CN202935909U - Silicon wafer feeding device of cleaning machine - Google Patents
Silicon wafer feeding device of cleaning machine Download PDFInfo
- Publication number
- CN202935909U CN202935909U CN 201220581915 CN201220581915U CN202935909U CN 202935909 U CN202935909 U CN 202935909U CN 201220581915 CN201220581915 CN 201220581915 CN 201220581915 U CN201220581915 U CN 201220581915U CN 202935909 U CN202935909 U CN 202935909U
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- silicon wafer
- cleaning machine
- loading device
- silicon chip
- wafer loading
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Abstract
The utility model discloses a silicon wafer feeding device of a cleaning machine. The silicon wafer feeding device comprises at least one feeding box for holding silicon wafers, at least one silicon wafer sucking robot for sucking the silicon wafers and controlling the silicon wafers to move, and a silicon wafer conveying device for conveying out the silicon wafers sucked by the silicon wafer sucking robot, wherein at least one air valve for separating the silicon wafers is arranged at the top part of the feeding box. By utilizing the silicon wafer feeding device of the cleaning machine, the automatic silicon wafer feeding and loading is realized, so that the pollution to the silicon wafers is reduced, the silicon wafer damage rate is reduced, the production efficiency is improved, and the manual work and the labor cost are saved.
Description
Technical field
The utility model relates to the crystal silicon solar battery technical field, particularly a kind of cleaning machine silicon wafer loading device.
Background technology
At present, before and after the crystal silicon solar battery in cleaning apparatus, its material loading is to take mode manually, when hand contact silicon chip, although wear single jersey and emgloves, what but general workman used is industrial conventional gloves, inevitably has small hole, and sweat stain will see through gloves and pollute silicon chip; In addition, due to gloves contact silicon chip, the dust on silicon chip and koniology will remain in glove surface, also can pollute silicon chip, and terms of settlement is to change gloves usually.But, when finding that generally gloves are dirty, just can change gloves, but this moment, gloves polluted the part silicon chip.
In addition, material loading adopts the manual mode of operation, at first, because manually-operated application force, in-service time and accuracy of action all are difficult to accurate control, easily causes fragment.Moreover the required labour power of manual operation is also larger, and every equipment generally needs two people, many people material loading even, has wasted manpower, has increased productive costs.
The utility model content
The utility model embodiment technical matters to be solved is, a kind of cleaning machine silicon wafer loading device is provided, and realizes the automatic charging load, reduces the pollution to silicon chip.
The utility model embodiment technical matters to be solved also is, a kind of cleaning machine silicon wafer loading device is provided, and realizes the automatic charging load, reduces fragment rate, enhances productivity, and saves artificial and human cost.
For reaching above-mentioned technique effect, the utility model embodiment provides a kind of cleaning machine silicon wafer loading device, comprising:
At least one upper magazine for placing silicon chip, the top of described upper magazine is provided with at least one air valve for separating of silicon chip;
At least one be used to drawing silicon chip and controlling the suction sheet manipulator that described silicon chip moves; And
Be used for silicon wafer conveying device that the silicon chip that described suction sheet manipulator is drawn is transferred out.
As the improvement of such scheme, the top of described upper magazine is provided with the even number air valve.
As the improvement of such scheme, described air valve is symmetrically distributed in the two ends of described upper magazine.
As the improvement of such scheme, described suction sheet manipulator comprises suction nozzle, the mechanical arm that is connected with described suction nozzle, is used for controlling the jacking system of described suction nozzle and mechanical arm lifting, is used for controlling the slide rail that described suction nozzle and mechanical arm move.
As the improvement of such scheme, described suction nozzle is provided with at least one vacuum cup.
As the improvement of such scheme, described vacuum cup is connected with vacuum machine.
As the improvement of such scheme, described cleaning machine silicon wafer loading device is provided with two upper magazines and two the suction sheet manipulators corresponding with described upper magazine.
As the improvement of such scheme, described silicon wafer conveying device is located at described two centres of inhaling the sheet manipulator.
As the improvement of such scheme, described silicon wafer conveying device is non-friction guide.
