CN105810435A - 一种耐高压高储能薄膜电容器及其制备方法 - Google Patents
一种耐高压高储能薄膜电容器及其制备方法 Download PDFInfo
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- CN105810435A CN105810435A CN201610230760.0A CN201610230760A CN105810435A CN 105810435 A CN105810435 A CN 105810435A CN 201610230760 A CN201610230760 A CN 201610230760A CN 105810435 A CN105810435 A CN 105810435A
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- Prior art keywords
- thin film
- film capacitor
- energy storage
- layer
- doping
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- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 78
- 239000003990 capacitor Substances 0.000 title claims abstract description 45
- 238000004146 energy storage Methods 0.000 title claims abstract description 39
- 238000002360 preparation method Methods 0.000 title claims abstract description 29
- 239000011734 sodium Substances 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 229910052751 metal Inorganic materials 0.000 claims abstract description 42
- 239000002184 metal Substances 0.000 claims abstract description 42
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 229910002115 bismuth titanate Inorganic materials 0.000 claims abstract description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 43
- 238000000137 annealing Methods 0.000 claims description 42
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 36
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 32
- 239000012528 membrane Substances 0.000 claims description 31
- 239000000243 solution Substances 0.000 claims description 25
- 239000002243 precursor Substances 0.000 claims description 23
- 229910052706 scandium Inorganic materials 0.000 claims description 22
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 22
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 18
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 claims description 18
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 16
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims description 16
- 239000000377 silicon dioxide Substances 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
- 229910052708 sodium Inorganic materials 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 14
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 14
- 238000004549 pulsed laser deposition Methods 0.000 claims description 14
- 238000004528 spin coating Methods 0.000 claims description 14
- 238000003756 stirring Methods 0.000 claims description 14
- 239000011259 mixed solution Substances 0.000 claims description 13
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 claims description 9
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 claims description 9
- 235000011056 potassium acetate Nutrition 0.000 claims description 9
- 239000001632 sodium acetate Substances 0.000 claims description 9
- 235000017281 sodium acetate Nutrition 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 claims description 8
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 claims description 7
- 229960000583 acetic acid Drugs 0.000 claims description 7
- OQRMRSDZEJMEHR-UHFFFAOYSA-N acetic acid;scandium Chemical compound [Sc].CC(O)=O OQRMRSDZEJMEHR-UHFFFAOYSA-N 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- 239000012362 glacial acetic acid Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 238000000197 pyrolysis Methods 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 abstract description 7
- 239000010931 gold Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 238000007669 thermal treatment Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000003292 glue Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 239000003985 ceramic capacitor Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000000052 vinegar Substances 0.000 description 2
- 235000021419 vinegar Nutrition 0.000 description 2
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000004899 motility Effects 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000012536 storage buffer Substances 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810075058.0A CN108155009A (zh) | 2016-04-13 | 2016-04-13 | 一种压电薄膜的制备方法 |
CN201610230760.0A CN105810435B (zh) | 2016-04-13 | 2016-04-13 | 一种耐高压高储能薄膜电容器及其制备方法 |
Applications Claiming Priority (1)
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CN201610230760.0A CN105810435B (zh) | 2016-04-13 | 2016-04-13 | 一种耐高压高储能薄膜电容器及其制备方法 |
Related Child Applications (1)
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CN201810075058.0A Division CN108155009A (zh) | 2016-04-13 | 2016-04-13 | 一种压电薄膜的制备方法 |
Publications (2)
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CN105810435A true CN105810435A (zh) | 2016-07-27 |
CN105810435B CN105810435B (zh) | 2018-05-11 |
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Family Applications (2)
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CN201810075058.0A Pending CN108155009A (zh) | 2016-04-13 | 2016-04-13 | 一种压电薄膜的制备方法 |
CN201610230760.0A Active CN105810435B (zh) | 2016-04-13 | 2016-04-13 | 一种耐高压高储能薄膜电容器及其制备方法 |
Family Applications Before (1)
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CN201810075058.0A Pending CN108155009A (zh) | 2016-04-13 | 2016-04-13 | 一种压电薄膜的制备方法 |
Country Status (1)
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CN (2) | CN108155009A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107464693A (zh) * | 2017-09-04 | 2017-12-12 | 铜陵百墩实业有限公司 | 一种高储能密度陶瓷电容器 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN115895656B (zh) * | 2021-08-24 | 2024-05-03 | 浙江理工大学 | 光致发光铽掺杂氧化锡薄膜及其制备方法 |
Citations (4)
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CN1541977A (zh) * | 2003-11-07 | 2004-11-03 | 四川大学 | 一种钛酸铋钠基无铅压电陶瓷 |
CN101728089A (zh) * | 2009-12-22 | 2010-06-09 | 西安交通大学 | 一种具有高储能密度的薄膜电容器及其制备方法 |
CN102234195A (zh) * | 2010-04-23 | 2011-11-09 | 四川师范大学 | 铌酸钠钾钛酸铋钠锂系无铅压电陶瓷组合物 |
CN103956266A (zh) * | 2014-04-14 | 2014-07-30 | 桂林电子科技大学 | 一种无铅Bi0.5Na0.5TiO3基高储能密度薄膜电容器及其制备方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100355697C (zh) * | 2006-03-03 | 2007-12-19 | 清华大学 | 利用水基溶胶凝胶方法制备高居里点压电薄膜的方法 |
CN103910380A (zh) * | 2012-12-28 | 2014-07-09 | 北京有色金属研究总院 | Nkbt水基溶胶、由其制备的二元铁电压电薄膜及制造方法 |
CN104072129A (zh) * | 2014-04-18 | 2014-10-01 | 济南大学 | 一种b位等价锆离子掺杂的钛酸铋钠薄膜 |
CN105601270B (zh) * | 2015-12-28 | 2018-06-15 | 北京有色金属研究总院 | 一种钪掺杂钛酸铋钠压电薄膜的水基制备方法 |
-
2016
- 2016-04-13 CN CN201810075058.0A patent/CN108155009A/zh active Pending
- 2016-04-13 CN CN201610230760.0A patent/CN105810435B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1541977A (zh) * | 2003-11-07 | 2004-11-03 | 四川大学 | 一种钛酸铋钠基无铅压电陶瓷 |
CN101728089A (zh) * | 2009-12-22 | 2010-06-09 | 西安交通大学 | 一种具有高储能密度的薄膜电容器及其制备方法 |
CN102234195A (zh) * | 2010-04-23 | 2011-11-09 | 四川师范大学 | 铌酸钠钾钛酸铋钠锂系无铅压电陶瓷组合物 |
CN103956266A (zh) * | 2014-04-14 | 2014-07-30 | 桂林电子科技大学 | 一种无铅Bi0.5Na0.5TiO3基高储能密度薄膜电容器及其制备方法 |
Non-Patent Citations (1)
Title |
---|
YUNYI WU, XIAOHUI WANG, AND LONGTU LI: "Effect of Sc Doping on the Structure and Electrical Properties of (Na0.85K0.15)0.5Bi0.5TiO3 Thin Films Prepared by Sol–Gel Processing", 《JOURNAL OF AMERICAN CERAMIC SOCIETY》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107464693A (zh) * | 2017-09-04 | 2017-12-12 | 铜陵百墩实业有限公司 | 一种高储能密度陶瓷电容器 |
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Publication number | Publication date |
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CN108155009A (zh) | 2018-06-12 |
CN105810435B (zh) | 2018-05-11 |
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