CN105301768A - Galvanometer laser scanning system - Google Patents
Galvanometer laser scanning system Download PDFInfo
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- CN105301768A CN105301768A CN201510824554.8A CN201510824554A CN105301768A CN 105301768 A CN105301768 A CN 105301768A CN 201510824554 A CN201510824554 A CN 201510824554A CN 105301768 A CN105301768 A CN 105301768A
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- lens
- galvanometer
- displacement platform
- plano
- scanning system
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
- G02B26/128—Focus control
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a galvanometer laser scanning system successively comprising a laser, a focusing lens, a first galvanometer, a second galvanometer, and a scanning surface along an axis. The focusing lens comprises a plane-concave lens and a convex lens. The plane-concave lens comprises a flat surface and a concave surface which are arranged oppositely. The convex lens comprises a first convex surface and a second convex surface which are arranged oppositely. The convex lens is fixedly arranged. The plane-concave lens is fixedly installed on a displacement table capable of horizontally moving along a line in parallel with the axis. The galvanometer laser scanning system is simple in structure and low in installation errors. The focusing lens has no real focus so that the galvanometer laser scanning system may maintain relative low temperature.
Description
Technical field
The present invention relates to optical engineering technical field, particularly relate to a kind of lens vibrating type laser scanning system.
Background technology
Laser scanner technique is a kind of technology that accurately can control laser beam and point to, and has now been widely used in and has now been widely used in light electric medical, Laser Processing, laser space communication, laser radar, remote sensing and the field such as measurement, adaptive optics.In Laser Processing and laser field up to standard, adopt mirror-vibrating laser scanning technique always.In order to ensure Laser Processing precision, laser needed through focusing on to ensure having good focus characteristics on workplace before arrival machined surface, according to the position that focusing system is put, focused on two kinds of types of focusing after can being divided into galvanometer prefocusing and galvanometer.
Prior art Patent 200320116330.4 discloses a kind of laser scanning system of mirror-vibrating prefocusing, comprises laser instrument, focus module, X-axis scanner head and Y axis scanning head.The focus module that laser beam is consisted of three pieces of combined lens, focus working face is arrived through X-axis scanner head and Y axis scanning head, described X-axis scanner head and Y axis scanning head form by digital ac servo motor and the eyeglass be attached in its rotating shaft, and the rotating shaft of digital ac servo motor is provided with stop means; Control system controls eyeglass respectively by the controller of two digital ac servo motors and moves in X-axis and Y-axis, realizes two-dimensional scan.After setting up dynamic focussing module, focus characteristics good on scanning plane can be ensured.But this scanning system adopts three pieces of eyeglasses to realize dynamically focusing, optical design and focusing model more complicated.Eyeglass is too many, and the error that processing and assembling bring also can increase, and affects focus effect.In addition, the system described in this invention has employing condenser lens, also there is focus point in the optical path in system except scanning plane, and superlaser beam focus can cause temperature too high, increases risk of equipment damage.
Separately, prior art Patent 200810197661.2 discloses focus scanning system after a kind of galvanometer, comprises laser instrument, beam expanding lens, x-axis scanning galvanometer, y-axis scanning galvanometer, scanning focused lens, z-axis travel mechanism and control system.Laser instrument gives off laser beam, amplify after collimation through beam expanding lens, laser beam directly enters x-axis scanning galvanometer and y-axis scanning galvanometer, control system control z-axis travel mechanism drive scanning focused lens in the z-axis direction, lower movement, regulate Laser Focusing point in the position in z-axis direction, realize 3 D stereo machining functions by the scanning focused lens being fixed on the z-axis travel mechanism that can move up and down along the z-axis direction.This system adopts F-theta lens as condenser lens, can ensure the focus characteristics of laser on workplace within the specific limits.But F-theta lens sizes can not be accomplished very large on the one hand, and on the other hand, this type of focusing is deteriorated at the focusing effect of F-theta rims of the lens, cannot realize the laser scanning of large format.
Therefore, for above-mentioned technical matters, be necessary to provide a kind of new lens vibrating type laser scanning system.
Summary of the invention
For overcoming the deficiencies in the prior art, a kind of galvanometer prefocusing is the object of the present invention is to provide to obtain lens vibrating type laser scanning system.
