CN105722294B - Atmospheric pressure discharges cold plasma generator - Google Patents
Atmospheric pressure discharges cold plasma generator Download PDFInfo
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- CN105722294B CN105722294B CN201410707754.0A CN201410707754A CN105722294B CN 105722294 B CN105722294 B CN 105722294B CN 201410707754 A CN201410707754 A CN 201410707754A CN 105722294 B CN105722294 B CN 105722294B
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Abstract
A kind of atmospheric pressure discharges cold plasma generator, belongs to technical field of plasma.The generator includes upper spacer, radio-frequency electrode, lower clapboard and ground electrode；Radio-frequency electrode is connect with radio-frequency power supply, and ground electrode is connect with radio-frequency power supply ground wire；Upper spacer is covered in radio-frequency electrode.It is characterized in that, radio-frequency electrode is equipped with the parallel strip of protrusion, the narrow slot to match with the lath of radio-frequency electrode is equipped on ground electrode, lower clapboard, the parallel strip of radio-frequency electrode can pass through the narrow slot of lower clapboard, be interspersed between the narrow slot of ground electrode or be interspersed in parallel again the parallel strip of ground electrode across the narrow slot of ground electrode in parallel；Plasma discharge chamber is formed between the parallel strip of radio-frequency electrode and the narrow slot of ground electrode or between narrow slot and parallel strip；It is equipped with the gas passage intersected in length and breadth inside lower clapboard, working gas can be evenly distributed to each arc chamber, by applying voltage, the uniform plasma jet of large volume is generated under normal pressure.
Description
Technical field
The invention belongs to technical field of plasma, and in particular to a kind of atmospheric pressure discharges cold plasma generator.
Background technique
Currently, can produce the non-equilibrium cold plasma of large area under low air pressure condition, however need in vacuum chamber
Middle completion can not achieve continuous operation, simultaneously because vacuum chamber volume is larger, builds and maintenance cost is expensive, greatly limit
Its application range.There are two types of the plasmas that can currently generate under atmospheric conditions, and one is hot plasmas, such as electricity
The plasma that arc generates, temperature about 10000K magnitude, for fearing hot material, application is restricted；Another kind is cold etc.
Gas ions, such as the plasma that corona discharge, dielectric barrier discharge generate, temperature near room temperature.
For the area for increasing cold plasma, existing cold plasma generator mostly uses plate electrode structures.Such as CN
200910085918.X disclosing " large-area flat-plate normal-pressure radio-frequency cold plasma system ", and phase parallel to each other there are two surface
The electrode mutually to insulate, one connect with radio-frequency power supply and is radio-frequency electrode, another, which is connected to ground, is ground electrode, wherein ground electrode
Bottom is equipped with the temperature on a heater for regulating ground electrode, and offers venthole on insulating materials at one end.ZL
201010180725.5 disclosing " normal pressure lower plate electrode radio frequency capacitive coupling argon oxygen/argon-nitrogen plasma generator ", there is two
A surface water cooling flat metal electrode composition parallel to each other bonds insulation lath in surface of metal electrode, in fixed insulation
One end of material is equipped with multiple ventholes.ZL 200610012139.3 discloses the " atmosphere pressure discharging cold based on double gas sources
Plasma generator " constitutes plate or round or ellipse using double gas source air supply systems and bare electrode structure
Atmosphere pressure discharging cold plasma generators, can also be by multiple plate or coaxial type plasma generator forming array type
Cold plasma generator.
The cold plasma generator that is either made of two surfaces flat metal electrode parallel to each other or multiple
The array type cold plasma generator that plate is constituted is difficult produced by guarantee though the plasma of larger area can be formed
The uniformity of cold plasma.
Summary of the invention
The purpose of the present invention is to provide a kind of atmospheric pressure discharges cold plasma generators, by using with battened construction
Radio-frequency electrode and matching ground electrode, form each arc chamber, and be equipped with the gas passage that transverse and longitudinal is intersected, can be by work
It is evenly distributed to each arc chamber as gas, the uniform plasma jet of large volume is generated under normal pressure and ejects electric discharge
Outdoor is conducive to the rotation or movement of sample to be processed, is allowed to be more suitable for biological induced-mutation, sterilization, purification and body surface
The fields such as modified, cleaning, disinfection.
