CN105301768B - Lens vibrating type laser scanning system - Google Patents
Lens vibrating type laser scanning system Download PDFInfo
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- CN105301768B CN105301768B CN201510824554.8A CN201510824554A CN105301768B CN 105301768 B CN105301768 B CN 105301768B CN 201510824554 A CN201510824554 A CN 201510824554A CN 105301768 B CN105301768 B CN 105301768B
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- lens
- galvanometer
- plano
- displacement platform
- concave mirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
- G02B26/128—Focus control
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a kind of lens vibrating type laser scanning system, the system includes successively along axis：Laser, focusing lens, the first galvanometer, the second galvanometer and scanning plane, the focusing lens include plano-concave mirror and convex lens, the plano-concave mirror includes plane and the concave surface being oppositely arranged, the convex lens include the first convex surface and the second convex surface being oppositely arranged, the convex lens fixed setting, the plano-concave mirror is fixedly installed in can be along the displacement platform that the parallel lines of axis move horizontally.The lens vibrating type laser scanning system of the present invention is simple in construction, and the alignment error of system is small；Focusing lens enable lens vibrating type laser scanning system to keep relative low temperature without real focus.
Description
Technical field
The present invention relates to optical engineering technical field, more particularly to a kind of lens vibrating type laser scanning system.
Background technology
Laser scanner technique is a kind of technology that can accurately control laser beam to point to, and has been widely used in wide
General is applied to the neck such as light electric medical, Laser Processing, laser space communication, laser radar, remote sensing and measurement, adaptive optics
Domain.In Laser Processing and laser field up to standard, always using mirror-vibrating laser scanning technique.In order to ensure to laser machine precision,
Laser is needed through over-focusing before machined surface is reached to ensure to have good focus characteristics on working face, according to focusing system
The position put, two kinds of types of focusing are focused on after galvanometer prefocusing and galvanometer can be divided into.
Prior art Patent 200320116330.4 discloses a kind of laser scanning system of mirror-vibrating prefocusing, including
Laser, focus module, X-axis probe and Y axis scanning head.The focus module that laser beam is made up of three pieces of combined lens, through X
Axle probe and Y axis scanning head reach focus working face, and the X-axis probe is watched with Y axis scanning head by digital exchange
The eyeglass for taking motor and being attached in its rotating shaft is formed, and stopping means is provided with the rotating shaft of digital ac servo motor；Control
System controls eyeglass to be moved in X-axis and Y-axis respectively by the controller of two digital ac servo motors, realizes that two dimension is swept
Retouch.After setting up dynamic focussing module, it is ensured that good focus characteristics on scanning plane.But this scanning system uses three pieces
Eyeglass realizes that dynamic is focused, and optical design and focusing model are more complicated.Eyeglass is too many, and the error that processing and assembling are brought also can
Increase, influence focus effect.In addition, the system described in the invention has using condenser lens, in light path in addition to scanning plane in system
In there is also focus point, superlaser beam focus can cause temperature too high, increase risk of equipment damage.
In addition, prior art Patent 200810197661.2 discloses focus scanning system after a kind of galvanometer, including laser
Device, beam expanding lens, x-axis scanning galvanometer, y-axis scanning galvanometer, scanning focused lens, z-axis travel mechanism and control system.Laser is sent out
Go out laser beam, after beam expanding lens amplification collimation, laser beam is directly entered x-axis scanning galvanometer and y-axis scanning galvanometer, control system control
ZhizZhou travel mechanisms drive scanning focused lens in the z-axis direction, lower movement, regulation Laser Focusing point is in the position in z-axis direction
Put, realize that 3 D stereo is processed by being fixed on the scanning focused lens for the z-axis travel mechanism that can be moved up and down along the z-axis direction
Function.This system is used as condenser lens using F-theta lens, can ensure gathering for laser on working face within the specific limits
Burnt characteristic.But one side F-theta lens sizes can not possibly accomplish that very greatly, on the other hand, this type of focusing is in F-
The focusing effect of theta rims of the lens is deteriorated, and can not realize the laser scanning of large format.