To achieve these goals, the technical scheme that provides of the embodiment of the present invention is as follows:
A kind of lens vibrating type laser scanning system, described system comprises successively along axis: laser instrument, focusing lens, the first galvanometer, the second galvanometer and scanning plane, described focusing lens comprise plano-concave mirror and convex lens, described plano-concave mirror comprises the plane and concave surface that are oppositely arranged, described convex lens comprise the first convex surface and the second convex surface that are oppositely arranged, described convex lens are fixedly installed, and described plano-concave mirror is fixedly installed on the displacement platform that can move horizontally along the parallel lines of axis.
As a further improvement on the present invention, described displacement platform comprises the first displacement platform and second moving stage, and described plano-concave mirror is fixedly installed on the first displacement platform, and described first displacement platform is fixedly installed in second moving stage.
As a further improvement on the present invention, described first displacement platform is automatic displacement platform, and described second moving stage is manual displacement platform.
As a further improvement on the present invention, laser beam beam-expanding system is provided with between described laser instrument and focusing lens.
As a further improvement on the present invention, in described convex lens, the radius-of-curvature of the first convex surface and the second convex surface is equal, and is greater than the radius-of-curvature of concave surface in plano-concave mirror.
As a further improvement on the present invention, the distance between the concave surface of described plano-concave mirror and the first convex surface of convex lens is 10 ~ 100mm.
As a further improvement on the present invention, the distance between the plane of described plano-concave mirror and concave surface is 1 ~ 10mm, and the distance between the first convex surface of convex lens and the second convex surface is 1 ~ 10mm.
As a further improvement on the present invention, described system also comprises the control module be connected with displacement platform, and described control module comprises:
Computing machine, for controlling the displacement size of plano-concave mirror by the displacement platform drive motor in displacement platform;
Scanner head controller, is connected with described computing machine, for receiving galvanometer pendulum angle information;
Drive motor, is connected with described scanner head controller, swings with pendulum angle information for driving the first galvanometer and/or the second galvanometer.
As a further improvement on the present invention, described scanner head controller comprises the first scanner head controller and the second scanner head controller, is respectively used to the first pendulum angle information of reception first galvanometer and the second pendulum angle information of the second galvanometer.
As a further improvement on the present invention, described drive motor comprises the first drive motor be connected with the first scanner head controller and the second drive motor be connected with the second scanner head controller, described first drive motor is connected with the first galvanometer and drives the first galvanometer to swing with the first pendulum angle information, and the second drive motor is connected with the second galvanometer and drives the second galvanometer to swing with the second pendulum angle information.
The present invention has following beneficial effect:
Lens vibrating type laser scanning system structure is simple, and the alignment error of system is little;
Focusing lens make lens vibrating type laser scanning system to keep relative low temperature without real focus;
Change the position of plano-concave mirror thus the focal length of automatic adjustment optical system by motorized precision translation stage, ensure that whole scanning plane has good focal beam spot, the Precision Machining of large scale breadth can be completed;
Manually displacement platform regulates the position of plano-concave mirror that system can be made to work in different operating Distance geometry work breadth situation.
Accompanying drawing explanation
Fig. 1 is the structural representation of embodiment of the invention lens vibrating type laser scanning system.
Fig. 2 is the module diagram of control module in embodiment of the invention lens vibrating type laser scanning system.
Embodiment
Technical scheme in the present invention is understood better in order to make those skilled in the art person, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, should belong to the scope of protection of the invention.
The invention discloses a kind of lens vibrating type laser scanning system, comprise successively along axis: laser instrument, focusing lens, the first galvanometer, the second galvanometer and scanning plane, focusing lens comprise plano-concave mirror and convex lens, plano-concave mirror comprises the plane and concave surface that are oppositely arranged, convex lens comprise the first convex surface and the second convex surface that are oppositely arranged, convex lens are fixedly installed, and plano-concave mirror is fixedly installed on the displacement platform that can move horizontally along the parallel lines of axis.
Shown in ginseng Fig. 1, in an embodiment of the present invention, lens vibrating type laser scanning system comprises: carbon dioxide laser 1, extender lens 2, plano-concave mirror 3, convex lens 4, X galvanometer 5, Y galvanometer 6, scanning plane 7, electricity driving displacement platform 8 and manual displacement platform 9.
