CN106735886A - One kind is based on single galvanometer and self adaptation mirror 3D scanning optics - Google Patents
One kind is based on single galvanometer and self adaptation mirror 3D scanning optics Download PDFInfo
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- CN106735886A CN106735886A CN201710082674.4A CN201710082674A CN106735886A CN 106735886 A CN106735886 A CN 106735886A CN 201710082674 A CN201710082674 A CN 201710082674A CN 106735886 A CN106735886 A CN 106735886A
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- mirror
- self adaptation
- adaptation mirror
- galvanometer
- focal length
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
Abstract
The invention discloses one kind based on single galvanometer and self adaptation mirror 3D scanning optics, including the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer；Novel in structural design of the present invention, using single vibration mirror scanning scheme, introduce self adaptation mirror zoom and expand module and focus on focusing module, on the premise of ensureing that eyeglass installation is maintained static, focal beam spot size can either be individually controlled, ensure that focus on light beam is significantly focused again；Optimize galvanometer quantity while equally realizing that 3D is significantly scanned, being rotated around incident light axis in dual-axis rotation does not influence laser reflectivity, improve the laser reflectivity change caused by beam deflection angle；Total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and bear power.
Description
Technical field
It is specially a kind of that light is scanned with self adaptation mirror 3D based on single galvanometer the present invention relates to laser galvanometer scanning technical field
System.
Background technology
Laser processing technology covers various Laser Processing works such as laser cutting, welding, surface treatment, punching, micro Process
Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and untouchable, the process velocity of rapidoprint
With the advantage such as quality, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting account for entirely laser machining the main status of industry, and with the raising of laser power, Gao Gong
The processing technologys such as rate laser welding, cladding, surface treatment will also obtain widely extension and lifting, wherein being swashed with high power especially
Photocoagulation can be popularized faster, such as in automobile, aviation, the application of ship multiple industry.
In Laser industry processed and applied, conventional laser technology scheme is insufficient for all kinds of process requirements, all kinds of multiple
How restricted the treatment application of miscellaneous figure is, is also inconvenient against huge machine tool running, and machining accuracy and speed
In urgent need to be improved, vibration mirror scanning scheme is just arisen at the historic moment.
Vibration mirror scanning is famous with high speed, and the quick of all kinds of shapes can be realized in mm magnitudes or even large-scale m magnitudes
Scanning, and scanning accuracy is high with repeatable accuracy, is mainly used in laser marking, body laser inner carving, laser welding, laser boring industry
Deng, with stepping up for laser power, vibration mirror scanning application will greatly be extended, and sweeping as vibration mirror scanning
Retouch eyeglass, though machining eyeglass technique is more preferably, plated film industry is also all the more ripe, because cannot direct water-cooling will be special by high power
It is the limitation of myriawatt level above power laser application, along with conventional dual galvanometer scanning system two panels galvanometer all can be because of eyeglass
Beam deflection angle and cause the not small change of laser reflectivity, traditional in addition 3D vibration mirror scannings are focused module by displacement,
Light path complexity is increased, while focal beam spot size often has different, Laser Processing breadth is limited to a certain extent.
In high power laser processing problems, it is capable of the metallic reflection type eyeglass of direct water-cooling and thermal conductive resin,
Ensure under less clear aperature, can still bear high laser power, this is the advantage for being difficult to substitute.And, commonly
Galvanometer scanning system generally requires more eyeglass composition in Laser Processing even two-dimensional scan process, reduces light beam
Capacity usage ratio, and reflection type optical path is then relatively more preferable.
Self adaptation mirror, as a kind of variable special optical reflecting optics of curved surface, it is intended that the current displacement focusing mould of substitution
Group.Conventional self adaptation mirror, its curved surface type cover sphere with it is aspherical, sphere self adaptation mirror is used for the smaller light of beam deflection angle
Lu Zhong, and aspherical self adaptation mirror is then usually used in the larger light path of beam deflection angle.Instantly self adaptation mirror, carries on the back by eyeglass
Air pressure is filled with the single air current in face, with minute surface outer gas swaging into pressure difference, self adaptation mirror is changed by the change of pressure difference
Often there is linear relationship in curved surface focal length, self adaptation mirror pressure difference, add metal direct water-cooling structure with focal length, establish self adaptation
The advantage that mirror can not be substituted.
Based on the premises, the present invention proposes one kind based on single galvanometer and self adaptation mirror 3D scanning optics, light path bag
The first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer are included, is based on
The adjustable zoom feature of self adaptation mirror, based on single galvanometer dual-axis rotation characteristic, the thermal conductive resin based on metal material, based on sharp
Light device species plates different high reflectance film layers, is particularly well-suited to kilowatt, the 3D laser of myriawatt level superpower laser is significantly swept
Retouch processed and applied.
