CN205289176U - Silicon wafer cleaning machine - Google Patents

Silicon wafer cleaning machine Download PDF

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Publication number
CN205289176U
CN205289176U CN201520857072.8U CN201520857072U CN205289176U CN 205289176 U CN205289176 U CN 205289176U CN 201520857072 U CN201520857072 U CN 201520857072U CN 205289176 U CN205289176 U CN 205289176U
Authority
CN
China
Prior art keywords
silicon wafer
basket
cleaning machine
wafer cleaning
transmission device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201520857072.8U
Other languages
Chinese (zh)
Inventor
刘锋
刘爱军
蒋月华
陈新军
邓加云
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Longi Green Energy Technology Co Ltd
Original Assignee
Xian Longi Silicon Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Longi Silicon Materials Corp filed Critical Xian Longi Silicon Materials Corp
Priority to CN201520857072.8U priority Critical patent/CN205289176U/en
Application granted granted Critical
Publication of CN205289176U publication Critical patent/CN205289176U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a silicon wafer cleaning machine, include material loading platform, unloading platform, be located a plurality of washing tanks between material loading platform and the unloading platform, its characterized in that: be located the top is provided with basket of flowers transmission device between material loading platform and the unloading platform. Basket of flowers transmission device direction of transfer is unloading platform to a material loading platform orientation. Basket of flowers transmission device is chain drive's conveyer. The utility model discloses transform on present silicon wafer cleaning machine's basis, set up basket of flowers transmission device in silicon wafer cleaning machine's top, follow unloading platform automatic conveying to material loading platform orientation with the basket of flowers, realize the automatic basket that returns, promote production efficiency, the saving human cost. Simultaneously, basket of flowers transmission device's setting can not influence original cleaning function of silicon wafer cleaning machine yet.

Description

A kind of silicon wafer cleaner
Technical field
This utility model belongs to silicon chip cutting technique field, particularly relates to a kind of silicon wafer cleaner.
Background technology
Silicon chip is that a kind of silicon materials are formed one by one by processing to be cut into. The multiple working procedures such as cutting, cleaning are passed through from silicon materials to spendable silicon chip. Cleaning one of the production process as silicon chip, the serviceability of silicon chip is had very big impact by the quality of its cleaning. The main purpose cleaned is to wash the sand grains of the generation in cutting process, the cutting abrasive material of residual, metal ion and fingerprint etc., making silicon chip surface reach the technical specifications such as corrosion-free oxidation, noresidue. Silicon chip, frequently with the silicon wafer cleaner of a kind of closing, to be placed in the gaily decorated basket during cleaning silicon chip to enter cleaning machine again and clean by existing Wafer Cleaning, detects workshop section personnel and poured out inside the gaily decorated basket by silicon chip after cleaning, then the gaily decorated basket and flower stand are cleaned workshop section with manually returning to.
Summary of the invention
This utility model purpose be in that to provide for the defect of prior art a kind of can the silicon wafer cleaner of the loopback gaily decorated basket and flower stand automatically.
This utility model for achieving the above object, adopts the following technical scheme that
A kind of silicon wafer cleaner, including feeding platform, blanking bench, multiple rinse baths between feeding platform and blanking bench, it is characterised in that: between described feeding platform and blanking bench, it is provided above gaily decorated basket transmitting device.
It is further characterized by described gaily decorated basket transmitting device direction of transfer is that blanking bench is to feeding platform direction.
Preferred: described gaily decorated basket transmitting device is chain-drive feed belt.
Described blanking bench is provided with feed belt.
Described gaily decorated basket transmitting device terrain clearance is 140-150cm.
This utility model is transformed on the basis of existing silicon wafer cleaner, is provided above gaily decorated basket transmitting device at silicon wafer cleaner, automatically transmits the gaily decorated basket to feeding platform direction from blanking bench, it is achieved automatically returns basket, improving production efficiency, saves human cost. Meanwhile, the setting of gaily decorated basket transmitting device is without the original cleaning function having influence on silicon wafer cleaner.
Accompanying drawing explanation
Fig. 1 is this utility model schematic diagram.
Detailed description of the invention
Existing silicon wafer cleaner, including feeding platform 1, blanking bench 2, multiple rinse baths 3 between feeding platform 1 and blanking bench 2, described blanking bench 2 is provided with feed belt.
As it is shown in figure 1, existing silicon wafer cleaner is transformed, above between described feeding platform 1 and blanking bench 2, terrain clearance is that 140-150cm arranges gaily decorated basket transmitting device 4. Described gaily decorated basket transmitting device 4 direction of transfer be blanking bench to feeding platform direction, the gaily decorated basket 5 is sent to feeding platform 1 from blanking bench 2. Described gaily decorated basket transmitting device 4 is chain-drive feed belt.
The gaily decorated basket is automatically transmitted from blanking bench to feeding platform direction by this utility model by being arranged on the gaily decorated basket transmitting device on silicon wafer cleaner top, it is achieved automatically returns basket, improving production efficiency, saves human cost. Meanwhile, the setting of gaily decorated basket transmitting device is without the original cleaning function having influence on silicon wafer cleaner.

Claims (4)

1. a silicon wafer cleaner, including feeding platform, blanking bench, multiple rinse baths between feeding platform and blanking bench, it is characterised in that: between described feeding platform and blanking bench, it is provided above gaily decorated basket transmitting device;
Described gaily decorated basket transmitting device direction of transfer is that blanking bench is to feeding platform direction.
2. silicon wafer cleaner according to claim 1, it is characterised in that: described gaily decorated basket transmitting device is chain-drive feed belt.
3. silicon wafer cleaner according to claim 1, it is characterised in that: described blanking bench is provided with feed belt.
4. silicon wafer cleaner according to claim 1, it is characterised in that: described gaily decorated basket transmitting device terrain clearance is 140-150cm.
CN201520857072.8U 2015-10-30 2015-10-30 Silicon wafer cleaning machine Active CN205289176U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520857072.8U CN205289176U (en) 2015-10-30 2015-10-30 Silicon wafer cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520857072.8U CN205289176U (en) 2015-10-30 2015-10-30 Silicon wafer cleaning machine

Publications (1)

Publication Number Publication Date
CN205289176U true CN205289176U (en) 2016-06-08

Family

ID=56463414

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520857072.8U Active CN205289176U (en) 2015-10-30 2015-10-30 Silicon wafer cleaning machine

Country Status (1)

Country Link
CN (1) CN205289176U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106169434A (en) * 2016-08-22 2016-11-30 倪武东 Device is cleaned in a kind of crystalline silicon transport

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106169434A (en) * 2016-08-22 2016-11-30 倪武东 Device is cleaned in a kind of crystalline silicon transport
CN106169434B (en) * 2016-08-22 2018-10-23 倪武东 A kind of crystalline silicon transport cleaning device

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20211013

Address after: 710199 no.388 Hangtian Middle Road, Chang'an District, Xi'an City, Shaanxi Province

Patentee after: LONGI GREEN ENERGY TECHNOLOGY Co.,Ltd.

Address before: No. 111-1, Ximei Road, New District, Wuxi City, Jiangsu Province, 214000

Patentee before: WUXI LONGI SILICON MATERIALS Corp.

TR01 Transfer of patent right