CN108336004B - Full-automatic wet processing equipment with single batch of four-flower basket synchronous operation - Google Patents
Full-automatic wet processing equipment with single batch of four-flower basket synchronous operation Download PDFInfo
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- CN108336004B CN108336004B CN201810351122.3A CN201810351122A CN108336004B CN 108336004 B CN108336004 B CN 108336004B CN 201810351122 A CN201810351122 A CN 201810351122A CN 108336004 B CN108336004 B CN 108336004B
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- spin dryer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to full-automatic wet processing equipment with single-batch four-flower basket synchronous operation, wherein an anti-corrosion framework and a shell (1) are fixedly connected with a mechanical arm installation and adjustment mechanism (2), a full-automatic mechanical arm module I (3) and a full-automatic mechanical arm module II (4) are connected with the mechanical arm installation and adjustment mechanism (2) in a matched mode, a cargo loading mechanism (7) and a process groove (9) with a transfer mechanism are arranged in a left-right movement coverage area of the full-automatic mechanical arm module I (3), a process groove (9) with a transfer mechanism is arranged in a left-right movement coverage area of the full-automatic mechanical arm module II 4, a horizontal spin dryer (11) and a double-station cargo unloading mechanism (8); the invention adopts the same batch of 4 flower baskets to run simultaneously, matches two sets of mechanical arms and is matched with a spin dryer, thereby improving the productivity of conventional wet processing equipment by more than 40 percent, greatly improving the productivity, further effectively reducing the process cost of each wafer, and simultaneously not occupying too much clean room space and manpower resources.
Description
Technical Field
The invention relates to the technical field of LED semiconductor wet processing equipment, in particular to full-automatic wet processing equipment with single-batch four-flower basket synchronous operation.
Background
In the LED and semiconductor industries, wet processing equipment is widely used and mature as a batch type wafer processing equipment. The typical dimensions of the wafer are typically 2"/4"/6"/8"/12 "or even 16", and the wafer thickness is typically 650-850 μm. In a wafer fab, a wafer requires two to three months of process flow, 450 or more process steps are completed, several tens to tens of thousands of specific chips are integrated, and at the end of the manufacturing process, individual chips are separated from the wafer and then packaged into the final product. Therefore, the cost of the single wafer is far beyond the estimated cost, and especially in the back-end packaging process, if the productivity can be greatly improved on the basis of the current process, great economic benefits can be generated for wafer manufacturers. Based on this, it is the direction in which each device is manufactured Shang Nu how to provide a lower cost, high throughput wet processing device that strives for the core competitive advantage of the wet processing device.
At present, the existing wet processing equipment carrying a spin dryer for realizing dry in and dry out basically adopts a single-basket or double-basket processing, the capacity of the equipment is limited, the cost of a single wafer process is high, and the corresponding manpower resource and maintenance cost are high.
Disclosure of Invention
The invention aims to solve the defects and provide full-automatic wet processing equipment with synchronous operation of single-batch four-flower basket. The scheme adopts the same batch of 4 flower baskets to run simultaneously, the equipment cost is improved by less than 1% on the basis of the original double flower basket equipment, but the productivity is improved by about 40%.
The full-automatic wet processing equipment comprises an anti-corrosion framework, a shell 1, a mechanical arm installation and adjustment mechanism 2, a full-automatic mechanical arm module I3, a full-automatic mechanical arm module II 4, a loading mechanism 7, a double-station lower cargo mechanism 8, a processing groove 9 with a transfer mechanism, a horizontal spin dryer 11, an operation interface 12, an electric control system 14 and a pipeline system 15, wherein the mechanical arm installation and adjustment mechanism 2 is fixedly connected with the anti-corrosion framework and the shell 1, the full-automatic mechanical arm module I3 and the full-automatic mechanical arm module II 4 are matched with the mechanical arm installation and adjustment mechanism 2, a loading mechanism 7 and a processing groove 9 with the transfer mechanism are arranged in a left-right movement coverage area of the full-automatic mechanical arm module I3, and a processing groove 9 with the transfer mechanism, a horizontal spin dryer 11 and the double-station lower cargo mechanism 8 are arranged in a left-right movement coverage area of the full-automatic mechanical arm module II 4.
The mechanical arm installation and adjustment mechanism 2 comprises a guide rail 21, a rack 22, an induction positioning block 23 and a fixed bracket 24, wherein the guide rail 21, the rack 22 and the induction positioning block 23 are fixedly installed on the fixed bracket 24.