The content of the invention
It is above-mentioned to solve it is an object of the invention to provide one kind based on single galvanometer and self adaptation mirror 3D scanning optics
The problem proposed in background technology.
To achieve the above object, the present invention provides following technical scheme：One kind is scanned based on single galvanometer with self adaptation mirror 3D
Optical system, including the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane are anti-
Galvanometer is penetrated, the first self adaptation mirror has identical beam deflection angle with the second self adaptation mirror and centre normal is parallel, composition connects
Continuous zoom expands module；Before the 3rd self adaptation mirror is placed in focal length off-axis paraboloidal mirror, light beam sequentially passes through the first self adaptation
Mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer, the first self adaptation mirror,
Second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer center of lens and beam center weight
Close.
Preferably, the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror are elliptic cylindrical shape reflection
Mirror.
Preferably, the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror mirror surface are concavo-convex
Variable curve.
Preferably, the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror speculum mounting surface have
Single air current.
Preferably, the focal length off-axis paraboloidal mirror is cylindric oblique reflection mirror, focuses on focal length long.
Preferably, the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and
Plane reflection galvanometer band water-cooling channel.
Preferably, the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and
Plane reflection galvanometer eyeglass is the good metal eyeglass of thermal conductivity.
Compared with prior art, the beneficial effects of the invention are as follows：
(1) novel in structural design of the present invention, using single vibration mirror scanning scheme, plane reflection galvanometer possesses dual-axis rotation, i.e.,
Can be rotated around mirror surface, can also be rotated with incident light axis.
(2) optimize galvanometer quantity while equally realizing that 3D is significantly scanned, rotated not around incident light axis in dual-axis rotation
Influence laser reflectivity, improves the laser reflectivity change caused by beam deflection angle.
(3) present invention use total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, significantly carry
Eyeglass high bears power.
(4) the first self adaptation mirror of the invention and the second self adaptation microscope group are combined into continuous zoom and expand module, to parallel
Incident beam carries out expanding or shrink beam for continuously adjustabe, it is therefore intended that while not changing focused spot position, changes and focuses on light
Spot diameter.
(5) the 3rd beam expanding lens of the invention is constituted with off-axis paraboloidal mirror and focuses on focusing module, and the expansion after module is expanded to zoom
Beam hot spot is focused and realizes significantly focusing.
(6) expand module invention introduces self adaptation mirror zoom and focus on focusing module, fixed ensureing that eyeglass is installed
On the premise of motionless, focal beam spot size can either be individually controlled, ensure that focus on light beam is significantly focused again, it is anti-by plane
Penetrate the cooperation of galvanometer dual-axis rotation, it is possible to achieve the scanning application of 3D big width lasers.
Brief description of the drawings
Fig. 1 is overall work schematic diagram of the invention；
Fig. 2 is plane reflection mirror structures schematic diagram of the invention；
Fig. 3 is the structural representation of embodiments of the invention 1；
Fig. 4 is the structural representation of embodiments of the invention 2.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1-4 are referred to, the present invention provides a kind of technical scheme：One kind scans optics based on single galvanometer with self adaptation mirror 3D
System, including the first self adaptation mirror 1, the second self adaptation mirror 2, the 3rd self adaptation mirror 3, focal length off-axis paraboloidal mirror 4 and plane are anti-
Galvanometer 5 is penetrated, the first self adaptation mirror 1 has identical beam deflection angle with the second self adaptation mirror 2 and centre normal is parallel, constituted
Continuous zoom expands module；According to optic path direction, before the 3rd self adaptation mirror 3 is placed in focal length off-axis paraboloidal mirror 4, light
It is anti-that beam sequentially passes through the first self adaptation mirror 1, the second self adaptation mirror 2, the 3rd self adaptation mirror 3, focal length off-axis paraboloidal mirror 4 and plane
Penetrate galvanometer 5, the first self adaptation mirror 1, the second self adaptation mirror 2, the 3rd self adaptation mirror 3, focal length off-axis paraboloidal mirror 4 and plane reflection
The center of lens of galvanometer 5 overlaps with beam center.
In the present invention, consider clear aperature optimize and curved surface deformation accuracy in the case of, the first self adaptation mirror 1, the
Two self adaptation mirrors 2 and the 3rd self adaptation mirror 3 are elliptic cylindrical shape speculum, and cylindroid ratio of long axis to short axis depends on self adaptation mirror
Beam deflection angle.
