CN209561360U - The efficient flow system of silicon chip of solar cell - Google Patents

The efficient flow system of silicon chip of solar cell Download PDF

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Publication number
CN209561360U
CN209561360U CN201920316979.1U CN201920316979U CN209561360U CN 209561360 U CN209561360 U CN 209561360U CN 201920316979 U CN201920316979 U CN 201920316979U CN 209561360 U CN209561360 U CN 209561360U
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basket
boat
support
silicon wafer
wafer
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CN201920316979.1U
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顾徐锋
戴秋喜
潘加永
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Suzhou Ying Zhen Intelligent Technology Co Ltd
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Suzhou Ying Zhen Intelligent Technology Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a kind of efficient flow systems of silicon chip of solar cell, including rack, reviewing station is provided in the middle part of the rack, the two sides of the reviewing station are provided with gaily decorated basket conveying mechanism and boat delivery platform, gaily decorated basket support tooth top sheet devices, boat support tooth top sheet devices and silicon chip transfer mechanism are provided on the reviewing station, the gaily decorated basket support tooth top sheet devices can rise or fall the silicon wafer being fully loaded in the gaily decorated basket with upward picking-up or silicon wafer is packed into the empty gaily decorated basket downwards;The boat support tooth top sheet devices can rise or fall the silicon wafer being fully loaded in metal boat with upward picking-up or silicon wafer is packed into empty metal boat downwards;The silicon chip transfer mechanism is used to grab the silicon wafer that the gaily decorated basket support tooth top sheet devices or boat support tooth top sheet devices are held up and is transferred to boat support tooth top sheet devices or gaily decorated basket support tooth top sheet devices.The efficient flow system of the silicon chip of solar cell realizes efficient circulation of the silicon wafer between metal boat and the gaily decorated basket, improves the production efficiency of solar battery.

Description

High-efficiency circulation system for solar cell silicon wafers
Technical Field
The utility model relates to a crystalline silicon solar cell processing equipment field, concretely relates to high-efficient circulation system of solar cell silicon chip.
Background
In the processing production of the crystalline silicon solar cell, part of the processes need to load solar cell silicon wafers from the flower basket onto a metal boat, then the metal boat filled with the silicon wafers is conveyed into a process furnace to carry out corresponding process treatment (such as a film coating process), and part of the processes need to guide the solar cell silicon wafers from the metal boat onto the flower basket.
The traditional method for transferring the silicon wafers between the flower basket and the metal boat is to pick and place the silicon wafers one by one manually, so that the labor intensity is high, and the automation degree is low; and the silicon chip is thin and fragile, and is very easy to damage, so the action of manually taking and placing the silicon chip must be gentle, the transfer time of the silicon chip is greatly increased, and in addition, the silicon chip is easy to scratch and pollute by manually reversing the silicon chip. In conclusion, the existing silicon wafer transfer efficiency between the flower basket and the metal boat is low, and the quality of the silicon wafer cannot be guaranteed. With the increasing perfection of automatic production, the automation of the processing and production of the crystalline silicon solar cell is realized, and the production efficiency is improved.
SUMMERY OF THE UTILITY MODEL
In view of the not enough of prior art existence above, the utility model provides a high-efficient circulation system of solar cell silicon chip.
The utility model adopts the technical proposal that: the high-efficiency transfer system of the solar cell silicon wafer comprises a rack, wherein a wafer reversing station is arranged in the middle of the rack, a flower basket conveying mechanism and a boat conveying platform are arranged on two sides of the wafer reversing station, the flower basket conveying mechanism is used for conveying a flower basket to the wafer reversing station or conveying the flower basket away from the wafer reversing station, the boat conveying platform is used for conveying a metal boat to the wafer reversing station or conveying the metal boat away from the wafer reversing station, and the wafer is transferred between the flower basket and the metal boat on the wafer reversing station; wherein,
the basket conveying mechanism comprises a basket feeding conveying belt and a basket discharging conveying belt which are arranged on one side of the rewinding station and a basket backflow area which is arranged on the other side of the rewinding station, and the basket backflow area is communicated with the basket feeding conveying belt and the basket discharging conveying belt;
the pattern basket tooth crest piece supporting device, the boat tooth crest piece supporting device and the silicon wafer transferring mechanism are arranged on the wafer reversing station, and the pattern basket tooth crest piece supporting device can ascend or descend to upwards support the silicon wafers in the full-load pattern basket or downwards load the silicon wafers into the empty pattern basket; the boat support addendum slice device can ascend or descend to upwards support the silicon slices in the full-load metal boat or downwards load the silicon slices into the empty metal boat; the silicon wafer transfer mechanism is used for grabbing the silicon wafer lifted by the flower basket support addendum wafer device or the boat support addendum wafer device and transferring the silicon wafer to the boat support addendum wafer device or the flower basket support addendum wafer device.
