 38 and blanking support plate positioning conveying module 39；
The feeding gaily decorated basket disengaging module 31 is used to the gaily decorated basket for filling with silicon chip being put into feeding gaily decorated basket lifting module 32 and incited somebody to action
The empty gaily decorated basket removes；
The feeding gaily decorated basket lifting module 32 is used to the gaily decorated basket for filling with silicon chip being moved into gaily decorated basket position, and the full gaily decorated basket enters
Enter, the empty gaily decorated basket for taking silicon chip away is moved to out gaily decorated basket position, empty gaily decorated basket outflow；
Silicon chip is moved to position corresponding to support plate room and correcting by the feeding chip feeding module 33；
Silicon chip is moved to support plate position by the feeding transfer module 34, puts silicon chip；
The feeding support plate positioning conveying module 35, positioning is clamped to support plate, is transported to lifting module 36；
The lifting module 36 will put the carrier plate transmission of silicon chip well to RIE dry method wool-weaving machine 4；
The blanking support plate positioning conveying module 39 is clamped positioning to the support plate after the making herbs into wool of RIE dry method wool-weaving machine 4, defeated
Support plate is sent to the blanking transfer module 38；
Silicon chip on support plate on support plate is placed on chip feeding streamline by the blanking transfer module 38；
Silicon chip on streamline is transported on packing production line by the blanking chip feeding module 37.
The RIE dry method wool-weaving machine 4 includes transmission mechanism 43 and support plate on cavity systems 41, ion source system 42, support plate
Lower transmission mechanism 44, the cavity systems 41, ion source system 42, transmission mechanism 43 is sequentially connected on support plate；
Specifically, the cavity systems 41 include five single cavitys, respectively loading chamaer 411, caching chamber 412, work
Skill chamber 413, cooling chamber 414 and unloading chamber 415；
Transmission mechanism 44 is arranged on the cavity systems 41, ion source system 42, transmission mechanism on support plate under the support plate
43 lower section.
It is automatic that the automatic laminating machine 5 includes conveying equipment 51, silicon chip discharge mechanism 52, straight line elevating mechanism 53, cylinder
Tilt centralising device 54；
The silicon chip discharge mechanism 52 is arranged in the front end of the conveying equipment 51, the cylinder wing drop centralising device
54 are arranged on the lower section of silicon chip discharge mechanism 52, for being corrected to the position of silicon chip；
The straight line elevating mechanism 53 is arranged on the lower section of cylinder wing drop centralising device 54.
The silicon chip that making herbs into wool is completed is removed by unloading manipulator from support plate, is placed on conveying equipment 51.Silicon chip feeding machine
Structure 52 is arranged in the front end of conveying equipment 51.Silicon chip relies on the nylon fixture block that the inertia of itself is poured in silicon chip discharge mechanism 52
On.Silicon chip discharge mechanism 52 separates two pieces of nylon fixture blocks by Pneumatic clamping jaw, and silicon chip falls into hoistable platform under gravity
On.In order to which that corrects silicon chip falls into position, it is necessary to which cylinder wing drop centralising device 54 is corrected to the position of silicon chip.Cylinder
Wing drop centralising device 54 is mainly made up of a cylinder and one block of supporting plate that can be rotated around bearing pin, is fallen using silicon chip
Enter on silicon chip and flat board to have on flat board the principle of a layer of air, the inclination of the certain angle formed by flat board, silicon chip can be from
It is dynamic to be positioned by a direction, reach the purpose of silicon chip positioning.The main function of straight line elevating mechanism 53 exactly puts down rewinding
For platform with moving up and down together, straight line elevating mechanism 53 coordinates the Buddhist nun that optoelectronic switch can allow in the superiors' silicon chip discharge mechanism 52
Imperial fixture block remains constant distance, prevents silicon chip height is too high from causing silicon chip to damage.Silicon chip can pass through photoelectric counting and switch
Counted, after setting value is reached, straight line elevating mechanism 53 is elevated to artificial feeding station, the convenient manually silicon chip to folding
Take out.
The gaily decorated basket automatic rotary mechanism 6 includes gaily decorated basket rotating device 61, gaily decorated basket switching mechanism 1 and gaily decorated basket tipper
Structure 2 63；
The gaily decorated basket rotating device 61 on cleaning machine 2 before the automation, pacify by the gaily decorated basket switching mechanism 1
The feed end of cleaning machine 2 before the automation,
The gaily decorated basket switching mechanism 2 63 is arranged on the bottom of cleaning machine 2 before the automation.
The major function of gaily decorated basket rotating device 61 is exactly 90 ° of gaily decorated basket transverse rotation for bringing gaily decorated basket loop back device, side
Continuous gaily decorated basket switching mechanism 1 receives the gaily decorated basket after an action of the bowels.
The major function of gaily decorated basket switching mechanism 1 is exactly by upward 90 ° of the empty gaily decorated basket, has traverse to be changed to stand up the gaily decorated basket.
