CN202524634U - Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device - Google Patents
Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device Download PDFInfo
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- CN202524634U CN202524634U CN201220006880XU CN201220006880U CN202524634U CN 202524634 U CN202524634 U CN 202524634U CN 201220006880X U CN201220006880X U CN 201220006880XU CN 201220006880 U CN201220006880 U CN 201220006880U CN 202524634 U CN202524634 U CN 202524634U
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Abstract
The utility model provides a dielectric barrier discharge enhancement mode low temperature plasma brush generating device improves the technical scheme in the background art to show reduction energy consumption. The dielectric barrier discharge enhancement type low-temperature plasma electric brush generating device is also provided with a pair of flat electrodes used for pre-ionizing working gas between the positions of the air inlet port and the main discharge electrode, the distance between the flat electrodes and the main discharge electrode along the flow velocity direction of the working gas is not less than 1mm, and the discharge end face of each flat electrode is provided with an insulating layer. The utility model discloses the initial voltage that mainly discharges or produce brush form plasma is lower, and rated operating voltage and electric current are littleer during normal glow discharge, and plasma discharge's energy still less, and the joule heat of consumption on current-limiting resistance also still less can prolong the main life who discharges electrode and current-limiting resistance.
Description
Technical field
The utility model relates to a kind of dielectric barrier discharge low-temperature plasma brush generating means.
Background technology
Disclosed atmos low-temperature plasma brush generating means among the Chinese patent ZL201120020842.5 " atmos low-temperature plasma brush generating means and array combination thereof "; By a main body chamber; Two electrodes; A current-limiting resistance, a mass flowmenter and a power-supply device are formed.The main body chamber comprises two ports, and a port is the air inlet port, and another port is the port of giving vent to anger, and the indoor part near this port of giving vent to anger of main cavity forms the narrow slit cavity naturally.In the main cavity chamber interior, two electrodes near the port arrangements of giving vent to anger.One of them electrode is connected with current-limiting resistance.The main body chamber is by processing like the polymer or the insulating ceramic materials of one type of polytetrafluoroethylene; Electrode is heat-resisting metal material.In the chamber two electrodes over against end face both can be that the plane also can be a tip-like.Mass flowmenter in this device is used for the plasma flow of control flows through chamber.Power-supply device provides direct current or alternating voltage.The current-limiting resistance of connecting in the circuit can suppress the electric field fluctuation of cathode zone, and the size of discharging current prevents that glow discharge is transformed into arc discharge between restriction the two poles of the earth, thereby makes and in gas chamber, can produce stable glow discharge.
During work, between two electrodes, add certain voltage, plasma is kept gas and active gases from air inlet port inflow chamber chamber, when flowing through regional between two electrodes, with stable plasma gas discharge takes place.Flow out at the narrow slit of the interval plasma flow that forms of two electrode discharges from chamber, narrow slit can guarantee that plasma gas has higher speed in the moment of ejection chamber.The plasma gas that flows out fast from the slit cavity is carrying the heat of part, is just eliminating the thermally labile factor of glow discharge with this.Plasma flow sprays from chamber with very fast speed, stretches out into the stable low-temperature plasma jet of brush shape, forms the atmos low-temperature plasma brush.
Although compare with traditional plasma producing apparatus, this device has been obtained significant progress, and its structure is simple and clear, with low cost, need not expensive vacuum system and just can under normal pressure, produce low-temperature plasma jet; Easy-to-operate does not have strict restriction to the size and dimension that is processed article.But its power consumption is higher.Owing in discharge loop, be provided with current-limiting resistance, when discharging current is excessive, will produce a large amount of Joule heats and with its waste; Secondly, for the plasma that generates larger volume increases the spacing between the sparking electrode, the increase of spacing has increased the puncture voltage between two electrodes simultaneously, and the discharge power of plasma.So not only consume and waste too much energy, also power supply is had higher requirement to external world.
The utility model content
The utility model provides a kind of dielectric barrier discharge enhanced low-temperature plasma brush generating means, the technical scheme in the background technology is improved, significantly to cut down the consumption of energy.