Therefore, for above-mentioned technical problem, it is necessary to provide a kind of new lens vibrating type laser scanning system.
The content of the invention
For overcome the deficiencies in the prior art, obtain mirror-vibrating laser it is an object of the invention to provide a kind of galvanometer prefocusing and sweep
Retouch system.
To achieve these goals, technical scheme provided in an embodiment of the present invention is as follows：
A kind of lens vibrating type laser scanning system, the system include successively along axis：Laser, focusing lens, first shake
Mirror, the second galvanometer and scanning plane, the focusing lens include plano-concave mirror and convex lens, and what the plano-concave mirror included being oppositely arranged puts down
Face and concave surface, the convex lens include the first convex surface and the second convex surface being oppositely arranged, and the convex lens fixed setting is described flat
Concave mirror is fixedly installed in can be along the displacement platform that the parallel lines of axis move horizontally.
As a further improvement on the present invention, the displacement platform includes the first displacement platform and second moving stage, the plano-concave
Mirror is fixedly installed on the first displacement platform, and first displacement platform is fixedly installed in second moving stage.
As a further improvement on the present invention, first displacement platform is automatic displacement platform, and the second moving stage is hand
Dynamic displacement platform.
As a further improvement on the present invention, laser beam beam-expanding system is provided between the laser and focusing lens.
As a further improvement on the present invention, the radius of curvature on the first convex surface and the second convex surface is equal in the convex lens,
And more than the radius of curvature of concave surface in plano-concave mirror.
As a further improvement on the present invention, the distance between the concave surface of the plano-concave mirror and the first convex surface of convex lens are
10~100mm.
As a further improvement on the present invention, the distance between the plane of the plano-concave mirror and concave surface are 1~10mm, convex lens
The distance between first convex surface and the second convex surface of mirror are 1~10mm.
As a further improvement on the present invention, the system also includes the control unit being connected with displacement platform, the control
Unit includes：
Computer, for controlling the displacement of plano-concave mirror by the displacement platform motor in displacement platform；
Head controller is scanned, is connected with the computer, for receiving galvanometer swing angle information；
Motor, it is connected with the scanning head controller, for driving the first galvanometer and/or the second galvanometer with angle of oscillation
Degree information is swung.
As a further improvement on the present invention, the scanning head controller includes the first scanning head controller and the second scanning
Head controller, it is respectively used to receive the first swing angle information of the first galvanometer and the second swing angle information of the second galvanometer.
As a further improvement on the present invention, the motor includes the first drive being connected with the first scanning head controller
Dynamic motor and the second motor being connected with the second scanning head controller, first motor are connected simultaneously with the first galvanometer
The first galvanometer is driven to be swung with the first swing angle information, the second motor is connected with the second galvanometer and drives second to shake
Mirror is swung with the second swing angle information.
The invention has the advantages that：
Lens vibrating type laser scanning system is simple in construction, and the alignment error of system is small；
Focusing lens enable lens vibrating type laser scanning system to keep relative low temperature without real focus；
The position for changing plano-concave mirror by motorized precision translation stage ensures whole scanning so as to automatically adjust the focal length of optical system
There is good focal beam spot on face, the Precision Machining of large scale breadth can be completed；
Manually the position of displacement platform regulation plano-concave mirror can make system in the case of different operating distance and work breadth
Work.
Brief description of the drawings
Fig. 1 is the structural representation of embodiment of the invention lens vibrating type laser scanning system.
Fig. 2 is the module diagram of control unit in embodiment of the invention lens vibrating type laser scanning system.
Embodiment
In order that those skilled in the art more fully understand the technical scheme in the present invention, below in conjunction with of the invention real
The accompanying drawing in example is applied, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described implementation
Example only part of the embodiment of the present invention, rather than whole embodiments.It is common based on the embodiment in the present invention, this area
The every other embodiment that technical staff is obtained under the premise of creative work is not made, should all belong to protection of the present invention
Scope.