The major function of gaily decorated basket switching mechanism 2 63 is exactly that the gaily decorated basket for plugging full silicon chip is downwardly turned over into 90 °, is easy to automatic
Cleaning machine 2 receives the gaily decorated basket before change.
In addition, the utility model additionally provides a kind of production line, including above-mentioned dry-wet integrated machine.
Finally it should be noted that：Various embodiments above is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the utility model is described in detail with reference to foregoing embodiments, one of ordinary skill in the art should
Understand：It can still modify to the technical scheme described in foregoing embodiments, either to which part or whole
Technical characteristic carries out equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from this practicality newly
The scope of each embodiment technical scheme of type.
Claims (10)
1. a kind of dry-wet integrated machine, it is characterised in that including cleaning machine, automation charging ＆ discharging machine before inserted sheet feeder, automation
Structure, RIE dry method wool-weaving machine, automatic laminating machine and gaily decorated basket automatic rotary mechanism；
Cleaning machine, automation charging and discharging mechanism are sequentially connected before the inserted sheet feeder, automation, the RIE dry method wool-weaving machine
It is connected respectively with the automation charging and discharging mechanism with automatic laminating machine, the gaily decorated basket automatic rotary mechanism is arranged on the inserted sheet
Before feeder and the automation between cleaning machine；
The inserted sheet feeder is used to a whole folded silicon chip is inserted into the sky gaily decorated basket to and is sent into cleaning machine before the automation；
Cleaning machine is used to carry out silicon chip damage cleaning before the automation；
The automation charging and discharging mechanism takes out the silicon chip through over cleaning from the gaily decorated basket to be put on RIE dry method wool-weaving machines, and will
Silicon chip after making herbs into wool is removed from RIE dry method wool-weaving machines；
The RIE dry method wool-weaving machine is used to etch to form antireflection layer matte in silicon chip surface；
The automatic laminating machine removes the silicon chip of making herbs into wool, builds up certain amount；
The empty gaily decorated basket for taking silicon chip away is transported to the discharge outlet of inserted sheet feeder by the gaily decorated basket automatic rotary mechanism.
2. dry-wet integrated machine according to claim 1, it is characterised in that the inserted sheet feeder includes silicon chip storage dress
Put, silicon wafer conveying device, gaily decorated basket hoisting mechanism, reclaimer robot and silicon chip lifting device；
The silicon chip storing unit, silicon wafer conveying device and gaily decorated basket hoisting mechanism are sequentially connected；
The reclaimer robot is arranged on above the silicon chip storing unit；
The silicon chip lifting device is arranged on below the silicon chip storing unit and is connected with the silicon chip storing unit, so as to change
Become the height of silicon chip storing unit.
3. dry-wet integrated machine according to claim 1, it is characterised in that cleaning machine includes being sequentially connected before the automation
Truss robot, cell body mechanism, drier and articulated robot；
The truss robot is placed on before the automation after the gaily decorated basket for filling with silicon chip is captured on the feeding station of cleaning machine；
The cell body mechanism is made up of multiple cell bodies, contains process liquid inside each cell body, each cell body is internally integrated automatically
Temperature conditioning unit and automatic liquid-feeding unit, the cell body mechanism top set manipulator to capture transplanting mechanism；
The manipulator crawl transplanting mechanism is used to be placed on the gaily decorated basket for filling with silicon chip in the cell body of each cell body mechanism, and controls
Fill with residence time of the gaily decorated basket of silicon chip in each cell body；
The drier is used to dry the silicon chip surface soaked by the liquid in cell body mechanism；
The articulated robot places the gaily decorated basket for filling with silicon chip on the automation charging and discharging mechanism.
4. dry-wet integrated machine according to claim 1, it is characterised in that the automation charging and discharging mechanism is spent including feeding
Basket disengaging module, feeding gaily decorated basket lifting module, feeding chip feeding module, feeding transfer module, feeding support plate positioning conveying mould
Group, lifting module, blanking chip feeding module, blanking transfer module and blanking support plate positioning conveying module；
The feeding gaily decorated basket disengaging module is used to the gaily decorated basket for filling with silicon chip being put into feeding gaily decorated basket lifting module and moves the empty gaily decorated basket
Go out；
The feeding gaily decorated basket lifting module is used to the gaily decorated basket for filling with silicon chip being moved into gaily decorated basket position, and the full gaily decorated basket enters, and will take
The empty gaily decorated basket for walking silicon chip is moved to out gaily decorated basket position, empty gaily decorated basket outflow；
Silicon chip is moved to position corresponding to support plate room and correcting by the feeding chip feeding module；
Silicon chip is moved to support plate position by the feeding transfer module, puts silicon chip；
The feeding support plate positioning conveying module, positioning is clamped to support plate, is transported to lifting module；
The lifting module will put the carrier plate transmission of silicon chip well to RIE dry method wool-weaving machines；
The blanking support plate positioning conveying module is clamped positioning, conveying carrier plate to the support plate after RIE dry method wool-weaving machine making herbs into wool
To the blanking transfer module；
Silicon chip on support plate on support plate is placed on chip feeding streamline by the blanking transfer module；
Silicon chip on streamline is transported on packing production line by the blanking chip feeding module.