For realizing above utility model purpose, the utility model provides following technical scheme:
Dielectric barrier discharge enhanced low-temperature plasma brush generating means comprises main body chamber and a pair of main discharge electrode with the air inlet port and the port of giving vent to anger, and the main body chamber is processed by insulating material; The said port of giving vent to anger is the narrow slit shape, and the indoor part near this port of giving vent to anger of main cavity forms the narrow slit cavity, and the width of the port of giving vent to anger is 5～100 with the ratio of thickness; The discharge end of said main discharge electrode is positioned at said narrow slit cavity place; Its special character is: between the position of air inlet port and main discharge electrode, also be provided with in order to working gas is carried out the pair of plates electrode of preionization; Plate electrode and main discharge are not less than 1mm along the spacing of working gas flow velocity direction, and the discharge end face of plate electrode is provided with insulating barrier.
The version of above-mentioned narrow slit cavity can be: main cavity is indoor to be shunk gradually or is tending towards flat from air inlet port to the port of giving vent to anger; Perhaps the indoor integral body of main cavity is the narrow slit cavity, and effect is better.
If the preferred indoor integral body of above-mentioned said main cavity is the narrow slit cavity of cuboid, the metal surface of plate electrode is close on the narrow slit chamber outer wall along the cuboid broadside is parallel, and the chamber wall of narrow slit cavity is as the insulating medium layer of plate electrode dielectric barrier discharge.(if place the main cavity chamber interior that following unfavorable factor is then arranged plate electrode: one of which, will be more complicated on structural design; Its two, can let more electrode contact with plasma, so not only can corroding electrode, contain disadvantageous composition but also can let in the plasma; Its three, The theoretical analysis and experimental verification, the effect when dielectric barrier discharge places inside with place the outside suitable basically.)
Best series limiting resistor again on the loop of above-mentioned main discharge electrode.
For providing the power supply of discharge voltage, plate electrode adopts AC power, and adjustable in the radio-frequency region of the frequency of AC power from power frequency to 13.56MHz; Electric source modes is continuous or impulse form; Wherein, plate electrode the discharging current effective value be not more than 10mA.(the discharge voltage amplitude is confirmed according to the chamber wall thickness because of discharge voltage and slit width, working gas classification, both sides, generally at 100～9000 volts.)
When above-mentioned plate electrode dielectric barrier discharge power was not more than 1W, the working gas flow velocity was 1～100L/min; Better with 1～30L/min.
Aforementioned body chamber (chamber wall) can be processed by polytetrafluoroethylene, insulating ceramics or both composite materials.
Above-mentioned main discharge electrode and plate electrode preferably adopt the electrode of being processed by copper, aluminium, tungsten, nickel, tantalum, platinum or its alloy, two main discharge electrodes each other over against the discharge end face be plane or tip-like.
Compare to background technology, the utlity model has following remarkable result:
(1) starting voltage of main discharge or generation brush shape plasma is lower; Rated operational voltage and electric current are littler during normal glow discharge; The energy of plasma discharge still less, consume on current-limiting resistance Joule heat also still less, can prolong the useful life of main discharge electrode and current-limiting resistance;
(2) energy that consumed of dielectric barrier discharge itself can be controlled in 1 watt, much smaller than producing plasma brush or main discharge energy needed;
(3) more stable through the plasma of the auxiliary atmos low-temperature plasma brush generating means generation of dielectric barrier discharge, size is bigger, and active specy is abundanter, and also more convenient operation and control are very suitable in atmospheric environment, using.
Description of drawings
Fig. 1 is the structural representation of the main body chamber of the utility model.
Fig. 2 is the schematic top plan view of the main body chamber of the utility model.
Fig. 3 is the work sketch map of the utility model.
Instantaneous voltage and electric current (conduction current) oscillogram when Fig. 4 carries out dielectric barrier discharge preionization for the pair of plates electrode of the utility model.
The puncture voltage of main discharge electrode (Ignition potential) was with the control curve figure (comparing with the condition that does not adopt preionization (auxiliary discharge)) of the variation relation of working gas flow velocity (Gas flowrate) when Fig. 5 worked for the utility model.