The full-automatic mechanical arm module I3 comprises a mechanical arm power body 31, a clamping jaw power body 32, a double short clamping jaw 33, a double long clamping jaw 34, a mechanical arm 37 and a supporting shaft 39, wherein a servo motor, a left-right operation power mechanism and an up-down operation power mechanism are arranged in the mechanical arm power body 31, a detection mechanism 38 is arranged on the upper end face of the mechanical arm power body, the mechanical arm power body 31 is connected with the guide rail 21 in a sliding mode through a sliding block 35, the left-right operation power mechanism is meshed with the guide rail 22 through a transmission gear 36, the up-down operation power mechanism is fixedly connected with the clamping jaw power body 32 through the supporting shaft 39, a motor and a guide mechanism are arranged in the clamping jaw power body 32, the mechanical arm 37 is matched with the motor and the guide mechanism, and the front end of the mechanical arm 37 is provided with the double short clamping jaw 33 and the double long clamping jaw 34.
The loading mechanism 7 comprises a double high basket positioning seat 71 and a double low basket positioning seat 72.
The process tank 9 with the transfer mechanism comprises a process tank body 91, a liquid discharging mechanism 95 and a liquid feeding mechanism 96, the liquid discharging mechanism 95 and the liquid feeding mechanism 96 are connected with the process tank body 91 in a sealing mode, a movable bearing seat 93 and a fixed bearing seat 94 are arranged in the process Cheng Caoti, the movable bearing seat 93 is located at the front upper side of the fixed bearing seat 94, the movable bearing seat 93 is matched and connected with a movable bearing power mechanism 92, and the movable bearing power mechanism 92 is installed on the process tank 9.
The horizontal spin dryer 11 comprises a sealing cover 1101 and a spin dryer body 1102, wherein the sealing cover 1101 is in sealing connection with the upper end face of the spin dryer body 1102, a flower basket fixed rotary bearing platform 1103 is arranged in the spin dryer body 1102, and four evenly distributed flower basket fixed bearing seats 1104 are arranged on the flower basket fixed rotary bearing platform 1103.
The full-automatic mechanical arm module II 4 comprises a mechanical arm power body II 41, a clamping jaw power body II 42, a double-long clamping jaw II 44, a mechanical arm II 47 and a supporting shaft II 49, wherein a servo motor II, a left-right operation power mechanism II and an up-down operation power mechanism II are arranged in the mechanical arm power body II 41, a detection mechanism II 48 is arranged on the upper end face of the mechanical arm power body II, the mechanical arm power body II 41 is connected with the guide rail 21 in a sliding mode through a sliding block II 45, the left-right operation power mechanism II is meshed with the rack 22 through a transmission gear II 46, the up-down operation power mechanism II is fixedly connected with the clamping jaw power body II 42 through the supporting shaft II 49, a motor II and a guide mechanism II are arranged in the clamping jaw power body II 42, the mechanical arm II 47 is matched and connected with the motor II and the guide mechanism II, and the front end of the mechanical arm II 47 is provided with the double-long clamping jaw II 44.
The automatic drying device also comprises an air drying groove mechanism 10, wherein the air drying groove mechanism 10 is positioned between the process groove 9 with the transfer mechanism and the horizontal spin dryer 11, and can also be positioned between the horizontal spin dryer 11 and the double-station cargo discharging mechanism 8. The air drying groove mechanism 10 comprises a groove body 101, a liquid discharge mechanism 102 and an air duct mechanism 103, wherein the lower end surface of the groove body 101 is connected with the liquid discharge mechanism 102 in a matched mode, and the air duct mechanism 103 is arranged on the upper end surface of the groove body 101.
The air duct mechanism 103 comprises a left air duct mechanism 1031 and a right air duct mechanism 1032, the structure of the left air duct mechanism 1031 is identical to that of the right air duct mechanism 1032, and the left air duct mechanism 1031 and the right air duct mechanism are symmetrically arranged on the upper end face of the tank body 101, the left air duct mechanism 1031 comprises an upper air duct cover 1034, a sealing pad 1035 and an air duct base 1036, the upper air duct cover 1034 is in sealing connection with the air duct base 1036 through the sealing pad 1035, an air inlet 1037 is arranged on the front end face of the air duct base 1036, an air duct groove 1038 communicated with the air inlet 1037 is arranged on the upper end face, and an air outlet 1033 communicated with the air duct groove 1038 is arranged at the joint of the air duct base 1036 and the upper air duct cover 1034 in the horizontal direction.