In order to achieve the above objectives, the present invention provides a kind of atmospheric pressure discharges cold plasma generator, including upper spacer 6,
Radio-frequency electrode 7, lower clapboard 8 and ground electrode 9, radio-frequency electrode 7 are connect with radio-frequency power supply 5, and ground electrode 9 and radio-frequency power supply ground wire connect
It connects, upper spacer 6 is covered in radio-frequency electrode 7, which is characterized in that be equipped with the gas passage 12 intersected in length and breadth inside lower clapboard 8, penetrate
Frequency electrode 7 is equipped with the parallel strip of protrusion, be equipped on ground electrode 9, lower clapboard 8 match with the lath of radio-frequency electrode 7 it is narrow
Slot, the parallel strip of radio-frequency electrode 7 can pass through the narrow slot 13 of lower clapboard 8, be interspersed between the narrow slot of ground electrode 9 in parallel；?
Plasma discharge chamber 10 is formed between the parallel strip of radio-frequency electrode 7 and the narrow slot of ground electrode 9.
Another structure of cold plasma generator of the present invention is that the parallel of protrusion also is provided on ground electrode 9
The parallel strip of battened construction, radio-frequency electrode 7 passes through the narrow slot of lower clapboard 8 and the narrow slot of ground electrode 9, then is interspersed in ground electricity in parallel
Between the parallel strip of pole 9；Electric discharge is formed between the parallel strip of radio-frequency electrode 7 and the narrow slot and parallel strip of ground electrode 9
Room 10.
Cold plasma generator of the present invention, the parallel strip lower surface of radio-frequency electrode 7 and ground electrode 9 or ground electricity
The parallel strip lower surface of pole 9 is generally aligned in the same plane.
The height of the parallel strip of cold plasma generator of the present invention, radio-frequency electrode 7 or ground electrode 9 is 1-
100mm。
Cold plasma generator of the present invention forms plasma discharge chamber between radio-frequency electrode 7 and ground electrode 9
10 gap is 0.5-3.0 mm.
Cold plasma generator of the present invention, the section that plasma discharge chamber collectively forms are round, oval
Shape, square, rectangle.
Cold plasma generator of the present invention, generator use bare metal electrode, and upper and lower partition uses insulation
Material.
Cold plasma generator of the present invention, gas flow controller are controlled by programmable controller, thus
Realize the accurate control of working gas flow.
Cold plasma generator of the present invention, radio-frequency electrode and 13.56MHz radio-frequency power supply are connected by radio frequency line
It connects, radio frequency discharge carries out under normal pressure.
Cold plasma generator of the present invention, working gas source including helium, argon gas can be in atmospheric pressure
The gas source of lower stable discharging.
The utility model has the advantages that a kind of atmospheric pressure discharges cold plasma generator provided by the invention, structure is simple, is easily worked；
The lath of its radio-frequency electrode passes through lower clapboard, is interspersed among the narrow slot of ground electrode or between the lath of ground electrode in parallel, is formed
Arc chamber；The lower clapboard of generator is equipped with the gas passage that transverse and longitudinal is intersected, it is ensured that working gas is evenly distributed to each electric discharge
Room guarantees the uniformity of electric discharge；By applying voltage, plasma is generated under normal pressure, endlessly plasma jet
It out outside arc chamber, forms the jet stream of large volume, sample to be processed is placed in fluerics, i.e., it will not be in plasma generator
The discharge process in portion has an impact, but can rotate or mobile example make processing it is more abundant；Electricity can also be changed according to actual needs
Stave lengths, quantity and the electrode spacing of pole suitable for biological induced-mutation, are killed to obtain the plasma jet of different volumes
The fields such as bacterium, purification and body surface are modified, clean, sterilize.
Detailed description of the invention
Attached drawing 1 is atmospheric pressure discharges cold plasma generator air supply system schematic diagram.
Attached drawing 2 is the Facad structure section view signal for the atmospheric pressure discharges cold plasma generator that ground electrode is equipped with battened construction
Figure.
Attached drawing 3 is the positive structure schematic for the atmospheric pressure discharges cold plasma generator that ground electrode is equipped with battened construction.
Attached drawing 4 is the side structure schematic diagram for the atmospheric pressure discharges cold plasma generator that ground electrode is equipped with battened construction.
Attached drawing 5 is the schematic cross-sectional view of plane where atmospheric pressure discharges cold plasma generator lower clapboard.
Attached drawing 6 is atmospheric pressure discharges cold plasma generator elevational schematic view, the section that plasma discharge chamber is constituted
For circle.
Attached drawing 7 is atmospheric pressure discharges cold plasma generator elevational schematic view, the section that plasma discharge chamber is constituted
For rectangle.
