CN105904087A - Reflection type high-power double-metal-galvanometer scanning system - Google Patents
Reflection type high-power double-metal-galvanometer scanning system Download PDFInfo
- Publication number
- CN105904087A CN105904087A CN201610475222.8A CN201610475222A CN105904087A CN 105904087 A CN105904087 A CN 105904087A CN 201610475222 A CN201610475222 A CN 201610475222A CN 105904087 A CN105904087 A CN 105904087A
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- China
- Prior art keywords
- mirror
- axis
- galvanometer
- scanning system
- ellipsoidal mirror
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a reflection type high-power double-metal-galvanometer scanning system comprising an off-axis ellipsoidal mirror and an inclined plane mirror. The off-axis ellipsoidal mirror and the inclined plane mirror both have 90-degree beam deflection angles; the connection line of the center of the off-axis ellipsoidal mirror and the center of the inclined plane mirror is perpendicular to the cylindrical surface center axis of the off-axis ellipsoidal mirror and meanwhile coincides with the cylindrical surface center axis of the inclined plane mirror; and the cylindrical surface center axis of the off-axis ellipsoidal mirror is perpendicular to the cylindrical surface center axis of the inclined plane mirror. The reflection type high-power double-metal-galvanometer scanning system is novel in structural design, a dual-lens galvanometer system is adopted, a light path structure is simple, a focusing lens and a galvanometer are synchronous, under the same film coating condition, the energy utilizing efficiency is improved to the maximum extent, and the reflection type high-power double-metal-galvanometer scanning system is suitable for small-range scanning machining of an optical fiber coupling output type laser galvanometer and has better advantages especially in two-dimensional laser scanning machining of a kilowatt and myriawatt level high-power optical fiber coupling output laser device.
Description
Technical field
The present invention relates to vibration mirror scanning technical field, a kind of reflective high power bimetallic vibration mirror scanning
System.
Background technology
It is multiple that laser processing technology covers cut, welding, surface process, punching, micro Process etc.
Laser processing technology, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and processing
The advantages such as untouchable, the process velocity of material and quality, having established laser processing technology is that one can not
The new and high technology substituted.
Present laser cutting account for the main status of whole Laser Processing industry, and carrying along with laser power
Height, the processing technique such as High Power Laser Welding, cladding, surface process also will widely be extended with
Promote, the most especially can faster popularize with High Power Laser Welding, as many at automobile, aviation, boats and ships etc.
The application of individual industry.
Optical fiber coupling output laser because optical fiber pliability, high efficiency coupling, preferable beam quality with
And the appearance of high power laser so that market share becomes increasingly conspicuous, current optical fiber coupling Output of laser
Device multikilowatt has been quite to popularize, and market the most progressively shown by myriawatt level laser instrument, allows optical-fiber laser is all kinds of to be added
Work technique all the more generalizes.
Vibration mirror scanning is famous with high speed, is capable of the quick scanning of all kinds of shape in little areal extent,
And scanning accuracy with repeat high, be mainly used in laser marking, body laser inner carving, laser welding, laser are beaten
Hole rows industry etc., along with stepping up of laser power, vibration mirror scanning application will be extended greatly,
And as the scan mirror of vibration mirror scanning, though machining eyeglass technique is more preferable, plated film industry is the most ripe,
Because direct water-cooling cannot being applied by the high power particularly above power laser of myriawatt level and limited, and
Can direct water-cooling and the metallic reflection type eyeglass of thermal conductive resin, under ensureing less clear aperature,
Still can bear high laser power, this is the advantage being difficult to substitute.And, common vibration mirror scanning
Even if system generally requires more eyeglass composition in the Laser Processing two-dimensional scan course of processing, reduce
Beam energy utilization rate.
Based on the premises, the present invention proposes the reflection that a kind of number of lenses is minimum, capacity usage ratio is the highest
Formula metal galvanometer system, it is based on off-axis ellipsoidal mirror and tapered plane arrangement of mirrors, it is adaptable to optical fiber coupling
Close the vibration mirror scanning two dimension processed and applied of output laser particularly superpower laser.