As an improvement to the above scheme, a basket silicon wafer normalization device and a metal boat silicon wafer normalization device are further arranged on the sheet reversing station, the basket silicon wafer normalization device is arranged above the basket support tooth top device and comprises a cylinder and a normalization plate connected to a movable end of the cylinder, and the cylinder can drive the normalization plate to act on the side portion of the silicon wafer on the basket support tooth top device so as to normalize the position of the silicon wafer on the basket support tooth top device; the metal boat silicon wafer regulating device is arranged above the boat support addendum wafer device, and the structure of the metal boat silicon wafer regulating device is similar to that of the flower basket silicon wafer regulating device.
As an improvement to the scheme, the basket feeding conveying belt and the basket discharging conveying belt are arranged side by side, and the flower basket backflow area comprises a plurality of backflow conveying belts.
As an improvement to the above scheme, a boat turnover device is provided on the boat conveying platform, and the boat turnover device is used for rotating the metal boat by a predetermined angle.
As an improvement to the above scheme, the basket receptacle top piece device comprises a jacking motor and a top piece plate mounted on a movable end of the jacking motor, wherein a plurality of receptacle teeth are arranged on the top of the top piece plate, and the receptacle teeth are positioned corresponding to the silicon wafer placement positions in the basket; the boat support addendum slice device is similar to the flower basket support addendum slice device in structure, and the positions of a plurality of support teeth on the boat support addendum slice device correspond to the silicon wafer arrangement positions in the metal boat.
As an improvement to the above scheme, the silicon wafer transfer mechanism is provided with two groups.
As an improvement to the above scheme, the silicon wafer transfer mechanism comprises an X-axis moving assembly, a Y-axis moving assembly, a Z-axis moving assembly and a grabbing assembly which are sequentially connected, wherein the X-axis moving assembly, the Y-axis moving assembly and the Z-axis moving assembly can drive the grabbing assembly to respectively move along the X-axis direction, the Y-axis direction and the Z-axis direction.
As an improvement to the above, the X-axis moving assembly includes an X-axis driving device and an X-axis support, the Y-axis moving assembly includes a Y-axis driving device and a Y-axis support, the Z-axis moving assembly includes a Z-axis driving device and a Z-axis support, the X-axis support is mounted on the top of the frame, the Y-axis moving assembly is disposed on the X-axis support, the Z-axis moving assembly is disposed on the Y-axis support, and the gripping assembly is mounted on the Z-axis support.
As an improvement to the above, the gripping assembly comprises a plurality of vacuum cups.
Has the advantages that: the utility model provides a high-efficient circulation system of solar cell silicon chip has overcome the not enough of background art, has realized the high-efficient circulation of silicon chip between metal boat and basket of flowers, has improved the productivity, has reduced intensity of labour, has improved the circulation efficiency of silicon chip and the quality of solar cell silicon chip between basket of flowers and metal boat to the processing production efficiency of solar cell silicon chip has been improved.
Drawings
FIG. 1 is a front view of a silicon wafer high-efficiency circulation system of a solar cell in an embodiment of the present application;
FIG. 2 is a top view of a solar cell silicon wafer high efficiency circulation system in an embodiment of the present application;
fig. 3 is a left side view of a solar cell silicon wafer high-efficiency circulation system in an embodiment of the present application.