Plasma discharge power when Fig. 6 works for the utility model (Plasma discharge power) is with the control curve figure (comparing with the condition that does not adopt preionization (auxiliary discharge)) of the variation relation of gas flow rate.
The power (Joule heat) that Fig. 7 is consumed for the utility model work timing leakage resistance is with the control curve figure (comparing with the condition that does not adopt preionization (auxiliary discharge)) of the variation relation of gas flow rate.
Embodiment
The operation principle of the utility model is: before generation plasma brush main discharge; In advance working gas (plasma is kept gas and/or active gases) is carried out pre-arcing; With portion gas ionization, the working gas of the part preionization main discharge region of flowing through again discharges.During main discharge; The negative ions of ionization that has in the gas even a spot of electronics can reduce the breakdown threshold of gas; Thereby reduce the starting voltage of main discharge, can also further suitably reduce rated operational voltage and electric current, so not only reduced plasma itself and produced energy needed; But also reduced the Joule heat that current-limiting resistance consumed, saved energy to a great extent.
Like Fig. 1, shown in Figure 2; With respect to original device (scheme of ZL201120020842.5); The structural improvement of the utility model is mainly reflected in; Between working gas (plasma is kept gas and/or active gases) air inlet port and main discharge electrode, another is set to parallel to each other, and over against plate electrode.Plate electrode is generally cuboid, is processed by copper, aluminium, tungsten, nickel, tantalum, platinum or its alloy material.Plate electrode places narrow slit cavity outside (the indoor integral body of main cavity is the form of narrow slit cavity in the present embodiment), the parallel respectively both sides that nestle up narrow slit cavity broad outer surface, two metal surfaces that are used to discharge.Two plate electrodes over against face cover the width of narrow slit, but do not surmount the peripheral width of cavity.Two plate electrodes and main discharge two electrodes are not less than 1mm along the spacing of working gas flow velocity direction.Two-layer dielectric between two plate electrodes, the plate electrode (two plate electrodes nestle up the outer surface of main body chamber both sides, and the chamber wall on both sides is as the insulating medium layer of dielectric barrier discharge) and discharging gap constitute a dielectric barrier discharge (DBD) plasma generator.One of them electrode connects the high-pressure side of high-voltage ac power; Another electrode grounding.The frequency of alternating voltage can change to the radio frequency of 13.56MHz from power frequency; Amplitude is generally several hectovolts to several kilovolts; The discharging current effective value is not more than 10mA; Electric source modes is continuous or impulse form.
During work; Let working gas (plasma is kept gas and/or active gases) from air inlet port inflow chamber chamber; When flowing through two plate electrode The corresponding area; On two electrodes, add certain alternating voltage, voltage magnitude is controlled near the working gas breakdown threshold, makes DBD power be not more than 1W.Before the pretreated part preionization of DBD gas is passing through chamber; Adding the working gas that certain voltage comes to excite once more preionization near the port main discharge of giving vent to anger on pairing two electrodes; Make the plasma jet of its discharge generation brush shape, from the port ejection of giving vent to anger.Utilize current-limiting resistance at main discharge circuit, select suitable plasma to keep gas and active gases, and reasonably design the narrow slit cavity and can avoid glow discharge to be transformed into arc discharge.Brush shape plasma jet is from the outlet ejection of chamber; This jet has the living features of non-equilibrium plasma; Thereby this plasma generating equipment can be used for carrying out the eliminating of plasma surface treatment and cleaning, plasma-deposited, plasma sterilization and plasma for purification and chemical and biological weapons.
Below the structure and the course of work of the utility model further are detailed.
Dielectric barrier discharge enhanced low-temperature plasma brush generating means comprises main body chamber 12, and main body chamber 12 has two ports, a port one 4 and another port one 6.Plasma keeps gas and active gases flows into chamber from port one 4, the narrow slit cavity of the main body of flowing through chamber 12 inside (whole in the main body chamber 12 in the present embodiment is the narrow slit cavitys).
Plasma brush generating means also comprises two electrodes, an electrode 20 and another electrode 22.Electrode 20 and electrode 22 face all in the inside of main body chamber 12 each other, and near port one 6.