The automatic lifting screen mechanism 13 is installed between the process groove 9 with the transfer mechanism and the horizontal spin dryer 11, the automatic lifting screen mechanism 13 comprises an upper fixing baffle 1301, a vertical guide rail 1302, a lower fixing baffle seat 1308 and a transparent isolation plate 1310, the upper fixing baffle 1301 is fixedly connected with the upper end of the vertical guide rail 1302, the lower end of the vertical guide rail 1302 is fixedly connected with the lower fixing baffle seat 1308, an upper transfer cylinder 1306 and a lower transfer cylinder 1306 and the transparent isolation plate 1310 are arranged in the lower fixing baffle seat 1308, the upper transfer cylinder 1306 is connected with a bottom fixing support 1305 through a cylinder sliding block 1307, the bottom fixing support 1305 is fixedly connected with the transparent isolation plate 1310 through a guide shaft 1304, a sealing sliding groove 1309 is arranged on the upper end face of the lower fixing baffle seat 1308, the transparent isolation plate 1310 is slidably connected with the vertical guide rail 1302 through a sliding block III1303, and the upper end face of the transparent isolation plate 1310 is provided with a water guide disc 1311.
The double-station lower cargo mechanism 8 comprises a left and right transfer cylinder 81, an up and down jacking cylinder 82, a mounting seat 83 and a flower basket bearing seat 84, wherein the mounting seat 83 is mounted on the anti-corrosion framework and the shell 1, the left and right transfer cylinder 81 is mounted on the mounting seat 83, the piston end of the left and right transfer cylinder 81 is matched and connected with the up and down jacking cylinder 82, and the piston end of the up and down jacking cylinder 82 is matched and connected with the flower basket bearing seat 84.
Compared with the prior art, the invention adopts the same batch of 4 flower baskets to run simultaneously, matches two sets of mechanical arms and is matched with a spin dryer, the productivity of wet processing equipment of a conventional carrying spin dryer is improved by more than 40% within the range of controllable cost, the productivity is greatly improved, the process cost of each wafer is effectively reduced, and meanwhile, the stable and improved productivity can be ensured without occupying too much clean room space and manpower resources, and the wet processing market can occupy more and more important positions in the future. In addition, the invention has the advantages of convenient control, easy maintenance, convenient operation, better improvement and improvement on equipment performance, wide applicability and suitability for all processes and wafers with various specifications in the process requiring spin drying.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a rear view of FIG. 1;
FIG. 3 is a left side view of FIG. 1;
FIG. 4 is a cross-sectional view A-A of FIG. 2;
FIG. 5 is a section B-B of FIG. 1;
FIG. 6 is a section C-C of FIG. 1;
FIG. 7 is a schematic view of a mechanical arm installation adjustment mechanism according to the present invention;
FIG. 8 is a schematic diagram of a fully automated mechanical arm module I according to the present invention;
FIG. 9 is a schematic diagram II of a fully automated mechanical arm module I according to the present invention;
FIG. 10 is a schematic diagram of a fully automated mechanical arm module II according to the present invention;
FIG. 11 is a schematic diagram II of a fully automated mechanical arm module II according to the present invention;
FIG. 12 is a schematic view of the loading mechanism of the present invention;
FIG. 13 is a schematic diagram of a dual-station cargo handling mechanism according to the present invention;
FIG. 14 is a second schematic diagram of the dual-station cargo handling mechanism of the present invention;
FIG. 15 is a schematic view of a process tank with a transfer mechanism according to the first embodiment of the present invention;
FIG. 16 is a schematic diagram of a process tank with a transfer mechanism according to a second embodiment of the present invention;
FIG. 17 is a schematic diagram of a mechanism of an air drying trough according to the present invention;
FIG. 18 is a schematic diagram of a second embodiment of the air drying trough mechanism of the present invention;
FIG. 19 is a schematic view of a wind tunnel mechanism according to the present invention;
FIG. 20 is a second schematic structural view of the air duct mechanism of the present invention;
FIG. 21 is a schematic view of the structure of the automatically elevating screen assembly of the present invention;
FIG. 22 is a schematic view of a horizontal spin dryer according to the present invention;
FIG. 23 is a schematic diagram II of a horizontal spin dryer according to the present invention;
FIG. 24 is a schematic diagram III of a horizontal spin dryer according to the present invention;