Detailed Description
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
The utility model provides a high-efficient circulation system of solar cell silicon chip please refer to fig. 1-3, fig. 1 shows the embodiment of the utility model provides an in the main structure of looking of high-efficient circulation system of solar cell silicon chip, high-efficient circulation system of solar cell silicon chip includes frame 1 the middle part of frame 1 is provided with rewinding station 10 the both sides of rewinding station 10 are provided with basket of flowers conveying mechanism 20 and boat conveying platform 30, basket of flowers conveying mechanism 20 be used for carrying the basket of flowers extremely rewinding station 10 or from the basket of flowers is carried away to rewinding station 10, boat conveying platform 30 is used for transporting the metal boat extremely rewinding station 10 or from the metal boat is carried away to rewinding station 10 is last to accomplish the transfer of silicon chip between basket of flowers and metal boat.
Fig. 2 shows overlooking structure of the solar cell silicon wafer high-efficiency circulation system in the embodiment of the present application, the basket conveying mechanism 20 comprises a basket conveying belt 21, a basket conveying belt 22 and a basket return area 23, the basket conveying belt 21 and the basket conveying belt 22 are arranged on one side of the rewinding station 10, the basket return area 23 is arranged on the other side of the rewinding station 10, and the basket conveying belt 21 and the basket conveying belt 22 are communicated with each other.
Further, the basket feeding belt 21 and the basket discharging belt 22 are arranged in parallel, the basket returning area 23 includes a plurality of returning belts 230, and the returning belts 230 connect the basket feeding belt 21 and the basket discharging belt 22.
Further, a boat turnover device 31 is disposed on the boat conveying platform 30, and the boat turnover device 31 is used for rotating the metal boat by a predetermined angle.
Furthermore, the boat turning device 31 includes a rotary cylinder and a clamping plate connected to the rotary cylinder, and the clamping plate is driven by the rotary cylinder to rotate by a predetermined angle after clamping and fixing the metal boat. In this embodiment, the rotation angle of the metal boat is 90 °.
Fig. 3 shows a left side view structure of a solar cell silicon wafer high-efficiency circulation system in an embodiment of the present application, a basket-supporting addendum device 11, a boat-supporting addendum device 12 and a silicon wafer transfer mechanism 13 are arranged on the rewinding station 10, and the basket-supporting addendum device 11 can be raised or lowered to lift up a silicon wafer in a full basket or to load a silicon wafer into an empty basket; the boat support addendum slice device 12 can ascend or descend to upwards support the silicon slices in the full-load metal boat or downwards load the silicon slices into the empty metal boat; the silicon wafer transfer mechanism 13 is used for grabbing the silicon wafer lifted by the basket support addendum wafer device 11 or the boat support addendum wafer device 12 and transferring the silicon wafer to the boat support addendum wafer device 12 or the basket support addendum wafer device 11.
In this embodiment, the silicon wafer transfer mechanisms 13 are provided in two groups to improve the silicon wafer transfer efficiency.
In this embodiment, the automatic solar cell circulation system further includes a touch panel 40, and a worker can control the start and stop of the basket conveying mechanism 20, the boat conveying platform 30, the basket holder addendum piece device 11, the boat holder addendum piece device 12, and the silicon wafer transfer mechanism 13 through the touch panel 40.
Further, the flower basket supports the addendum slice device 11 and comprises a jacking motor and a top slice plate installed at the movable end of the jacking motor, a plurality of support teeth are arranged at the top of the top slice plate, and the positions of the support teeth correspond to the positions of silicon wafer placement in the flower basket. The top plate is parallel to the length direction of the flower basket, the support teeth are preferably arranged to be V-shaped grooves, one silicon wafer can be correspondingly contained in each support tooth, the top plate is preferably arranged in parallel, the distance between the two top plates is smaller than the side length of the silicon wafer, the support teeth on the two top plates support the silicon wafers from two sides, and the support stability of the silicon wafers is improved.
The boat support addendum plate device 12 is similar to the basket support addendum plate device 11 in structure and also comprises a jacking motor and a jacking plate installed at the movable end of the jacking motor, a plurality of support teeth are arranged at the top of the jacking plate, the positions of the support teeth correspond to the silicon wafer placing positions in the metal boat, the number of the support teeth corresponds to the number of the silicon wafers in the fully loaded metal boat, and the jacking plate is parallel to the length direction of the metal boat.
