CN106169434B - A kind of crystalline silicon transport cleaning device - Google Patents
A kind of crystalline silicon transport cleaning device Download PDFInfo
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- CN106169434B CN106169434B CN201610700092.3A CN201610700092A CN106169434B CN 106169434 B CN106169434 B CN 106169434B CN 201610700092 A CN201610700092 A CN 201610700092A CN 106169434 B CN106169434 B CN 106169434B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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Abstract
A kind of crystalline silicon provided by the invention transports cleaning device, including：Multiple feeding jigs, feeding jig transport system, feeding jig lifting system, feeding jig lifting system, suction piece system, suction piece transport system, faulty goods processing system, product arranges module, multiple process handling modules, stack system is postponed in discharging, emergent charging system, it can integrate full-automatic plug-in sheet machine and Chained cleaning machine function currently on the market in photovoltaic silicon chip production link, reach inserted sheet to sorting machine slitless connection, instead of slot type silicon wafer cleaner, inserted sheet is fallen in optimization, slot type cleans link tool fixture, the silicon chip that cleaning is completed directly is transported to sorting machine, it can replace the function of slot type cleaning, play the loading and unloading advantage of chain type cleaning, improve all transfer efficients, reduce the proportion of goods damageds, reduce artificial input；It can replace the function of roller type chain type texturing machine, etching machine in the making herbs into wool of solar-energy photo-voltaic cell piece, etching production link, substantially reduce equipment input cost.
Description
Technical field
The present invention relates to the cleaning equipment of crystalline silicon, especially a kind of crystalline silicon transports cleaning device.
Background technology
Photovoltaic industry, semicon industry have chain type cleaning and slot type cleaning solution, front-end-of-line to have in the world at present
Purely manual, semi-automatic, fully automatic feeding device；Chain type cleans easy and back segment process slitless connection after discharging, generally in foreign countries
Using, but at present the country use or manual dock feeding with back segment process；Chain type cleaning is conveyed using roller bearing, due to rolling
The number of axle, unit price cause manufacturing cost to clean 5-8 times higher than slot type, so accounting for 99% at home using slot type cleaning.Slot type is clear
Wash it is more due to the use of jig, so material-uploading style than chain type clean it is more cumbersome, even if having on the market by slot type clean integrate
For jig automatic back flow, but artificial interference is needed to complete, only solves the problems, such as labor intensity, do not reach less manpower,
Automatic seamless docks purpose.
Chain type cleaning technique, feature：Product horizontal passes in and out all cleaning modules, and product is in this section of process residence time 15
In minute.Chain type cleaning front-end-of-line has purely manual, semi-automatic, full automatic treatment device, general to be degumming or primary cleaning dress
It sets；The product handled well is manually taken chain type cleaning link, no and chain type by chain type cleaning front-end-of-line in batch
Cleaning process slitless connection.Generally use manually by single product and drains into feeding port to chain type cleaning feeding section at home, nothing
Need fragment or inserted sheet, slice arranging apparatus, chain type cleaning that roller bearing conveying products, roller bearing arc surface is used directly to be contacted with product surface,
Auxiliary wheel counterweight above product makes product generate frictional force with roller bearing cambered surface, so that roller bearing is rotated by power, to make product
It moves forward, roller bearing is installed in the liquid for holding different medium simultaneously, to ensure that product is submerged in liquid completely, in product
Top matches idler wheel counterweight, product is pressed always inside people's liquid, ensures that product remains appropriate frictional force with roller bearing,
With this ensure product it is continuous, it is positive move forward, disparate modules, a upper module and next module centre mistake are passed through in product movement
In order to ensure that different medium is not gone here and there mutually in crossing, software roller bearing is added in a upper module outlet, different cleanings are realized with this,
There are appropriate spacing, roller bearing lower section to be equipped with ultrasonic transducer according to technique difference, be bubbled dress among roller bearing and roller bearing simultaneously
It sets, ensures that cleaning performance, roller bearing, away from spray equipment is also equipped in different process, spray simultaneously up and down with roller bearing middle ware with this
It drenches, effect and product surface, that is, ensures product cleaning performance, and guarantee product is continuous, forward direction moves forward.One in this process
As be made of multiple modules, individual module according to technique difference be furnished with different function, have spray, ultrasonic wave, liquid cleaning, clear water
The functions such as rinsing, liquid neutralization, high-temperature rinsing, high temperature drying.Chain type cleans blanking and generally uses automatic blanking to box at home
In formula container, then by manually unifying to receive next procedure manually, external generally using blanking slitless connection to next procedure.
Slot type cleaning device feature：Product passes in and out all cleaning modules by jig vertically, and product is stopped in this section of process
Time is in 60 minutes.Slot type cleaning is Vehicles Collected from Market occupation rate highest cleaning model, there is low cost, cleaning maturation etc.