Implement the utility model, have following beneficial effect:
The utility model cleaning machine silicon wafer loading device, compare with existing artificial loading load mode, the utility model has been realized the automatic charging load, and it comprises magazine, suction sheet manipulator, silicon wafer conveying device, and the top of upper magazine is provided with at least one air valve for separating of silicon chip.The utility model is put into upper magazine with silicon chip, by the air valve of being located at upper magazine top, silicon chip is separated, inhale the sheet manipulator uppermost silicon chip in upper magazine is held, move on the silicon wafer conveying device of putting in advance silicon chip, reach the purpose that silicon chip is delivered to material loading track corresponding to cleaning machine.Therefore, the utility model cleaning machine silicon wafer loading device is realized the automatic charging load, has the following advantages: one, by reducing contacting of hand and silicon chip, the pollution of minimizing to silicon chip; Two, can inhale application force, in-service time and the accuracy of action of sheet manipulator by setting, avoid the generation of fragment, improve the yield rate of product, enhance productivity; Three, can reduce artificial and human cost, increase economic efficiency; Four, the utility model cleaning machine blanking loading device is simple in structure, is easy to industrialization, applied range.
Description of drawings
Fig. 1 is the structural representation of the utility model cleaning machine silicon wafer loading device the first embodiment;
Fig. 2 is the block diagram of the upper magazine of the utility model cleaning machine silicon wafer loading device;
Fig. 3 is the front view of upper magazine shown in Figure 2;
Fig. 4 is the structural representation of the utility model cleaning machine silicon wafer loading device the second embodiment.
The specific embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the utility model is described in further detail.
The utility model provides a kind of numerous embodiments of cleaning machine silicon wafer loading device, comprising: at least one upper magazine for placing silicon chip, and the top of described upper magazine is provided with at least one air valve for separating of silicon chip; At least one be used to drawing silicon chip and controlling the suction sheet manipulator that described silicon chip moves; And be used for silicon wafer conveying device that the silicon chip that described suction sheet manipulator is drawn is transferred out.Described upper magazine and the corresponding setting of described suction sheet manipulator.
The utility model can be by arranging a plurality of suction sheet manipulators, and the upper magazine corresponding with suction sheet manipulator is set, and realizes multiple suction sheet mode, can adjust the material loading speed of feeding device and the purpose of efficient according to needs of production thereby reach.
Referring to Fig. 1, Fig. 2, Fig. 3, the utility model provides a kind of cleaning machine silicon wafer loading device the first embodiment, comprising: a upper magazine 1 that is used for placing silicon chip, and the top of described upper magazine 1 is provided with at least one air valve 11 for separating of silicon chip; One is used for drawing silicon chip and controlling the suction sheet manipulator 2 that described silicon chip moves; And be used for silicon wafer conveying device 3 that the silicon chip that described suction sheet manipulator 2 is drawn is transferred out.
The air valve 11 of being located at magazine 1 top can separate uppermost several silicon chips in upper magazine 1, described silicon chip forms the gap under the effect of the buoyant gas of air valve 11 ejections, reach the purpose of each self-separation, be conducive to improve and inhale the efficient that sheet manipulator 2 is drawn silicon chip, avoid inhaling sheet manipulator 2 and draw simultaneously the multi-disc silicon chip.
The utility model cleaning machine silicon wafer loading device is put into upper magazine 1 with silicon chip, by the air valve 11 of being located at upper magazine 1 top, silicon chip is separated, inhaling sheet manipulator 2 holds the interior uppermost silicon chip of upper magazine 1, move on the silicon wafer conveying device 3 of putting in advance silicon chip, reach the purpose that silicon chip is delivered to material loading track corresponding to cleaning machine.
Preferably, the top of described upper magazine 1 is provided with even number air valve 11.
Better, the top of described upper magazine 1 is provided with 4 air valves 11.
Preferably, described air valve 11 is symmetrically distributed in the two ends of described upper magazine 1.
Better, shown in air valve 11 be 4, two, the every end of upper magazine 1 is symmetrically distributed in the two ends of described upper magazine 1 evenly and at intervals.
Described suction sheet manipulator 2 comprises suction nozzle 21, the mechanical arm 22 that is connected with described suction nozzle 21, is used for controlling the jacking system 23 of described suction nozzle 21 and mechanical arm 22 liftings, is used for controlling the slide rail 24 that described suction nozzle 21 and mechanical arm 22 move.
Need to prove, described jacking system 23 can adopt existing jacking system, general main lifting bar, motor, bearing, coupler, the strut bar etc. of comprising.
Described suction nozzle 21 is provided with at least one vacuum cup 211.Described vacuum cup 211 is connected with vacuum machine.
Preferably, described suction nozzle 21 is provided with two vacuum cups 211, and described vacuum cup 211 is symmetrically distributed on described suction nozzle 21.
Preferably, described suction nozzle 21 is provided with three vacuum cups 211, and described vacuum cup 211 is distributed on described suction nozzle 21 side by side, or triangular in shape being distributed on described suction nozzle 21.