Each label lists as follows in figure:
1- working gas source；2- gas cylinder valve；3- gas flow controller；4- gas delivery conduit；5- radio frequency electrical
Source；6- upper spacer；7- radio-frequency electrode；8- lower clapboard；9- ground electrode；10- arc chamber；11- plasma jet；12-
Gas passage；13- narrow slot.
Specific embodiment
Below in conjunction with technical solution and attached drawing, in detail narration a specific embodiment of the invention.
The present invention relates to a kind of atmospheric pressure discharges cold plasma generators, as shown in Figure 1, including upper spacer 6, radio-frequency electrode
7, lower clapboard 8 and ground electrode 9, radio-frequency electrode 7 are connect with radio-frequency power supply 5, and ground electrode 9 is connect with radio-frequency power supply ground wire, upper spacer 6
It is covered in radio-frequency electrode 7, which is characterized in that it is as shown in Figure 5 that the gas passage 12(intersected in length and breadth is equipped with inside lower clapboard 8),
Radio-frequency electrode is equipped with the parallel strip of protrusion, is equipped with the narrow slot to match with the lath of radio-frequency electrode on ground electrode, lower clapboard,
The parallel strip of radio-frequency electrode can pass through the narrow slot of lower clapboard, be interspersed between the narrow slot of ground electrode in parallel；In radio-frequency electrode
Parallel strip and ground electrode narrow slot between form plasma discharge chamber 10, the section that arc chamber is constituted can be for shown in Fig. 6
Round or shown in Fig. 7 rectangle.
Another structure of atmospheric pressure discharges cold plasma generator, positive structure schematic is as shown in Figure 3, side is tied
Structure schematic diagram is as shown in Figure 4, Facad structure schematic cross-sectional view is as shown in Figure 2.The ground electrode 9 of the generator is equipped with the lath of protrusion
The lath of structure, radio-frequency electrode 7 passes through the narrow slot of lower clapboard 8 and ground electrode 9, then is interspersed in the parallel strip of ground electrode 9 in parallel
Between；Arc chamber 10 is formed between the parallel strip of radio-frequency electrode and the narrow slot of ground electrode and parallel strip.
The air supply system of atmospheric pressure discharges cold plasma generator is as shown in Figure 1.Open gas cylinder valve 2, using gas stream
Amount controller 3 adjusts the size of throughput, and the gas source 1 that works leads to plasma generator along gas delivery conduit 4, by air inlet
Mouth enters lower clapboard 8, then flows to each arc chamber 10 by the gas passage 12 that transverse and longitudinal in lower clapboard 8 is intersected, and passes through radio-frequency power supply 5
Apply voltage, electric discharge occurs between electrode and generates uniform plasma jet 11, endlessly plasma jet 11 sprays
It projects outside arc chamber.Sample or article to be processed are placed under generator, it can be achieved that biological induced-mutation, sterilization, purification with
And body surface modification, cleaning, disinfection etc..
Claims (9)
1. atmospheric pressure discharges cold plasma generator, including upper spacer (6), radio-frequency electrode (7), lower clapboard (8) and ground electrode
(9), radio-frequency electrode (7) is connect with radio-frequency power supply (5), and ground electrode (9) is connect with radio-frequency power supply ground wire, and upper spacer (6) is covered in
In radio-frequency electrode (7), which is characterized in that it is equipped with the gas passage (12) intersected in length and breadth inside lower clapboard (8), radio-frequency electrode (7),
It is equipped with the parallel strip of protrusion on ground electrode (9), is equipped on ground electrode (9), lower clapboard (8) and the plate of radio-frequency electrode (7)
The narrow slot that item matches, the parallel strip of radio-frequency electrode (7) can pass through the narrow slot (13) of lower clapboard (8), be interspersed in ground in parallel
Between the narrow slot of electrode (9), then it is interspersed between the parallel strip of ground electrode in parallel；Radio-frequency electrode (7) parallel strip and
Plasma discharge chamber (10) are formed between the narrow slot and parallel strip of ground electrode (9), the atmospheric pressure discharges cold plasma hair
Raw device working gas source including helium, argon gas can stable discharging under atmospheric pressure gas source.
2. atmospheric pressure discharges cold plasma generator as described in claim 1, the lower surface of the parallel strip of radio-frequency electrode with
Ground electrode lower surface is in same plane.
3. atmospheric pressure discharges cold plasma generator as claimed in claim 2, which is characterized in that the radio-frequency electrode it is parallel
The height of lath is 1-100mm.
4. atmospheric pressure discharges cold plasma generator as claimed in claim 3, which is characterized in that the radio-frequency electrode and ground electricity
The gap that plasma discharge chamber is formed between pole is 0.5-3.0mm.