Further, the silicon wafer transfer mechanism 13 includes an X-axis moving component, a Y-axis moving component, a Z-axis moving component, and a grabbing component 130, which are connected in sequence, and the X-axis moving component, the Y-axis moving component, and the Z-axis moving component can drive the grabbing component to respectively move along an X-axis direction, a Y-axis direction, and a Z-axis direction so as to accurately grab the silicon wafer lifted by the basket support addendum plate device 11 or the boat support addendum plate device 12 and transfer the silicon wafer onto the basket support addendum plate device 12 or the basket support addendum plate device 11. Here, the X-axis direction refers to the up-down direction in fig. 2, the Y-axis direction refers to the left-right direction in fig. 2, and the Z-axis direction refers to the direction perpendicular to the paper surface in fig. 2.
Further, the X-axis moving assembly comprises an X-axis driving device and an X-axis support, the Y-axis moving assembly comprises a Y-axis driving device and a Y-axis support, and the Z-axis moving assembly comprises a Z-axis driving device and a Z-axis support. The X-axis support is arranged at the top of the rack 1, the Y-axis moving assembly is arranged on the X-axis support, and when the X-axis support is driven by the X-axis driving device to move along the X-axis direction, the Y-axis moving assembly also moves along the X-axis direction; the Z-axis moving assembly is arranged on the Y-axis support, and when the Y-axis driving device drives the Y-axis support to move along the Y-axis direction, the Z-axis moving assembly also moves along the Y-axis direction; the grasping assembly 130 is mounted on the Z-axis support, and when the Z-axis drive drives the Z-axis support to move in the Z-axis direction, the grasping assembly 130 also moves in the Z-axis direction.
Preferably, the X-axis driving device, the Y-axis driving device, and the Z-axis driving device are one of an air cylinder, an electric cylinder, a hydraulic cylinder, and a linear motor. More preferably, the X-axis driving device, the Y-axis driving device, and the Z-axis driving device are servo linear motors.
Further, the grabbing component 130 comprises a plurality of vacuum chucks, the vacuum chucks are arranged side by side along the length direction of the flower basket or the metal boat, and each vacuum chuck can correspondingly suck a silicon wafer.
In the first embodiment of the present embodiment, the solar cell silicon wafer is transferred from the basket to the metal boat by the solar cell silicon wafer high-efficiency circulation system, specifically, the full-load basket is transported to the sheet-rewinding station 10 by the basket-feeding conveyor belt 21, and the empty metal boat is transported to the sheet-rewinding station 10 by the boat-conveying platform 30 located at the left or right side of the sheet-rewinding station 10; the flower basket support addendum slice device 11 ascends to support the silicon slice in the fully loaded flower basket upwards, the boat support addendum slice device 12 ascends, the silicon slice transfer mechanism 13 grabs the silicon slice supported by the flower basket support addendum slice device 11 and transfers the silicon slice to the boat support addendum slice device 12, and then the boat support addendum slice device 12 descends to load the silicon slice into the empty metal boat; and then the flower basket supports the addendum slice device 11 to descend and reset, the empty flower basket is conveyed away from the slice reversing station 10 through the backflow conveying belt 230 and then flows back to the basket outlet conveying belt 22 to be conveyed out, and the full-load metal boat is conveyed away from the slice reversing station 10 through the boat conveying platform 30 positioned on the left side or the right side of the slice reversing station 10.
In this embodiment, empty metal boats are first turned over from a vertical state to a horizontal state by the boat turning device 31, and then transported to the sheet inverting station 10 by the boat conveying platform 30, and full metal boats are transported by the boat conveying platform 30 in sequence, and then transported after the boat turning device 31 is turned over from the horizontal state to the vertical state.