The light beam that carbon dioxide laser 1 sends expands through extender lens 2, the focusing lens of laser beam through expanding through being made up of an average concave mirror 3 and convex lens 4, then X galvanometer 5 center is incided, X galvanometer 5 by laser beam reflection on Y galvanometer 6, Y galvanometer 6 again by laser beam reflection on scanning plane 7.Plano-concave mirror is arranged on electricity driving displacement platform 8, and initial makeup location is fixed, and electricity driving displacement platform is arranged on manual displacement platform 9.Electricity driving displacement platform automatically can control plano-concave mirror 3 and move towards convex lens 4 direction, regulates the focal length of whole system, makes each analyzing spot on scanning plane 7 be just in time laser beam focus points.Electricity driving displacement platform 8 is arranged on manual displacement platform 9, initial can distance between manual adjustments electricity driving displacement platform 8 and manual displacement platform 9 when installing, make there is different distances between plano-concave mirror 3 from convex lens 4, may correspond to and different initial focal length.
In present embodiment, plano-concave mirror 3 and convex lens 4 together constitute focusing lens, its object is to optimize existing dynamic focussing module optical system, and this focusing lens structure is more simple, and focusing lens make structure not easily produce high temperature without real focus.
Plano-concave mirror 3 comprises the plane and concave surface that are oppositely arranged, and convex lens 4 comprise the first convex surface and the second convex surface that are oppositely arranged.Convex lens 4 are fixedly installed, and plano-concave mirror 3 is removable setting on axis, and laser beam is incident from the plane of plano-concave mirror 3, successively after the first convex surface of the concave surface of plano-concave mirror, convex lens from the second convex surface outgoing of convex lens 4.
Wherein, the material that in present embodiment, plano-concave mirror 3 is used with convex lens 4 is identical, is zinc selenide.In convex lens 4, the radius-of-curvature of the first convex surface and the second convex surface is equal, and is greater than the radius-of-curvature of concave surface in plano-concave mirror 3.
Further, the distance between the concave surface of plano-concave mirror 3 and the first convex surface of convex lens 4 is 10 ~ 100mm, and the distance between the plane of plano-concave mirror 3 and concave surface is 1 ~ 10mm, and the distance between the first convex surface of convex lens 4 and the second convex surface is 1 ~ 10mm.
Particularly, in a specific embodiment of the present invention, distance between the plane of plano-concave mirror 3 and concave surface is 5mm, distance between first convex surface of convex lens 4 and the second convex surface is 5mm, in plano-concave mirror 3, the radius-of-curvature of concave surface is 110.94mm, in convex lens 4, the radius-of-curvature of the first convex surface and the second convex surface is 368.78mm, and the distance between the concave surface of plano-concave mirror 3 and the first convex surface of convex lens 4 is 50mm.
During focusing lens work, convex lens 4 are fixed, and plano-concave mirror 3 can move towards the direction of convex lens 4 under the driving of driving mechanism, supposes that amount of exercise is Z, then can change the focal length of whole focusing lens.
Focusing length in the present embodiment when wavelength of light 10.64 μm, initial focal length 750mm is:
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
Displacement platform in present embodiment comprises electricity driving displacement platform 8 and manual displacement platform 9, and plano-concave mirror 3 is fixedly installed on electricity driving displacement platform 8, and electricity driving displacement platform 8 is fixedly installed on manual displacement platform 9.Electricity driving displacement platform 8 is controlled by computing machine, and when operating personnel want to realize different working depths and working range, manually can adjust the position of plano-concave mirror 3 by displacement platform, optical lever principle is utilized to realize different operating height and operational ranges, or each side condition such as environment temperature on optical system form affect time, can the position of manual adjustments plano-concave mirror make light focusing in workplace.
In addition, the lens vibrating type laser scanning system in present embodiment also comprises control module, and particularly, shown in ginseng Fig. 2, this control module comprises:
Computing machine 10, for being controlled the displacement size of plano-concave mirror 3 by automatic displacement platform 8, also for calculating the pendulum angle information needed for X galvanometer 5, Y galvanometer 6;
Scanner head controller, comprises X-axis scanner head controller 11 and Y axis scanning head controller 13, is connected respectively with computing machine 10, for receiving the first swing information needed for X galvanometer 5 and the second swing information needed for Y galvanometer 6;
Drive motor, comprises X-axis drive motor 12 and Y-axis drive motor 14, is connected respectively with X-axis scanner head controller 11 with Y axis scanning head controller 13, is respectively used to drive X galvanometer 5 and Y galvanometer 6 to swing with the first pendulum angle information and the second swing information.