in the figure: 1. an anti-corrosion framework and a shell, a regulating mechanism is arranged on a mechanical arm 2, a mechanical arm module I3, a mechanical arm module II 4, a high new air filter 5, an air draft system 6, a loading mechanism 7, a double-station unloading mechanism 8, a process tank 9 with a transfer mechanism, an air drying tank mechanism 10, a horizontal spin dryer 11, an operation interface 12, a screen lifting mechanism 13, an electric control system 14, a 15 pipeline system 16, a flower basket 21, a guide rail 22, a rack 23, a sensing positioning block 24, a fixed support frame 31, a mechanical arm power body 32, a clamping jaw power body 33, a double-short clamping jaw 34, a double-long clamping jaw 35, a sliding block 36, a transmission gear 37, a detection mechanism 38, a supporting shaft 39, a mechanical arm power body 41, a clamping jaw power body II, a double-long clamping jaw 44, a sliding block 45, a transmission gear II, a mechanical arm 47 and a detection mechanism 48, 49 supporting shafts II, 71 double high flower basket positioning seats, 72 double low flower basket positioning seats, 81 left and right transfer cylinders, 82 up and down lifting cylinders, 83 mounting seats, 84 flower basket bearing platforms, 91 manufacturing process groove bodies, 92 moving bearing power mechanisms, 93 moving bearing seats, 94 fixed bearing seats, 95 liquid discharging mechanisms, 96 liquid feeding mechanisms, 101 groove bodies, 102 liquid discharging mechanisms, 103 air channel mechanisms, 1031 left air channel mechanisms, 1032 right air channel mechanisms, 1033 air outlet knife edges, 1034 upper air channel covers, 1035 sealing gaskets, 1036 air channel bases, 1037 air inlets, 1038 air channel grooves, 1101 sealing covers, 1102 rotary drying machine bodies, 1103 flower basket fixed rotary bearing platforms, 1104 flower basket fixed bearing seats, 1301 upper fixed baffle plates, 1302 vertical guide rails, 1303 slide blocks III,1304 guide shafts, 1306 bottom fixed brackets, 1306 up and down transfer cylinders, 1307 air cylinder slide blocks, 1308, a retaining seat 1309 sealing the chute, a transparent partition 1310, and a water guide disk 1311.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in the drawing, the invention comprises an anti-corrosion framework and a shell 1, a mechanical arm installation and adjustment mechanism 2, a full-automatic mechanical arm module I3, a full-automatic mechanical arm module II 4, a high and new air filter 5, an exhaust system 6, an upper cargo loading mechanism 7, a double-station cargo unloading mechanism 8, a process groove 9 with a transfer mechanism, a horizontal spin dryer 11, an operation interface 12, an electric control system 14 and a pipeline system 15, wherein the anti-corrosion framework and the shell 1 can adopt an anti-explosion SUS shell and framework according to the application requirements of the process, and are matched with the high and new air filter 5 and the exhaust system 6 to ensure the micro-negative pressure environment in wet process equipment, so as to avoid external air pollution and internal gas leakage. The mechanical arm installation adjusting mechanism 2 is fixedly connected with the anti-corrosion framework and the shell 1, a left-right movement coverage area of the full-automatic mechanical arm module I3 is provided with the goods loading mechanism 7 and the manufacturing groove 9 with the transfer mechanism, and a left-right movement coverage area of the full-automatic mechanical arm module II 4 is provided with the manufacturing groove 9 with the transfer mechanism, the horizontal spin dryer 11 and the double-station goods discharging mechanism 8. As shown in fig. 7, the mechanical arm installation and adjustment mechanism 2 comprises a guide rail 21, a rack 22, an induction positioning block 23 and a fixed bracket 24, wherein the guide rail 21, the rack 22 and the induction positioning block 23 are fixedly installed on the fixed bracket 24; the guide rail 21 is assembled with the sliding block 35 and the sliding block II 45 of the mechanical arm system to realize guiding and loading, the rack 22 is meshed with the transmission gear 36 and the transmission gear II 46 of the mechanical arm system to realize left and right movement of the mechanical arm on the X axis, the sensing positioning block 23 is sensed by the sensing mechanism arranged on the multipoint sensor and the mechanical arm to realize positioning of the arm at different stations of the machine, and the fixing support 24 is used for ensuring the flatness and stability of operation of the mechanical arm through multipoint adjusting screws.
As shown in fig. 8 and 9, the fully automatic mechanical arm module i 3 includes a mechanical arm power body 31, a clamping jaw power body 32, a double short clamping jaw 33, a double long clamping jaw 34, a mechanical arm 37 and a supporting shaft 39, wherein a servo motor, a left-right operation power mechanism and an up-down operation power mechanism are arranged in the mechanical arm power body 31, a detection mechanism 38 is arranged on the upper end face of the mechanical arm power body, and the detection mechanism utilizes a detection sensor to confirm whether a flower basket is clamped or not by adjusting an installation angle and a sensor detection distance. The mechanical arm power body 31 is in sliding connection with the guide rail 21 through a sliding block 35, the left and right operation power mechanism is in meshed connection with the rack 22 through a transmission gear 36, the up and down operation power mechanism is fixedly connected with the clamping jaw power body 32 through a supporting shaft 39, a motor and a guide mechanism are arranged in the clamping jaw power body 32, the mechanical arm 37 is in matched connection with the motor and the guide mechanism, and the front end of the mechanical arm 37 is provided with a double short clamping jaw 33 and a double long clamping jaw 34; the loading mechanism 7 comprises a double high basket positioning seat 71 and a double low basket positioning seat 72. The height difference of the double short clamping jaw 33 and the double long clamping jaw 34 is matched with the height difference of the double high flower basket positioning seat 71 and the double low flower basket positioning seat 72, so that the process groove 9 with the transfer mechanism can be used for clamping 4 flower baskets at the same time.
