CN1223241C - Constant-pressure radio frequency cold plasma system and spray gun thereof - Google Patents
Constant-pressure radio frequency cold plasma system and spray gun thereof Download PDFInfo
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- CN1223241C CN1223241C CN 02145762 CN02145762A CN1223241C CN 1223241 C CN1223241 C CN 1223241C CN 02145762 CN02145762 CN 02145762 CN 02145762 A CN02145762 A CN 02145762A CN 1223241 C CN1223241 C CN 1223241C
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Abstract
The present invention relates to a normal pressure radio frequency cold plasma system which comprises a spray gun, a radio frequency power supply and a gas supply source. The present invention is characterized in that the spray gun comprises an outer shell, wherein one end of the outer shell is sealed, and the other end is provided with a nozzle; an inner electrode and an outer electrode coated on the periphery of the inner electrode are arranged in the outer shell; the inner electrode is connected with the radio frequency power supply, and the outer electrode is earthed; an insulating body is arranged in the sealed end of the outer shell between the inner electrode and the outer electrode; a discharge zone is formed between the inner electrode and the outer electrode, wherein one end of the discharge zone is communicated with the nozzle, and the other end is communicated with a gas inlet guide tube; the gas inlet guide tube is communicated with the gas supply source; the discharge zone is formed between the inner electrode and the outer electrode, and discharge operation is carried out under the normal pressure; one end of the discharge zone is communicated with the nozzle, and the other end is communicated with the gas inlet guide tube. The present invention can stably work under the atmospheric pressure and generate cold plasma beam current which has low voltage and large area. Therefore, the present invention opens up a way for wide application of the plasma technology in the fields of cleaning, sterilization, disinfection, etc.
Description
[technical field]
The present invention relates to a kind of plasma producing apparatus, refer to a kind of normal-pressure radio-frequency cold plasma system and spray gun thereof especially.
[background technology]
Plasma technique is just developing rapidly in recent years, and is widely used, for example can be used for: (1) microelectronics industry silicon chip cleans, and substitutes present acid and washed with de-ionized water.(2) clean all biochemical contaminated surfaces, comprise by chemical and biological weapons surfaces contaminated and space.(3) substitute wet chemistry method, can be used for pharmacy and food service industry disinfect in situ.(4) be used for medical device sterilization and treating for skin disease.(5) be used to clean the radioactive material surface, the evidence plasma technique is present unique feasible means, and in the world discarded radioactive material can only landfill disposal at present.(6) food fresh keeping sterilization.(8) textile enterprise's dress material modification.(9) etching metal, semiconductor and dielectric substance etc.
In air, make gas breakdown ionization produce plasma needs several kilovolts high pressure.Generate plasma at present and mainly contain dual mode: a kind of is to utilize electric arc to produce plasma, and gas temperature will be up to more than 3000 ℃ during arc discharge, and the direct current heat balance plasma torch of generation can be used for cutting, welding and the surface spraying of metal.But the plasma torch of high temperature has also limited its purposes, because it can burn the article that all are faced.Another kind of mode is to utilize corona discharge to produce plasma, but corona discharge is difficult to produce the uniform large-area plasma, and under several kilovolts high pressure, current range only is the micromicroampere magnitude, generally just is used for producing ozone and makes sterilization usefulness.Existing plasma technique will make gas puncture under non-high pressure and produce plasma, and keeps and stablize the large tracts of land non-thermal discharge, can only carry out in vacuum chamber, thereby limit its application.
[summary of the invention]
The object of the present invention is to provide a kind of normal-pressure radio-frequency cold plasma system and spray gun thereof, under atmospheric pressure steady operation also can produce low-voltage, large tracts of land cold plasma line, thereby can be widely used in fields such as cleaning, sterilization, sterilization.
In order to achieve the above object, the invention provides a kind of normal-pressure radio-frequency cold plasma system, comprise spray gun, radio-frequency power supply, air supply source, it is characterized in that: this spray gun comprises a shell, this shell one end sealing, the other end is provided with spout, electrode and the external electrode that is coated on electrode periphery in this in this shell, being provided with, electrode is connected this external electrode ground connection in this with radio-frequency power supply, be provided with insulator between electrode and the external electrode in being somebody's turn to do, also be provided with discharge range between electrode and the external electrode in being somebody's turn to do, this discharge range one end communicates with this spout, and the other end communicates with air induction conduit, this air induction conduit is communicated with air supply source, and discharge is carried out under normal pressure.