Advantage.Slot type cleaning front-end-of-line has purely manual, semi-automatic, full automatic treatment device, general to be fragment or inserted sheet, screening dress
It sets.Purely manual inserted sheet is manually to be put into product one by one in slot type cleaning packing jig (to be film magazine below, generally use PVDF
Material, also useful PP materials, also have film magazine and gaily decorated basket integrator, generally there is 25-200 pieces type), then it will fill
The film magazine of product be concentrated into slot type cleaning concentrate jig in (it is usually metal and plastic material to be the gaily decorated basket, the gaily decorated basket below, is also had
Metal and plastics are mixed), then the gaily decorated basket for filling film magazine is put into the feeding end of slot type cleaning device；Semi-automatic inserted sheet is
Product is manually put into sliding desk type slice arranging apparatus one by one, reaches semi-automatic and product is put into film magazine, first by manually by piece
Box is put into slice arranging apparatus, is generally placed in 3-4 boxes, then artificial fragment, is put into feeding slide unit one by one, has slice arranging apparatus certainly
Then the film magazine for filling product is manually concentrated into the gaily decorated basket by dynamic film magazine packing task of completing then by manually taking out film magazine,
Then the gaily decorated basket for filling film magazine is manually put into the feeding end of slot type cleaning device；Full-automatic inserted sheet is manually to produce previous process
Product are put into full-automatic inserting piece device feeding end in batch, and film magazine is also that batch is put into or is individually put into conveying device, is then started
Full-automatic inserting piece device, full-automatic inserting piece device are then automatic by the film magazine dispensed automatically into film magazine, automatic subpackaging product
It is put into out material conveying device, then by manually taking out film magazine in discharging end, is then manually concentrated into the film magazine for filling product
In the gaily decorated basket, then the gaily decorated basket for filling film magazine is manually put into the feeding end of slot type cleaning device；
After the gaily decorated basket is manually put into feeding port by slot type cleaning device, start charging button, is then cleaned fill by slot type at this time
The manipulator set is automatically performed all module processes and (also manually completes all module cleanings, be called Manual-cleaning dress
Set), until the product handled well is automatically sent to feed opening together with the gaily decorated basket automatically, then by being accomplished manually blanking, will spend
Film magazine takes out in basket, is sent to next procedure (sorting unit), by film magazine is manually put into feeding end, sorting unit is pressed for next procedure
Photograph box quantity is automatically performed sorting function, and client is put in storage according to product classification is sub-elected.What such device was described herein is
Prevailing model, some of which also divide multiple modules, are drying function herein, and not drying being also once manually transferred to is got rid of
It is dry, then manually it is fetched into sorting unit.
In conclusion the prior art is mainly by following disadvantage：
1, frock clamp uses more, time-consuming and laborious, and frock clamp also needs update a batch every year；
2, frock clamp is more, causes preceding road, later process automation linking difficult, has substantially manually carried on the market
It is docked at upper and lower process, the degree of automation is low, there is an automatic butt, but again without thoroughly breaking away from frock clamp, and
Manufacturing price is quite high；
3, process segmentation is more, causes integral layout ornaments in workshop in disorder；
4, it is easy accumulation after blanking, causes batch temporary, largely occupies frock clamp, operating cost is made to increase；
5, product stops this activity time and reaches 60 minutes, influences products in circulation efficiency；
6, complicated in mechanical structure, 2 sets of manipulator or more, cost, failure rate all can be relatively high；
7, there are impact marks in product and film magazine bottom contact position.
Invention content
In order to solve the above-mentioned technical problem, a kind of crystalline silicon transport cleaning device is provided, can be integrated currently on the market
Full-automatic plug-in sheet machine and Chained cleaning machine function, reach inserted sheet to sorting machine slitless connection, it is excellent instead of slot type silicon wafer cleaner
Inserted sheet, slot type cleaning link tool fixture are melted, the silicon chip that cleaning is completed directly is transported to sorting machine, slot type can be replaced clear
The function of washing plays the loading and unloading advantage of chain type cleaning, reduces the products in circulation time, improves all transfer efficients, reduces the proportion of goods damageds, subtract
Few artificial input.