5. atmospheric pressure discharges cold plasma generator as described in claim 1, which is characterized in that the radio-frequency electrode it is parallel
Lath lower surface and the parallel strip lower surface of the ground electrode are in same plane.
6. atmospheric pressure discharges cold plasma generator as claimed in claim 5, which is characterized in that the parallel-plate of the ground electrode
Item height is 1-100mm.
7. atmospheric pressure discharges cold plasma generator as claimed in claim 6, which is characterized in that the radio-frequency electrode and ground electricity
The gap that plasma discharge chamber is formed between pole is 0.5-3.0mm.
8. such as the described in any item atmospheric pressure discharges cold plasma generators of claim 1-7, which is characterized in that the plasma
The section that body arc chamber collectively forms is round, ellipse, square, rectangle.
9. atmospheric pressure discharges cold plasma generator as claimed in claim 8, which is characterized in that the radio frequency electrical of the generator
Pole and ground electrode are bare metal electrode, and the material that the upper spacer and lower clapboard use is insulating materials.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410707754.0A CN105722294B (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
| CN201910478858.1A CN110167249B (en) | 2014-12-01 | 2014-12-01 | Normal pressure discharge cold plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410707754.0A CN105722294B (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
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| CN201910478858.1A Division CN110167249B (en) | 2014-12-01 | 2014-12-01 | Normal pressure discharge cold plasma generator |
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| CN105722294A CN105722294A (en) | 2016-06-29 |
| CN105722294B true CN105722294B (en) | 2019-04-30 |
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| CN201910478858.1A Active CN110167249B (en) | 2014-12-01 | 2014-12-01 | Normal pressure discharge cold plasma generator |
| CN201410707754.0A Active CN105722294B (en) | 2014-12-01 | 2014-12-01 | Atmospheric pressure discharges cold plasma generator |
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| CN111642051A (en) * | 2020-06-19 | 2020-09-08 | 西安理工大学 | Array plasma device for material surface treatment |
Citations (3)
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|---|---|---|---|---|
| CN1552082A (en) * | 2001-07-02 | 2004-12-01 | Novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same | |
| CN2927603Y (en) * | 2006-02-24 | 2007-07-25 | 清华大学 | High-speed cold plasma array generator of atmosphere radio-frequency discharge |
| CN204539603U (en) * | 2014-12-01 | 2015-08-05 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharges cold plasma generator |
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| CN1223241C (en) * | 2002-10-11 | 2005-10-12 | 杨易正 | Constant-pressure radio frequency cold plasma system and spray gun thereof |
| CN2604845Y (en) * | 2003-01-27 | 2004-02-25 | 王守国 | Atmospheric radio-frequency and DC mixed cold plasma generator |
| CN1323751C (en) * | 2003-05-27 | 2007-07-04 | 松下电工株式会社 | Plasma processing apparatus, method for producing reaction vessel for plasma generation, and plasma processing method |
| JP5168907B2 (en) * | 2007-01-15 | 2013-03-27 | 東京エレクトロン株式会社 | Plasma processing apparatus, plasma processing method, and storage medium |
| CN100577866C (en) * | 2007-02-27 | 2010-01-06 | 中微半导体设备(上海)有限公司 | Gas sprayer assembly applied in plasma reaction chamber, manufacture method and renewing reutilization method thereof |
| JP2012084396A (en) * | 2010-10-12 | 2012-04-26 | Fusion Techs Corp | Pulse-power-type low-temperature plasma jet generating apparatus |
| KR101572156B1 (en) * | 2010-11-09 | 2015-11-26 | 삼성전자 주식회사 | Plasma generator, and plasma generating method |
| CN106024568B (en) * | 2011-03-30 | 2019-05-21 | 周星工程股份有限公司 | Plasma generating apparatus and substrate processing apparatus |
| CN102869181B (en) * | 2012-09-05 | 2016-04-13 | 北京交通大学 | For electrode structure and the electrode fixing structure of plasma propeller |
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- 2014-12-01 CN CN201410707754.0A patent/CN105722294B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1552082A (en) * | 2001-07-02 | 2004-12-01 | Novel electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same | |
| CN2927603Y (en) * | 2006-02-24 | 2007-07-25 | 清华大学 | High-speed cold plasma array generator of atmosphere radio-frequency discharge |
| CN204539603U (en) * | 2014-12-01 | 2015-08-05 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharges cold plasma generator |
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| Publication number | Publication date |
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| CN110167249B (en) | 2022-01-28 |
| CN110167249A (en) | 2019-08-23 |
| CN105722294A (en) | 2016-06-29 |
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