Particularly, shown in ginseng Fig. 2, laser beam completes X-Y plane scanning by galvanometer system, for the flat scanning of large format, and galvanometric scanning system after the three-dimensional object lens of the dynamic focusing lens of employing band.Computing machine 10 calculates the pendulum angle needed for X, Y galvanometer by scanning coordinate, computing machine 10 controls the digital interchange X-axis drive motor 12 of X-axis scanner head by X-axis scanner head controller 11, X galvanometer 5 is driven to swing corresponding angle by X-axis drive motor 12, controlled the digital interchange Y-axis drive motor 14 of Y axis scanning head by Y axis scanning head controller 13, drive Y galvanometer to swing corresponding angle by Y-axis drive motor 14.
X galvanometer, Y galvanometer under the control of corresponding drive motor, laser beam reflection on the predetermined X of workplace, Y-coordinate point.Computing machine can also calculate the defocus error peace concave mirror 3 of system by scanning coordinate should to the displacement in convex lens direction, and the electricity driving displacement platform drive motor 15 directly controlling electricity driving displacement platform 8 drives plano-concave mirror to move corresponding distance.
As can be seen from the above technical solutions, the present invention has the following advantages:
Lens vibrating type laser scanning system structure is simple, and the alignment error of system is little;
Focusing lens make lens vibrating type laser scanning system to keep relative low temperature without real focus;
Change the position of plano-concave mirror thus the focal length of automatic adjustment optical system by motorized precision translation stage, ensure that whole scanning plane has good focal beam spot, the Precision Machining of large scale breadth can be completed;
Manually displacement platform regulates the position of plano-concave mirror that system can be made to work in different operating Distance geometry work breadth situation.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and when not deviating from spirit of the present invention or essential characteristic, the present invention can be realized in other specific forms.Therefore, no matter from which point, all should embodiment be regarded as exemplary, and be nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the present invention.Any Reference numeral in claim should be considered as the claim involved by limiting.
In addition, be to be understood that, although this instructions is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of instructions is only for clarity sake, those skilled in the art should by instructions integrally, and the technical scheme in each embodiment also through appropriately combined, can form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. a lens vibrating type laser scanning system, it is characterized in that, described system comprises successively along axis: laser instrument, focusing lens, the first galvanometer, the second galvanometer and scanning plane, described focusing lens comprise plano-concave mirror and convex lens, described plano-concave mirror comprises the plane and concave surface that are oppositely arranged, described convex lens comprise the first convex surface and the second convex surface that are oppositely arranged, and described convex lens are fixedly installed, and described plano-concave mirror is fixedly installed on the displacement platform that can move horizontally along the parallel lines of axis.
2. lens vibrating type laser scanning system according to claim 1, is characterized in that, described displacement platform comprises the first displacement platform and second moving stage, and described plano-concave mirror is fixedly installed on the first displacement platform, and described first displacement platform is fixedly installed in second moving stage.
3. lens vibrating type laser scanning system according to claim 2, is characterized in that, described first displacement platform is automatic displacement platform, and described second moving stage is manual displacement platform.
4. lens vibrating type laser scanning system according to claim 1, is characterized in that, is provided with laser beam beam-expanding system between described laser instrument and focusing lens.
5. lens vibrating type laser scanning system according to claim 1, is characterized in that, in described convex lens, the radius-of-curvature of the first convex surface and the second convex surface is equal, and is greater than the radius-of-curvature of concave surface in plano-concave mirror.
6. lens vibrating type laser scanning system according to claim 1, is characterized in that, the distance between the concave surface of described plano-concave mirror and the first convex surface of convex lens is 10 ~ 100mm.
7. lens vibrating type laser scanning system according to claim 6, is characterized in that, the distance between the plane of described plano-concave mirror and concave surface is 1 ~ 10mm, and the distance between the first convex surface of convex lens and the second convex surface is 1 ~ 10mm.
8. lens vibrating type laser scanning system according to claim 1, is characterized in that, described system also comprises the control module be connected with displacement platform, and described control module comprises:
Computing machine, for controlling the displacement size of plano-concave mirror by the displacement platform drive motor in displacement platform;
Scanner head controller, is connected with described computing machine, for receiving galvanometer pendulum angle information;
Drive motor, is connected with described scanner head controller, swings with pendulum angle information for driving the first galvanometer and/or the second galvanometer.
9. lens vibrating type laser scanning system according to claim 8, it is characterized in that, described scanner head controller comprises the first scanner head controller and the second scanner head controller, is respectively used to the first pendulum angle information of reception first galvanometer and the second pendulum angle information of the second galvanometer.