Described normal-pressure radio-frequency cold plasma system, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz, this plasma discharge is depressed at normal atmosphere and is carried out, and be that low-voltage punctures, the rms voltage when gas is breakdown is 100 volts to 200 volts scopes.
Described normal-pressure radio-frequency cold plasma system is characterized in that: the shell of this spray gun and external electrode can be made as one.
Described normal-pressure radio-frequency cold plasma system is characterized in that: this air supply source institute supplied gas is argon gas or helium.
Described normal-pressure radio-frequency cold plasma system is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
Described normal-pressure radio-frequency cold plasma system is characterized in that: electrode and external electrode periphery are respectively equipped with the cool cycles water pipe in this.
The present invention also provides a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, this shell one end sealing, the other end is provided with spout, it is characterized in that: the external electrode of electrode and hollow in this shell, being provided with, external electrode is coated on electrode periphery in this, should interior electrode be conical, its external diameter towards an end of closed termination of outer cover is bigger, end external diameter towards spout is less, and the inner chamber of this external electrode has and is somebody's turn to do interior electrode corresponding shape, and electrode is connected with radio-frequency power supply in this, this external electrode ground connection, the blind end place that is positioned at shell in being somebody's turn to do between electrode and the external electrode is provided with insulator, forms discharge range between electrode and the external electrode in this, and this discharge range one end communicates with this spout, the other end communicates with air induction conduit, and this air induction conduit is communicated with air supply source by pressure-reducing valve.
The present invention also provides a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, it is characterized in that: electrode and external electrode in this shell, being provided with, external electrode is coated on electrode periphery in this, electrode and this external electrode are the cylindrical shape of hollow in being somebody's turn to do, the inner chamber of electrode is communicated with air induction conduit in being somebody's turn to do, be provided with the cylindrical shape insulator between electrode and the external electrode in being somebody's turn to do, this insulator is provided with one along its strip through slot that axially connects, this through slot forms discharge range, be somebody's turn to do on the interior electrode perisporium being provided with a plurality of air vent holes by through slot, this external electrode perisporium is provided with a plurality of to spout that should through slot, should be connected with radio-frequency power supply by interior electrode, this external electrode ground connection, this air induction conduit is communicated with air supply source by pressure-reducing valve.
The present invention also provides a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, it is characterized in that: electrode and external electrode in this shell, being provided with, external electrode is coated on electrode periphery in this, be provided with insulator between electrode and the external electrode in being somebody's turn to do, electrode comprises the path section of interconnected hollow in being somebody's turn to do, changeover portion and big footpath section, this path section is the less cylindrical shape of external diameter, this changeover portion is tubaeform, should big footpath section be the bigger cylindrical shape of external diameter, should big footpath section have perisporium and end wall, end wall in this big footpath section is provided with a plurality of through holes, the inner chamber of this path section is communicated with air induction conduit, this dispatch from foreign news agency very cylindrical shape and have and should in electrode pair perisporium and the end wall of answering, this insulator relatively should in be provided with one and the corresponding through hole of above-mentioned through hole between the end wall of the end wall of electrode and this external electrode, this through hole forms discharge range, correspondence is provided with a plurality of spouts on the end wall of this external electrode, should be connected with radio-frequency power supply by interior electrode, this external electrode ground connection, this air induction conduit is communicated with air supply source by pressure-reducing valve.
Described normal-pressure radio-frequency cold plasma spray gun is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz.
Described normal-pressure radio-frequency cold plasma spray gun, when its power surpasses 300 watt-hours, can be in this electrode and external electrode periphery establish the cool cycles water pipe respectively.
Normal-pressure radio-frequency cold plasma system of the present invention is steady operation under atmospheric pressure, and its advantage is:
1, adopt radio-frequency power supply under normal pressure, can produce the cold plasma of uniform large-area, the past, this type of cold plasma can only take place in vacuum chamber.2, not only can be written into working gas, and can be written into working gas, and can add other any reacting gas and liquid composition with the argon gas conduct with the helium conduct.3, the plasma line temperature of its ejection contains the ion composition usually less than 200 degrees centigrade hardly and spray in the line.4, directly can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz to excite discharge, rms voltage during its disruptive discharge only is between 100 volts to 200 volts, therefore it is different from high-voltage corona discharge, high-voltage corona discharge is to add insulating material between electrode, the build-up of luminance frequency range is 1 to 100 KHz, and the build-up of luminance rms voltage is 1 to 5 kilovolt.