A kind of crystalline silicon provided by the invention transports cleaning device, including：
Multiple feeding jigs, the feeding jig are used to place the product for needing to carry out process；
Feeding jig transport system, for conveying multiple feeding jigs；
The tail in the feeding jig transport system is arranged in feeding jig lifting system, the feeding jig lifting system
Portion, for promoting multiple feeding jigs successively；
Suction piece system is arranged in the tail portion of the feeding jig lifting system, for drawing product；
Suction piece transport system is arranged in the tail portion of the feeding jig lifting system, is used for conveying products；
Faulty goods processing system, the faulty goods processing system are arranged in the exit of the suction piece transport system,
To be detected to product and handle faulty goods；
Product arranges module, is arranged in the exit of the suction piece transport system, for being sent to the suction piece transport system
The product gone out is arranged；
Multiple process handling modules, multiple process handling modules are sequentially connected setting, for arranging the product
The product that module is sent out carries out process successively；
Stack system is postponed in discharging, is arranged in the exit of the drawing mechanism, at by above-mentioned process handling module
The product managed carries out parallel equidistant storage；
Emergent charging system, is arranged in the tail portion of the drawing mechanism, for store exceed predetermined number by above-mentioned
The processed product of process handling module, the predetermined number are the maximum quantity that stack system storage is postponed in the discharging.
Further, crystalline silicon transport cleaning device further includes round belt, and the round belt fills to be cleaned as the transport
The delivery platform set, the product arrangement module and multiple process handling modules pass through the round belt conveying products, production
Product, which are lain on the round belt, carries out transport and process.
Further, the feeding jig transport system carries out horizontal feed, and each institute to multiple feeding jigs
Feeding jig is stated when by the feeding jig lifting system, the feeding jig transport system is stopped, equipped with production
The feeding jig of product can control the empty feeding for having conveyed product with the movement of the feeding jig transport system
Tool ejection.
Further, the tail portion per the process handling module is both provided with the climbing being arranged horizontal by angle.
Further, the rear and front end per the process handling module is both provided with end axis, each end axis setting
The liquid level of process handling module where position is above each end axis.
Further, it is both provided at least a round belt per the process handling module, each round belt is around the shaft
It is arranged in eight words, and each round belt is rough surface or smooth surface, the round belt is to clear as the transport
The delivery platform of cleaning device, product lie on the round belt and are transported.
Further, it is both provided with support shaft and pinch roller system per the process handling module, each round belt is all provided with
It sets the top of the support shaft in the process handling module of place and is slidably connected with the support shaft, place process mould
The top of the round belt in the process handling module of place is arranged in the pinch roller system in the block, at pressed place technique
The product transmitted on the reason mould round belt in the block.
Further, identical quantity transfer passage, the number of the transfer passage are both provided with per the process handling module
Amount is at least 1, and is both provided with cleansing medium per the process handling module, each process handling module be provided with to
A few ultrasonic wave shakes head, or is not provided with ultrasonic wave and shakes head.
Further, multiple process handling modules include：At least one first process handling module, at the second technique
Manage module, third process handling module, the 4th process handling module, the 5th process handling module；
Each first process handling module is sequentially connected setting, for what is transferred out to product arrangement module
Product carries out process successively；
Second process handling module is arranged in the tail portion for multiple first process handling modules being arranged in order, described
Second process handling module is provided with spray equipment；
Third process handling module is arranged in the tail portion of second process handling module, the third process mould
Block is provided with cleaning agent, each first process handling module, second process handling module, the third process
Module carries out process in liquid to product；
4th process handling module is arranged in the tail portion of the third process handling module, the 4th process mould
Block is provided with drying unit；
5th process handling module is arranged in the tail portion of the 4th process handling module, the 5th process mould
The tail portion of block is provided with drawing mechanism.
Further, discharging postpones stack system and is provided with condition discriminating apparatus, and the condition discriminating apparatus is distinguishing the type of product
Number, and product is stored classifiedly.
In conclusion a kind of crystalline silicon transport cleaning device provided by the invention compared with prior art its have it is beneficial
Effect is full-automatic plug-in sheet machine and the Chained cleaning machine function that can be integrated currently on the market, reach inserted sheet to sorting machine without
Seam docking, instead of slot type silicon wafer cleaner, inserted sheet is fallen in optimization, slot type cleans link tool fixture, the silicon for directly completing cleaning
Piece is transported to sorting machine, can replace the function of slot type cleaning, play the loading and unloading advantage of chain type cleaning, when reducing products in circulation
Between, all transfer efficients are improved, the proportion of goods damageds are reduced, reduce artificial input；Wherein, the product in feeding jig is after completing to draw, row
The feeding jig in face can eject empty feeding jig behind, improve the degree of automation；
Advantage is as follows：
1) identical yield less manpower 1-2 people；
2) it is lost without frock clamp；
3) installation space smaller, integral layout, workshop are smooth beautiful；
4) production capacity is 1.5 times of original production capacity；
5) the degree of automation higher is put into this equipment feeding platform in batches after degumming, without human intervention, directly with sorting
Machine docks, testing process；
6) without mechanisms such as cumbersome manipulator, throwings, pressure basket problem loss is not had, failure rate is lower；
7) the products in circulation time shortens, and is shortened to from 55 minutes 10-15 minutes；
8), product contacts in technical module without jig, collisionless trace.