Better, described 3 vacuum cups 211 are equilateral triangle and are distributed on described suction nozzle 21.
Described vacuum cup 211 can be oval, circular, bar shaped, but is not limited to this.
Preferably, described silicon wafer conveying device 3 is non-friction guide.
Referring to Fig. 4, the utility model provides a kind of cleaning machine silicon wafer loading device the second embodiment, comprising: two upper magazines 1 that are used for placing silicon chip, and the top of described upper magazine 1 is provided with at least one air valve 11 for separating of silicon chip; Two are used for drawing silicon chip and controlling the suction sheet manipulator 2 that described silicon chip moves; And be used for silicon wafer conveying device 3 that the silicon chip that described suction sheet manipulator 2 is drawn is transferred out.
Different from cleaning machine silicon wafer loading device the first embodiment shown in Figure 1 is, feeding device shown in Figure 4 comprises that two are used for drawing silicon chip and controlling the suction sheet manipulator 2 that described silicon chip moves for the upper magazine 1 of placement silicon chip and two corresponding with described upper magazine 1, and silicon wafer conveying device 3 is located at described two centres of inhaling sheet manipulators 2.
Preferably, described silicon wafer conveying device 3 is non-friction guide.
The utility model is provided with two upper magazines 1 and two suction sheet manipulators 2, coordinates with silicon wafer conveying device 3 by upper magazine 1, suction sheet manipulator 2, can significantly increase exponentially production efficiency.
In sum, implement the utility model, have following beneficial effect:
The utility model cleaning machine silicon wafer loading device, compare with existing artificial loading load mode, the utility model has been realized the automatic charging load, and it comprises magazine, suction sheet manipulator, silicon wafer conveying device, and the top of upper magazine is provided with at least one air valve for separating of silicon chip.The utility model is put into upper magazine with silicon chip, by the air valve of being located at upper magazine top, silicon chip is separated, inhale the sheet manipulator uppermost silicon chip in upper magazine is held, move on the silicon wafer conveying device of putting in advance silicon chip, reach the purpose that silicon chip is delivered to material loading track corresponding to cleaning machine.Therefore, the utility model cleaning machine silicon wafer loading device is realized the automatic charging load, has the following advantages: one, by reducing contacting of hand and silicon chip, the pollution of minimizing to silicon chip; Two, can inhale application force, in-service time and the accuracy of action of sheet manipulator by setting, avoid the generation of fragment, improve the yield rate of product, enhance productivity; Three, can reduce artificial and human cost, increase economic efficiency; Four, the utility model cleaning machine blanking loading device is simple in structure, is easy to industrialization, applied range.
Above disclosed is only preferred embodiment of the present utility model, certainly can not limit with this interest field of the utility model, and the equivalent variations of therefore doing according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (9)
1. a cleaning machine silicon wafer loading device, is characterized in that, comprising:
At least one upper magazine for placing silicon chip, the top of described upper magazine is provided with at least one air valve for separating of silicon chip;
At least one be used to drawing silicon chip and controlling the suction sheet manipulator that described silicon chip moves; And
Be used for silicon wafer conveying device that the silicon chip that described suction sheet manipulator is drawn is transferred out.
2. cleaning machine silicon wafer loading device as claimed in claim 1, is characterized in that, the top of described upper magazine is provided with the even number air valve.
3. cleaning machine silicon wafer loading device as claimed in claim 2, is characterized in that, described air valve is symmetrically distributed in the two ends of described upper magazine.
4. cleaning machine silicon wafer loading device as claimed in claim 1, it is characterized in that, described suction sheet manipulator comprises suction nozzle, the mechanical arm that is connected with described suction nozzle, is used for controlling the jacking system of described suction nozzle and mechanical arm lifting, is used for controlling the slide rail that described suction nozzle and mechanical arm move.
5. cleaning machine silicon wafer loading device as claimed in claim 4, is characterized in that, described suction nozzle is provided with at least one vacuum cup.
6. cleaning machine silicon wafer loading device as claimed in claim 5, is characterized in that, described vacuum cup is connected with vacuum machine.
7. cleaning machine silicon wafer loading device as claimed in claim 1, is characterized in that, described cleaning machine silicon wafer loading device is provided with two upper magazines and two the suction sheet manipulators corresponding with described upper magazine.
8. cleaning machine silicon wafer loading device as claimed in claim 7, is characterized in that, described silicon wafer conveying device is located at described two centres of inhaling the sheet manipulator.
