CN105693248A - 一种硫化镉靶材制备方法及装置 - Google Patents
一种硫化镉靶材制备方法及装置 Download PDFInfo
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- CN105693248A CN105693248A CN201511002673.1A CN201511002673A CN105693248A CN 105693248 A CN105693248 A CN 105693248A CN 201511002673 A CN201511002673 A CN 201511002673A CN 105693248 A CN105693248 A CN 105693248A
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- cadmium sulfide
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- 229910052980 cadmium sulfide Inorganic materials 0.000 title claims abstract description 100
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 title claims abstract description 99
- 238000000034 method Methods 0.000 title claims abstract description 35
- 239000013077 target material Substances 0.000 title claims abstract description 32
- 239000000843 powder Substances 0.000 claims abstract description 47
- 238000005245 sintering Methods 0.000 claims abstract description 32
- 238000000465 moulding Methods 0.000 claims abstract description 11
- 238000003825 pressing Methods 0.000 claims abstract description 5
- 238000002360 preparation method Methods 0.000 claims description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 26
- 229910002804 graphite Inorganic materials 0.000 claims description 26
- 239000010439 graphite Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000035755 proliferation Effects 0.000 claims description 6
- 238000007731 hot pressing Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 abstract description 7
- 239000006184 cosolvent Substances 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 2
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 abstract 2
- 238000009413 insulation Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000011017 operating method Methods 0.000 description 5
- 208000037656 Respiratory Sounds Diseases 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/547—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on sulfides or selenides or tellurides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
- C04B35/6455—Hot isostatic pressing
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5427—Particle size related information expressed by the size of the particles or aggregates thereof millimeter or submillimeter sized, i.e. larger than 0,1 mm
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201511002673.1A CN105693248B (zh) | 2015-12-25 | 2015-12-25 | 一种硫化镉靶材制备方法及装置 |
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CN201511002673.1A CN105693248B (zh) | 2015-12-25 | 2015-12-25 | 一种硫化镉靶材制备方法及装置 |
Publications (2)
Publication Number | Publication Date |
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CN105693248A true CN105693248A (zh) | 2016-06-22 |
CN105693248B CN105693248B (zh) | 2019-07-02 |
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CN201511002673.1A Active CN105693248B (zh) | 2015-12-25 | 2015-12-25 | 一种硫化镉靶材制备方法及装置 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106521631A (zh) * | 2016-11-08 | 2017-03-22 | 清远先导材料有限公司 | 多晶硫化锌的制备方法 |
CN107805788A (zh) * | 2017-11-08 | 2018-03-16 | 清远先导材料有限公司 | 碲化锌靶材的制备方法 |
CN108059459A (zh) * | 2017-11-03 | 2018-05-22 | 北京安泰六九新材料科技有限公司 | 一种MoS2陶瓷靶材的制备方法 |
CN108179387A (zh) * | 2017-12-28 | 2018-06-19 | 清远先导材料有限公司 | 一种铜铟镓硒基系列靶材的制备方法 |
CN110128143A (zh) * | 2019-06-25 | 2019-08-16 | 先导薄膜材料(广东)有限公司 | 一种硒化镉靶材及其制备方法 |
CN110256080A (zh) * | 2019-06-28 | 2019-09-20 | 先导薄膜材料(广东)有限公司 | 硒化铟靶材的制备模具及制备方法 |
CN111842900A (zh) * | 2020-07-31 | 2020-10-30 | 河南科技大学 | 一种高纯钴靶材的热压烧结方法 |
CN117362037A (zh) * | 2023-10-16 | 2024-01-09 | 潍坊卓宇新材料科技有限公司 | 一种硫化镉靶片加工工艺及分体式加工模具 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102203954A (zh) * | 2008-10-31 | 2011-09-28 | Aqt太阳能公司 | 用于光伏应用的硫属元素化物合金溅射靶及其制造方法 |
CN104264118A (zh) * | 2014-10-13 | 2015-01-07 | 福州大学 | 一种硫化镉陶瓷靶材及其制备方法 |
CN105097988A (zh) * | 2014-05-22 | 2015-11-25 | 汉能新材料科技有限公司 | 一种导电硫化物靶材及其制备方法 |
-
2015
- 2015-12-25 CN CN201511002673.1A patent/CN105693248B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102203954A (zh) * | 2008-10-31 | 2011-09-28 | Aqt太阳能公司 | 用于光伏应用的硫属元素化物合金溅射靶及其制造方法 |
CN105097988A (zh) * | 2014-05-22 | 2015-11-25 | 汉能新材料科技有限公司 | 一种导电硫化物靶材及其制备方法 |
CN104264118A (zh) * | 2014-10-13 | 2015-01-07 | 福州大学 | 一种硫化镉陶瓷靶材及其制备方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106521631A (zh) * | 2016-11-08 | 2017-03-22 | 清远先导材料有限公司 | 多晶硫化锌的制备方法 |
CN108059459A (zh) * | 2017-11-03 | 2018-05-22 | 北京安泰六九新材料科技有限公司 | 一种MoS2陶瓷靶材的制备方法 |
CN108059459B (zh) * | 2017-11-03 | 2021-02-02 | 北京安泰六九新材料科技有限公司 | 一种MoS2陶瓷靶材的制备方法 |
CN107805788A (zh) * | 2017-11-08 | 2018-03-16 | 清远先导材料有限公司 | 碲化锌靶材的制备方法 |
CN108179387A (zh) * | 2017-12-28 | 2018-06-19 | 清远先导材料有限公司 | 一种铜铟镓硒基系列靶材的制备方法 |
CN110128143A (zh) * | 2019-06-25 | 2019-08-16 | 先导薄膜材料(广东)有限公司 | 一种硒化镉靶材及其制备方法 |
CN110256080A (zh) * | 2019-06-28 | 2019-09-20 | 先导薄膜材料(广东)有限公司 | 硒化铟靶材的制备模具及制备方法 |
CN111842900A (zh) * | 2020-07-31 | 2020-10-30 | 河南科技大学 | 一种高纯钴靶材的热压烧结方法 |
CN117362037A (zh) * | 2023-10-16 | 2024-01-09 | 潍坊卓宇新材料科技有限公司 | 一种硫化镉靶片加工工艺及分体式加工模具 |
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CN105693248B (zh) | 2019-07-02 |
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Effective date of registration: 20161101 Address after: 511875, Guangdong, Qingyuan Province, Qingxin County, wo Yun town industrial zone (fish dam road side) Applicant after: FIRST RARE MATERIALS Co.,Ltd. Address before: 511517 Guangdong city of Qingyuan province high tech Zone Industrial Park Baijia No. 27-9 Applicant before: FIRST RARE MATERIALS Co.,Ltd. |
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Effective date of registration: 20240612 Address after: 221000 Xuzhou High tech Industrial Development Zone, Xuzhou City, Jiangsu Province, North of Fifth Ring Road and West of Tongchuang Road, No. 1 Qianfeng South Road Patentee after: Pioneer Electronic Technology Co.,Ltd. Country or region after: China Address before: 511875 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Patentee before: FIRST RARE MATERIALS Co.,Ltd. Country or region before: China |
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