In the present invention, the first self adaptation mirror 1, the second self adaptation mirror 2 and the speculum of the 3rd self adaptation mirror 3 have single air-flow
Passage, mirror surface is concavo-convex variable curve, and first is changed by being filled with the change of differential pressure of atmospheric pressure in single air current certainly
Adapt to the curved surface focal length of mirror 1, the second self adaptation mirror 2 and the 3rd self adaptation mirror 3.
In the present invention, on the basis of clear aperature utilization rate is ensured, in order to reduce eyeglass weight, and it is easily installed and identification
Eyeglass directionality, focal length off-axis paraboloidal mirror 4 is cylindric slant reflection mirror, and focal length is more long.
In the present invention, the first self adaptation mirror 1, the second self adaptation mirror 2, the 3rd self adaptation mirror 3, focal length off-axis paraboloidal mirror 4 with
And plane reflection galvanometer 5 is the metal material with thermal conductive resin, band water-cooling channel is easy to direct water-cooling, greatly improves mirror
Face laser power damage threshold.
In the present invention, the first self adaptation mirror 1 and the second self adaptation mirror 2 constitute continuous zoom and expand module, the 3rd self adaptation
Mirror 3 is constituted with focal length off-axis paraboloidal mirror 4 and focuses on focusing module.
In the present invention, plane reflection galvanometer 5 possesses dual-axis rotation mode, i.e., can be rotated around mirror surface central shaft 9,
Can be rotated with incident light axis 10.
Operation principle：Collimated light beam glancing incidence to the first self adaptation mirror 1, by the air pressure for adjusting the first self adaptation mirror 1
Pressure difference, change incident beam diverging shrinkage character, the reflected beams by the second self adaptation mirror 2, while according to certain algorithm relation
Control to adjust the differential pressure of atmospheric pressure of the second self adaptation mirror 2 so that be collimated light beam after diverging or the light beam reflection shunk.Among these,
First self adaptation mirror 1 and the second self adaptation mirror 2 constitute continuous zoom and expand module, parallel entrance beam is realized and is expanded or is contracted
Beam so that focal beam spot diameter changes, and do not influence focused spot position simultaneously.Through expanding or shrink beam after directional light
Beam, then glancing incidence is to the minute surface of the 3rd self adaptation mirror 3, be equally based on self adaptation mirror characteristic to laser-beam divergence shrinkage at
Reason, corresponding the reflected beams incide focal length off-axis paraboloidal mirror 4, and to realize that light beam is focused on, focused spot location-dependent query is in the 3rd
Self adaptation mirror 3 and the parameter coordination of focal length off-axis paraboloidal mirror 4, are so capable of achieving the significantly change of focus on light beam focal position.It is poly-
Defocused laser beam is incided on plane reflection galvanometer 5, and rotation is coordinated by the minute surface central shaft 9 of plane reflection galvanometer 5 and incident light axis 10,
In the scanning patter that plane reflection galvanometer can be obtained on any level face for 5 times, add continuous zoom and expand module and focusing
Mutual cooperation between focusing module, can meet the compensation of focused spot position, can guarantee that the lower section of plane reflection galvanometer 5 is same again
Focal beam spot uniformity on one horizontal plane, then based on the focus characteristics long of focal length off-axis paraboloidal mirror 4, that is, realize 3D significantly scan it is sharp
Light processed and applied.
Embodiment 1：
The present embodiment is directed to optical fiber output class laser, after optical-fiber laser output, is collimated by off-axis paraboloidal mirror 6, its
In, optical fiber goes out light spot position and is overlapped with the focus of off-axis paraboloidal mirror 6, and collimated light beam is by the first self adaptation mirror 1 and the second self adaptation
Mirror 2 constitutes continuous zoom and expands module and carry out zoom and expands, and expands light beam again via the 3rd self adaptation mirror 3 and the off-axis parabolic of focal length
Mirror 4 constitutes focusing focusing module and focuses on and focus, and eventually passes biaxial rotated plane reflection galvanometer 5 and reflects.Based on continuous change
The mutual cooperation for expanding module again and focusing between focusing module carries out focal position compensation and spot diameter compensation, based on flat
The dual-axis rotation angular compliance of galvanometer 5 is reflected in face, realizes the scanning application of arbitrary graphic in the lower section 3d space of plane reflection galvanometer 5.