9. cleaning machine silicon wafer loading device as claimed in claim 8, is characterized in that, described silicon wafer conveying device is non-friction guide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220581915 CN202935909U (en) | 2012-10-31 | 2012-11-07 | Silicon wafer feeding device of cleaning machine |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220566893.2 | 2012-10-31 | ||
| CN201220566893 | 2012-10-31 | ||
| CN 201220581915 CN202935909U (en) | 2012-10-31 | 2012-11-07 | Silicon wafer feeding device of cleaning machine |
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| Publication Number | Publication Date |
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| CN202935909U true CN202935909U (en) | 2013-05-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220581915 Expired - Lifetime CN202935909U (en) | 2012-10-31 | 2012-11-07 | Silicon wafer feeding device of cleaning machine |
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| CN (1) | CN202935909U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106169434A (en) * | 2016-08-22 | 2016-11-30 | 倪武东 | Device is cleaned in a kind of crystalline silicon transport |
| CN106542309A (en) * | 2017-01-10 | 2017-03-29 | 荣旗工业科技（苏州）有限公司 | A kind of carrier supplies machine |
| CN107309464A (en) * | 2017-08-07 | 2017-11-03 | 嘉兴邦博电子科技有限公司 | A kind of wiring board perforating device of automatic charging |
| CN108288596A (en) * | 2018-02-12 | 2018-07-17 | 苏州卓樱自动化设备有限公司 | A kind of separator of silicon chip after cutting |
| CN110137123A (en) * | 2019-05-31 | 2019-08-16 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer handling equipment and wafer baiting method |
| CN110190013A (en) * | 2019-06-06 | 2019-08-30 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer feeding device, wafer charging method and wafer cleaning equipment |
| CN110329745A (en) * | 2019-07-12 | 2019-10-15 | 嘉兴勤慎智能技术有限公司 | A kind of transfer robot |
| CN111634687A (en) * | 2020-06-04 | 2020-09-08 | 无锡亚电智能装备有限公司 | Feeding mechanism and feeding method of wafer basket cleaning equipment |
| CN112501894A (en) * | 2020-11-12 | 2021-03-16 | 湖南钒谷新能源技术有限公司 | Felt body dust collecting equipment |
-
2012
- 2012-11-07 CN CN 201220581915 patent/CN202935909U/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106169434A (en) * | 2016-08-22 | 2016-11-30 | 倪武东 | Device is cleaned in a kind of crystalline silicon transport |
| CN106169434B (en) * | 2016-08-22 | 2018-10-23 | 倪武东 | A kind of crystalline silicon transport cleaning device |
| CN106542309A (en) * | 2017-01-10 | 2017-03-29 | 荣旗工业科技（苏州）有限公司 | A kind of carrier supplies machine |
| CN107309464A (en) * | 2017-08-07 | 2017-11-03 | 嘉兴邦博电子科技有限公司 | A kind of wiring board perforating device of automatic charging |
| CN108288596A (en) * | 2018-02-12 | 2018-07-17 | 苏州卓樱自动化设备有限公司 | A kind of separator of silicon chip after cutting |
| CN110137123A (en) * | 2019-05-31 | 2019-08-16 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer handling equipment and wafer baiting method |
| CN110190013A (en) * | 2019-06-06 | 2019-08-30 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer feeding device, wafer charging method and wafer cleaning equipment |
| CN110329745A (en) * | 2019-07-12 | 2019-10-15 | 嘉兴勤慎智能技术有限公司 | A kind of transfer robot |
| CN111634687A (en) * | 2020-06-04 | 2020-09-08 | 无锡亚电智能装备有限公司 | Feeding mechanism and feeding method of wafer basket cleaning equipment |
| CN111634687B (en) * | 2020-06-04 | 2021-08-10 | 无锡亚电智能装备有限公司 | Feeding mechanism and feeding method of wafer basket cleaning equipment |
| CN112501894A (en) * | 2020-11-12 | 2021-03-16 | 湖南钒谷新能源技术有限公司 | Felt body dust collecting equipment |
| CN112501894B (en) * | 2020-11-12 | 2022-02-01 | 湖南钒谷新能源技术有限公司 | Felt body dust collecting equipment |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 528100, Sanshui District, Guangdong City, Foshan Industrial Park, No. C District, No. 69 Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180222 Address after: 322009 Zhejiang city in Jinhua Province town of Yiwu City, Su Fuk Road No. 126 Co-patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Patentee after: ZHEJIANG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: No. 69, C District, Sanshui Industrial Park, Sanshui, Foshan, Guangdong Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130515 |