The invention discloses a kind of lens vibrating type laser scanning system, includes successively along axis：Laser, focusing lens,
One galvanometer, the second galvanometer and scanning plane, focusing lens include plano-concave mirror and convex lens, plano-concave mirror include the plane being oppositely arranged and
Concave surface, convex lens include the first convex surface and the second convex surface being oppositely arranged, and convex lens fixed setting, plano-concave mirror is fixedly installed in can
On the displacement platform moved horizontally along the parallel lines of axis.
Join shown in Fig. 1, in the embodiment of the present invention, lens vibrating type laser scanning system includes：Carbon dioxide
Laser 1, extender lens 2, plano-concave mirror 3, convex lens 4, X galvanometers 5, Y galvanometers 6, scanning plane 7, electricity driving displacement platform 8 and manual displacement
Platform 9.
The light beam that carbon dioxide laser 1 is sent is expanded by extender lens 2, the laser beam through expanding pass through by
The focusing lens that one average concave mirror 3 and convex lens 4 is formed, are then incident on the center of X galvanometers 5, laser beam is reflexed to Y by X galvanometers 5
On galvanometer 6, Y galvanometers 6 again reflex to laser beam on scanning plane 7.Plano-concave mirror is arranged on electricity driving displacement platform 8, initial installation position
Fixation is put, electricity driving displacement platform is arranged on manual displacement platform 9.Electricity driving displacement platform can automatically control plano-concave mirror 3 towards convex lens 4
Direction is moved, and adjusts the focal length of whole system so that each scanning element is exactly laser beam focus points on scanning plane 7.It is electronic
Displacement platform 8 is arranged on manual displacement platform 9, can initially be adjusted manually between electricity driving displacement platform 8 and manual displacement platform 9 during installation
Distance so that have different distances between plano-concave mirror 3 and convex lens 4, can correspond to and different initial focal lengths.
Plano-concave mirror 3 and convex lens 4 together constitute focusing lens in present embodiment, and its object is to optimize existing dynamic
Focus module optical system, the focusing lens structure is more simple, and focusing lens make structure be not likely to produce high temperature without real focus.
Plano-concave mirror 3 includes plane and the concave surface being oppositely arranged, and convex lens 4 are convex including the first convex surface being oppositely arranged and second
Face.Convex lens 4 are fixedly installed, and plano-concave mirror 3 is movably arranged on axis, and the plane of laser beam from plano-concave mirror 3 is incident, successively
It is emitted behind first convex surface of concave surface, convex lens by plano-concave mirror from the second convex surface of convex lens 4.
Wherein, plano-concave mirror 3 is identical with the material used in convex lens 4 in present embodiment, is zinc selenide.In convex lens 4
The radius of curvature on the first convex surface and the second convex surface is equal, and more than the radius of curvature of concave surface in plano-concave mirror 3.
Further, the distance between first convex surface of the concave surface of plano-concave mirror 3 and convex lens 4 is 10~100mm, and plano-concave
The distance between the plane of mirror 3 and concave surface be the distance between 1~10mm, the first convex surface and the second convex surface of convex lens 4 for 1~
10mm。
Specifically, in the specific embodiment of the present invention, the distance between the plane of plano-concave mirror 3 and concave surface are 5mm, convex
The distance between first convex surface and the second convex surface of lens 4 are 5mm, and the radius of curvature of concave surface is 110.94mm in plano-concave mirror 3, convex
The radius of curvature on the first convex surface and the second convex surface is 368.78mm in lens 4, the concave surface of plano-concave mirror 3 and the first of convex lens 4
The distance between convex surface is 50mm.
When focusing lens work, convex lens 4 are fixed, and plano-concave mirror 3 can be under the driving of drive mechanism towards the side of convex lens 4
To motion, it is assumed that amount of exercise Z, then can change the focal length of whole focusing lens.
