CN106773025B - Focusing lens and lens vibrating type laser scanning system - Google Patents
Focusing lens and lens vibrating type laser scanning system Download PDFInfo
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- CN106773025B CN106773025B CN201510824078.XA CN201510824078A CN106773025B CN 106773025 B CN106773025 B CN 106773025B CN 201510824078 A CN201510824078 A CN 201510824078A CN 106773025 B CN106773025 B CN 106773025B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/127—Adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors
- G02B26/128—Focus control
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
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Abstract
The invention discloses a kind of focusing lens and lens vibrating type laser scanning systems, the focusing lens include the plano-concave mirror and convex lens of coaxial arrangement, the plano-concave mirror includes the plane being oppositely arranged and concave surface, the convex lens includes the first convex surface and the second convex surface being oppositely arranged, the convex lens fixed setting, plano-concave mirror is movably arranged on axis, and light is incident from the plane of plano-concave mirror, successively by the concave surface of plano-concave mirror, convex lens the first convex surface after be emitted from the second convex surface of convex lens.Focusing lens structure of the present invention is simple, and alignment error is small；Focusing lens make focusing lens be able to maintain relative low temperature without real focus；For lens vibrating type laser scanning system when incoming laser beam waist radius is greater than 7.5mm, laser does not influence focusing effect apart from the distance between focusing lens.
Description
Technical field
The present invention relates to optical engineering technical fields, more particularly to a kind of focusing lens and mirror-vibrating laser scanning system
System.
Background technique
Laser scanner technique is a kind of technology that can accurately control laser beam direction, has been widely used in wide
General be applied to light electric medical, laser processing, laser space communication, laser radar, remote sensing and measurement, adaptive optics etc. is led
Domain.In laser processing and laser field up to standard, mirror-vibrating laser scanning technique is used always.In order to guarantee to laser machine precision,
Laser is needed before reaching machined surface through over-focusing to guarantee to have good focus characteristics on working face, according to focusing system
The position put focuses two kinds of types of focusing after being divided into galvanometer prefocusing and galvanometer.
Patent CN101419336B proposes the type of focusing after a kind of galvanometer in the prior art, which sweeps
The system of retouching includes laser, beam expanding lens, x-axis scanning galvanometer, y-axis scanning galvanometer, scanning focused lens, z-axis mobile mechanism and control
System processed.The lens vibrating type laser scanning system by xy bidimensional scanning galvanometer and scanning focused mirror, (sweep by such as usual focus lamp or telecentricity
Retouch lens) be split up into the assembly that can be mutually shifted, i.e. xy axis scanning galvanometer is fixed in the z-axis direction, and scanning focused
Lens, which are fixed in the mechanism that can be moved up and down along the z-axis direction, realizes 3 D stereo machining function.
In addition, existing patent CN2664011Y discloses a kind of galvanometer prefocusing laser scanning system, including laser, focusing
Module, X-axis probe and Y axis scanning head, the convex lens group focus module for using three pieces of combined lens to constitute, design first
Block is movable lens, under the drive of the motor, is done reciprocating linear motion, and latter two pieces are stationary lens.Focusing system is on the one hand
Focussing force is played, on the other hand plays optical lever, the position of lens is changed to automatically adjust light by motorized precision translation stage
The focal length of system guarantees there is good focal beam spot on entire scanning surface.Laser beam is by focus module through X-axis probe
Focus working face is reached with Y axis scanning head.
The type of focusing scans model using traditional F-theta lens focus mode due to the limitation of lens sizes after galvanometer
Enclosing should not be too large, and scanning surface edge light beam focus characteristics have become very poor.
Galvanometer prefocusing its optical design of its laser scanning system of mode and focusing model are more complicated.Eyeglass is too many, adds
Work and assembly bring error can also increase, and influence focus effect.In addition, such 3 D scanning system substantially in addition to scanning surface
There is also real focus point in optical path, it is excessively high that superlaser beam focus will lead to temperature, increases risk of equipment damage.