As shown in fig. 15 and 16, the process tank 9 with the transfer mechanism comprises a process tank body 91, a liquid discharging mechanism 95 and a liquid feeding mechanism 96, wherein the liquid discharging mechanism 95 and the liquid feeding mechanism 96 are in sealing connection with the process tank body 91, a movable bearing seat 93 and a fixed bearing seat 94 are arranged in the process Cheng Caoti 91, the movable bearing seat 93 is positioned above the fixed bearing seat 94, the movable bearing seat 93 is matched and connected with a movable bearing power mechanism 92, and the movable bearing power mechanism 92 is installed on the process tank 9. The process tank 91 may be a circulation tank, a standing tank, a quick-discharge QDR tank, an acid-alkali corrosion resistant material such as PP/PTFE/PVDF, or a material such as SUS/QUARTZ, or one or more arrangements according to the process requirements, and the process tank is not limited to the material/size/manner and number. The process tank body realizes the replacement of the solution in the tank body through a liquid inlet mechanism 96 and a liquid outlet and discharging mechanism 95. When the full-automatic mechanical arm module II places the first two flowers on the fixed bearing seat 94 in the process groove body, the movable bearing power mechanism 92 cooperates with the movable bearing seat 93 to move the movable bearing seat 93 and the other two flowers on the movable bearing seat 93 to the position above the fixed bearing seat 94, so that the full-automatic mechanical arm module II clamps again, the movable bearing seat 93 and the fixed bearing seat 94 bear 4 flowers in the same batch together, the movable bearing seat 93 can move back and forth in the process groove body, and the movable bearing seat 93 cooperates with the mechanical arm to place and clamp the positions of the flowers.
As shown in fig. 22, 23 and 24, the horizontal spin dryer 11 includes a sealing cover 1101 and a spin dryer body 1102, the sealing cover 1101 is connected with an upper end surface of the spin dryer body 1102 in a sealing manner, a basket fixing and rotating bearing platform 1103 is arranged in the spin dryer body 1102, and four evenly distributed basket fixing and bearing seats 1104 are arranged on the basket fixing and rotating bearing platform 1103. The horizontal spin dryer can spin dry 4 flower baskets and wafers simultaneously, so that the efficiency is improved obviously, dynamic balance is facilitated, and the breaking risk caused by balance is reduced effectively.
As shown in fig. 10 and 11, the structure of the fully-automatic mechanical arm module ii 4 is the same as that of the fully-automatic mechanical arm module i 3, and the difference is that the fully-automatic mechanical arm module ii 4 has fewer double short clamping jaws.
As shown in fig. 17 and 18, the present invention further includes an air drying tank mechanism 10, where the air drying tank mechanism 10 is located between the process tank 9 with the transfer mechanism and the horizontal spin dryer 11, and may also be located between the horizontal spin dryer 11 and the dual-station lower cargo mechanism 8. The air drying groove mechanism 10 comprises a groove body 101, a liquid discharge mechanism 102 and an air duct mechanism 103, wherein the lower end surface of the groove body 101 is connected with the liquid discharge mechanism 102 in a matched mode, and the air duct mechanism 103 is arranged on the upper end surface of the groove body 101. The air drying groove mechanism 10 is arranged for air drying the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4, and is used for guaranteeing that the double long clamping jaw II clamps and takes out the basket and can not wet the basket secondarily when the basket is delivered after the horizontal spin dryer finishes the manufacturing procedure. The groove body 101 is processed in a U-shaped mode, size occupation is reduced, the liquid discharging mechanism 102 is matched, the liquid which drops into the groove can be discharged cleanly, the liquid discharging mechanism 102 can avoid long-term leaving of the dropped liquid, and particle pollution is generated.