In a second embodiment of the present embodiment, the solar cell silicon wafer is transferred from a metal boat to a flower basket by the solar cell silicon wafer high-efficiency circulation system, specifically, a full-load metal boat is transported to the sheet-rewinding station 10 by the boat-conveying platform 30 located at the left side or the right side of the sheet-rewinding station 10, and an empty flower basket is transported to the sheet-rewinding station 10 by the basket-feeding conveyor belt 21; the boat support tooth crest piece device 12 ascends to support the silicon wafers in the fully loaded metal boat upwards, the basket support tooth crest piece device 11 ascends, the silicon wafer transfer mechanism 13 grabs the silicon wafers supported by the boat support tooth crest piece device 12 and transfers the silicon wafers to the basket support tooth crest piece device 11, and the rear basket support tooth crest piece device 11 descends to load the silicon wafers into the empty basket; and then the boat support addendum slice device 12 descends and resets, full-load flower baskets are conveyed away from the slice reversing station 10 through the backflow conveying belt 230 and then flow back to the basket outlet conveying belt 22 to be conveyed out, and empty metal boats are conveyed away from the slice reversing station 10 through the boat conveying platform 30 positioned on the left side or the right side of the slice reversing station 10.
In this embodiment, the full-load metal boats are first turned over from the vertical state to the horizontal state by the boat turning device 31, and then transported to the sheet inverting station 10 by the boat conveying platform 30, and the empty metal boats are transported by the boat conveying platform 30 in sequence, and then transported after the boat turning device 31 is turned over from the horizontal state to the vertical state.
In conclusion, in this embodiment, the worker places a fully loaded basket of flowers or an empty basket of flowers on the basket feeding belt 21, the empty basket of flowers or the fully loaded basket of flowers that accomplish the silicon wafer transfer flows back to the basket discharging belt 22 through the backflow belt 230 arranged on the basket returning area 23 on the other side of the rewinding station 10, the basket feeding belt 21 and the basket discharging belt 22 are arranged on the same side of the rewinding station 10, the worker only needs to take the empty basket of flowers or the fully loaded basket of flowers on one side of the rewinding station 10, the other side of the rewinding station 10 does not need to prepare the worker, manpower is saved, and production efficiency is improved.
In a third embodiment of the present invention, the solar cell silicon wafer high-efficiency circulation system alternately transfers solar cell silicon wafers from the flower basket to the metal boat and from the metal boat to the flower basket, specifically, a full-load flower basket is conveyed to the sheet reversing station 10 by the basket-feeding conveyer belt 21, and an empty metal boat is conveyed to the sheet reversing station 10 by the boat-conveying platform 30 located at the left side or the right side of the sheet reversing station 10; the flower basket support addendum slice device 11 ascends to support the silicon slice in the full-load flower basket upwards, the boat support addendum slice device 12 ascends, and the silicon slice transfer mechanism 13 grabs the silicon slice supported by the flower basket support addendum slice device 11 and transfers the silicon slice to the boat support addendum slice device 12; then the boat support addendum slice device 12 descends to load the silicon wafers into the empty metal boat, and the flower basket support addendum slice device 11 in the lifting state is kept in the original position; the metal boat filled with the silicon wafers is transported away from the sheet inverting station 10 through a boat conveying platform 30 positioned on the left side or the right side of the sheet inverting station 10; while another full metal boat is transported to the sheet reversing station 10 by the boat transfer platform 30 located on the right or left side of the sheet reversing station 10; the boat support addendum slice device 12 ascends to support the silicon slice in the fully loaded metal boat upwards, and the silicon slice transfer mechanism 13 grabs the silicon slice supported by the boat support addendum slice device 12 and transfers the silicon slice to the flower basket support addendum slice device 11 in a lifted state; the rear basket tooth crest piece supporting device 11 descends to load the silicon wafer into the hollow basket from which the silicon wafer is removed; the basket filled with silicon chips is transported away from the chip reversing station 10 through the backflow conveying belt 230, and then flows back to the basket outlet conveying belt 22 to be transported out; another full-load basket is conveyed to the slice rewinding station 10 through the basket feeding conveyor belt 21, the boat support addendum slice device 12 in the lifting state is kept in place, then, in the same way as the operation, the silicon slice is transferred to the boat support addendum slice device 12 in the lifting state from the full-load basket, and then the boat support addendum slice device 12 descends to load the silicon slice into an empty metal boat from which the silicon slice is removed; the above steps are repeatedly executed, and are not described herein again.