Therefore, in view of the above technical problems, it is necessary to which a kind of focusing lens and lens vibrating type laser scanning system are provided.
Summary of the invention
In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a kind of focusing lens for laser three-dimensional scanning
Head and lens vibrating type laser scanning system.
To achieve the goals above, technical solution provided in an embodiment of the present invention is as follows:
A kind of focusing lens, the focusing lens include the plano-concave mirror and convex lens of coaxial arrangement, and the plano-concave mirror includes
The plane being oppositely arranged and concave surface, the convex lens include the first convex surface and the second convex surface being oppositely arranged, and the convex lens is solid
Fixed setting, plano-concave mirror are movably arranged on axis, and the plane of light from plano-concave mirror is incident, successively by the concave surface of plano-concave mirror,
It is emitted behind first convex surface of convex lens from the second convex surface of convex lens.
As a further improvement of the present invention, the material of the plano-concave mirror and convex lens is zinc selenide.
As a further improvement of the present invention, the radius of curvature on the first convex surface and the second convex surface is equal in the convex lens,
And it is greater than the radius of curvature of concave surface in plano-concave mirror.
As a further improvement of the present invention, the distance between the concave surface of the plano-concave mirror and the first convex surface of convex lens are
10~100mm.
As a further improvement of the present invention, the distance between the plane of the plano-concave mirror and concave surface are 1~10mm, convex lens
The distance between first convex surface and the second convex surface of mirror are 1~10mm.
As a further improvement of the present invention, the distance between the plane of the plano-concave mirror and concave surface are 5mm, convex lens
The distance between first convex surface and the second convex surface are 5mm, and the radius of curvature of concave surface is 110.94mm in plano-concave mirror, the in convex lens
The radius of curvature on one convex surface and the second convex surface is 368.78mm, between the concave surface of plano-concave mirror and the first convex surface of convex lens away from
From for 50mm.
As a further improvement of the present invention, focusing length when 10.64 μm of the wavelength of light, initial focal length 750mm
Are as follows:
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
Correspondingly, a kind of lens vibrating type laser scanning system, the system along axis successively include: laser, focusing lens,
First galvanometer, the second galvanometer and scanning surface.
As a further improvement of the present invention, laser beam beam-expanding system is equipped between the laser and focusing lens.
As a further improvement of the present invention, the laser beam waist radius of the laser emitting is greater than 7.5mm.
The invention has the following advantages:
Focusing lens structure is simple, and alignment error is small；
Focusing lens make focusing lens be able to maintain relative low temperature without real focus；
For lens vibrating type laser scanning system when incoming laser beam waist radius is greater than 7.5mm, laser is apart from focusing lens
The distance between do not influence focusing effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of focusing lens in first embodiment of the invention.
Fig. 2 is the structural schematic diagram of lens vibrating type laser scanning system in second embodiment of the invention.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, below in conjunction with of the invention real
The attached drawing in example is applied, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention
Range.
The invention discloses a kind of two lens dynamic focusing lens, and its object is to optimize existing dynamic focussing module optics
System, the focusing lens structure is more simple, and focusing lens make structure be not likely to produce high temperature without real focus.
Specifically, join shown in Fig. 1, the focusing lens in the embodiment of the invention, the plano-concave including coaxial arrangement
Mirror 1 and convex lens 2, plano-concave mirror include the plane 11 being oppositely arranged and concave surface 12, and convex lens 2 includes the first convex surface being oppositely arranged
21 and second convex surface 22.Convex lens 2 is fixedly installed, and plano-concave mirror 1 is movably arranged on axis, plane of the light from plano-concave mirror 1
11 is incident, successively by the concave surface of plano-concave mirror 1 12, convex lens 2 the first convex surface 21 after go out from the second convex surface 22 of convex lens 2
It penetrates.
Wherein, plano-concave mirror 1 is identical with material used in convex lens 2 in present embodiment, is zinc selenide.In convex lens 2
The radius of curvature on the first convex surface 21 and the second convex surface 22 is equal, and is greater than the radius of curvature of concave surface 12 in plano-concave mirror 1.