As shown in fig. 19 and 20, the air duct mechanism 103 includes a left air duct mechanism 1031 and a right air duct mechanism 1032, the structure of the left air duct mechanism 1031 is identical to that of the right air duct mechanism 1032, and the left air duct mechanism 1031 is symmetrically installed on the upper end surface of the tank 101, the left air duct mechanism 1031 includes an upper air duct cover 1034, a sealing pad 1035 and an air duct base 1036, the upper air duct cover 1034 is hermetically connected with the air duct base 1036 through the sealing pad 1035, the front end surface of the air duct base 1036 is provided with an air inlet 1037, the upper end surface is provided with an air duct groove 1038 communicated with the air inlet 1037, and an air outlet knife edge 1033 communicated with the air duct groove 1038 is arranged at the joint of the air duct base 1036 and the upper air duct cover 1034 in the horizontal direction. The left and right horizontal air outlet knife edges spray out the nitrogen air speed like a blade, so that the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4 can be dried rapidly.
As shown in fig. 21, the automatic lifting screen mechanism 13 is installed between the process tank 9 with the transfer mechanism and the horizontal spin dryer 11, the automatic lifting screen mechanism 13 includes an upper fixing baffle 1301, a vertical guide rail 1302, a lower fixing baffle 1308 and a transparent partition plate 1310, the upper fixing baffle 1301 is fixedly connected to the upper end of the vertical guide rail 1302, the lower end of the vertical guide rail 1302 is fixedly connected to the lower fixing baffle 1308, an upper and lower transfer cylinder 1306 and a transparent partition plate 1310 are arranged in the lower fixing baffle 1308, the upper and lower transfer cylinder 1306 is connected to a bottom fixing support 1305 through a cylinder sliding block 1307, the bottom fixing support 1305 is fixedly connected to the transparent partition plate 1310 through a guide shaft 1304, a sealing sliding chute 1309 is arranged on the upper end surface of the lower fixing baffle 1308, the transparent partition plate 1310 is slidably connected to the vertical guide rail 1302 through a sliding block III1303, and a water guide disc 1311 is arranged on the upper end surface of the transparent partition plate 1310. The purpose of the water guide disc 1311 is to avoid the risk that the liquid drop enters the automatic lifting screen mechanism 13 and the liquid accumulation may affect sensor sensing judgment and may cause corrosion or rust to the cylinder in the process that the full-automatic mechanical arm module II 4 clamps the flower basket and the wafer from the process groove 9 with the transfer mechanism to the horizontal spin dryer 11. The purpose of the automatic lifting screen mechanism 13 is to ensure that the process liquid volatilizes or the reactive corrosive gases volatilize as little as possible into the drying and unloading area while avoiding the influence of the drying and unloading area on the process. The automatic lifting screen mechanism 13 can be arranged at different positions according to the requirements, and the number can be increased or decreased according to the requirements of the manufacturing process.
As shown in fig. 13 and 14, the double-station cargo discharging mechanism 8 comprises a left and right transferring cylinder 81, an up and down lifting cylinder 82, a mounting seat 83 and a basket bearing seat 84, wherein the mounting seat 83 is mounted on the anti-corrosion framework and the shell 1, the left and right transferring cylinder 81 is mounted on the mounting seat 83, the piston ends of the left and right transferring cylinder 81 are connected with the up and down lifting cylinder 82 in a matched manner, and the piston ends of the up and down lifting cylinder 82 are connected with the basket bearing seat 84 in a matched manner. The left and right transfer cylinder drives the up-down jacking cylinder and the flower basket bearing seat, the flower basket is borne to move at the left station and the right station, the up-down jacking cylinder drives the flower basket bearing seat to lift, the flower basket is lifted and separated from the unloading station, further, the displacement at the left station and the right station is realized, and the unloading requirement of 4 flower baskets in one batch can be realized by the double-station unloading mechanism.
The working principle of the invention is as follows: firstly, the double short clamping jaw 33 and the double long clamping jaw 34 of the full-automatic mechanical arm module I clamp 4 flowers of the loading mechanism at the same time, and send the flowers to the movable bearing seat 93 and the fixed bearing seat 94 of the process groove 9 with the transfer mechanism, the liquid feeding mechanism 96 starts to put chemical liquid into the process groove 91 to soak the flowers for 4 flowers, and after a period of time, the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4 starts to clamp two flowers on the fixed bearing seat 94. The two flowers are sent to two flowers fixed bearing seats on a flower basket fixed rotary bearing platform 1103 of the horizontal type spin dryer 11, the flower basket fixed rotary bearing platform 1103 is rotated for 90 degrees after being fixed with flower baskets, the other two flower baskets are waited for being placed, at the moment, the movable bearing seat 93 is moved to the upper part of the fixed bearing seat 94 through the movable bearing power mechanism 92, the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4 is moved to the upper part of the movable bearing seat 93 again to clamp the other two flower baskets and send the two flower baskets to the other two flower basket fixed bearing seats on the flower basket fixed rotary bearing platform 1103 of the horizontal type spin dryer 11, the sealing cover 1101 is closed to start spin drying, and meanwhile, the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4 is moved to the air drying groove mechanism 10 to air dry, and the transparent isolation plate 1310 of the automatic lifting screen mechanism 13 starts to rise to isolate a spin drying area. When the sealing cover 1101 is opened after the horizontal spin dryer 11 finishes the manufacturing process, the transparent partition plate 1310 of the automatic lifting screen mechanism 13 is opened, the double long clamping jaw II 44 of the full-automatic mechanical arm module II 4 is moved to the upper part of the horizontal spin dryer 11 to clamp and transfer the flower basket on the flower basket fixing bearing seat to the double-station unloading mechanism to wait for the next process.