Between port one 4 and electrode 20 or 22, plasma brush generating means also comprises two parallel-plate electrodes 17 and electrode 18, and electrode 17 lays respectively at both sides, the cavity outside with electrode 18.
Plasma keeps gas and active gases flows into main body chamber 12 from port one 4 constantly; At first flow through electrode 17 and electrode 18 pairing region of discharges; Be not more than the power lower part working gas generation preionization of 1W, the gas after the preionization flow through electrode 20 and electrode 22 pairing region of discharges are when electrode 20 and 22 voltage are enough high again; Gas will be punctured once more; At the plasma flow of chamber interior formation larger volume and higher concentration, this air-flow from port one 6 ejections, forms the jet 24 of brush shape through the narrow slit cavity.
Fig. 3 is the work sketch map of the atmospheric dielectric barrier discharge enhanced low-temperature plasma brush generating means 26 of the utility model.Atmospheric pressure plasma brush generating means 26 also comprises current-limiting resistance 28 and power-supply device 30 and power-supply device 40 except containing a main body chamber 12.Power-supply device 30 forms main discharge circuit for the electrode 20 near port one 6 places provides discharge voltage with electrode 22; Power-supply device 40 provides discharge voltage for electrode 17 and electrode 18, forms the dielectric barrier discharge loop.In addition, control the mass flowmenter 34 and 32 that plasma is kept gas and active gases flow velocity in addition respectively.
During work, plasma is kept gas and is controlled by way of pipeline 38 again by air inlet port inflow chamber chamber through flowmeter 34; Active gases is controlled by way of pipeline 38 again by air inlet port inflow chamber chamber through flowmeter 32.Plasma is kept gas and active gases at first flow through electrode 17 and electrode 18 pairing region of discharge generation preionization; Gas after the preionization flow through again electrode 20 and electrode 22 pairing region of discharges; When the voltage that is added in electrode 20 and 22 two ends is enough high; Flowing through, the gas in zone is just punctured once more between two electrodes, and electric discharge phenomena take place, and forms plasma flow.The current-limiting resistance 28 that is connected in the circuit can limit the size of discharging current between the two poles of the earth and the electric field fluctuation of inhibition cathode zone, prevents that the glow discharge between the electrode is transformed into arc discharge.Plasma flow just can spray from the narrow slit cavity with the form of stable brush shape low-temperature plasma jet 24 because of the influence of flow velocity own.The low-temperature plasma jet 24 that low temperature plasma brush generating means 26 is produced touches the surface that is processed object 36, and suitably contacts with it and move around, and just can handle the whole surface or the pretreating surface of object 36.
Through experiment, verified that the utility model can cut down the consumption of energy significantly.Below illustrate.
Under atmospheric environment, adopt the utility model to experimentize, the spacing of a pair of main discharge electrode end face of plasma brush generating means is 15mm, and the main discharge electrode diameter is 0.9mm; Add sinusoidal voltage and make the gas generation preionization of inside cavity, electric voltage frequency is 9.0KHz.Fig. 4 has showed instantaneous voltage and electric current (conduction current) oscillogram when the pair of plates electrode carries out dielectric barrier discharge preionization.The about 3.6KV of discharge voltage peak-to-peak value this moment; In the alive outside half period, the about 1mA of current amplitude 2～3 current impulses appears.Discharge power is when in the positive and negative half period of inherent applied voltage of unit interval current impulse taking place, and the applied voltage in this moment shifts corresponding electric charge institute work and superposes.
Promptly
Through detecting and calculate discharge power P
DBD≈ 10mW.
As can be seen from Figure 5, under the situation whether DBD assists, puncture voltage all increases along with air-flow and slowly increases, this be since negative ions or electron diffusion speed along with the ever-increasing cause of flow velocity.Two kinds of situations before and after relatively DBD assists, the about 5.1KV of gas breakdown voltage before DBD is auxiliary; After auxiliary, puncture voltage is reduced to about 1.3KV.It is thus clear that adopt the mode of DBD preionization can significantly reduce the puncture voltage of working gas.
