CN106042650B - 压印材料排出装置及压印设备 - Google Patents
压印材料排出装置及压印设备 Download PDFInfo
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- CN106042650B CN106042650B CN201610197474.9A CN201610197474A CN106042650B CN 106042650 B CN106042650 B CN 106042650B CN 201610197474 A CN201610197474 A CN 201610197474A CN 106042650 B CN106042650 B CN 106042650B
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- 239000000463 material Substances 0.000 title claims abstract description 394
- 239000000758 substrate Substances 0.000 claims description 36
- 239000007788 liquid Substances 0.000 claims description 32
- 238000011049 filling Methods 0.000 claims description 25
- 230000005484 gravity Effects 0.000 claims description 17
- 238000003860 storage Methods 0.000 claims description 15
- 239000011148 porous material Substances 0.000 claims description 11
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 239000000945 filler Substances 0.000 description 1
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17563—Ink filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Ink Jet (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-076992 | 2015-04-03 | ||
| JP2015076992 | 2015-04-03 | ||
| JP2016-002753 | 2016-01-08 | ||
| JP2016002753A JP6700794B2 (ja) | 2015-04-03 | 2016-01-08 | インプリント材吐出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106042650A CN106042650A (zh) | 2016-10-26 |
| CN106042650B true CN106042650B (zh) | 2018-01-02 |
Family
ID=57358607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610197474.9A Active CN106042650B (zh) | 2015-04-03 | 2016-03-31 | 压印材料排出装置及压印设备 |
Country Status (4)
| Country | Link |
|---|---|
| JP (2) | JP6700794B2 (enExample) |
| CN (1) | CN106042650B (enExample) |
| SG (1) | SG10201602050WA (enExample) |
| TW (1) | TWI614110B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6983587B2 (ja) * | 2017-09-06 | 2021-12-17 | キヤノン株式会社 | 吐出材収容ユニットおよび吐出材吐出装置 |
| TWI680063B (zh) * | 2017-09-06 | 2019-12-21 | 日商佳能股份有限公司 | 噴出材料接收單元、噴出材料噴出設備及撓性構件之製造方法 |
| US10421283B2 (en) | 2017-09-06 | 2019-09-24 | Canon Kabushiki Kaisha | Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible member |
| JP2019125619A (ja) * | 2018-01-12 | 2019-07-25 | キヤノン株式会社 | 吐出装置およびインプリント装置 |
| US10894420B2 (en) * | 2018-04-11 | 2021-01-19 | Canon Kabushiki Kaisha | Ejection-material injecting method, ejection-material ejection apparatus, and imprinting apparatus |
| JP7277127B2 (ja) * | 2018-04-11 | 2023-05-18 | キヤノン株式会社 | 吐出材充填方法、吐出材吐出装置、およびインプリント装置 |
| CN110394979B (zh) * | 2018-04-25 | 2021-09-21 | 中国航发商用航空发动机有限责任公司 | 光固化成形设备 |
| JP7764260B2 (ja) * | 2022-01-26 | 2025-11-05 | 理想テクノロジーズ株式会社 | 液体循環装置及び液体吐出装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1960879A (zh) * | 2004-06-01 | 2007-05-09 | 佳能精技股份有限公司 | 供墨装置、记录装置、供墨方法和记录方法 |
| EP1873587A3 (en) * | 2006-06-30 | 2008-01-23 | ASML Netherlands BV | Inprintable medium dispenser |
| JP2011176132A (ja) * | 2010-02-24 | 2011-09-08 | Canon Inc | インプリント装置及びそのテンプレート並びに物品の製造方法 |
| CN103048879A (zh) * | 2011-10-14 | 2013-04-17 | 佳能株式会社 | 压印设备和使用该压印设备的物品制造方法 |
| CN103135340A (zh) * | 2011-11-30 | 2013-06-05 | 佳能株式会社 | 压印装置、压印方法和制造物品的方法 |
| CN104094380A (zh) * | 2012-02-07 | 2014-10-08 | 佳能株式会社 | 压印装置和制造物品的方法 |
| JP2014216471A (ja) * | 2013-04-25 | 2014-11-17 | 大日本印刷株式会社 | インプリント装置及びインプリント方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3706294B2 (ja) * | 2000-03-27 | 2005-10-12 | 東京エレクトロン株式会社 | 処理液供給装置及び処理液供給方法 |
