CN105556411A - 压力式流量控制装置 - Google Patents

压力式流量控制装置 Download PDF

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Publication number
CN105556411A
CN105556411A CN201480049537.5A CN201480049537A CN105556411A CN 105556411 A CN105556411 A CN 105556411A CN 201480049537 A CN201480049537 A CN 201480049537A CN 105556411 A CN105556411 A CN 105556411A
Authority
CN
China
Prior art keywords
pressure
fluid passage
main body
control operation
stress control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480049537.5A
Other languages
English (en)
Chinese (zh)
Inventor
广濑隆
吉田俊英
松本笃谘
平田薰
池田信一
西野功二
土肥亮介
杉田胜幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN105556411A publication Critical patent/CN105556411A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
CN201480049537.5A 2013-12-05 2014-11-25 压力式流量控制装置 Pending CN105556411A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-252167 2013-12-05
JP2013252167A JP6372998B2 (ja) 2013-12-05 2013-12-05 圧力式流量制御装置
PCT/JP2014/005885 WO2015083343A1 (ja) 2013-12-05 2014-11-25 圧力式流量制御装置

Publications (1)

Publication Number Publication Date
CN105556411A true CN105556411A (zh) 2016-05-04

Family

ID=53273128

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480049537.5A Pending CN105556411A (zh) 2013-12-05 2014-11-25 压力式流量控制装置

Country Status (7)

Country Link
US (1) US10372145B2 (https=)
JP (1) JP6372998B2 (https=)
KR (2) KR102087645B1 (https=)
CN (1) CN105556411A (https=)
DE (1) DE112014005572T5 (https=)
TW (2) TWI658351B (https=)
WO (1) WO2015083343A1 (https=)

Cited By (3)

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Publication number Priority date Publication date Assignee Title
CN109478074A (zh) * 2016-07-28 2019-03-15 株式会社富士金 压力式流量控制装置
CN109791415A (zh) * 2016-10-14 2019-05-21 株式会社富士金 流体控制装置
CN110114601A (zh) * 2016-12-26 2019-08-09 株式会社富士金 压电元件驱动式阀以及流量控制装置

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US9904299B2 (en) * 2015-04-08 2018-02-27 Tokyo Electron Limited Gas supply control method
CN107771258B (zh) * 2015-06-25 2019-11-12 伊利诺斯工具制品有限公司 压电致动器型阀
KR102024449B1 (ko) * 2015-08-24 2019-09-23 가부시키가이샤 후지킨 유체 제어 장치에 있어서의 시일 부재의 고정 구조, 커넥터 및 유체 제어 장치
CN108139760A (zh) 2015-10-28 2018-06-08 株式会社富士金 流量信号补正方法以及使用其的流量控制装置
CN108780332B (zh) * 2016-02-29 2021-10-01 株式会社富士金 流量控制装置
US10665430B2 (en) * 2016-07-11 2020-05-26 Tokyo Electron Limited Gas supply system, substrate processing system and gas supply method
JP7245600B2 (ja) 2016-12-15 2023-03-24 株式会社堀場エステック 流量制御装置、及び、流量制御装置用プログラム
CN106876304B (zh) * 2017-02-24 2019-09-10 成都京东方光电科技有限公司 一种湿法刻蚀排气系统及湿法刻蚀装置
JP7475631B2 (ja) * 2017-11-24 2024-04-30 株式会社フジキン バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置
JP7529664B2 (ja) * 2019-07-08 2024-08-06 株式会社堀場エステック 流量制御装置、流量測定方法、及び、流量制御装置用プログラム
CN114364907B (zh) * 2019-09-05 2024-10-11 株式会社堀场Stec 流量控制阀和流量控制装置
WO2021131577A1 (ja) 2019-12-25 2021-07-01 株式会社フジキン 圧力制御装置
US12306647B2 (en) 2020-03-05 2025-05-20 Fujikin Incorporated Flow rate control device and flow rate control method wherein an internal command signal is generated by a combination of first order lag process and ramp process
JP2022029854A (ja) * 2020-08-05 2022-02-18 株式会社堀場エステック 流量制御装置、流量制御方法、及び、流量制御プログラム
WO2022190711A1 (ja) 2021-03-11 2022-09-15 株式会社フジキン 気化器および気化供給装置
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
KR20230000975A (ko) * 2021-06-25 2023-01-03 가부시키가이샤 호리바 에스텍 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법
CN113977451B (zh) * 2021-10-25 2023-08-25 长鑫存储技术有限公司 半导体设备的检测系统及检测方法
CN119103392B (zh) * 2024-11-08 2025-01-28 陕西星环聚能科技有限公司 一种用于可控核聚变装置的压电阀和可控核聚变装置

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CN102770697A (zh) * 2010-01-26 2012-11-07 株式会社富士金 流体控制器及流量控制装置

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EP0749058A2 (en) * 1995-06-12 1996-12-18 Fujikin Incorporated Pressure type flow rate control apparatus
CN1227572A (zh) * 1996-05-31 1999-09-01 萨索技术(控股)有限公司 催化剂
US5816285A (en) * 1996-08-12 1998-10-06 Fujikin Incorporated Pressure type flow rate control apparatus
CN1227572C (zh) * 1998-05-29 2005-11-16 株式会社富士金 具备压力式流量控制装置的气体供给设备
CN1279416A (zh) * 1999-06-25 2001-01-10 富准精密工业(深圳)有限公司 散热装置扣件
EP1146326A2 (en) * 2000-04-14 2001-10-17 Nagano Keiki Co., Ltd. Pressure sensor mounting
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JP2005149075A (ja) * 2003-11-14 2005-06-09 Fujikin Inc 流体制御装置
CN101253458A (zh) * 2005-08-26 2008-08-27 株式会社富士金 垫片式节流器及使用了该节流器的压力式流量控制装置
CN102057340A (zh) * 2008-06-04 2011-05-11 株式会社富士金 流量调整器用自动压力调整器
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109478074A (zh) * 2016-07-28 2019-03-15 株式会社富士金 压力式流量控制装置
CN109478074B (zh) * 2016-07-28 2021-08-24 株式会社富士金 压力式流量控制装置
CN109791415A (zh) * 2016-10-14 2019-05-21 株式会社富士金 流体控制装置
CN110114601A (zh) * 2016-12-26 2019-08-09 株式会社富士金 压电元件驱动式阀以及流量控制装置

Also Published As

Publication number Publication date
TW201535081A (zh) 2015-09-16
JP6372998B2 (ja) 2018-08-15
US10372145B2 (en) 2019-08-06
TWI658351B (zh) 2019-05-01
DE112014005572T5 (de) 2016-12-01
TWI566067B (zh) 2017-01-11
KR20160028474A (ko) 2016-03-11
KR20180108851A (ko) 2018-10-04
TW201701095A (zh) 2017-01-01
KR102087645B1 (ko) 2020-03-11
WO2015083343A1 (ja) 2015-06-11
JP2015109022A (ja) 2015-06-11
US20160349763A1 (en) 2016-12-01
KR101902855B1 (ko) 2018-10-01

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Application publication date: 20160504

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