Normal-pressure radio-frequency cold plasma spray gun of the present invention can spray the cold plasma line that contains a large amount of metastable active ingredients, owing to be under atmospheric pressure, so this line contains the ion composition hardly.Main application of the present invention is: by the large area plasma line that contains a large amount of active ingredients of ejection, can be used for cleaning the surface contamination that surface contamination that all organic substances bring and biological virus and bacterium are caused, for example, with oxygen during as reacting gas, its active oxygen can be very fast and organic and organism reaction form carbon dioxide packing and water, because the line temperature is lower, so contaminated body surface is cleaned and can not damage when sterilizing with it, also can not bring secondary pollution to substrate.By changing different reacting gass, can be used for body surface is carried out modification etching organic and inorganic material and chemical vapour deposition film material.Be used to clean the restriction that surface contamination that surface contamination that all organic substances are brought and biological virus and bacterium caused has no any pollution, cleaning speed fast (be conventional wet chemistry method 20-30 times), any infringement, not contaminated body space and shape can not arranged base material with the large area plasma line, have advantages such as penetrability, cost are very low.
By changing discharge power, gas flow, gas ingredients can be controlled the length of plasma line ejection and avoid arcing phenomenon between the electrode.
[description of drawings]
Fig. 1 is the structure cross-sectional schematic of first kind of embodiment of the present invention;
Fig. 2 is the structure cross-sectional schematic of second kind of embodiment of the present invention;
Fig. 3 is the structure cross-sectional schematic of the third embodiment of the present invention.
Fig. 4 is the discharge of argon oxygen plasma and helium oxygen plasma discharge characteristic curve figure of first kind of embodiment of the present invention.
Fig. 5 is the argon oxygen plasma line of first kind of embodiment of the present invention and the temperature comparison diagram of helium oxygen plasma line.
At first, see also Fig. 1, normal-pressure radio-frequency cold plasma system of the present invention, comprise spray gun, radio-frequency power supply 101, air supply source 102, this spray gun comprises a shell, these shell one end insulated body 104 sealings, the other end is provided with spout 110, the external electrode 105 of electrode 103 and hollow in this shell, being provided with, should interior electrode 103 be conical, its external diameter towards an end of closed termination of outer cover is bigger, and be less towards an end external diameter of spout 110, external electrode 105 is coated on electrode 103 peripheries in this, and the inner chamber of this external electrode 105 has and is somebody's turn to do interior electrode 103 corresponding shape.Should be connected with radio-frequency power supply 101 by interior electrode 103, these external electrode 105 ground connection, the blind end place of being somebody's turn to do close shell between interior electrode 103 and the external electrode 105 is provided with insulator 104, form discharge range 108 in being somebody's turn to do between electrode 103 and the external electrode 105, these discharge range 108 1 ends communicate with this spout 110, the other end communicates with air induction conduit 107, and this air induction conduit 107 is communicated with air supply source 102 by pressure reduction control valve door 106.This external electrode 105 and should in electrode 103 can be by metal material, as stainless steel, aluminium, copper etc. are processed into, insulating material such as insulator 104 useful ceramics, polytetrafluoroethylene.The shell of this spray gun and external electrode 105 can be made as one.
Radio-frequency power supply 101 can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz or other frequency to excite discharge, and discharge is carried out under normal pressure.
The interior electrode 103 of normal-pressure radio-frequency cold plasma spray gun of the present invention is conical, and it is a principle design of utilizing the Lavalle spout, and the discharge range 108 of setting up taper barrel helps improving the speed of ejection line, and then improves the length of ejection plasma; Because of the radius of curvature difference of discharge range 108, therefore more help the puncture of gas.The present invention can directly excite argon gas to form stable cold argon plasma under normal pressure.Should connect radio-frequency power supplies 101 by radio frequency source cable 109 by interior electrode 103.Can adopt argon or helium as being written into gas, and sneak into partial reaction gas, gas flow can be controlled by control pressure loading valve 106 and gas flowmeter, and it is 6 millimeters gas conduit that air induction conduit 107 can adopt external diameter, seals with elastic tape with the spray gun junction.Insulator 104 also plays the effect of enclosed electrode end, and mist is outwards sprayed by spout 110 through behind the discharge range 108, forms and contains ion hardly, only contains the line of a large amount of active atomics and molecule.
See also Fig. 2, second kind of embodiment of the present invention.Electrode 202 and this external electrode 205 are the cylindrical shape of hollow in this spray gun, the inner chamber of electrode 202 is communicated with air induction conduit 207 in being somebody's turn to do, this air induction conduit 207 is communicated with air supply source 203 by control pressure loading valve 206, be provided with cylindrical shape insulator 204 between electrode 202 and the external electrode 205 in being somebody's turn to do, electrode 202 connects radio-frequency power supplies 201 by radio frequency source cable 208 in this.This insulator 204 is provided with a strip through slot 222 along its axial perforation, this through slot 222 forms discharge range, to being provided with a plurality of air vent holes 2020 by through slot 222, these external electrode 205 perisporiums are provided with the spout 2050 of a plurality of correspondences on these interior electrode 202 perisporiums.
Right-hand end between insulator 204 and two electrodes is sealed by elastic tape, mist is through behind the discharge range, spout 2050 by a plurality of correspondences of establishing on external electrode 205 perisporiums outwards sprays, and forms to contain ion hardly, only contains the line of a large amount of active atomics and molecule.
Radio-frequency power supply 201 can adopt the radio-frequency power supply of 13.56MHz or 27.12MHz or other frequency to excite discharge, and the rms voltage during its disruptive discharge is 100～200 volts, and discharge is carried out under normal pressure.
The principle of above-mentioned second its discharge range of embodiment is that spout is arranged on external electrode 205 perisporiums, form the poroid spout of a plurality of roundlets (diameter of small sircle hole can be 0.5 to 1.5 millimeter) and distribute, discharge is the discharge range that forms a strip between two concentric metallic cylinder.This spray gun makes the plasma line that concentrates on a bigger spout, is decomposed into the less plasma line of diameter, and makes it be distributed in the interval outwards ejection of a bar shaped.This spray gun not only can improve the width of ejection line greatly, and can improve the area of ejection line greatly.
See also Fig. 3, the normal-pressure radio-frequency cold plasma spray gun of the third embodiment of the present invention, electrode 303 comprises the path section 3031 of interconnected hollow in being somebody's turn to do, changeover portion 3032 and big footpath section 3033, this path section 3031 is the less cylindrical shape of external diameter, changeover portion 3032 is tubaeform, should big footpath section 3033 be the bigger cylindrical shape of external diameter, should big footpath section 3033 have perisporium 3034 and end wall 3035, end wall 3035 in this big footpath section is provided with a plurality of through holes 3036, the inner chamber 305 of this path section 3031 is communicated with this air induction conduit 309, this air induction conduit 309 is communicated with air supply source 302 by by-pass valve control 307, and electrode 303 connects radio-frequency power supply 301 by radio frequency source cable 308 in this.The external electrode 306 that is coated on electrode 303 peripheries in this is also for cylindrical shape and have and the perisporium 3061 and the end wall 3062 of should interior electrode pair answering, be provided with insulator 304 between electrode 303 and the external electrode 306 in being somebody's turn to do, this insulator 304 relatively should in be provided with one and above-mentioned through hole 3036 corresponding through holes 3041 between the end wall 3062 of the end wall 3035 of electrode and this external electrode, this through hole 3041 forms discharge range, and correspondence is provided with a plurality of spouts 311 on the end wall 3062 of this external electrode.
It is 27.12MHz and 13.56MHz power supply that radio-frequency power supply 301 can adopt frequency respectively, and two kinds of power supplys can use separately with plasma gun, can directly excite argon gas to form stable cold argon plasma under normal pressure.
Above-mentioned the 3rd embodiment can make the plasma line that concentrates on a bigger spout equally, is decomposed into the less plasma beam of diameter and flows to outer ejection.This spray gun not only can improve the width of ejection line greatly, and can improve the area of ejection line greatly.
Can adopt argon gas or helium as being written into working gas, in addition, can mix and add a spot of reacting gas or liquid composition according to different needs, as oxygen, nitrogen, charcoal fluorine four, water etc., the ratio of shared total gas flow is in 5%.Gas is ionized the formation plasma at discharge range, outwards sprays by spout then to have a large amount of active atomics and molecular beam.The line length of ejection plasma when selecting discharge as required.
, tackle two electrodes and adopt water-cooled greater than 300 watt-hours at discharge power, for example electrode and external electrode periphery are established the cool cycles water pipe respectively in this.When discharge power less than 300 watt-hours, there is no need to use water-cooled.
Fig. 4 has shown discharge of argon oxygen and helium oxygen discharge characteristic curve, and wherein abscissa is the time, unit: nanosecond; The ordinate left side is a voltage, unit: volt, and the right side is an electric current, unit: ampere; When discharge power all is 150 watt-hours, total gas flow rate identical (be 2 cubic metres per hour), reacting gas oxygen proportion equates (being 1%).We significantly find out from Fig. 4, obviously different with discharge current curves H1, discharge voltage profile H2 based on helium based on discharge current curves A1, the discharge voltage profile A2 of argon gas, twice when the current amplitude during the argon discharge discharges near helium, and voltage amplitude is smaller, from the voltage waveform of representative, its phase place also is different.
Fig. 5 is the temperature comparison diagram of argon oxygen plasma line and helium oxygen plasma line, and wherein abscissa is the distance with the spout of spray gun, unit: millimeter; Ordinate is a Celsius temperature, unit: degree; When adopting argon gas when being written into working gas, ejection line composition is an ar atmo, and the ar atmo of excitation state and electronics and institute's reacting gas of sneaking into pass through active atomic and the molecule after the plasma discharge.When discharge power is that 150 watt-hour argon oxygen line temperature are less than 150 degrees centigrade; When adopting the helium conduct to be written into working gas, the line composition is a helium atom, the helium atom of excitation state and electronics and the reacting gas of sneaking into through active atomic and molecule after the plasma discharge, when discharge power is 150 watt-hours, helium oxygen line temperature is less than 60 degrees centigrade.When discharge power all is 150 watt-hours, total gas flow rate identical (be 2 cubic metres per hour), reacting gas oxygen proportion equates (being 1%).We significantly find out from Fig. 5, spray the temperature of line when being respectively discharge of argon oxygen and the discharge of helium oxygen than black line with than white line, relatively two curves we as can be seen, in input power, under the identical condition of the shared ratio of total gas flow rate and reacting gas oxygen, the height when temperature of argon oxygen line will obviously be discharged than helium oxygen, therefore, we can obtain conclusion, and when being written into gas, its capacity usage ratio will improve than with helium the time greatly with argon gas.
Claims (11)
1, a kind of normal-pressure radio-frequency cold plasma system, comprise spray gun, radio-frequency power supply, air supply source, it is characterized in that: this spray gun comprises a shell, this shell one end sealing, the other end is provided with spout, electrode and the external electrode that is coated on electrode periphery in this in this shell, being provided with, should be connected with radio-frequency power supply by interior electrode, this external electrode ground connection is provided with insulator between electrode and the external electrode in this, also is provided with discharge range between electrode and the external electrode in this, this discharge range one end communicates with this spout, the other end communicates with air induction conduit, and this air induction conduit is communicated with air supply source, and discharge is carried out under normal pressure.
2, normal-pressure radio-frequency cold plasma system as claimed in claim 1, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz, this plasma discharge is depressed at normal atmosphere and is carried out, and be that low-voltage punctures, the breakdown rms voltage of gas is 100 volts to 200 volts scopes.
3, normal-pressure radio-frequency cold plasma system as claimed in claim 1 is characterized in that: the shell and the external electrode of this spray gun are made as one.
4, normal-pressure radio-frequency cold plasma system as claimed in claim 1 is characterized in that: this air supply source institute supplied gas is argon gas or helium.
5, normal-pressure radio-frequency cold plasma system as claimed in claim 1 is characterized in that: this air supply source institute supplied gas is the mist of argon gas or helium and a spot of reacting gas or liquid.
6, normal-pressure radio-frequency cold plasma system as claimed in claim 1 is characterized in that: electrode and external electrode periphery are respectively equipped with the cool cycles water pipe in this.
7, a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, this shell one end sealing, the other end is provided with spout, it is characterized in that: the external electrode of electrode and hollow in this shell, being provided with, external electrode is coated on electrode periphery in this, should interior electrode be conical, its external diameter towards an end of closed termination of outer cover is bigger, end external diameter towards spout is less, and the inner chamber of this external electrode has and is somebody's turn to do interior electrode corresponding shape, and electrode is connected with radio-frequency power supply in this, this external electrode ground connection, the blind end place that is positioned at shell in being somebody's turn to do between electrode and the external electrode is provided with insulator, forms discharge range between electrode and the external electrode in this, and this discharge range one end communicates with this spout, the other end communicates with air induction conduit, and this air induction conduit is communicated with air supply source by pressure-reducing valve.
