CN205702846U - A kind of reflective high power bimetallic galvanometer scanning system - Google Patents
A kind of reflective high power bimetallic galvanometer scanning system Download PDFInfo
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- CN205702846U CN205702846U CN201620643778.9U CN201620643778U CN205702846U CN 205702846 U CN205702846 U CN 205702846U CN 201620643778 U CN201620643778 U CN 201620643778U CN 205702846 U CN205702846 U CN 205702846U
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- mirror
- ellipsoidal mirror
- tapered plane
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- central shaft
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Abstract
nullThe utility model discloses a kind of reflective high power bimetallic galvanometer scanning system，Including off-axis ellipsoidal mirror and tapered plane reflecting mirror，And ellipsoidal mirror and tapered plane reflecting mirror are 90 ° of beam deflection angle off axis，Off-axis ellipsoidal mirror center is perpendicular to off-axis ellipsoidal mirror cylinder central shaft with tapered plane mirror center line，Also overlap with tapered plane reflecting mirror cylinder central shaft simultaneously，Off-axis ellipsoidal mirror cylinder central shaft is mutually perpendicular to tapered plane reflecting mirror cylinder central shaft，This utility model novel in structural design，Use two lens galvanometer system，Light channel structure is simple，Achieve focusing Tong Bu with galvanometer，Under identical plating conditions，At utmost improve energy utilization efficiency，It is applicable to optical fiber coupling output class laser instrument galvanometer little range scans processing，Especially kilowatt、More advantage in the two dimensional laser scanning processing of myriawatt level high-power optical-fiber coupling output laser.
Description
Technical field
This utility model relates to vibration mirror scanning technical field, a kind of reflective high power bimetallic vibration mirror scanning system
System.
Background technology
Laser processing technology covers the multiple Laser Processing works such as cut, welding, surface process, punching, micro Process
Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Untouchable, process velocity due to laser beam Yu rapidoprint
With advantages such as quality, having established laser processing technology is a kind of new and high technology that can not be substituted.
Present laser cutting account for the main status of whole Laser Processing industry, and along with the raising of laser power, Gao Gong
The processing technique such as rate laser welding, cladding, surface process also will widely be extended and be promoted, and the most especially swash with high power
Photocoagulation can faster be popularized, such as the application in multiple industries such as automobile, aviation, boats and ships.
Optical fiber coupling output laser is because optical fiber pliability, high efficiency coupling, preferable beam quality and high-power
The appearance of laser instrument so that market share becomes increasingly conspicuous, current optical fiber coupling output laser multikilowatt has been quite to popularize,
Market the most progressively shown by myriawatt level laser instrument, allows all kinds of processing technique of optical-fiber laser all the more generalize.
Vibration mirror scanning is famous with high speed, is capable of the quick scanning of all kinds of shape, and scanning essence in little areal extent
Spend and repeat high, being mainly used in laser marking, body laser inner carving, laser welding, laser boring industry etc., along with laser power
Stepping up, vibration mirror scanning application will be extended greatly, and as the scan mirror of vibration mirror scanning, though machining eyeglass
Technique is more preferable, and plated film industry is the most ripe, because of cannot direct water-cooling will be by the high power particularly above power of myriawatt level
The restriction of laser application, and can direct water-cooling and the metallic reflection type eyeglass of thermal conductive resin, ensureing less logical light
Under aperture, still can bear high laser power, this is the advantage being difficult to substitute.And, common galvanometer scanning system exists
Even if the Laser Processing two-dimensional scan course of processing generally requires more eyeglass composition, reduce beam energy utilization rate.
Based on the premises, the utility model proposes the reflective gold that a kind of number of lenses is minimum, capacity usage ratio is the highest
Belonging to galvanometer system, it is based on off-axis ellipsoidal mirror and tapered plane arrangement of mirrors, it is adaptable to optical fiber coupling output laser is special
It it is the vibration mirror scanning two dimension processed and applied of superpower laser.
Utility model content
The purpose of this utility model is to provide a kind of reflective high power bimetallic galvanometer scanning system, above-mentioned to solve
The problem proposed in background technology.
For achieving the above object, the following technical scheme of this utility model offer: a kind of reflective high power bimetallic galvanometer
Scanning system, including off-axis ellipsoidal mirror and tapered plane reflecting mirror, and described off-axis ellipsoidal mirror and described tapered plane reflecting mirror
Being 90 ° of beam deflection angle, described off-axis ellipsoidal mirror center is perpendicular to the most ellipse with described tapered plane mirror center line
Coquille cylinder central shaft, also overlaps with tapered plane reflecting mirror cylinder central shaft simultaneously, described off-axis ellipsoidal mirror cylinder center
Axle is mutually perpendicular to described tapered plane reflecting mirror cylinder central shaft.
Preferably, described off-axis ellipsoidal mirror and tapered plane reflecting mirror are cylindric slant reflection mirror.