Description of the drawings
Fig. 1 is the overall structure diagram that a kind of crystalline silicon provided by the invention transports cleaning device；
Fig. 2 is that a kind of crystalline silicon provided by the invention transports multiple feeding jigs of cleaning device, feeding jig delivery system
System, feeding jig lifting system, suction piece system, suction piece transport system, the cloth of faulty goods processing system and product arrangement module
Set structural schematic diagram；
Fig. 3 is the structural representation for the single process handling module that a kind of crystalline silicon provided by the invention transports cleaning device
Figure；
Fig. 4 is the 5th process handling module that a kind of crystalline silicon provided by the invention transports cleaning device, and heap is postponed in discharging
The arrangement schematic diagram of stack system and emergent charging system；
Fig. 5 is climbing and the end axis for each process handling module that a kind of crystalline silicon provided by the invention transports cleaning device
Partial enlargement structural representation；
Fig. 6 is the close-up schematic view of the arrangement for the round belt that a kind of crystalline silicon provided by the invention transports cleaning device；
In figure：
1, feeding jig；2, feeding jig transport system；3, feeding jig lifting system；
4, suction piece system；5, suction piece transport system；6, faulty goods processing system；
7, product arranges module；8, process handling module；9, stack system is postponed in discharging；
10, emergent charging system；81, the first process handling module；
82, the second process handling module；83, third process handling module；
84, the 4th process handling module；85, the 5th process handling module；
86, support shaft；87, pinch roller system；88, climb；89, axis is held；810, round belt.
Specific implementation mode
The present invention is described in further details in the following with reference to the drawings and specific embodiments：
As shown in Figures 1 to 6, a kind of crystalline silicon provided by the invention transports cleaning device, including：Multiple feeding jigs 1,
Feeding jig 1 is used to place the product for needing to carry out process；1 transport system 2 of feeding jig, is controlled for conveying multiple feedings
Tool 1；1 lifting system 3 of feeding jig, 1 lifting system 3 of feeding jig are arranged in the tail portion of 1 transport system 2 of feeding jig, are used for
Multiple feeding jigs 1 are promoted successively；Suction piece system 4 is arranged in the tail portion of 1 lifting system 3 of feeding jig, for drawing product；
Suction piece transport system 5 is arranged in the tail portion of 1 lifting system 3 of feeding jig, is used for conveying products；Faulty goods processing system 6,
Faulty goods processing system 6 is arranged in the exit of suction piece transport system 5, to product is detected and to faulty goods into
Row processing；Product arranges module 7, is arranged in the exit of suction piece transport system 5, the production for being sent out to suction piece transport system 5
Product are arranged；Multiple process handling modules 8, multiple process handling modules 8 are sequentially connected setting, for arranging module to product
7 products sent out carry out process successively；Stack system 9 is postponed in discharging, is arranged in the exit of drawing mechanism, to by upper
It states 8 processed product of process handling module and carries out parallel equidistant storage, solve between process since efficiency is different or goes out
When existing problem, temporary storage is carried out to the product that working process is crossed, waits for that process restores positive postpartum below, then product is transported to
Next process；Emergent charging system 10, is arranged in the tail portion of drawing mechanism, for store exceed predetermined number by above-mentioned
8 processed product of process handling module, predetermined number are the maximum quantity that discharging postpones that stack system 9 is stored, can be whole
Full-automatic plug-in sheet machine currently on the market and Chained cleaning machine function are closed, reaches inserted sheet to sorting machine slitless connection, instead of slot type
Silicon wafer cleaner, inserted sheet is fallen in optimization, slot type cleans link tool fixture, and the silicon chip that cleaning is completed directly is transported to sorting machine,
The function that can replace slot type cleaning, plays the loading and unloading advantage of chain type cleaning, reduces the products in circulation time, and all transfer efficients subtract
Few proportion of goods damageds.
In a preferred embodiment, crystalline silicon transport cleaning device further includes round belt 810, and round belt 810 is to conduct
Transporting the delivery platform of cleaning device, product arranges module 7 and multiple process handling modules 8 by 810 conveying products of round belt,
Product, which is lain on round belt 810, carries out transport and process, ensures the continuity in product conveyor process engineering, from
Dynamicization degree is greatly improved.