Further, the distance between the concave surface 12 of plano-concave mirror 1 and the first convex surface 21 of convex lens 2 are 10~100mm, and
The distance between the plane 11 of plano-concave mirror 1 and concave surface 12 are 1~10mm, the first convex surface 21 and the second convex surface 22 of convex lens 2 it
Between distance be 1~10mm.
Specifically, in a specific embodiment of the invention, the distance between the plane 11 of plano-concave mirror 1 and concave surface 12 are
5mm, the distance between first convex surface 21 and the second convex surface 22 of convex lens 2 are 5mm, the radius of curvature of concave surface 12 in plano-concave mirror 1
For 110.94mm, the radius of curvature on the first convex surface 21 and the second convex surface 22 is 368.78mm in convex lens 2, plano-concave mirror 1 it is recessed
The distance between face 12 and the first convex surface 21 of convex lens 2 are 50mm.
When focusing lens work, convex lens 2 is fixed, and plano-concave mirror 1 can be under the driving of driving mechanism (not shown) towards convex
The direction of lens 2 moves, it is assumed that the focal length of entire focusing lens then can be changed in amount of exercise Z.
Focusing length in the present embodiment in 10.64 μm of wavelength of light, initial focal length 750mm are as follows:
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
Focusing lens in present embodiment can be applied to laser three-dimensional scanning etc..
Ginseng Fig. 2 show the structural schematic diagram of lens vibrating type laser scanning system in another embodiment of the present invention, along axis
Line successively includes laser 6, focusing lens, the first galvanometer 3, the second galvanometer 4 and scanning surface 5, wherein focusing lens are by above-mentioned flat
Concave mirror 1 and convex lens 2 form, and the first galvanometer 3 is X galvanometer, and the second galvanometer 4 is Y galvanometer, the mounting means of focusing lens with it is above-mentioned
First embodiment is identical, is no longer repeated herein.
In the installation process of lens vibrating type laser scanning system, laser 6, plano-concave mirror 1, convex lens 2 center will be one
On straight line, and with the first galvanometer 3, the second galvanometer 4 beam inlet center point-blank.
Laser is carbon dioxide continuous wave laser in present embodiment, and the laser beam waist radius of laser emitting is big
In 7.5mm.
Laser beam needs to consider deviation existing for the focus point and scanning surface of laser beam, i.e., when processing to workpiece
Laser generates defocus in working face.The present invention completes laser beam to the defocus school on full work breadth by focusing lens
Just, change the position of plano-concave mirror by motorized precision translation stage to automatically adjust the focal length of optical system, guarantee on entire scanning surface
There is good focal beam spot.
For lens vibrating type laser scanning system, choosing scanning surface central point is that coordinate origin establishes rectangular coordinate system, it is assumed that
(x, y) point on reflection laser Shu Zhixiang scanning surface, then the defocus error calculation formula of system are as follows:
Wherein d is second galvanometer 4 the distance between to scanning surface 5, e be the first galvanometer 3 and 4 mirror surface center of the second galvanometer it
Between distance.
For the lens vibrating type laser scanning system in a specific embodiment of the invention, plano-concave mirror 1 is mobile to 2 direction of convex lens
Distance and adjusting focal length between relationship are as follows:
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
Pass through two formula as above, it is known that scanning element (x, y), user of service can calculate plano-concave mirror 2 should be to convex
The mobile distance Z in 3 direction of lens eliminates defocus error to guarantee that each scanning element is exactly focus point on scanning surface.
Further, in other embodiments, in order to obtain lesser disc of confusion on scanning surface, before focusing lens
Laser beam beam-expanding system can also be increased.
In the present embodiment, focusing system is limited by lens sizes after the existing galvanometer of comparison, the breadth that works is difficult to do big, scanning
Edge light beam focus characteristics in face are very poor, and the present invention can complete the Precision Machining of large scale breadth.