Summary of the invention
It is an object of the invention to provide a kind of reflective high power bimetallic galvanometer scanning system, to solve
The problem proposed in above-mentioned background technology.
For achieving the above object, the present invention provides following technical scheme: a kind of reflective high power bimetallic
Galvanometer scanning system, including off-axis ellipsoidal mirror and tapered plane reflecting mirror, and described off-axis ellipsoidal mirror and institute
State tapered plane reflecting mirror and be 90 ° of beam deflection angle, described off-axis ellipsoidal mirror center and described tapered plane
Mirror center line is perpendicular to off-axis ellipsoidal mirror cylinder central shaft, the most also with tapered plane reflecting mirror post
Face central shaft overlaps, described off-axis ellipsoidal mirror cylinder central shaft and described tapered plane reflecting mirror cylinder center
Axle is mutually perpendicular to.
Preferably, described off-axis ellipsoidal mirror and tapered plane reflecting mirror are cylindric slant reflection mirror.
Preferably, described off-axis ellipsoidal mirror compatibility focus lamp and two kinds of characteristics of galvanometer.
Preferably, it is equipped with cooling-water duct inside described off-axis ellipsoidal mirror and tapered plane reflecting mirror.
Preferably, described off-axis ellipsoidal mirror incidence focal length is shorter, and outgoing focal length is longer.
Compared with prior art, the invention has the beneficial effects as follows:
(1) present configuration is novel in design, uses two lens galvanometer system, and light channel structure is simple, it is achieved that poly-
Burnt Tong Bu with galvanometer, under identical plating conditions, at utmost improve energy utilization efficiency, it is adaptable to
Optical fiber coupling output class laser instrument galvanometer little range scans processing, especially kilowatt, myriawatt level Gao Gong
More advantage in the two dimensional laser scanning processing of rate optical fiber coupling output laser.
(2) it is equipped with cooling-water duct inside the off-axis ellipsoidal mirror of the present invention and tapered plane reflecting mirror, for straight
Water receiving is cold, improves eyeglass and bears laser power.
(3) the off-axis ellipsoidal mirror of the present invention has two focuses, entrance focus correspondence optical fiber coupling output laser
Go out luminous point, focused spot corresponds to exit focus, based on ellipsoid characteristic, it is possible to increase focus on
Beam quality.
Accompanying drawing explanation
Fig. 1 is the overall work schematic diagram of the present invention；
Fig. 2 is the off-axis ellipsoidal mirror structural representation of the present invention；
Fig. 3 is the tapered plane mirror structure schematic diagram of the present invention；
Fig. 4 is the two lens projection of the present invention；
Fig. 5 is that the A-A of the present invention is to sectional view.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the present invention, and
It is not all, of embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art are not doing
Go out the every other embodiment obtained under creative work premise, broadly fall into the scope of protection of the invention.
Referring to Fig. 1-5, the present invention provides a kind of technical scheme: a kind of reflective high power bimetallic galvanometer
Scanning system, including off-axis ellipsoidal mirror 1 and tapered plane reflecting mirror 2, and described off-axis ellipsoidal mirror 1 with
Described tapered plane reflecting mirror 2 is 90 ° of beam deflection angle, and described off-axis ellipsoidal mirror 1 center is with described
Tapered plane reflecting mirror 2 line of centres is perpendicular to off-axis ellipsoidal mirror cylinder central shaft 3, the most also with tapered plane
Reflecting mirror cylinder central shaft 4 overlaps, and described off-axis ellipsoidal mirror cylinder central shaft 3 is anti-with described tapered plane
Penetrate mirror cylinder central shaft 4 to be mutually perpendicular to.
In the present embodiment, on the basis of ensureing clear aperature utilization rate, in order to reduce eyeglass weight, off axis
Ellipsoidal mirror 1 and tapered plane reflecting mirror 2 are cylindric slant reflection mirror.