Focusing length in the present embodiment in 10.64 μm of wavelength of light, initial focal length 750mm is：
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
Displacement platform in present embodiment includes electricity driving displacement platform 8 and manual displacement platform 9, and plano-concave mirror 3 is fixedly installed in electricity
On dynamic displacement platform 8, electricity driving displacement platform 8 is fixedly installed on manual displacement platform 9.Electricity driving displacement platform 8 is controlled by computer, and is worked as
Operating personnel want to realize different working depth and working range, can manually displacement platform adjustment plano-concave mirror 3 position, profit
Different operating height and operational ranges are realized with optics lever principle, or each side condition such as environment temperature is to optical system
When forming influence, the position of manually adjustable plano-concave mirror makes light focusing in working face.
In addition, the lens vibrating type laser scanning system in present embodiment also includes control unit, specifically, join shown in Fig. 2,
The control unit includes：
Computer 10, for controlling the displacement of plano-concave mirror 3 by automatic displacement platform 8, it is additionally operable to calculate X galvanometers 5, Y
Swing angle information needed for galvanometer 6；
Scan head controller, including X-axis scanning head controller 11 and Y axis scanning head controller 13, respectively with computer 10
It is connected, for receiving the second swing information needed for the first swing information and Y galvanometers 6 needed for X galvanometers 5；
Motor, including X-axis motor 12 and Y-axis motor 14, scan head controller 11 and Y with X-axis respectively
Axle scanning head controller 13 is connected, and is respectively used to drive X galvanometers 5 and Y galvanometers 6 to swing letter with the first swing angle information and second
Breath is swung.
Specifically, join shown in Fig. 2, laser beam is completed X-Y plane by galvanometer system and scanned, and is swept for the plane of large format
Retouch, using galvanometric scanning system after the three-dimensional object lens with dynamic focusing lens.Computer 10 calculates X, Y by scanning coordinate and shaken
Swing angle needed for mirror, computer 10 scan head controller 11 by X-axis and control the digital exchange X-axis of X-axis probe to drive
Dynamic motor 12, drives X galvanometers 5 to swing corresponding angle by X-axis motor 12, and Y-axis is controlled by Y axis scanning head controller 13
The digital exchange Y-axis motor 14 of probe, Y galvanometers are driven to swing corresponding angle by Y-axis motor 14.
Laser beam is reflexed to the predetermined X of working face, Y-coordinate point by X galvanometers, Y galvanometers under the control of corresponding motor
On.The defocus error peace concave mirror 3 that computer can also calculate system by scanning coordinate should be to the shifting in convex lens direction
Dynamic distance, and directly control the electricity driving displacement platform motor 15 of electricity driving displacement platform 8 to drive plano-concave mirror to move corresponding distance.
As can be seen from the above technical solutions, the present invention has advantages below：
Lens vibrating type laser scanning system is simple in construction, and the alignment error of system is small；
Focusing lens enable lens vibrating type laser scanning system to keep relative low temperature without real focus；
The position for changing plano-concave mirror by motorized precision translation stage ensures whole scanning so as to automatically adjust the focal length of optical system
There is good focal beam spot on face, the Precision Machining of large scale breadth can be completed；
Manually the position of displacement platform regulation plano-concave mirror can make system in the case of different operating distance and work breadth
Work.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit requires rather than described above limits, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.Any reference in claim should not be considered as to the involved claim of limitation.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that those skilled in the art should for clarity
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It is appreciated that other embodiment.
Claims (9)
1. a kind of lens vibrating type laser scanning system, it is characterised in that the system includes successively along axis：Laser, focusing lens
Head, the first galvanometer, the second galvanometer and scanning plane, the focusing lens include plano-concave mirror and convex lens, and the plano-concave mirror includes phase
Plane and concave surface to setting, the convex lens include the first convex surface and the second convex surface being oppositely arranged, and the convex lens are fixed
Set, the plano-concave mirror is fixedly installed in can be along the displacement platform that the parallel lines of axis move horizontally；First in the convex lens
The radius of curvature on convex surface and the second convex surface is equal, and more than the radius of curvature of concave surface in plano-concave mirror.