The present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications that do not depart from the spirit and principles of the invention are intended to be equivalent substitutes and are included in the scope of the invention.
Claims (6)
1. The utility model provides a full-automatic wet processing equipment of four basket synchronous operation of single batch, includes anticorrosive skeleton and shell (1), arm installation guiding mechanism (2), full-automatic arm module I (3), full-automatic arm module II (4), goes up cargo aircraft (7), cargo aircraft under the duplex position (8), takes to move and carries mechanism process groove (9), horizontal spin dryer (11), operation interface (12), electrical system (14) and pipe-line system (15), its characterized in that: the mechanical arm installation adjusting mechanism (2) is fixedly connected with the anti-corrosion framework and the shell (1), the full-automatic mechanical arm module I (3) and the full-automatic mechanical arm module II (4) are matched and connected with the mechanical arm installation adjusting mechanism (2), a left-right movement coverage area of the full-automatic mechanical arm module I (3) is provided with a cargo loading mechanism (7) and a process groove (9) with a transfer mechanism, and a left-right movement coverage area of the full-automatic mechanical arm module II 4 is provided with a process groove (9) with a transfer mechanism, a horizontal spin dryer (11) and a double-station cargo unloading mechanism (8);
the mechanical arm installation and adjustment mechanism (2) comprises a guide rail (21), a rack (22), an induction positioning block (23) and a fixed bracket (24), wherein the guide rail (21), the rack (22) and the induction positioning block (23) are fixedly installed on the fixed bracket (24);
the full-automatic mechanical arm module I (3) comprises a mechanical arm power body (31), a clamping jaw power body (32), double short clamping jaws (33), double long clamping jaws (34), a mechanical arm (37) and a supporting shaft (39), wherein a servo motor, a left-right operation power mechanism and an up-down operation power mechanism are arranged in the mechanical arm power body (31), a detection mechanism (38) is arranged on the upper end face of the mechanical arm power mechanism, the mechanical arm power body (31) is connected with a guide rail (21) in a sliding mode through a sliding block (35), the left-right operation power mechanism is meshed with a connecting rack (22) through a transmission gear (36), the up-down operation power mechanism is fixedly connected with the clamping jaw power body (32) through a supporting shaft (39), a motor and a guide mechanism are arranged in the clamping jaw power body (32), the mechanical arm (37) is matched with the motor and the guide mechanism, and the double short clamping jaws (33) and the double long clamping jaws (34) are arranged at the front end of the mechanical arm (37).
The goods loading mechanism (7) comprises a double-high flower basket positioning seat (71) and a double-low flower basket positioning seat (72);
the process tank (9) with the transfer mechanism comprises a process tank body (91), a liquid discharging mechanism (95) and a liquid feeding mechanism (96), wherein the liquid discharging mechanism (95) and the liquid feeding mechanism (96) are connected with the process tank body (91) in a sealing mode, a movable bearing seat (93) and a fixed bearing seat (94) are arranged in the process Cheng Caoti (91), the movable bearing seat (93) is located at the front upper side of the fixed bearing seat (94), the movable bearing seat (93) is connected with a movable bearing power mechanism (92) in a matched mode, and the movable bearing power mechanism (92) is arranged on the process tank (9);
the horizontal spin dryer (11) comprises a sealing cover (1101) and a spin dryer body (1102), wherein the sealing cover (1101) is connected with the upper end face of the spin dryer body (1102) in a sealing mode, a flower basket fixing and rotating bearing platform (1103) is arranged in the spin dryer body (1102), and four evenly distributed flower basket fixing and bearing seats (1104) are arranged on the flower basket fixing and rotating bearing platform (1103).