In this embodiment, the solar cell silicon wafer high-efficiency circulation system alternately transfers the solar cell silicon wafer from the basket to the metal boat and from the metal boat to the basket, so that the time for descending, resetting and re-ascending the basket holder tooth crest device 11 and the basket holder tooth crest device 12 and the time for transporting the empty basket and the empty boat are reduced, and the production efficiency is further improved.
With continuing reference to fig. 1-3, in one embodiment, a basket silicon wafer regularizing device 14 and a metal boat silicon wafer regularizing device 15 are further disposed on the sheet rewinding station 10, and the basket silicon wafer regularizing device 14 is configured to regularize a silicon wafer lifted by the basket tooth top supporting device 11 or a silicon wafer transferred to the basket tooth top supporting device 11 by the silicon wafer transfer mechanism 13; the metal boat silicon wafer normalizing device 15 is used for normalizing the silicon wafers lifted by the boat support addendum wafer device 12 or the silicon wafers transferred to the boat support addendum wafer device 12 by the silicon wafer transfer mechanism 13. The arrangement of the flower basket silicon wafer normalization device 14 and the metal boat silicon wafer normalization device 15 overcomes the position deviation of the silicon wafer in the jacking and transferring processes, and improves the positioning accuracy of silicon wafer transfer.
The basket of flowers silicon chip regular device 14 sets up in basket of flowers support addendum piece device 11 top, including cylinder 140 and connect at the regular board 141 of cylinder 140 expansion end, cylinder 140 can drive regular board 141 acts on the lateral part of silicon chip on basket of flowers support addendum piece device 11 to the position of silicon chip on basket of flowers support addendum piece device 11 is supported in order to reform the flower. It will be appreciated that the regulator plate 141 extends along the length of the flower basket. Preferably, the basket silicon wafer regulating devices 14 are arranged on two sides above the basket tooth top plate device 11, the regulating plates 141 move inwards from two sides to clamp silicon wafers on the basket tooth top plate device 11, the positions of the silicon wafers on the basket tooth top plate device 11 are corrected, and then the regulating plates 141 move outwards to reset.
The metal boat silicon wafer regularizing device 15 is arranged above the boat support addendum plate device 12 and comprises a cylinder 150 and a regularizing plate 151 connected to the movable end of the cylinder 150, and the cylinder 150 can drive the regularizing plate 151 to act on the side of the silicon wafer on the boat support addendum plate device 12 so as to normalize the position of the silicon wafer on the boat support addendum plate device 12. The structure of the metal boat silicon wafer normalization device 15 is similar to that of the flower basket silicon wafer normalization device 14, and details are omitted here.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims (9)

1. A high-efficiency solar cell silicon wafer circulation system comprises a rack and is characterized in that a wafer reversing station is arranged in the middle of the rack, a flower basket conveying mechanism and a boat conveying platform are arranged on two sides of the wafer reversing station, the flower basket conveying mechanism is used for conveying a flower basket to the wafer reversing station or conveying the flower basket away from the wafer reversing station, the boat conveying platform is used for conveying a metal boat to the wafer reversing station or conveying the metal boat away from the wafer reversing station, and the wafer is transferred between the flower basket and the metal boat on the wafer reversing station; wherein,
the basket conveying mechanism comprises a basket feeding conveying belt and a basket discharging conveying belt which are arranged on one side of the rewinding station and a basket backflow area which is arranged on the other side of the rewinding station, and the basket backflow area is communicated with the basket feeding conveying belt and the basket discharging conveying belt;
the pattern basket tooth crest piece supporting device, the boat tooth crest piece supporting device and the silicon wafer transferring mechanism are arranged on the wafer reversing station, and the pattern basket tooth crest piece supporting device can ascend or descend to upwards support the silicon wafers in the full-load pattern basket or downwards load the silicon wafers into the empty pattern basket; the boat support addendum slice device can ascend or descend to upwards support the silicon slices in the full-load metal boat or downwards load the silicon slices into the empty metal boat; the silicon wafer transfer mechanism is used for grabbing the silicon wafer lifted by the flower basket support addendum wafer device or the boat support addendum wafer device and transferring the silicon wafer to the boat support addendum wafer device or the flower basket support addendum wafer device.