2. lens vibrating type laser scanning system according to claim 1, it is characterised in that the displacement platform includes the first displacement
Platform and second moving stage, the plano-concave mirror are fixedly installed on the first displacement platform, and first displacement platform is fixedly installed in second
On displacement platform.
3. lens vibrating type laser scanning system according to claim 2, it is characterised in that first displacement platform is automatic position
Moving stage, the second moving stage are manual displacement platform.
4. lens vibrating type laser scanning system according to claim 1, it is characterised in that the laser and focusing lens it
Between be provided with laser beam beam-expanding system.
5. lens vibrating type laser scanning system according to claim 1, it is characterised in that the concave surface of the plano-concave mirror and convex lens
The distance between first convex surface of mirror is 10~100mm.
6. lens vibrating type laser scanning system according to claim 5, it is characterised in that the plane of the plano-concave mirror and concave surface
The distance between be that the distance between 1~10mm, the first convex surface and the second convex surface of convex lens is 1~10mm.
7. lens vibrating type laser scanning system according to claim 1, it is characterised in that the system also includes and displacement platform
Connected control unit, described control unit include：
Computer, for controlling the displacement of plano-concave mirror by the displacement platform motor in displacement platform；
Head controller is scanned, is connected with the computer, for receiving galvanometer swing angle information；
Motor, it is connected with the scanning head controller, for driving the first galvanometer and/or the second galvanometer to believe with swing angle
Breath is swung.
8. lens vibrating type laser scanning system according to claim 7, it is characterised in that the scanning head controller includes the
Scan head controller and the second scanning head controller, it is respectively used to receive the first swing angle information and second of the first galvanometer
Second swing angle information of galvanometer.
9. lens vibrating type laser scanning system according to claim 8, it is characterised in that the motor includes and first
The first connected motor of scanning head controller and the second motor being connected with the second scanning head controller, described first
Motor is connected with the first galvanometer and drives the first galvanometer to be swung with the first swing angle information, the second motor with
Second galvanometer is connected and drives the second galvanometer to be swung with the second swing angle information.
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| CN201510824554.8A CN105301768B (en) | 2015-11-24 | 2015-11-24 | Lens vibrating type laser scanning system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510824554.8A CN105301768B (en) | 2015-11-24 | 2015-11-24 | Lens vibrating type laser scanning system |
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| CN105301768A CN105301768A (en) | 2016-02-03 |
| CN105301768B true CN105301768B (en) | 2018-01-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106218232B (en) * | 2016-08-31 | 2018-07-31 | 广州创乐激光设备有限公司 | A kind of varifocal laser marking optical system |
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| CN110967802A (en) * | 2018-09-30 | 2020-04-07 | 上海铁路通信有限公司 | High-power pulse laser self-adaptive zooming system |
| CN110133620B (en) * | 2019-04-19 | 2021-10-19 | 深圳市速腾聚创科技有限公司 | Multi-line laser radar |
| CN111624725A (en) * | 2020-04-22 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | System for realizing zooming and light path shaping |
| CN113798659A (en) * | 2020-05-29 | 2021-12-17 | 方强 | Optical zoom focusing lens, mechanical structure thereof, optical structure and using method thereof |
| CN112853343B (en) * | 2020-12-31 | 2023-11-10 | 北京机科国创轻量化科学研究院有限公司烟台分公司 | Self-zooming laser cladding forming device and method |
| CN113351996A (en) * | 2021-06-16 | 2021-09-07 | 深圳信息职业技术学院 | Laser polishing and surface modification equipment |
| CN117148565B (en) * | 2023-10-30 | 2024-02-02 | 杭州爱新凯科技有限公司 | Front focusing galvanometer scanning system and scanning method with adjustable multiplying power |
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| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
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