In a preferred embodiment, 1 transport system 2 of feeding jig carries out horizontal feed to multiple feeding jigs 1,
And each when by feeding 1 lifting system 3 of jig, 1 transport system 2 of feeding jig is stopped feeding jig 1, suction piece system
System 4 is provided with water pump or vacuum generator, and suction piece system 4 is to generate negative pressure by water pump, or produce by vacuum generator
Raw negative pressure, product are put into according to technological requirement in each feeding jig 1, are then put into 1 transport system 2 of feeding jig one by one,
The first feeding jig 1 being arranged in order is transported to working position by 1 transport system 2 of feeding jig, then 1 lifting system of feeding jig
3 work, and are promoted to after proper height, and suction piece system 4 is started to work, and processed product is sucked suction piece system 4, makes production
The upper surfaces of product and suction piece transport system 5 generate frictional force, at the same suction piece system 4 processed product in addition one side under
There is acting in opposition power apparatus in side, and individually processed product is detached and is sucked out so as to realize, when processed product quilt
After suction piece transport system 5 is transported to target position, second processed product supplements again, realizes uninterrupted conveying.When upper
Product is sucked out one in material jig 1, and 1 lifting system 3 of feeding jig can all correspond to rising certain size, meet suction piece system with this
It unites 4 job requirements.After the product in feeding jig 1 has conveyed, 1 lifting system 3 of feeding jig can drop to suitable position, so
1 transport system 2 of feeding jig is started to work afterwards, and the feeding jig 1 equipped with product can be with the fortune of feeding jig transport system 2
It is dynamic to eject the empty feeding jig 1 for having conveyed product, and the position of former feeding jig 1 is replaced to start the cycle over work, subtract significantly
The workload of few operating personnel, and increase working efficiency.It is to convey suction piece transport system 5 that product, which arranges 7 task of module,
The product gone out arranges as requested, is output to next module.Product is transported to faulty goods processing by suction piece transport system 5
System 6, faulty goods processing system 6 can require identify substandard product according to product defects, when detecting unqualified production
Faulty goods processing system 6 can reduce delivery head after product, substandard product is directly placed into 7 bottom of product arrangement module, so
After rise to working position, when detecting qualified products faulty goods processing system 6 can be delivered directly to be arranged in order it is multiple
First process handling module 8 of process handling module 8 starts to carry out process to product.
In a preferred embodiment, it is both provided with per the tail portion of process handling module 8 and is arranged horizontal by angle
Climbing 88, since end axis 89 and the driving shaft in process handling module 8 are Different Plane arrangements, so processed product is defeated
Being sent at this time can be there are one upward slope process, and the liquid above product that is processed in upward slope can be slipped under gravity works as
In preceding technical module, the liquid leakage between different process processing module 8 will not or be reduced, also there are one process moulds certainly
The end axis 89 and driving shaft of block 8 are same plane arrangements, and same plane arrangement can also install flexible roller additional in end to be passed through
Product liquid dispose, it is this generally roller bearing transferring structure use.
In a preferred embodiment, it is both provided with end axis 89 per the rear and front end of process handling module 8, each holds axis
The position of 89 settings is above the liquid level of 89 place process handling module 8 of each end axis, to form climbing 88.
In a preferred embodiment, an at least round belt 810, each round belt are both provided with per process handling module 8
810 be in that eight words are arranged, and each round belt 810 is rough surface or smooth surface around the shaft, and difference can be selected in round belt 810
Material can be horizontally disposed with and also be arranged horizontal by angle certainly, and round belt 810 is to the conveying as transport cleaning device
Platform, product lie on round belt 810 and are transported.
In a preferred embodiment, it is both provided with support shaft 86 and pinch roller system 87 per process handling module 8, often
The top of support shaft 86 in process handling module 8 where a round belt 810 is arranged at simultaneously is slidably connected with support shaft 86, when
So, it can also be arranged in support shaft 86 and turn rod, then round belt 810 is connect and with rod is turned with the rotation of turn rod, place process mould
The top of the round belt 810 in place process handling module 8 is arranged in pinch roller system 87 in block 8, at pressed place technique
The product that transmits on round belt 810 in reason module 8, due to product in 8 cleansing medium of process handling module by when have one
Buoyancy is determined, to which processed product and 810 frictional force of round belt can be caused inadequate, it may appear that processed product conveying and stacking etc.
Adverse consequences, so installed support shaft 86 and pinch roller system 87 additional in the special process of entire process, 86 cloth of support shaft
The suitable position below round belt 810 is set, 810 top weight of round belt is withstood；Pinch roller system 87 is arranged in 810 top of round belt and closes
Right position is set, and processed product is pushed down, pinch roller system 87 is pushed down using the idler wheel gravity being arranged in above its own axis
Processed product.In the entire system, appropriate number of support is arranged in suitable position according to processed product size
Axis 86 and pinch roller system 87 ensure that processed product generates suitable frictional force with round belt 810 always with this, ensure to be processed
Product accurately move forward.