In the present embodiment, off-axis ellipsoidal mirror 1 is used as focus lamp or galvanometer, at off-axis ellipsoidal mirror cylinder
When central shaft rotates, do not affect focusing beam characteristics.
In the present embodiment, off-axis ellipsoidal mirror 1 is internal with tapered plane reflecting mirror 2 is equipped with cooling-water duct,
For direct water-cooling, improve eyeglass and bear laser power.
It addition, in the present embodiment, the entrance focus correspondence optical fiber coupling Output of laser of off-axis ellipsoidal mirror 1
Device go out luminous point, described off-axis ellipsoidal mirror 1 has two focuses, in any one focus, point source is sent out
Penetrating light beam, all can converge to another focus through minute surface, the incident focal length of off-axis ellipsoidal mirror 1 is shorter,
Outgoing focal length is longer, it is possible to increase focus on beam quality.
By rotating in off-axis ellipsoidal mirror cylinder central shaft and tapered plane reflecting mirror cylinder when the present invention works
Mandrel certain angle, can realize the little range scans of focussing plane, and the most off-axis ellipsoidal mirror focusing focal length is relatively
Long, Diode laser self compensation focused spot size concordance can be passed through.
Operation principle: optical fiber coupling output laser goes out luminous point on off-axis ellipsoidal mirror 1 entrance focus,
Output beam focuses on through off-axis ellipsoidal mirror 1, focuses on light beam poly-after tapered plane reflecting mirror 2 reflects
Burnt become a certain size a hot spot, focal beam spot size depends on that off-axis ellipsoidal mirror 1 is incident the most burnt
Away from, outgoing effective focal length and the optical fiber core diameter of optical fiber coupling output laser, by small angle rotation from
Axle ellipsoidal mirror cylinder central shaft 3 and tapered plane reflecting mirror cylinder central shaft 4, focusing focal plane is formed necessarily to be swept
Retouch scope, by coupling ellipsoidal mirror cylinder central shaft 3 and tapered plane reflecting mirror cylinder central shaft 4 corner
And turn to, the scanning of any figure can be realized in sweep limits, and in scanning process, focus on light beam
Can be constant.
Present configuration is novel in design, uses two lens galvanometer system, and light channel structure is simple, it is achieved that poly-
Burnt Tong Bu with galvanometer, under identical plating conditions, at utmost improve energy utilization efficiency, it is adaptable to optical fiber
Coupling output class laser instrument galvanometer little range scans processing, especially kilowatt, myriawatt level high-power fiber coupling
Close more advantage in the two dimensional laser scanning processing of output laser.
Although an embodiment of the present invention has been shown and described, for those of ordinary skill in the art
Speech, it is possible to understand that these embodiments can be carried out without departing from the principles and spirit of the present invention
Multiple change, revising, replace and modification, the scope of the present invention is limited by claims and equivalent thereof
Fixed.