Fig. 6 is at the variation relation of DBD auxiliary front and back plasma discharge power (Plasma discharge power) with gas flow rate.Under two kinds of situations, the discharge power of plasma all increases along with the increase of gas flow rate, and this explanation will be kept stable normal glow discharge, and gas flow rate is big more, and desired power is high more.Relatively the auxiliary front and back of DBD situation before DBD is auxiliary, is kept the about 45W of power of normal glow discharge; Through DBD auxiliary after, the power of keeping normal glow discharge drops to about 10W.This show DBD preionization process plasma discharge power is reduced to original 1/5～1/4, the use of having saved energy to a great extent.
Fig. 7 assists the variation relation of the front and back power (Joule heat) that current-limiting resistance consumed with gas flow rate at DBD.Under two kinds of situations, the Joule heat that on current-limiting resistance, produces all increases along with the increase of gas flow rate, this be since discharging current along with the ever-increasing cause of gas flow rate.Situation before and after relatively DBD assists, before DBD is auxiliary, the about 130W of the Joule heat that on current-limiting resistance, produces; Through DBD auxiliary after, drop to about 35W at the Joule heat that produces on the current-limiting resistance.DBD preionization process is reduced to the Joule heat that is produced on the current-limiting resistance original approximately 1/4, has reduced the waste and the loss of energy equally to a great extent.
Above experimental data shows that the DBD preionization mode of low energy consumption can reduce gas breakdown voltage effectively, reduces the Joule heat that plasma discharge power and current-limiting resistance are produced, and the useful life that prolongs current-limiting resistance and main discharge electrode.Thereby this atmospheric dielectric barrier discharge enhanced low-temperature plasma brush generating means has huge potential using value in fields such as material surface cleaning, material character improvement, sterilization and the depollutions of environment.
Claims (8)
1. dielectric barrier discharge enhanced low-temperature plasma brush generating means comprises main body chamber and a pair of main discharge electrode with the air inlet port and the port of giving vent to anger, and the main body chamber is processed by insulating material; The said port of giving vent to anger is the narrow slit shape, and the indoor part near this port of giving vent to anger of main cavity forms the narrow slit cavity, and the width of the port of giving vent to anger is 5～100 with the ratio of thickness; The discharge end of said main discharge electrode is positioned at said narrow slit cavity place; It is characterized in that: between the position of air inlet port and main discharge electrode, also be provided with in order to working gas is carried out the pair of plates electrode of preionization; Plate electrode and main discharge are not less than 1mm along the spacing of working gas flow velocity direction, and the discharge end face of plate electrode is provided with insulating barrier.
2. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 1 is characterized in that: main cavity is indoor to be shunk gradually or is tending towards flat from air inlet port to the port of giving vent to anger, and perhaps the indoor integral body of main cavity is the narrow slit cavity.
3. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 2; It is characterized in that: the indoor integral body of said main cavity is the narrow slit cavity of cuboid; The metal surface of plate electrode is close on the narrow slit chamber outer wall along the cuboid broadside is parallel, and the chamber wall of narrow slit cavity is as the insulating medium layer of plate electrode dielectric barrier discharge.
4. according to the arbitrary described dielectric barrier discharge enhanced low-temperature plasma brush generating means of claim 1 to 3, it is characterized in that: also be in series with current-limiting resistance on the loop of main discharge electrode.
5. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 4; It is characterized in that: for providing the power supply of discharge voltage, plate electrode adopts AC power, and adjustable in the radio-frequency region of the frequency of AC power from power frequency to 13.56MHz; Electric source modes is continuous or impulse form; Wherein, plate electrode the discharging current effective value be not more than 10mA.
6. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 5, it is characterized in that: plate electrode dielectric barrier discharge power is not more than 1W, and the working gas flow velocity is 1～100L/min.
7. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 6, it is characterized in that: said main body chamber is processed by polytetrafluoroethylene or insulating ceramics.