10. lens vibrating type laser scanning system according to claim 9, it is characterized in that, described drive motor comprises the first drive motor be connected with the first scanner head controller and the second drive motor be connected with the second scanner head controller, described first drive motor is connected with the first galvanometer and drives the first galvanometer to swing with the first pendulum angle information, and the second drive motor is connected with the second galvanometer and drives the second galvanometer to swing with the second pendulum angle information.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106218232A (en) * | 2016-08-31 | 2016-12-14 | 广州创乐激光设备有限公司 | A kind of varifocal laser marking optical system |
| CN108273806A (en) * | 2018-04-10 | 2018-07-13 | 哈尔滨工业大学 | A kind of laser cleaning equipment camera lens and laser cleaning equipment |
| CN110133620A (en) * | 2019-04-19 | 2019-08-16 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN110967802A (en) * | 2018-09-30 | 2020-04-07 | 上海铁路通信有限公司 | High-power pulse laser self-adaptive zooming system |
| CN111624725A (en) * | 2020-04-22 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | System for realizing zooming and light path shaping |
| CN112853343A (en) * | 2020-12-31 | 2021-05-28 | 北京机科国创轻量化科学研究院有限公司烟台分公司 | Self-zooming laser cladding forming device and method |
| CN113351996A (en) * | 2021-06-16 | 2021-09-07 | 深圳信息职业技术学院 | Laser polishing and surface modification equipment |
| WO2021239155A1 (en) * | 2020-05-29 | 2021-12-02 | 方强 | Optical zoom focusing lens, mechanical structure and optical structure thereof, and usage method therefor |
| CN117148565A (en) * | 2023-10-30 | 2023-12-01 | 杭州爱新凯科技有限公司 | Front focusing galvanometer scanning system and scanning method with adjustable multiplying power |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN101419336A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Mirror-vibrating laser three-dimensional scanning system |
| CN102079176A (en) * | 2009-11-28 | 2011-06-01 | 深圳市大族激光科技股份有限公司 | Laser marking machine |
| CN204338864U (en) * | 2014-12-11 | 2015-05-20 | 广东汉唐量子光电科技有限公司 | A kind of new-type laser output device printed for 3D |
-
2015
- 2015-11-24 CN CN201510824554.8A patent/CN105301768B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN101419336A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Mirror-vibrating laser three-dimensional scanning system |
| CN102079176A (en) * | 2009-11-28 | 2011-06-01 | 深圳市大族激光科技股份有限公司 | Laser marking machine |
| CN204338864U (en) * | 2014-12-11 | 2015-05-20 | 广东汉唐量子光电科技有限公司 | A kind of new-type laser output device printed for 3D |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106218232A (en) * | 2016-08-31 | 2016-12-14 | 广州创乐激光设备有限公司 | A kind of varifocal laser marking optical system |
| CN108273806A (en) * | 2018-04-10 | 2018-07-13 | 哈尔滨工业大学 | A kind of laser cleaning equipment camera lens and laser cleaning equipment |
| CN110967802A (en) * | 2018-09-30 | 2020-04-07 | 上海铁路通信有限公司 | High-power pulse laser self-adaptive zooming system |
| CN110133620A (en) * | 2019-04-19 | 2019-08-16 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN111624725A (en) * | 2020-04-22 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | System for realizing zooming and light path shaping |
| WO2021239155A1 (en) * | 2020-05-29 | 2021-12-02 | 方强 | Optical zoom focusing lens, mechanical structure and optical structure thereof, and usage method therefor |
| CN112853343A (en) * | 2020-12-31 | 2021-05-28 | 北京机科国创轻量化科学研究院有限公司烟台分公司 | Self-zooming laser cladding forming device and method |
| CN112853343B (en) * | 2020-12-31 | 2023-11-10 | 北京机科国创轻量化科学研究院有限公司烟台分公司 | Self-zooming laser cladding forming device and method |
| CN113351996A (en) * | 2021-06-16 | 2021-09-07 | 深圳信息职业技术学院 | Laser polishing and surface modification equipment |
| CN117148565A (en) * | 2023-10-30 | 2023-12-01 | 杭州爱新凯科技有限公司 | Front focusing galvanometer scanning system and scanning method with adjustable multiplying power |
| CN117148565B (en) * | 2023-10-30 | 2024-02-02 | 杭州爱新凯科技有限公司 | Front focusing galvanometer scanning system and scanning method with adjustable multiplying power |
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