Claims (5)
1. a reflective high power bimetallic galvanometer scanning system, it is characterised in that: include off-axis ellipsoid
Mirror and tapered plane reflecting mirror, and described off-axis ellipsoidal mirror is 90 ° of light beams with described tapered plane reflecting mirror
Deflection angle, described off-axis ellipsoidal mirror center is perpendicular to the most ellipse with described tapered plane mirror center line
Coquille cylinder central shaft, also overlaps with tapered plane reflecting mirror cylinder central shaft simultaneously, described off-axis ellipsoid
Face mirror cylinder central shaft is mutually perpendicular to described tapered plane reflecting mirror cylinder central shaft.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is special
Levy and be: described off-axis ellipsoidal mirror and tapered plane reflecting mirror are cylindric slant reflection mirror.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is special
Levy and be: described off-axis ellipsoidal mirror is used as focus lamp and galvanometer.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is special
Levy and be: inside described off-axis ellipsoidal mirror and tapered plane reflecting mirror, be equipped with cooling-water duct.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is special
Levy and be: described off-axis ellipsoidal mirror incidence focal length is shorter, and outgoing focal length is longer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610475222.8A CN105904087A (en) | 2016-06-26 | 2016-06-26 | Reflection type high-power double-metal-galvanometer scanning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610475222.8A CN105904087A (en) | 2016-06-26 | 2016-06-26 | Reflection type high-power double-metal-galvanometer scanning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105904087A true CN105904087A (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610475222.8A Pending CN105904087A (en) | 2016-06-26 | 2016-06-26 | Reflection type high-power double-metal-galvanometer scanning system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735887A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
| CN107561690A (en) * | 2017-10-19 | 2018-01-09 | 山东镭之源激光科技股份有限公司 | A kind of two eyeglasses discrepancy light laser galvanometer system in the same direction |
| CN113649704A (en) * | 2021-10-15 | 2021-11-16 | 苏州市瑞思特智能制造有限公司 | Method for embossing and marking on metallurgical plate and method for detecting steel plate batch |
| CN114966925A (en) * | 2022-06-10 | 2022-08-30 | 上海嘉强自动化技术有限公司 | Reflective broadband integrating mirror and broadband optical fiber laser optical system |
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
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| CN2234843Y (en) * | 1995-09-19 | 1996-09-11 | 张岚生 | Reflector for laser machine tool |
| WO2004008216A3 (en) * | 2002-07-10 | 2004-04-08 | Trumpf Lasertechnik Gmbh | Laser machine tool |
| US20080259425A1 (en) * | 2005-12-23 | 2008-10-23 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Scanner Head for a Laser Machining Device |
| US20100116968A1 (en) * | 2008-11-12 | 2010-05-13 | Industrial Technology Research Institute | Method of focus and automatic focusing apparatus and detecting module thereof |
| CN204353650U (en) * | 2014-12-09 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Optical focus structure and laser process equipment |
| CN204353651U (en) * | 2014-12-09 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Optical focus structure and laser process equipment |
| CN205702846U (en) * | 2016-06-26 | 2016-11-23 | 上海嘉强自动化技术有限公司 | A kind of reflective high power bimetallic galvanometer scanning system |
-
2016
- 2016-06-26 CN CN201610475222.8A patent/CN105904087A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2234843Y (en) * | 1995-09-19 | 1996-09-11 | 张岚生 | Reflector for laser machine tool |
| WO2004008216A3 (en) * | 2002-07-10 | 2004-04-08 | Trumpf Lasertechnik Gmbh | Laser machine tool |
| US20080259425A1 (en) * | 2005-12-23 | 2008-10-23 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Scanner Head for a Laser Machining Device |
| US20100116968A1 (en) * | 2008-11-12 | 2010-05-13 | Industrial Technology Research Institute | Method of focus and automatic focusing apparatus and detecting module thereof |
| CN204353650U (en) * | 2014-12-09 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Optical focus structure and laser process equipment |
| CN204353651U (en) * | 2014-12-09 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Optical focus structure and laser process equipment |
| CN205702846U (en) * | 2016-06-26 | 2016-11-23 | 上海嘉强自动化技术有限公司 | A kind of reflective high power bimetallic galvanometer scanning system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735887A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
| CN107561690A (en) * | 2017-10-19 | 2018-01-09 | 山东镭之源激光科技股份有限公司 | A kind of two eyeglasses discrepancy light laser galvanometer system in the same direction |
| CN113649704A (en) * | 2021-10-15 | 2021-11-16 | 苏州市瑞思特智能制造有限公司 | Method for embossing and marking on metallurgical plate and method for detecting steel plate batch |
| CN114966925A (en) * | 2022-06-10 | 2022-08-30 | 上海嘉强自动化技术有限公司 | Reflective broadband integrating mirror and broadband optical fiber laser optical system |
| CN116423040A (en) * | 2023-03-20 | 2023-07-14 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
| CN116423040B (en) * | 2023-03-20 | 2023-11-28 | 苏州菲镭泰克激光技术有限公司 | Laser welding galvanometer system |
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Application publication date: 20160831 |