Embodiment 2：
The present embodiment is directed to and freely exports collimated light beam, and plane mirror 7 is coaxially adjusted with the composition light beam of plane mirror 8
Section module, under parallel beam incident, sequentially passes through plane mirror 7 and plane mirror 8, due to that may be produced during incidence
Raw angular deviation and position deviation, so needing the coaxial regulating system pair of light beam that plane mirror 7 is constituted with plane mirror 8
Light beam is coaxially adjusted, then expands module and become by the first self adaptation mirror 1 and the composition continuous zoom of the second self adaptation mirror 2
Expand again, expand light beam and focus on and focus via the 3rd self adaptation mirror 3 and the composition focusing focusing module of focal length off-axis paraboloidal mirror 4,
Biaxial rotated plane reflection galvanometer 5 is eventually passed to reflect.Expanded between module and focusing focusing module based on continuous zoom
Mutual cooperation carry out focal position compensation and spot diameter compensation, it is real based on the dual-axis rotation angular compliance of plane reflection galvanometer 5
The scanning application of arbitrary graphic in the existing lower section 3d space of plane reflection galvanometer 5.
Novel in structural design of the present invention, using single vibration mirror scanning scheme, introduces self adaptation mirror zoom and expands module and gather
Burnt focusing module, on the premise of ensureing that eyeglass installation is maintained static, can either individually control focal beam spot size, can protect again
Card focus on light beam is significantly focused, and breaches traditional bit transposition Jiao's module limitation；Optimize while equally realizing that 3D is significantly scanned
Galvanometer quantity, being rotated around incident light axis in dual-axis rotation does not influence laser reflectivity, improves swashing caused by beam deflection angle
Light reflectivity changes；Total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and hold
By power, while focusing focal length more long, the species according to laser has different plated films, is particularly suited for kilowatt, myriawatt level
The 3D laser significantly scanning machining application of superpower laser.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding can carry out various changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention
And modification, the scope of the present invention be defined by the appended.
Claims (7)
1. a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Including the first self adaptation mirror, second
Self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer, the first self adaptation mirror and second is certainly
Adaptation mirror has identical beam deflection angle and centre normal is parallel, and composition continuous zoom expands module；The 3rd self adaptation mirror
Before being placed in focal length off-axis paraboloidal mirror, light beam sequentially passes through the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, length
Burnt off-axis paraboloidal mirror and plane reflection galvanometer, the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length
Off-axis paraboloidal mirror and plane reflection galvanometer center of lens overlap with beam center.
2. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
State the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror and be elliptic cylindrical shape speculum.
3. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
State the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror mirror surface and be concavo-convex variable curve.
4. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
Stating the first self adaptation mirror, the second self adaptation mirror and the 3rd self adaptation mirror speculum mounting surface has single air current.
5. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
Focal length off-axis paraboloidal mirror is stated for cylindric oblique reflection mirror, focal length is focused on long.
6. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
State the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer band water-cooled
Passage.
7. according to claim 1 a kind of based on single galvanometer and self adaptation mirror 3D scanning optics, it is characterised in that：Institute
State the first self adaptation mirror, the second self adaptation mirror, the 3rd self adaptation mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer eyeglass equal
It is the good metal eyeglass of thermal conductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710082674.4A CN106735886A (en) | 2017-02-16 | 2017-02-16 | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710082674.4A CN106735886A (en) | 2017-02-16 | 2017-02-16 | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics |
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Family
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| CN201710082674.4A Pending CN106735886A (en) | 2017-02-16 | 2017-02-16 | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021056697A1 (en) * | 2019-09-25 | 2021-04-01 | 清华大学 | Multi-reflector laser dynamic focusing system based on variable optical path |
| US11295953B2 (en) | 2019-02-25 | 2022-04-05 | Jiangsu University | Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry |
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| EP1716962A1 (en) * | 2005-04-29 | 2006-11-02 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Device with an adaptive mirror for modifying the focus characteristics of a laser working machine |
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| CN206445360U (en) * | 2017-02-16 | 2017-08-29 | 上海嘉强自动化技术有限公司 | One kind is based on single galvanometer and adaptive mirror 3D scanning optics |
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| DE10027148A1 (en) * | 2000-05-31 | 2001-12-06 | Volkswagen Ag | Laser machining device has focused laser, movably adjustable scanner mirror in beam path; adaptive focusing mirror, deflection mirror, adjustable mirror can be placed before scanner mirror |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11295953B2 (en) | 2019-02-25 | 2022-04-05 | Jiangsu University | Method and apparatus for micromachining semiconductor material from opposing sides through synchronous coordination of laser and electrochemistry |
| WO2021056697A1 (en) * | 2019-09-25 | 2021-04-01 | 清华大学 | Multi-reflector laser dynamic focusing system based on variable optical path |
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Application publication date: 20170531 |