In a preferred embodiment, identical quantity transfer passage, transfer passage are both provided with per process handling module 8
Quantity be at least 1, and be both provided with cleansing medium per process handling module 8, each process handling module 8 is provided at least
One ultrasonic wave shakes head, or is not provided with ultrasonic wave and shakes head；
In one embodiment, the quantity of transfer passage be 5, respectively transfer passage 1, transfer passage 2, transfer passage 3,
Transfer passage 4 and transfer passage 5, then 6 meeting of faulty goods processing system when faulty goods processing system 6 detects qualified products
It is delivered directly to transfer passage 1,1 processed product can be sent to transfer passage 2 by transfer passage 1, and transfer passage 2 can will be by
The product of processing is sent to transfer passage 3, and processed product can be sent to transfer passage 4 by transfer passage 3, and conveying logical 4 can will be by
The product of processing is sent to transfer passage 5, until full 5 transfer passages of arrangement, by the product of 5 transfer passages be transported to together according to
First process handling module 8 of multiple process handling modules 8 of secondary arrangement starts to carry out process to product.
In a preferred embodiment, multiple process handling modules 8 include：At least one first process handling module
81, the second process handling module 82, third process handling module 83, the 4th process handling module 84, the 5th process handling module
85；
Each first process handling module 81 is sequentially connected setting, the product for being transferred out to product arrangement module 7
Process is carried out successively, the processed product arranged is transported to the first process handling module 81 by product arrangement module 7,
It is required equipped with a certain proportion of cleansing medium, also in the first process according to treatment process in first process handling module 81
The bottom branch of module 81 has appropriate number of 110 ultrasonic wave to shake head, when have product by when can start 110 ultrasonic waves and shake head.
Processed product is first contacted with 81 end axis 89 of the first process handling module after reaching the first process handling module 81, and is produced with it
Frictional force is given birth to, transmission device is to drive round belt 810 by 81 driving shaft of the first process handling module in the first process handling module 81,
Round belt 810 is rotated with moved end axis 89；
Second process handling module 82 is arranged in the tail portion for multiple first process handling modules 81 being arranged in order, second
The tail portion of process handling module 82 is provided with climbing 88, and the second process handling module 82 is provided with spray equipment, processed
Product is first contacted with 82 end axis 89 of the second process handling module after reaching the second process handling module 82, and generates friction with it
Power, transmission device is to drive round belt 810, round belt by 82 driving shaft of the second process handling module in the second process handling module 82
810 band moved end axis 89 rotate, and as rinsing module, can arbitrarily change function according to technological requirement；
Third process handling module 83 is arranged in the tail portion of the second process handling module 82, third process handling module 83
Tail portion be provided with climbing 88, and third process handling module 83 is provided with cleaning agent, the quilt in the second process handling module 82
The product of processing is transported to third process handling module 83, in third process handling module 83 according to treatment process require equipped with
A certain proportion of cleansing medium, processed product reach first and third process handling module 83 after third process handling module 83
It holds axis 89 to contact, and frictional force is generated with it, transmission device is by third process handling module in third process handling module 83
83 driving shafts drive round belt 810, round belt 810 to be rotated with moved end axis 89, can be arbitrary according to technological requirement as rinsing module
Change function, each first process handling module 81, the second process handling module 82, third process handling module 83 are in liquid
It is interior to product carry out process in the actual production process can be according to actual needs, before and after each process handling module
Process sequence is adjusted, to adapt to the different demands in actual production；
4th process handling module 84 is arranged in the tail portion of third process handling module 83, the 4th process handling module 84
Tail portion be provided with climbing 88, and the 4th process handling module 84 is provided with drying unit, can arbitrarily be changed according to technological requirement
Become control different temperatures, the processed product in third process handling module 83 is transported to the 4th process handling module 84, quilt
The product of processing is first contacted with 84 end axis 89 of the 4th process handling module after reaching the 4th process handling module 84, and is produced with it
Frictional force is given birth to, transmission device is to drive round belt 810 by 84 driving shaft of the 4th process handling module in the 4th process handling module 84,
Round belt 810 is rotated with moved end axis 89；
5th process handling module 85 is arranged in the tail portion of the 4th process handling module 84, the 5th process handling module 85
Tail portion be provided with drawing mechanism, the processed product in the 4th process handling module 84 is transported to the 5th process handling module
85, processed product is first contacted with 85 end axis 89 of the 5th process handling module after reaching the 5th process handling module 85, and with
It generates frictional force, and transmission device is to drive round belt by 85 driving shaft of the 5th process handling module in the 5th process handling module 85
810, round belt 810 is rotated with moved end axis 89, and in one embodiment, transfer passage is 5, and respectively transfer passage 1, conveying is logical
Road 2, transfer passage 3, transfer passage 4 and transfer passage 5, it is logical that the product to be processed by process is transported to conveying successively
The tail portion in road 1, the tail portion of transfer passage 2, the tail portion of transfer passage 3, transfer passage 4 tail portion and transfer passage 5 tail portion, it is defeated
Channel 1, transfer passage 2, transfer passage 3, transfer passage 4 and transfer passage 5 is sent to rotate processed product forward by going out
Material heap stack transport system is transported to down one of production process, if lower one of production process has little time the processed product of processing,
Discharging postpones stack system 9 and carries out temporary processing to processed product, and normally heap is postponed in discharging to one of production process afterwards instantly
The processed product of caching is gradually transported to down one of production process by stack system 9 according to technological requirement, if discharging is postponed
Stack system 9 is unable to meet production requirement, can processed product be transported to emergent charging system 10, alleviate production pressure
Power.