2. The fully automatic wet processing apparatus of claim 1, wherein: full-automatic arm module II (4) are including arm power body II (41), clamping jaw power body II (42), two long clamping jaw II (44), arm II (47) and back shaft II (49), inside servo motor II, control operation power unit II and the operation power unit II from top to bottom of being equipped with of arm power body II (41), its up end is equipped with detects mechanism II (48), arm power body II (41) pass through slider II (45) sliding connection guide rail (21), control operation power unit II and pass through drive gear II (46) meshing connection rack (22), control operation power unit II passes through back shaft II (49) fixed connection clamping jaw power body II (42), be equipped with motor II, guiding mechanism II in clamping jaw power body II (42), arm II (47) cooperation connection motor II, guiding mechanism II, arm II (47) front end is equipped with two long clamping jaw II (44).
3. The fully automatic wet processing apparatus of claim 2, wherein: still include air-dry groove mechanism (10), air-dry groove mechanism (10) are located and take and move between mechanism process groove (9) and horizontal spin dryer (11) or place between horizontal spin dryer (11) and duplex lower goods mechanism (8), air-dry groove mechanism (10) include cell body (101), liquid discharge mechanism (102) and wind channel mechanism (103), terminal surface cooperation connection liquid discharge mechanism (102) under cell body (101), cell body (101) up end is equipped with wind channel mechanism (103).
4. The fully automatic wet processing apparatus of claim 3, wherein: the air duct mechanism (103) comprises a left air duct mechanism (1031) and a right air duct mechanism (1032), the structure of the left air duct mechanism (1031) is identical to that of the right air duct mechanism (1032), the air duct mechanism (1031) and the right air duct mechanism are symmetrically arranged on the upper end face of the groove body (101), the left air duct mechanism (1031) comprises an upper air duct cover (1034), a sealing pad (1035) and an air duct base (1036), the upper air duct cover (1034) is connected with the air duct base (1036) in a sealing mode through the sealing pad (1035), an air inlet (1037) is formed in the front end face of the air duct base (1036), an air duct groove (1038) communicated with the air inlet (1037) is formed in the joint of the air duct base (1036) and the upper air duct cover (1034) in the horizontal direction, and an air outlet knife edge (1033) communicated with the air duct groove (1038) is formed in the joint.
5. The fully automatic wet processing apparatus of claim 1, wherein: still include automatic lift screen mechanism (13), automatic lift screen mechanism (13) are installed in the area and are carried between mechanism process groove (9) and the horizontal spin dryer (11), automatic lift screen mechanism (13) are including last fixed stop (1301), perpendicular guide rail (1302), lower fixed fender seat (1308) and transparent division board (1310), the upper end of last fixed stop (1301) fixed connection perpendicular guide rail (1302), fixed fender seat (1308) under the lower extreme fixed connection of perpendicular guide rail (1302), the inside cylinder (1306) that carries from top to bottom that is equipped with of fixed fender seat (1308) down, transparent division board (1310) are carried from top to bottom and are connected bottom fixed bolster (1305) through cylinder slider (1307), bottom fixed bolster (1305) are through guiding axle (1304) fixed connection transparent division board (1310), the up end of fixed fender seat (1308) is equipped with sealed spout (1309) down, transparent division board (1310) are through slider III (1303) sliding connection perpendicular guide rail (1302), transparent division board (1310) up end face is equipped with water guide tray (1311).
6. The fully automatic wet processing apparatus of claim 1, wherein: the double-station lower cargo mechanism (8) comprises a left and right transfer cylinder (81), an upper and lower jacking cylinder (82), a mounting seat (83) and a flower basket bearing seat (84), wherein the mounting seat (83) is arranged on an anti-corrosion framework and a shell (1), the left and right transfer cylinder (81) is arranged on the mounting seat (83), the piston end of the left and right transfer cylinder (81) is matched and connected with the upper and lower jacking cylinder (82), and the piston end of the upper and lower jacking cylinder (82) is matched and connected with the flower basket bearing seat (84).
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| CN201810351122.3A CN108336004B (en) | 2018-04-18 | 2018-04-18 | Full-automatic wet processing equipment with single batch of four-flower basket synchronous operation |
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| CN201810351122.3A CN108336004B (en) | 2018-04-18 | 2018-04-18 | Full-automatic wet processing equipment with single batch of four-flower basket synchronous operation |
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| CN108336004B true CN108336004B (en) | 2023-09-08 |
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| CN111790710B (en) * | 2019-04-09 | 2022-07-22 | 北京北方华创微电子装备有限公司 | Position conversion device and cleaning equipment |
| CN111081617B (en) * | 2019-11-12 | 2022-12-13 | 至微半导体(上海)有限公司 | Device for high-speed transmission and automatic offset reset of chip product lifting basket |
| CN111489989B (en) * | 2020-04-03 | 2024-04-16 | 北京北方华创微电子装备有限公司 | Cache groove of semiconductor cleaning machine |
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