8. dielectric barrier discharge enhanced low-temperature plasma brush generating means according to claim 7; It is characterized in that: said main discharge electrode and plate electrode are the electrode that copper, aluminium, tungsten, nickel, tantalum or platinum are processed, two main discharge electrodes each other over against the discharge end face be plane or tip-like.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102448239A (en) * | 2012-01-10 | 2012-05-09 | 中国科学院西安光学精密机械研究所 | Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device |
| CN104918402A (en) * | 2015-06-01 | 2015-09-16 | 东华大学 | Device for common voltage high voltage radio cooperation radio frequency glow jet discharge and discharge method |
| CN105555001A (en) * | 2015-12-08 | 2016-05-04 | 上海至纯洁净系统科技股份有限公司 | Normal-voltage glow plasma device |
| CN108668423A (en) * | 2017-03-31 | 2018-10-16 | 北京北方华创微电子装备有限公司 | Plasma processing device and pre-cleaning processes |
| CN108834298A (en) * | 2018-08-16 | 2018-11-16 | 东华大学 | A kind of apparatus and method controlling radio frequency jet length by auxiliary discharge |
| WO2020226977A1 (en) | 2019-05-07 | 2020-11-12 | Transient Plasma Systems, Inc. | Pulsed non-thermal atmospheric pressure plasma processing system |
| CN112333910A (en) * | 2020-11-04 | 2021-02-05 | 中国人民解放军空军工程大学 | Preionization type high-efficiency plasma synthetic jet actuator |
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- 2012-01-10 CN CN201220006880XU patent/CN202524634U/en not_active Expired - Lifetime
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| CN102448239B (en) * | 2012-01-10 | 2013-06-05 | 中国科学院西安光学精密机械研究所 | Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device |
| CN102448239A (en) * | 2012-01-10 | 2012-05-09 | 中国科学院西安光学精密机械研究所 | Dielectric barrier discharge enhanced low-temperature plasma electric brush generating device |
| CN104918402A (en) * | 2015-06-01 | 2015-09-16 | 东华大学 | Device for common voltage high voltage radio cooperation radio frequency glow jet discharge and discharge method |
| CN105555001A (en) * | 2015-12-08 | 2016-05-04 | 上海至纯洁净系统科技股份有限公司 | Normal-voltage glow plasma device |
| CN108668423A (en) * | 2017-03-31 | 2018-10-16 | 北京北方华创微电子装备有限公司 | Plasma processing device and pre-cleaning processes |
| US11478746B2 (en) | 2018-07-17 | 2022-10-25 | Transient Plasma Systems, Inc. | Method and system for treating emissions using a transient pulsed plasma |
| US11629860B2 (en) | 2018-07-17 | 2023-04-18 | Transient Plasma Systems, Inc. | Method and system for treating emissions using a transient pulsed plasma |
| CN108834298A (en) * | 2018-08-16 | 2018-11-16 | 东华大学 | A kind of apparatus and method controlling radio frequency jet length by auxiliary discharge |
| WO2020226977A1 (en) | 2019-05-07 | 2020-11-12 | Transient Plasma Systems, Inc. | Pulsed non-thermal atmospheric pressure plasma processing system |
| EP3966845A4 (en) * | 2019-05-07 | 2023-01-25 | Transient Plasma Systems, Inc. | Pulsed non-thermal atmospheric pressure plasma processing system |
| US11696388B2 (en) | 2019-05-07 | 2023-07-04 | Transient Plasma Systems, Inc. | Pulsed non-thermal atmospheric pressure plasma processing system |
| CN112333910A (en) * | 2020-11-04 | 2021-02-05 | 中国人民解放军空军工程大学 | Preionization type high-efficiency plasma synthetic jet actuator |
| US11811199B2 (en) | 2021-03-03 | 2023-11-07 | Transient Plasma Systems, Inc. | Apparatus and methods of detecting transient discharge modes and/or closed loop control of pulsed systems and method employing same |
| CN113556855B (en) * | 2021-07-22 | 2022-06-10 | 重庆大学 | Three-electrode double-source excitation plasma generating device |
| CN113556855A (en) * | 2021-07-22 | 2021-10-26 | 重庆大学 | Three-electrode double-source excitation plasma generating device |
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