In a preferred embodiment, discharging postpones stack system 9 and is provided with condition discriminating apparatus, and condition discriminating apparatus is distinguishing
The model of product, and product is stored classifiedly, processed product is temporary to arrangement according to anomaly between suitable, solve work
Since efficiency is different or when something goes wrong, carries out temporary storage to the product that working process is crossed, waits for process below between sequence
Restore positive postpartum, then product is transported to next process.
Silicon chip product in the said goods, including photovoltaic industry silicon chip production link after multi-wire saw；Photovoltaic industry battery
Prime is cleaned in piece production link, making herbs into wool and etching product；Multi-wire saw reaches product in semicon industry, equally, also can be to crystalline substance
The similar products such as circle are processed.
The above, only presently preferred embodiments of the present invention, are not intended to limit the invention, every skill according to the present invention
Art essence should be included in technical solution of the present invention to any trickle amendment, equivalent replacement and improvement made by above example
Protection domain within.
Claims (10)
1. a kind of crystalline silicon transports cleaning device, which is characterized in that including：
Multiple feeding jigs (1), the feeding jig (1) are used to place the product for needing to carry out process；
Feeding jig transport system (2), for conveying multiple feeding jigs (1)；
Feeding jig lifting system (3), the feeding jig lifting system (3) are arranged in the feeding jig transport system (2)
Tail portion, for promoting multiple feeding jigs (1) successively；
Suction piece system (4) is arranged in the tail portion of the feeding jig lifting system (3), for drawing product；
Suction piece transport system (5), setting are used for conveying products in the tail portion of the feeding jig lifting system (3)；
Going out in suction piece transport system (5) is arranged in faulty goods processing system (6), the faulty goods processing system (6)
At mouthful, to be detected to product and handle faulty goods；
Product arranges module (7), and setting is in the exit of the suction piece transport system (5), for the suction piece transport system
(5) product sent out is arranged；
Multiple process handling modules (8), multiple process handling modules (8) are sequentially connected setting, for arranging the product
The product that row module (7) is sent out carries out process successively；The product sent out by multiple process handling modules (8) is admitted to out
Expect device；
Stack system (9) is postponed in discharging, is arranged in the exit of the drawing mechanism, to passing through above-mentioned process handling module (8)
Processed product carries out parallel equidistant storage；
Emergent charging system (10), is arranged in the tail portion of the drawing mechanism, for store exceed predetermined number by above-mentioned
Process handling module (8) processed product, the predetermined number are that the maximum number that stack system (9) is stored is postponed in the discharging
Amount.
2. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that further include round belt (810), institute
Round belt (810) is stated to the delivery platform as the transport cleaning device, the product arrangement module (7) and multiple works
Skill processing module (8) by the round belt (810) conveying products, product lie on the round belt (810) carry out transport and
Process.
3. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that the feeding jig delivery system
(2) are united to multiple feeding jigs (1) progress horizontal feeds, and each feeding jig (1) is controlled by the feeding
When having lifting system (3), the feeding jig transport system (2) is stopped, and feeding jig (1) meeting of product is housed
The empty feeding jig (1) for having conveyed product is ejected with the movement of the feeding jig transport system (2).
4. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that per the process handling module
(8) tail portion is both provided with the climbing (88) being arranged horizontal by angle.
5. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that per the process handling module
(8) rear and front end is both provided with end axis (89), and the position of each end axis (89) setting is above each end axis
(89) liquid level of process handling module (8) where.
6. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that per the process handling module
(8) it is both provided with an at least round belt (810), each round belt (810) is arranged in eight words around the shaft, and each circle
Band (810) is rough surface or smooth surface.