| JP2002273113A (ja) * | 2001-03-15 | 2002-09-24 | Koganei Corp | 濾過器および薬液供給装置並びに薬液供給方法 |
| JP2003251821A (ja) * | 2001-10-05 | 2003-09-09 | Canon Inc | 液体収納容器、液体供給システム、液体使用装置、インクタンク、インク供給システム、インクジェット記録ヘッド及び記録装置 |
| KR20170024154A (ko) * | 2003-10-22 | 2017-03-06 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법, 디바이스의 제조 방법 |
| TWI362059B (en) * | 2004-11-25 | 2012-04-11 | Az Electronic Mat Ip Japan Kk | Photoresist coating solution supply system and method for supplying photoresist coating solution using thereof, and photoresist coating system using thereof |
| JP4755119B2 (ja) * | 2007-02-14 | 2011-08-24 | 株式会社リコー | 液体吐出ヘッド用液体供給部材、液体吐出装置及び画像形成装置 |
| US8864296B2 (en) * | 2008-01-30 | 2014-10-21 | Hewlett-Packard Development Company, L.P. | System for priming a fluid dispenser by expanding gas bubbles |
| JP5209431B2 (ja) * | 2008-09-30 | 2013-06-12 | 富士フイルム株式会社 | インクジェット記録装置 |
| US20100102471A1 (en) * | 2008-10-24 | 2010-04-29 | Molecular Imprints, Inc. | Fluid transport and dispensing |
| US20100101493A1 (en) * | 2008-10-27 | 2010-04-29 | Molecular Imprints, Inc. | Dispense System |
| JP2010120340A (ja) * | 2008-11-21 | 2010-06-03 | Canon Inc | 流体排出装置および記録装置 |
| JP5277506B2 (ja) * | 2009-02-09 | 2013-08-28 | キヤノンファインテック株式会社 | インクジェット記録ヘッド、インク貯留装置 |
| US20110140304A1 (en) * | 2009-12-10 | 2011-06-16 | Molecular Imprints, Inc. | Imprint lithography template |
| JP5335717B2 (ja) * | 2010-03-16 | 2013-11-06 | 富士フイルム株式会社 | レジスト組成物配置装置及びパターン形成体の製造方法 |
| JP2013022491A (ja) * | 2011-07-19 | 2013-02-04 | Seiko Epson Corp | 描画装置 |
| JP5930832B2 (ja) * | 2012-04-27 | 2016-06-08 | キヤノン株式会社 | 光硬化物の製造方法 |
| JP5995567B2 (ja) * | 2012-07-12 | 2016-09-21 | キヤノン株式会社 | インプリント装置、それを用いた物品の製造方法 |
| US9887095B2 (en) * | 2013-03-12 | 2018-02-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for an etch process with silicon concentration control |
| JP6362109B2 (ja) * | 2013-10-04 | 2018-07-25 | キヤノン株式会社 | インプリント装置および部品の製造方法 |
| JP6264888B2 (ja) * | 2014-01-07 | 2018-01-24 | セイコーエプソン株式会社 | 液体噴射装置 |
-
2016
- 2016-01-08 JP JP2016002753A patent/JP6700794B2/ja active Active
- 2016-03-16 TW TW105108098A patent/TWI614110B/zh active
- 2016-03-16 SG SG10201602050WA patent/SG10201602050WA/en unknown
- 2016-03-31 CN CN201610197474.9A patent/CN106042650B/zh active Active
-
2020
- 2020-04-13 JP JP2020071663A patent/JP6882574B2/ja active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1960879A (zh) * | 2004-06-01 | 2007-05-09 | 佳能精技股份有限公司 | 供墨装置、记录装置、供墨方法和记录方法 |
| EP1873587A3 (en) * | 2006-06-30 | 2008-01-23 | ASML Netherlands BV | Inprintable medium dispenser |
| JP2011176132A (ja) * | 2010-02-24 | 2011-09-08 | Canon Inc | インプリント装置及びそのテンプレート並びに物品の製造方法 |
| CN103048879A (zh) * | 2011-10-14 | 2013-04-17 | 佳能株式会社 | 压印设备和使用该压印设备的物品制造方法 |
| CN103135340A (zh) * | 2011-11-30 | 2013-06-05 | 佳能株式会社 | 压印装置、压印方法和制造物品的方法 |
| CN104094380A (zh) * | 2012-02-07 | 2014-10-08 | 佳能株式会社 | 压印装置和制造物品的方法 |
| JP2014216471A (ja) * | 2013-04-25 | 2014-11-17 | 大日本印刷株式会社 | インプリント装置及びインプリント方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201636225A (zh) | 2016-10-16 |
| JP6700794B2 (ja) | 2020-05-27 |
| JP2020129671A (ja) | 2020-08-27 |
| SG10201602050WA (en) | 2016-11-29 |
| TWI614110B (zh) | 2018-02-11 |
| JP6882574B2 (ja) | 2021-06-02 |
| JP2016197710A (ja) | 2016-11-24 |
| CN106042650A (zh) | 2016-10-26 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |