CN103545165A - Mass spectrum ionization method based on cold plasma jets and ion source device - Google Patents
Mass spectrum ionization method based on cold plasma jets and ion source device Download PDFInfo
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Abstract
The invention relates to a mass spectrum ionization method based on cold plasma jets and an ion source device, and belongs to the technical field of mass spectrometry. According to the mass spectrum ionization method based on the cold plasma jets and the ion source device, a copper tube or a stainless steel tube or other electric conduction metal tubes or a quartz tube with discharge electrodes attached to the outer surface is used as a discharge chamber, and a high-voltage power source is used as a discharge power source; discharge gas is injected to the gas inlet of the discharge chamber, the flow of the gas is regulated, and stable cold plasma jets can be generated on the gas outlet; samples can be ionized by the cold plasma jets, and thus ion detection is achieved. According to the technology, the samples can be ionized through a mode of mixing sample gas and the discharge gas (when the samples are gas or volatile matters) and a mode of directly injecting the jets to the samples. The invention further relates to the corresponding ion source device. The ion source device can be used in an open environment, and has the advantages of being convenient to build, small in size, low in price, low in energy consumption and the like.
Description
Technical field
The invention belongs to mass spectral analysis field, particularly a kind of ioning method of open type and ion source device, specifically, relate to a kind of mass spectrum ioning method and ion source device based on atmosphere cold plasma jet.
Background technology
Mass spectrum alanysis instrument is widely used a kind of chemical analysis instrument on our times, its basic principle is to make each composition in sample that ionization occur in ion source, produce the charged ion of various different mass-to-charge ratioes, then utilize electric field or magnetic field to produce different impacts to the ion motion of different mass-to-charge ratioes, thereby realize the detection of material.
Ion source is mass spectrum alanysis instrument sampling ion, and its key is ionization techniques.Ionized essence is that molecule loses electronics or proton, generates the molecular ion with positive and negative charge.Through the development of last 100 years, Ionized technology is of a great variety.And the study hotspot of ionization techniques is normal pressure open type ionization techniques in recent years.This class technology is exactly not need numerous and diverse sample pretreatment program from the different of conventional ion technology maximum in the past, makes the rapid analysis of sample obtain realization; And can under unlimited atmospheric pressure environment, carry out, the sample that mass spectrum alanysis instrument can be analyzed has spatially obtained great expansion; Sample can keep primary characteristic simultaneously, and the possibility that Non-Destructive Testing is realized is greatly improved.Existing electron spray desorption ionization (DESI), electron spray extraction ionization (EESI), the neutral desorption electrospray based on electro-spray ionization (ESI) of this class technology extracts the methods such as ionization (ND-EESI), also comprises the methods such as the Atmosphere Pressure Chemical Ionization (APCI) (APCI) based on plasma, direct real-time analysis technology (DART), dielectric barrier discharge ionization (DBDI), low temperature plasma probe (LTP), microwave plasma torch (MPT).Wherein ESI and APCI are two kinds of ion sources that are the most often equipped with in LC/MS equipment, and this two classes ion source range of application is wider, more stable, belongs to soft ionomer source.It should be noted that most that ESI makes the mankind can intactly measure protein macromolecule first, for life science has been brought revolution, therefore its inventor John Fenn has also obtained 2002 years Nobel chemistry Prizes.But these two kinds of ion sources need to dissolve in specific solvent by institute's test sample product, make sample treatment program comparatively complicated, and define testing sample kind.
2004, < < Science > > magazine was delivered the achievement in research of Cooks teach problem group, i.e. DESI.It can be at open type environment intermediate ion solid sample, and the blank of field of mass spectrometry for the on-the-spot Direct Analysis of sample filled up in its appearance greatly.After this, many open type ionization techniques without sample pretreatment occur thereupon.As EESI, ND-EESI, DART, DBDI, LTP, MPT plasma method.Wherein the method such as the DESI based on ESI, EESI, ND-EESI is being analyzed the important tool of polar substances, and the methods such as DART, DBDI based on plasma, LTP, MPT have absolute predominance analyzing aspect apolar substance.
Ionization techniques based on plasma because principle novel, apolar substance ionization effect excellence has been obtained to everybody extensive concern.Plasma, refers to when material temperature raises or is subject to ionizing, and electronics is separated with cation, forms the state of matter being comprised of electronics and cation.This ionization material keeps electric neutrality in macroscopic view.Plasma is divided and can be divided into high-temperature plasma and low temperature plasma by temperature, the plasma that high-temperature plasma produces as the fixed stars such as the sun and atom bomb, hydrogen bomb, and they have been full-ionized, gas temperature can reach 10
4-10
9k.Low temperature plasma is partially ionized, and gas temperature is generally lower than 10
4k.Low temperature plasma can be divided into not only hot plasma (claim not only thermal equilibrium plasma) and cold plasma (but also claiming nonthermal plasma).Electronics and ion temperature approximately equal in hot plasma, macroscopical temperature is higher; And electronics and ion temperature differ greatly in cold plasma, electron temperature be ion temperature 10-100 doubly, macroscopical temperature approaches room temperature.In cold plasma, contain a large amount of electronics, metastable state ion, free radical isoreactivity particle, there is extremely strong reactivity, therefore can make sample molecule ionization, as ion source, use.
The plasma that DART utilizes glow discharge to produce makes sample produce ionization, and this technology has realized commercialization, technology comparative maturity.But also exist electrode fouling and loss, need periodic cleaning and replacing, the shortcoming such as price is very high, has certain obstruction for technology universal.The plasma that DBDI applicating medium barrier discharge produces makes sample ions, and dielectric impedance can softening strength of discharge, prevents electrode fouling.But also define working space, greatly reduce the advantage of open type ionization techniques.For this technology is more widely used, introduced atmosphere cold plasma fluidics.
Atmosphere cold plasma jet is a kind of new atmos low-temperature plasma discharge technology of rising in recent years, is one of study hotspot of current plasma science in the world and engineering field.It is that one of atmospheric non-equilibrium plasma is supplemented, and is a kind of new form that produces cold plasma under atmospheric pressure.In atmosphere cold plasma jet generation process, by introducing air-flow, make plasma that region of discharge produces from jet pipe or ejection eating dishes without rice or wine, realized the separated of region of discharge and working region, guaranteed again most of active material simultaneously and carried can be transported in more wide space by air-flow by charged particle.Therefore there is higher practicality.The characteristic of atmosphere cold plasma jet and advantage, just meeting the ionogenic requirement of a high-quality normal pressure open type.
And LTP and MPT just this technology in the application in mass spectral analysis field.MPT is used microwave to produce plasma jet.Its shortcoming is relatively bulky complex of device, needs professional person to build, and the adjusting of a lot of parameters is not to facilitate very much in testing process.And LTP structure is relatively simple, but also exist internal and external electrode relative position, need to optimize, excitation power supply parameter also needs the shortcomings such as optimization.And when regulating power parameter, easily generating electrodes and mass spectrum taper hole generation discharge breakdown phenomenon, can damage mass spectrographic circuit board when serious.
Summary of the invention
The problems such as the present invention aims to provide a kind of mass spectrum ioning method and ion source device based on cold-plasma jet, solves existing method step numerous and diverse, and left-hand seat is slow, efficiency is low.The method utilizes atmosphere cold plasma jet to realize the ionization of sample, and step is simpler, easy to operate, efficiency is higher.The present invention is simultaneously according to having built an easy ion source for method, and the advantages such as volume is little, cheap, low energy consumption that it has, are conducive to the portable development of mass spectrum alanysis instrument.
Technical scheme of the present invention is as follows:
A kind of mass spectrum ioning method based on cold-plasma jet provided by the invention, is characterized in that the method comprises the steps:
1) sample is put on sample stage;
2) regulate the center line of cold plasma fluid generator discharge cavity and the angle of mass spectrum taper hole axis at 0 °～90 °, the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm;
3) discharge gas is introduced in cold plasma fluid generator, controlled discharge gas flow is at 0.1L/min～10L/min;
4) start high voltage source, make cold plasma fluid generator produce cold-plasma jet and this jet is injected directly on sample, by sample ions.
The mass spectrum ioning method of another kind provided by the invention based on cold-plasma jet, is characterized in that the method comprises the steps:
1) sample is put in mixed gas cylinder;
2) regulate the center line of cold plasma fluid generator discharge cavity and the angle of mass spectrum taper hole axis at 0 °～90 °, the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm;
3) first discharge gas is passed into mixed gas cylinder, enter in cold plasma fluid generator after discharge gas is mixed with sample gas, discharge gas flow is controlled to 0.1L/min～10L/min;
4) start high voltage source, make cold plasma fluid generator produce cold-plasma jet, by sample ions.
In said method, it is characterized in that: the frequency of described high voltage source is within the scope of 1kHz～100kHz, and Voltage Peak peak value is within the scope of 1kV～10kV, and power is within the scope of 0.1W～100W.Described discharge gas is used helium, argon gas, nitrogen, hydrogen and airborne one or more mist.
A kind of ion source device based on cold-plasma jet provided by the invention, is characterized in that: described device comprises manometric discharge gas bottle, pressure-reducing valve, flowmeter, flow control valve, plasma fluid generator, sample stage and high voltage source are housed; The outlet of described discharge gas bottle is connected with described pressure-reducing valve, flowmeter, flow control valve and plasma fluid generator successively by gas piping; Described sample stage is arranged on the jet exit of plasma fluid generator; The discharge cavity of cold plasma fluid generator adopts internal diameter at 0.1mm～5mm, the metal tube that length is 5mm～200mm, or adopt internal diameter at 0.1mm～5mm, and wall thickness 0.1mm～5mm, length is 5mm～200mm, outer surface is covered with the quartz ampoule of sparking electrode.
The ion source device of the second provided by the invention based on cold-plasma jet, is characterized in that: described device comprises manometric discharge gas bottle, pressure-reducing valve, flowmeter, flow control valve, mixed gas cylinder, plasma fluid generator and high voltage source are housed; The outlet of described discharge gas bottle is connected with described pressure-reducing valve, flowmeter, flow control valve and mixed gas cylinder import successively by gas piping, and the outlet of mixed gas cylinder is connected with plasma fluid generator by gas piping; The discharge cavity of cold plasma fluid generator adopts internal diameter at 0.1mm～5mm, the metal tube that length is 5mm～200mm, or adopt internal diameter at 0.1mm～5mm, and wall thickness 0.1mm～5mm, length is 5mm～200mm, outer surface is covered with the quartz ampoule of sparking electrode.
In ion source device of the present invention, it is characterized in that: the outer wall at described discharge cavity is provided with insulation screen; Described metal tube material is copper, aluminium, copper alloy, aluminium alloy or stainless steel.Sparking electrode (703) material of described quartz ampoule outer surface is gold, silver, copper, iron, aluminium, stainless steel, copper alloy, ferroalloy or aluminium alloy.
The present invention compared with prior art, have the following advantages and the technique effect of high-lighting: this method is based on atmosphere cold plasma principle, the ioning method relating to is realized in atmospheric pressure open type environment, do not need the pre-treatment of sample or only need simple process, greatly having simplified analysis process, is a kind of easy ioning method; In analytic process, the parameter of required adjusting seldom, greatly reduces staff's workload.The present invention, owing to having adopted a kind of simple discharging structure form, makes to build device and simple.Compare with existing ion source device, the ion source device of building has the advantages such as cost is low, easy to use, energy consumption is little.And the funtion part volume of device is smaller, comprises high voltage source and can accomplish that weight is no more than 300g, very portable, is beneficial to the portable development of mass spectrum alanysis instrument.
Accompanying drawing explanation
Fig. 1 is the structural representation of the main part-cold plasma fluid generator of intermediate ion source apparatus of the present invention, and wherein Fig. 1 a is metal tube electric discharge cavate cold plasma fluid generator, and Fig. 1 b is quartz ampoule electric discharge cavate cold plasma fluid generator.
Fig. 2 adopts intermediate ion source apparatus of the present invention and mass spectrometry to realize the single unit system schematic diagram of solid, difficult volatile liquid sample detection.
Fig. 3 adopts intermediate ion source apparatus of the present invention and mass spectrometry to realize the single unit system schematic diagram of gas or volatile substances sample detection.
Fig. 4 realizes the resulting mass spectrogram of the fast detecting of active component in medicine by ion source and mass spectrometry in embodiment mono-.The spectrogram that wherein Fig. 4 a obtains for detecting Azithromycin dispersible tablet, the spectrogram that Fig. 4 b obtains for detecting erythromycin ointment.
Fig. 5 is by the resulting mass spectrogram of caffeine in ion source and mass spectrometry fast detecting beverage in embodiment bis-.Wherein Fig. 5 a is for detecting the laughable spectrogram obtaining, the spectrogram that Fig. 5 b obtains for detecting unified green tea.
In figure: 1-Pressure gauge; 2-discharge gas bottle; 3-pressure-reducing valve; 4-flowmeter; 5-flow control valve; 6-high voltage source; 7-plasma fluid generator; 8-sample stage; 9-solid sample; 10-mass spectrum taper hole; 11-mixes gas cylinder; 701-insulation screen; 702-discharge cavity; 703-sparking electrode.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As shown in Figure 1, be the structural representation of the main part-cold plasma fluid generator of intermediate ion source apparatus of the present invention.
Wherein, Fig. 1 a is metal tube electric discharge cavate cold plasma fluid generator, and it comprises insulation screen 701, discharge cavity 702 two parts.On insulation screen, open an aperture, lead-in conductor is connected with discharge cavity.
Fig. 1 b is quartz ampoule electric discharge cavate cold plasma fluid generator, at the outer surface of quartz ampoule, wraps up in and applies layer of metal sparking electrode 703, and electrode is connected with high voltage source.The material of sparking electrode can be used gold, silver, copper, iron, aluminium, stainless steel, copper alloy, ferroalloy or aluminium alloy.
When with mass spectrometer coupling, kind adopts two kinds of modes shown in Fig. 2 and Fig. 3 per sample.When sample is solid and not during volatile material, can adopt as shown in Figure 2 shown in ion source device detect, this device comprises discharge gas bottle 2, pressure-reducing valve 3, flowmeter 4, flow control valve 5, plasma fluid generator 7, sample stage 8 and the high voltage source 6 that Pressure gauge 1 is housed; The outlet of described discharge gas bottle 2 is connected with described pressure-reducing valve 3, flowmeter 4, flow control valve 5 and plasma fluid generator 7 successively by gas piping; Described sample stage 8 is arranged on the jet exit of plasma fluid generator; The discharge cavity 702 of cold plasma fluid generator adopts internal diameter at 0.1mm～5mm, length is the metal tube of 5mm～200mm, or adopts internal diameter at 0.1mm～5mm, wall thickness 0.1mm～5mm, length is 5mm～200mm, and outer surface is covered with the quartz ampoule of sparking electrode 703.The discharge gas being equipped with in the discharge gas bottle 2 of Pressure gauge 1 is introduced cold plasma fluid generators 7 through pressure-reducing valve 3, flowmeter 4, flow control valve 5.First the sample stage 8 that is placed with solid sample 9 is above placed on to mass spectrum taper hole 10 1mm～25mm places, the place ahead.Regulate the angle of cold plasma generator 7 center lines and mass spectrum taper hole axis at 0 °～90 °, the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm.Then regulate discharge gas flow, by flow control at 0.1L/min～10L/min.In this range of flow, can produce more stable plasma jet.Start high voltage source 6, cold plasma fluid generator 7 produces cold-plasma jet, and jet flow direct spray sample, by sample ions.Again finely tune angle and the distance of jet and taper hole, make to obtain optimum mass signal.Described discharge gas is used helium, argon gas, nitrogen, hydrogen and airborne one or more mist.The frequency of high voltage source is within the scope of 1kHz～100kHz, and Voltage Peak peak value is within the scope of 1kV～10kV, and power is within the scope of 0.1W～100W.
When sample is volatile substances or gas, can adopt ion source device shown in Fig. 3 to detect, this device comprises discharge gas bottle 2, pressure-reducing valve 3, flowmeter 4, flow control valve 5, mixed gas cylinder 11, plasma fluid generator 7 and the high voltage source 6 that Pressure gauge 1 is housed; The outlet of described discharge gas bottle 2 is connected with described pressure-reducing valve 3, flowmeter 4, flow control valve 5 and mixed gas cylinder 11 imports successively by gas piping, and the outlet of mixed gas cylinder 11 is connected with plasma fluid generator 7 by gas piping; The discharge cavity 702 of cold plasma fluid generator adopts internal diameter at 0.1mm～5mm, length is the metal tube of 5mm～200mm, or adopts internal diameter at 0.1mm～5mm, wall thickness 0.1mm～5mm, length is 5mm～200mm, and outer surface is covered with the quartz ampoule of sparking electrode 703.Same discharge gas flows into through pressure-reducing valve 3, flowmeter 4, flow control valve 5 the mixed gas cylinder 11 that air inlet pipeline and outlet pipe are housed.First sample is placed in mixed gas cylinder or by syringe the mixed gas cylinder 11 of gas inject to be measured.After passing into discharge gas, sample volatilizes sample gas to be mixed with discharge gas, then enters cold plasma fluid generator 7.Adjusting cold plasma generator 7 center lines are with mass spectrum taper hole axis to overlapping, and the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm.Then regulate discharge gas flow, by flow control at 0.1L/min～10L/min.In this range of flow, can produce more stable plasma jet.Start high voltage source 6, cold plasma fluid generator 7 produces the cold-plasma jet that contains sample ions, again finely tunes the distance of jet and taper hole, makes to obtain optimum mass signal.Described discharge gas is used helium, argon gas, nitrogen, hydrogen and airborne one or more mist.The frequency of high voltage source is within the scope of 1kHz～100kHz, and Voltage Peak peak value is within the scope of 1kV～10kV, and power is within the scope of 0.1W～100W.
Lifting several embodiments is below further described effect of the present invention again.
The fast detecting of active component in embodiment one, medicine
Adopt mode shown in Fig. 2, ion source and mass spectrometer coupling are detected to the active component in Azithromycin dispersible tablet (active ingredient: azithromycin, Mw, 748.88) and erythromycin ointment (active ingredient: erythromycin, Mw, 733.93).The source parameters that uses of experiment is: high-voltage power voltage 4kV(peak-to-peak value), frequency 20kHz, and power 5W; Discharge gas is helium; Discharge cavity is the stainless steel tube of a length 80mm, internal diameter 0.5mm, external diameter 1/16in.During experiment, first tablet is placed on to (or ointment is coated on sample stage) on sample stage, regulate the angle (approximately 30 °) of cold plasma generator 7 center lines and mass spectrum taper hole axis, the distance (about 20mm) of cold-plasma jet outlet and mass spectrum taper hole, constant gas flow rate is at 1.6L/min.After parameter mixes up, just can obtain the spectrogram of sample in several seconds.If use automatic sampling apparatus continuous sample introduction instead, can realize the detection speed of 2s/ sheet.This is to quality on-line monitoring important in inhibiting in pharmaceutical production.Fig. 4 is the resulting mass spectrogram of experiment.In Fig. 4 a, shown very strong quasi-molecular ion peak (m/z749.9), in Fig. 4 b, shown very strong [M+H]
+peak (m/z734.9) and [M+H-H
2o]
+peak (m/z716.9), illustrates that the method can effectively detect the active ingredient in medicine.
The fast detecting of caffeine in embodiment two, beverage
Adopt mode shown in Fig. 2, ion source and mass spectrometer coupling are carried out to fast detecting to caffeine (Mw, 194.19) in beverage (laughable, unified green tea).The source parameters that uses of experiment is: high-voltage power voltage 4kV(peak-to-peak value), frequency 20kHz, and power 5W; Discharge gas is helium; Discharge cavity is the quartz ampoule of a length 80mm, internal diameter 1mm, external diameter 3mm, quartz ampoule outer surface parcel layer of copper electrode.During experiment, first beverage is dropped on sample stage, regulate the angle (approximately 30 °) of cold plasma generator 7 center lines and mass spectrum taper hole axis, the distance (about 20mm) of cold-plasma jet outlet and mass spectrum taper hole, constant gas flow rate is at 1.6L/min.After parameter mixes up, just can obtain the spectrogram of sample in several seconds.Fig. 5 is the resulting mass spectrogram of experiment, and wherein Fig. 5 a is for detecting the laughable spectrogram obtaining, the spectrogram that Fig. 5 b obtains for detecting unified green tea.In figure, shown very strong quasi-molecular ion peak (m/z195), illustrated that the method can realize the detection of caffeine in beverage.Can be by the method for food security field.
Claims (9)
1. the mass spectrum ioning method based on cold-plasma jet, is characterized in that the method comprises the steps:
1) sample is put on sample stage;
2) regulate the center line of cold plasma fluid generator (7) discharge cavity and the angle of mass spectrum taper hole (10) axis at 0 °～90 °, the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm;
3) discharge gas is introduced in cold plasma fluid generator (7), controlled discharge gas flow is at 0.1L/min～10L/min;
4) start high voltage source (6), make cold plasma fluid generator (7) produce cold-plasma jet and this jet is injected directly on sample, by sample ions.
2. the mass spectrum ioning method based on cold-plasma jet, is characterized in that the method comprises the steps:
1) sample is put in mixed gas cylinder (11);
2) regulate the center line of cold plasma fluid generator (7) discharge cavity and the angle of mass spectrum taper hole (10) axis at 0 °～90 °, the distance of cold-plasma jet outlet and mass spectrum taper hole is at 1mm～100mm;
3) first discharge gas is passed into mixed gas cylinder (11), enter in cold plasma fluid generator (7) after discharge gas is mixed with sample gas, discharge gas flow is controlled to 0.1L/min～10L/min;
4) start high voltage source (6), make cold plasma fluid generator (7) produce cold-plasma jet, by sample ions.
3. a kind of mass spectrum ioning method based on cold-plasma jet as claimed in claim 1 or 2, it is characterized in that: the frequency of described high voltage source is within the scope of 1kHz～100kHz, Voltage Peak peak value is within the scope of 1kV～10kV, and power is within the scope of 0.1W～100W.
4. a kind of mass spectrum ioning method based on cold-plasma jet as claimed in claim 1 or 2, is characterized in that: described discharge gas is used helium, argon gas, nitrogen, hydrogen and airborne one or more mist.
5. realize a kind of ion source device based on cold-plasma jet of ioning method as claimed in claim 1, it is characterized in that: described device comprises discharge gas bottle (2), pressure-reducing valve (3), flowmeter (4), flow control valve (5), plasma fluid generator (7), sample stage (8) and the high voltage source (6) that Pressure gauge (1) is housed; The outlet of described discharge gas bottle (2) is connected with described pressure-reducing valve (3), flowmeter (4), flow control valve (5) and plasma fluid generator (7) successively by gas piping; Described sample stage (8) is arranged on the jet exit of plasma fluid generator; The discharge cavity of cold plasma fluid generator (702) adopts internal diameter at 0.1mm～5mm, length is the metal tube of 5mm～200mm, or adopts internal diameter at 0.1mm～5mm, wall thickness 0.1mm～5mm, length is 5mm～200mm, and outer surface is covered with the quartz ampoule of sparking electrode (703).
6. realize a kind of ion source device based on cold-plasma jet of ioning method as claimed in claim 2, it is characterized in that: described device comprises discharge gas bottle (2), pressure-reducing valve (3), flowmeter (4), flow control valve (5), mixed gas cylinder (11), plasma fluid generator (7) and the high voltage source (6) that Pressure gauge (1) is housed; By gas piping, import is connected with mixed gas cylinder (11) with described pressure-reducing valve (3), flowmeter (4), flow control valve (5) successively in the outlet of described discharge gas bottle (2), and the outlet that mixes gas cylinder (11) is connected with plasma fluid generator (7) by gas piping; The discharge cavity of cold plasma fluid generator (702) adopts internal diameter at 0.1mm～5mm, length is the metal tube of 5mm～200mm, or adopts internal diameter at 0.1mm～5mm, wall thickness 0.1mm～5mm, length is 5mm～200mm, and outer surface is covered with the quartz ampoule of sparking electrode (703).
7. a kind of mass ion source device based on cold-plasma jet as described in claim 5 or 6, is characterized in that: the outer wall at described discharge cavity (702) is provided with insulation screen (701).
8. a kind of mass ion source device based on cold-plasma jet as described in claim 5 or 6, is characterized in that: described metal tube material is copper, aluminium, copper alloy, aluminium alloy or stainless steel.
9. a kind of mass ion source device based on cold-plasma jet as described in claim 5 or 6, is characterized in that: sparking electrode (703) material of described quartz ampoule outer surface is gold, silver, copper, iron, aluminium, stainless steel, copper alloy, ferroalloy or aluminium alloy.
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