Preferably, described off-axis ellipsoidal mirror is used as focus lamp and galvanometer.
Preferably, it is equipped with cooling-water duct inside described off-axis ellipsoidal mirror and tapered plane reflecting mirror.
Preferably, the entrance focus correspondence optical fiber of described off-axis ellipsoidal mirror coupling output laser go out luminous point, wherein,
Off-axis ellipsoidal mirror has two focuses, is divided into entrance focus and exit focus, and focus is corresponding with off-axis ellipsoidal mirror minute surface center
Forming incident focal length and outgoing focal length, incident focal length is shorter, and outgoing focal length is longer, the transmitting light beam of point source in arbitrary focus
Bundle, all can converge to another focus through minute surface, and entrance focus is the focus that distance axis ellipsoidal mirror minute surface centre distance is short.
Preferably, described off-axis ellipsoidal mirror incidence focal length is shorter, focuses on focal length longer.
Compared with prior art, the beneficial effects of the utility model are:
(1) this utility model novel in structural design, uses two lens galvanometer system, and light channel structure is simple, it is achieved that focus on
Tong Bu with galvanometer, under identical plating conditions, at utmost improve energy utilization efficiency, it is adaptable to optical fiber coupling output class laser instrument
The little range scans of galvanometer is processed, especially kilowatt, the two dimensional laser scanning of myriawatt level high-power optical-fiber coupling output laser adds
More advantage in work.
(2) it is equipped with cooling-water duct inside off-axis ellipsoidal mirror of the present utility model and tapered plane reflecting mirror, for straight
Water receiving is cold, improves eyeglass and bears laser power.
(3) off-axis ellipsoidal mirror of the present utility model entrance focus correspondence optical fiber coupling output laser go out luminous point,
And have two entrance focus on off-axis ellipsoidal mirror, it is possible to increase focus on beam quality.
Accompanying drawing explanation
Fig. 1 is overall work schematic diagram of the present utility model；
Fig. 2 is off-axis ellipsoidal mirror structural representation of the present utility model；
Fig. 3 is tapered plane mirror structure schematic diagram of the present utility model；
Fig. 4 is two lens projection of the present utility model；
Fig. 5 is that A-A of the present utility model is to sectional view.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
Fig. 1-5, a kind of technical scheme of this utility model offer: a kind of reflective high power bimetallic vibration mirror scanning are provided
System, including off-axis ellipsoidal mirror 1 and tapered plane reflecting mirror 2, and described off-axis ellipsoidal mirror 1 and described tapered plane reflecting mirror 2
Being 90 ° of beam deflection angle, described off-axis ellipsoidal mirror 1 center and described tapered plane reflecting mirror 2 line of centres are perpendicular to off axis
Ellipsoidal mirror cylinder central shaft 3, also overlaps with tapered plane reflecting mirror cylinder central shaft 4 simultaneously, described off-axis ellipsoidal mirror cylinder
Central shaft 3 is mutually perpendicular to described tapered plane reflecting mirror cylinder central shaft 4.
In the present embodiment, on the basis of ensureing clear aperature utilization rate, in order to reduce eyeglass weight, off-axis ellipsoidal mirror 1
It is cylindric slant reflection mirror with tapered plane reflecting mirror 2, but is not limited to cylindric slant reflection mirror.
In the present embodiment, off-axis ellipsoidal mirror 1 is used as focus lamp and galvanometer, rotates at off-axis ellipsoidal mirror cylinder central shaft
Time, do not affect focusing beam characteristics.
In the present embodiment, off-axis ellipsoidal mirror 1 is internal with tapered plane reflecting mirror 2 is equipped with cooling-water duct, for directly
Water-cooled, improves eyeglass and bears laser power.
It addition, in the present embodiment, the entrance focus correspondence optical fiber coupling output laser of off-axis ellipsoidal mirror 1 go out light
Point, wherein, off-axis ellipsoidal mirror 1 has two focuses, is divided into entrance focus and exit focus, focus and off-axis ellipsoidal mirror 1 mirror
Center, face is correspondingly formed incident focal length and outgoing focal length, and incident focal length is shorter, and outgoing focal length is longer, point source in arbitrary focus
Launch light beam, all can converge to another focus through minute surface, it is possible to increase focus on beam quality, and entrance focus is distance
The focus that axle ellipsoidal mirror 1 minute surface centre distance is short, the incident focal length of off-axis ellipsoidal mirror 1 is shorter, focuses on focal length longer.
By rotating off-axis ellipsoidal mirror cylinder central shaft and tapered plane reflecting mirror cylinder center during utility model works
Axle certain angle, can realize the little range scans of focussing plane, and the most off-axis ellipsoidal mirror focusing focal length is longer, can pass through Diode laser
Self compensation focused spot size concordance.