8, a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, it is characterized in that: electrode and external electrode in this shell, being provided with, external electrode is coated on electrode periphery in this, electrode and this external electrode are the cylindrical shape of hollow in being somebody's turn to do, the inner chamber of electrode is communicated with air induction conduit in being somebody's turn to do, be provided with the cylindrical shape insulator between electrode and the external electrode in being somebody's turn to do, this insulator is provided with one along its strip through slot that axially connects, this through slot forms discharge range, be somebody's turn to do on the interior electrode perisporium being provided with a plurality of air vent holes by through slot, this external electrode perisporium is provided with a plurality of to spout that should through slot, should be connected with radio-frequency power supply by interior electrode, this external electrode ground connection, this air induction conduit is communicated with air supply source by pressure-reducing valve.
9, a kind of normal-pressure radio-frequency cold plasma spray gun, comprise a shell, it is characterized in that: electrode and external electrode in this shell, being provided with, external electrode is coated on electrode periphery in this, be provided with insulator between electrode and the external electrode in being somebody's turn to do, electrode comprises the path section of interconnected hollow in being somebody's turn to do, changeover portion and big footpath section, this path section is the less cylindrical shape of external diameter, this changeover portion is tubaeform, should big footpath section be the bigger cylindrical shape of external diameter, should big footpath section have perisporium and end wall, end wall in this big footpath section is provided with a plurality of through holes, and the inner chamber of this path section is communicated with air induction conduit, this dispatch from foreign news agency very cylindrical shape and have and should in electrode pair perisporium and the end wall of answering, this insulator relatively should in be provided with one and the corresponding through hole of above-mentioned through hole between the end wall of the end wall of electrode and this external electrode, this through hole forms discharge range, and correspondence is provided with a plurality of spouts on the end wall of this external electrode, and electrode is connected with radio-frequency power supply in this, this external electrode ground connection, this air induction conduit is communicated with air supply source by pressure-reducing valve.
10, as claim 7 or 8 or 9 described normal-pressure radio-frequency cold plasma spray guns, it is characterized in that: this radio-frequency power supply is the radio-frequency power supply of 13.56MHz or 27.12MHz.
11, normal-pressure radio-frequency cold plasma system as claimed in claim 9 is characterized in that: electrode and external electrode periphery are respectively equipped with the cool cycles water pipe in this.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02145762 CN1223241C (en) | 2002-10-11 | 2002-10-11 | Constant-pressure radio frequency cold plasma system and spray gun thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02145762 CN1223241C (en) | 2002-10-11 | 2002-10-11 | Constant-pressure radio frequency cold plasma system and spray gun thereof |
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| CN1489426A CN1489426A (en) | 2004-04-14 |
| CN1223241C true CN1223241C (en) | 2005-10-12 |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102065625B (en) * | 2009-11-16 | 2012-08-22 | 财团法人工业技术研究院 | Plasma system with introducing device |
| CN102291924B (en) * | 2011-08-10 | 2013-03-20 | 苏州工业职业技术学院 | Novel plasma treatment device |
| CN102921674A (en) * | 2011-08-10 | 2013-02-13 | 中国科学院微电子研究所 | Novel spraying gun for cleaning free radicals in plasma under constant pressure by water cooling way |
| CN102291923A (en) * | 2011-08-10 | 2011-12-21 | 苏州工业职业技术学院 | Plasma gun |
| CN102601677B (en) * | 2012-03-30 | 2014-02-05 | 大连理工大学 | Atmospheric cold plasma jet auxiliary cutting method |
| CN103681200A (en) * | 2013-12-11 | 2014-03-26 | 苏州市奥普斯等离子体科技有限公司 | Liquid material plasma treating device |
| CN105722294B (en) * | 2014-12-01 | 2019-04-30 | 无锡源清天木生物科技有限公司 | Atmospheric pressure discharges cold plasma generator |
| CN111491434A (en) * | 2019-01-25 | 2020-08-04 | 天津吉兆源科技有限公司 | Small-size radio frequency plasma spray gun |
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