7. a kind of crystalline silicon according to claim 6 transports cleaning device, which is characterized in that per the process handling module
(8) it is both provided with support shaft (86) and pinch roller system (87), process handling module where each round belt (810) is arranged at
(8) top of the support shaft (86) in is simultaneously slidably connected with the support shaft (86), in place process handling module (8)
The top for the round belt (810) that the pinch roller system (87) is arranged in place process handling module (8), to pressed place
The product transmitted on the round belt (810) in process handling module (8).
8. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that per the process handling module
(8) it is both provided with identical quantity transfer passage, the quantity of the transfer passage is at least 1, and per the process handling module
(8) it is both provided with cleansing medium, each process handling module (8) is provided at least one ultrasonic wave and shakes head, or does not set
Ultrasonic wave is set to shake head.
9. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that multiple process moulds
Block (8) includes：At least one first process handling module (81), the second process handling module (82), third process handling module
(83), the 4th process handling module (84), the 5th process handling module (85),
Each first process handling module (81) is sequentially connected setting, for being conveyed to product arrangement module (7)
The product gone out carries out process successively；
Second process handling module (82) is arranged in the tail portion for multiple first process handling modules (81) being arranged in order,
Second process handling module (82) is provided with spray equipment；
Third process handling module (83) is arranged at the tail portion of second process handling module (82), the third technique
Reason module (83) is provided with cleaning agent, each first process handling module (81), second process handling module (82),
The third process handling module (83) carries out process in liquid to product；
4th process handling module (84) is arranged at the tail portion of the third process handling module (83), the 4th technique
Reason module (84) is provided with drying unit；
5th process handling module (85) is arranged at the tail portion of the 4th process handling module (84), the 5th technique
The tail portion of reason module (85) is provided with drawing mechanism.
10. a kind of crystalline silicon according to claim 1 transports cleaning device, which is characterized in that stack system is postponed in discharging
(9) it is provided with condition discriminating apparatus, the condition discriminating apparatus stores classifiedly product to distinguish the model of product.
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| CN107051966A (en) * | 2017-03-08 | 2017-08-18 | 常州市科沛达超声工程设备有限公司 | Full-automatic silicon wafer cleans line and its method of work |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000156395A (en) * | 1998-11-20 | 2000-06-06 | Tokyo Electron Ltd | Treatment system |
| CN102671883A (en) * | 2012-05-18 | 2012-09-19 | 上海思恩电子技术（东台）有限公司 | Cleaning machine with supporting and thrusting mechanism |
| JP2013016795A (en) * | 2011-07-04 | 2013-01-24 | Siltronic Ag | Device and method for temporarily storing wafer-type workpiece |
| CN202935909U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Silicon wafer feeding device of cleaning machine |
| CN104028502A (en) * | 2014-05-23 | 2014-09-10 | 无锡妤卓兰科技有限公司 | Ultrasonic cleaning equipment |
| CN205253632U (en) * | 2015-12-07 | 2016-05-25 | 天津中环半导体股份有限公司 | Full self - cleaning device of silicon chip inserted sheet |
| CN205289176U (en) * | 2015-10-30 | 2016-06-08 | 无锡隆基硅材料有限公司 | Silicon wafer cleaning machine |
| CN205944050U (en) * | 2016-08-22 | 2017-02-08 | 倪武东 | Crystalline silica transportation belt cleaning device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101394458B1 (en) * | 2011-05-31 | 2014-05-14 | 세메스 주식회사 | buffer unit and substrate cleaning apparatus and substrate processing method |
-
2016
- 2016-08-22 CN CN201610700092.3A patent/CN106169434B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000156395A (en) * | 1998-11-20 | 2000-06-06 | Tokyo Electron Ltd | Treatment system |
| JP2013016795A (en) * | 2011-07-04 | 2013-01-24 | Siltronic Ag | Device and method for temporarily storing wafer-type workpiece |
| CN102671883A (en) * | 2012-05-18 | 2012-09-19 | 上海思恩电子技术（东台）有限公司 | Cleaning machine with supporting and thrusting mechanism |
| CN202935909U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Silicon wafer feeding device of cleaning machine |
| CN104028502A (en) * | 2014-05-23 | 2014-09-10 | 无锡妤卓兰科技有限公司 | Ultrasonic cleaning equipment |
| CN205289176U (en) * | 2015-10-30 | 2016-06-08 | 无锡隆基硅材料有限公司 | Silicon wafer cleaning machine |
| CN205253632U (en) * | 2015-12-07 | 2016-05-25 | 天津中环半导体股份有限公司 | Full self - cleaning device of silicon chip inserted sheet |
| CN205944050U (en) * | 2016-08-22 | 2017-02-08 | 倪武东 | Crystalline silica transportation belt cleaning device |
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