Operation principle: optical fiber coupling output laser goes out luminous point on off-axis ellipsoidal mirror 1 entrance focus, output beam warp
Cross off-axis ellipsoidal mirror 1 to focus on, focus on light beam after tapered plane reflecting mirror 2 reflects, be focused into a certain size a hot spot,
Focal beam spot size depends on the incident effective focal length of off-axis ellipsoidal mirror 1, outgoing effective focal length and optical fiber coupling Output of laser
The optical fiber core diameter of device, by small angle rotation off-axis ellipsoidal mirror cylinder central shaft 3 and tapered plane reflecting mirror cylinder central shaft 4,
Focus on focal plane and form certain sweep limits, by coupling ellipsoidal mirror cylinder central shaft 3 and tapered plane reflecting mirror cylinder central shaft 4
Corner and turning to, can realize the scanning of any figure in sweep limits, and in scanning process, focuses on light beam performance constant.
This utility model novel in structural design, uses two lens galvanometer system, and light channel structure is simple, it is achieved that focuses on and shakes
Mirror synchronizes, and under identical plating conditions, at utmost improves energy utilization efficiency, it is adaptable to optical fiber coupling output class laser instrument galvanometer
Little range scans is processed, especially kilowatt, in the processing of the two dimensional laser scanning of myriawatt level high-power optical-fiber coupling output laser
More advantage.
Embodiment the most of the present utility model, for the ordinary skill in the art,
It is appreciated that in the case of without departing from principle of the present utility model and spirit and these embodiments can be carried out multiple change, repair
Changing, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a reflective high power bimetallic galvanometer scanning system, it is characterised in that: include off-axis ellipsoidal mirror and tapered plane
Reflecting mirror, and described off-axis ellipsoidal mirror and described tapered plane reflecting mirror be 90 ° of beam deflection angle, described off-axis ellipsoidal mirror
Center and described tapered plane mirror center line are perpendicular to off-axis ellipsoidal mirror cylinder central shaft, the most also reflect with tapered plane
Mirror cylinder central shaft overlaps, and described off-axis ellipsoidal mirror cylinder central shaft is the most vertical with described tapered plane reflecting mirror cylinder central shaft
Directly.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is characterised in that: described from
Axle ellipsoidal mirror and tapered plane reflecting mirror are cylindric slant reflection mirror.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is characterised in that: described from
Axle ellipsoidal mirror is used as focus lamp and galvanometer.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is characterised in that: described from
It is equipped with cooling-water duct inside axle ellipsoidal mirror and tapered plane reflecting mirror.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is characterised in that: described from
Axle ellipsoidal mirror entrance focus correspondence optical fiber coupling output laser go out luminous point, wherein, off-axis ellipsoidal mirror has two Jiao
Point, is divided into entrance focus and exit focus, focus and off-axis ellipsoidal mirror minute surface center to be correspondingly formed incident focal length burnt with outgoing
Away from, incident focal length is shorter, and outgoing focal length is longer, and in arbitrary focus, the transmitting light beam of point source, all can converge through minute surface
To another focus, and entrance focus is the focus that distance axis ellipsoidal mirror minute surface centre distance is short.
One the most according to claim 1 reflective high power bimetallic galvanometer scanning system, it is characterised in that: described from
Axle ellipsoidal mirror incidence focal length is shorter, focuses on focal length longer.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620643778.9U CN205702846U (en) | 2016-06-26 | 2016-06-26 | A kind of reflective high power bimetallic galvanometer scanning system |
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| CN201620643778.9U CN205702846U (en) | 2016-06-26 | 2016-06-26 | A kind of reflective high power bimetallic galvanometer scanning system |
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| CN205702846U true CN205702846U (en) | 2016-11-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105904087A (en) * | 2016-06-26 | 2016-08-31 | 上海嘉强自动化技术有限公司 | Reflection type high-power double-metal-galvanometer scanning system |
| CN110095863A (en) * | 2019-03-05 | 2019-08-06 | 天津欧斯迪医疗科技有限公司 | A kind of optical tomography scanning means |
| CN116909014A (en) * | 2023-09-11 | 2023-10-20 | 之江实验室 | Elliptic surface-based galvanometer plane scanning device and scanning method |
-
2016
- 2016-06-26 CN CN201620643778.9U patent/CN205702846U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105904087A (en) * | 2016-06-26 | 2016-08-31 | 上海嘉强自动化技术有限公司 | Reflection type high-power double-metal-galvanometer scanning system |
| CN110095863A (en) * | 2019-03-05 | 2019-08-06 | 天津欧斯迪医疗科技有限公司 | A kind of optical tomography scanning means |
| CN116909014A (en) * | 2023-09-11 | 2023-10-20 | 之江实验室 | Elliptic surface-based galvanometer plane scanning device and scanning method |
| CN116909014B (en) * | 2023-09-11 | 2023-12-01 | 之江实验室 | Elliptic surface-based galvanometer plane scanning device and scanning method |
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