2. The efficient solar cell silicon wafer circulating system according to claim 1, wherein a basket silicon wafer regularizing device and a metal boat silicon wafer regularizing device are further arranged on the reversing station, the basket silicon wafer regularizing device is arranged above the basket-holder tooth top device and comprises a cylinder and a regularizing plate connected to a movable end of the cylinder, and the cylinder can drive the regularizing plate to act on the side portion of the silicon wafer on the basket-holder tooth top device so as to normalize the position of the silicon wafer on the basket-holder tooth top device; the metal boat silicon wafer regulating device is arranged above the boat support addendum wafer device, and the structure of the metal boat silicon wafer regulating device is similar to that of the flower basket silicon wafer regulating device.
3. The efficient circulation system for the solar cell silicon wafers as claimed in claim 1, wherein two basket-in conveyer belts and two basket-out conveyer belts are arranged side by side, and the flower basket reflux area comprises a plurality of reflux conveyer belts.
4. The efficient circulation system for solar cell silicon wafers as claimed in claim 1, wherein a boat turning device is provided on the boat conveying platform, the boat turning device being adapted to rotate the metal boat by a predetermined angle.
5. The efficient circulation system for solar cell silicon wafers as claimed in claim 1, wherein the basket support top piece device comprises a jacking motor and a top piece plate mounted on the movable end of the jacking motor, a plurality of support teeth are arranged on the top of the top piece plate, and the positions of the support teeth correspond to the positions of the silicon wafers in the basket; the boat support addendum slice device is similar to the flower basket support addendum slice device in structure, and the positions of a plurality of support teeth on the boat support addendum slice device correspond to the silicon wafer arrangement positions in the metal boat.
6. The solar cell silicon wafer high-efficiency circulation system according to claim 1, wherein the silicon wafer transfer mechanisms are provided in two groups.
7. The efficient solar cell silicon wafer circulating system according to claim 1, wherein the silicon wafer transferring mechanism comprises an X-axis moving assembly, a Y-axis moving assembly, a Z-axis moving assembly and a grabbing assembly which are connected in sequence, and the X-axis moving assembly, the Y-axis moving assembly and the Z-axis moving assembly can drive the grabbing assembly to move along the X-axis direction, the Y-axis direction and the Z-axis direction respectively.
8. The solar cell silicon wafer high-efficiency circulation system according to claim 7, wherein the X-axis moving assembly comprises an X-axis driving device and an X-axis support, the Y-axis moving assembly comprises a Y-axis driving device and a Y-axis support, the Z-axis moving assembly comprises a Z-axis driving device and a Z-axis support, the X-axis support is mounted at the top of the rack, the Y-axis moving assembly is arranged on the X-axis support, the Z-axis moving assembly is arranged on the Y-axis support, and the grabbing assembly is mounted on the Z-axis support.
9. The solar cell silicon wafer high efficiency flow system of claim 7, wherein the gripper assembly comprises a plurality of vacuum chucks.
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CN110783430A (en) * 2019-11-06 2020-02-11 上海焕巍智能科技有限公司 Solar silicon wafer guiding and exchanging method and device
CN113394145A (en) * 2021-05-07 2021-09-14 拉普拉斯(无锡)半导体科技有限公司 Silicon wafer guide system
CN118173485A (en) * 2024-05-15 2024-06-11 浙江求是半导体设备有限公司 Battery piece transferring and loading equipment, battery piece transferring and loading system and battery piece transferring and loading method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110783430A (en) * 2019-11-06 2020-02-11 上海焕巍智能科技有限公司 Solar silicon wafer guiding and exchanging method and device
CN113394145A (en) * 2021-05-07 2021-09-14 拉普拉斯(无锡)半导体科技有限公司 Silicon wafer guide system
CN118173485A (en) * 2024-05-15 2024-06-11 浙江求是半导体设备有限公司 Battery piece transferring and loading equipment, battery piece transferring and loading system and battery piece transferring and loading method

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