5. dry-wet integrated machine according to claim 1, it is characterised in that the RIE dry method wool-weaving machine include cavity systems,
Transmission mechanism under transmission mechanism and support plate on ion source system, support plate, the cavity systems, ion source system, transmit on support plate
Mechanism is sequentially connected；
Under the support plate transmission mechanism be arranged on the cavity systems, ion source system, on support plate transmission mechanism lower section.
6. dry-wet integrated machine according to claim 1, it is characterised in that the automatic laminating machine includes conveying equipment, silicon
Piece discharge mechanism, straight line elevating mechanism, cylinder wing drop centralising device；
The silicon chip discharge mechanism is arranged in the front end of the conveying equipment, and the cylinder wing drop centralising device is arranged on institute
State below silicon chip discharge mechanism, for being corrected to the position of silicon chip；
The straight line elevating mechanism is arranged on below the cylinder wing drop centralising device.
7. dry-wet integrated machine according to claim 1, it is characterised in that the gaily decorated basket automatic rotary mechanism revolves including the gaily decorated basket
Rotary device, gaily decorated basket switching mechanism one and gaily decorated basket switching mechanism two；
The gaily decorated basket rotating device is arranged on before the automation on cleaning machine, the gaily decorated basket switching mechanism one be arranged on it is described from
The feed end of cleaning machine before dynamicization,
The gaily decorated basket switching mechanism two cleans motor spindle before being arranged on the automation.
8. dry-wet integrated machine according to claim 5, it is characterised in that the cavity systems include five single chambers
Body, respectively loading chamaer, caching chamber, process cavity, cooling chamber and unloading chamber.
9. dry-wet integrated machine according to claim 3, it is characterised in that the cell body mechanism is made up of seven technology grooves.
10. a kind of production line, it is characterised in that including the dry-wet integrated machine any one of claim 1-9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720329247.7U CN206685400U (en) | 2017-03-30 | 2017-03-30 | Dry-wet integrated machine and production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720329247.7U CN206685400U (en) | 2017-03-30 | 2017-03-30 | Dry-wet integrated machine and production line |
Publications (1)
| Publication Number | Publication Date |
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| CN206685400U true CN206685400U (en) | 2017-11-28 |
Family
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| CN201720329247.7U Active CN206685400U (en) | 2017-03-30 | 2017-03-30 | Dry-wet integrated machine and production line |
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| Country | Link |
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| CN (1) | CN206685400U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106784169A (en) * | 2017-03-30 | 2017-05-31 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN113066745A (en) * | 2021-03-26 | 2021-07-02 | 江苏大学 | Reactive ion etching device and method for continuously preparing large-area nano suede |
| CN113224178A (en) * | 2021-04-28 | 2021-08-06 | 宜兴市昱元能源装备技术开发有限公司 | Production method of silicon wafer, silicon wafer produced by using production method and solar cell |
| CN115565922A (en) * | 2022-09-22 | 2023-01-03 | 无锡荣能半导体材料有限公司 | Automatic alternating double-track sorting and feeding machine for silicon wafers |
| CN117174781A (en) * | 2023-09-15 | 2023-12-05 | 浙江鸿禧能源股份有限公司 | Monocrystalline silicon wafer cleaning and texturing device and process for TOPCO battery |
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2017
- 2017-03-30 CN CN201720329247.7U patent/CN206685400U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106784169A (en) * | 2017-03-30 | 2017-05-31 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN106784169B (en) * | 2017-03-30 | 2019-03-19 | 常州比太科技有限公司 | Dry-wet integrated machine and production line |
| CN113066745A (en) * | 2021-03-26 | 2021-07-02 | 江苏大学 | Reactive ion etching device and method for continuously preparing large-area nano suede |
| CN113224178A (en) * | 2021-04-28 | 2021-08-06 | 宜兴市昱元能源装备技术开发有限公司 | Production method of silicon wafer, silicon wafer produced by using production method and solar cell |
| CN113224178B (en) * | 2021-04-28 | 2023-05-26 | 宜兴市昱元能源装备技术开发有限公司 | Silicon wafer production method and silicon wafer and solar cell produced by same |
| CN115565922A (en) * | 2022-09-22 | 2023-01-03 | 无锡荣能半导体材料有限公司 | Automatic alternating double-track sorting and feeding machine for silicon wafers |
| CN117174781A (en) * | 2023-09-15 | 2023-12-05 | 浙江鸿禧能源股份有限公司 | Monocrystalline silicon wafer cleaning and texturing device and process for TOPCO battery |
| CN117174781B (en) * | 2023-09-15 | 2024-04-16 | 浙江鸿禧能源股份有限公司 | Monocrystalline silicon wafer cleaning and texturing device and process for TOPCO battery |
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