As can be seen from the above technical solutions, focusing lens of the invention and lens vibrating type laser scanning system have following excellent
Point:
Focusing lens structure is simple, and alignment error is small；
Focusing lens make focusing lens be able to maintain relative low temperature without real focus；
For lens vibrating type laser scanning system when incoming laser beam waist radius is greater than 7.5mm, laser is apart from focusing lens
The distance between do not influence focusing effect.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. a kind of focusing lens, which is characterized in that the focusing lens include the plano-concave mirror and convex lens of coaxial arrangement, described flat
Concave mirror includes the plane being oppositely arranged and concave surface, and the convex lens includes the first convex surface and the second convex surface being oppositely arranged, described
Convex lens fixed setting, plano-concave mirror are movably arranged on axis, and the plane of light from plano-concave mirror is incident, successively pass through plano-concave mirror
Concave surface, convex lens the first convex surface after from the second convex surface of convex lens be emitted, between the plane and concave surface of the plano-concave mirror
Distance is 5mm, and the distance between first convex surface and the second convex surface of convex lens are 5mm, and the radius of curvature of concave surface is in plano-concave mirror
110.94mm, the radius of curvature on the first convex surface and the second convex surface is 368.78mm, the concave surface of plano-concave mirror and convex lens in convex lens
The distance between first convex surface of mirror is 50mm.
2. focusing lens according to claim 1, which is characterized in that the material of the plano-concave mirror and convex lens is selenizing
Zinc.
3. focusing lens according to claim 1, which is characterized in that 10.64 μm of the wavelength of light, initial focal length
Focusing length when 750mm are as follows:
Wherein, Δ S is focusing length, and Z is the displacement of plano-concave mirror.
4. a kind of lens vibrating type laser scanning system, which is characterized in that the system successively includes: that laser, right are wanted along axis
Focusing lens described in asking any one of 1~3, the first galvanometer, the second galvanometer and scanning surface.
5. lens vibrating type laser scanning system according to claim 4, which is characterized in that the laser and focusing lens it
Between be equipped with laser beam beam-expanding system.
6. lens vibrating type laser scanning system according to claim 4, which is characterized in that the laser beam of the laser emitting
Waist radius is greater than 7.5mm.
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| CN201510824078.XA CN106773025B (en) | 2015-11-24 | 2015-11-24 | Focusing lens and lens vibrating type laser scanning system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510824078.XA CN106773025B (en) | 2015-11-24 | 2015-11-24 | Focusing lens and lens vibrating type laser scanning system |
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| CN106773025A CN106773025A (en) | 2017-05-31 |
| CN106773025B true CN106773025B (en) | 2019-07-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108941896B (en) * | 2018-07-06 | 2021-04-16 | 武汉光谷航天三江激光产业技术研究院有限公司 | Laser focusing device and laser system |
| CN111168234B (en) * | 2018-11-11 | 2024-06-21 | 上海三克激光科技有限公司 | Beam shaping system and method |
| CN111290117A (en) * | 2019-12-24 | 2020-06-16 | 哈尔滨新光光电科技股份有限公司 | Light beam pointing control method and system |
| CN113484999B (en) * | 2021-07-02 | 2022-04-29 | 沈阳师范大学 | Zoom lens for focusing |
| CN114754329B (en) * | 2022-05-18 | 2024-05-07 | 常州工学院 | Large-angle high-magnification zoom laser illumination lens |
| CN117148565B (en) * | 2023-10-30 | 2024-02-02 | 杭州爱新凯科技有限公司 | Front focusing galvanometer scanning system and scanning method with adjustable multiplying power |
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| CN204338864U (en) * | 2014-12-11 | 2015-05-20 | 广东汉唐量子光电科技有限公司 | A kind of new-type laser output device printed for 3D |
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| US5995131A (en) * | 1996-12-19 | 1999-11-30 | Canon Kabushiki Kaisha | Imaging lens system of scanning optical apparatus |
| CN1218193A (en) * | 1997-11-24 | 1999-06-02 | 华北工学院 | Laser length-varying linear scanning system |
| WO2007006444A1 (en) * | 2005-07-14 | 2007-01-18 | Keysystech Gmbh | Laser scanner ii |
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