CN204353651U - Optical focus structure and laser process equipment - Google Patents
Optical focus structure and laser process equipment Download PDFInfo
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- CN204353651U CN204353651U CN201420773295.1U CN201420773295U CN204353651U CN 204353651 U CN204353651 U CN 204353651U CN 201420773295 U CN201420773295 U CN 201420773295U CN 204353651 U CN204353651 U CN 204353651U
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- paraboloidal mirror
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- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 29
- 230000008569 process Effects 0.000 title claims abstract description 28
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 230000011514 reflex Effects 0.000 claims abstract description 4
- 239000004606 Fillers/Extenders Substances 0.000 claims description 10
- 238000003698 laser cutting Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004447 accommodation reflex Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
The utility model relates to a kind of optical focus structure and laser process equipment.A kind of optical focus structure, for in laser process equipment, comprise the speculum that the transmission direction along laser beam sets gradually, paraboloidal mirror and ellipsoidal mirror, described speculum is arranged rotationally and the incident direction of relative laser bundle tilts, reflex on described paraboloidal mirror to make laser beam along the direction of the symmetry axis being parallel to described paraboloidal mirror, the contiguous described speculum of described paraboloidal mirror arrange and its opening towards described speculum, the inner surface of described paraboloidal mirror is the first reflecting surface, the inner surface of described ellipsoidal mirror is the second reflecting surface, described second reflecting surface is towards described speculum and described paraboloidal mirror, one of them focus of the elliptic contour of described ellipsoidal mirror overlaps with the focus of described paraboloidal mirror.By adopting described optical focus structure, the stability of layout of described laser process equipment is higher.
Description
Technical field
The utility model relates to a kind of optical texture, particularly relates to a kind of optical focus structure and adopts the laser process equipment of this optical focus structure.
Background technology
Laser, due to the advantage of its high brightness, high directivity, high monochromaticity and high coherence, has been widely used in the importance of the national products such as scientific research, national defence, industry.General laser scanning manufacturing equipment, as laser cutting device, its light path system mainly contains three kinds of modes: fixed light path, flight light path, half flight light path.The laser scanning manufacturing equipment of these three kinds of modes generally comprises: the laser instrument, collimator and extender mirror, miter angle speculum and the condenser lens (i.e. field flattening lens or telecentric lens) that set gradually along optical path direction.At present, generally laser instrument and collimator and extender mirror integrated to form LASER Light Source, the laser beam that laser instrument produces is expanded by collimator and extender mirror, reduce the angle of divergence with the diameter of expansion of laser light bundle simultaneously, thus obtain approximately parallel laser beam, then a slice is adopted or multi-disc miter angle is counter establishes mirror that laser beam reflection is imported condenser lens to focus on, thus by laser beam converge on material to be processed, make surface portion generating gasification or the liquefaction of rapidoprint, then adopt certain way to gasify or liquefaction portion removing, thus realize laser cutting.
In use, generally by miter angle speculum and condenser lens integrated, to form optical focus structure.Laser process equipment need laser beam that LASER Light Source is launched exactly with the optical axis alignment of this focusing optical structure.But LASER Light Source and focusing optical structure are all comparatively complicated, size is comparatively large, and heavier-weight, so the optical axis adjustment being difficult to laser beam optical axis and the focusing optical structure sent by LASER Light Source overlaps.For this reason, generally need to arrange multi-disc miter angle speculum, cooperative mechanical five times regualting frame is to adjust the position of LASER Light Source and two bit scan galvanometers simultaneously.But the adjustment process of mechanical five times regualting frame is comparatively complicated, and its stability is not high.In addition, through the reflection of repeatedly miter angle speculum, the energy loss of laser beam is serious, also makes the portion of energy of miter angle mirror absorption laser beam cause the thermal deformation of self, thus affects light path resistance to overturning.
Utility model content
Based on this, be necessary the optical focus structure providing a kind of stability of layout higher and the laser process equipment adopting this optical focus structure.
A kind of optical focus structure, for in laser process equipment, comprise the speculum that the transmission direction along laser beam sets gradually, paraboloidal mirror and ellipsoidal mirror, described speculum is arranged rotationally and the incident direction of relative laser bundle tilts, reflex on described paraboloidal mirror to make laser beam along the direction of the symmetry axis being parallel to described paraboloidal mirror, the contiguous described speculum of described paraboloidal mirror arrange and its opening towards described speculum, the inner surface of described paraboloidal mirror is the first reflecting surface, the inner surface of described ellipsoidal mirror is the second reflecting surface, described second reflecting surface is towards described speculum and described paraboloidal mirror, one of them focus of the elliptic contour of described ellipsoidal mirror overlaps with the focus of described paraboloidal mirror.
Wherein in an embodiment, described paraboloidal mirror and described ellipsoidal mirror one-body molded, the major axis of the elliptic contour of described ellipsoidal mirror is parallel with the symmetry axis of described paraboloidal mirror or vertical.
Wherein in an embodiment, described paraboloidal mirror and described ellipsoidal mirror one-body molded, the major axis of the elliptic contour of described ellipsoidal mirror and the symmetry axis oblique of described paraboloidal mirror.
Wherein in an embodiment, the inner surface of described paraboloidal mirror is provided with reflective coating to form described first reflecting surface, and the inner surface of described ellipsoidal mirror is provided with reflective coating to form described second reflecting surface.
Wherein in an embodiment, described speculum is between two focuses of the elliptic contour of described ellipsoidal mirror.
A kind of laser process equipment, comprise laser instrument that the transmission direction along laser beam sets gradually, collimator and extender mirror, optical focus structure as above described in any one, and nozzle, the laser beam transmitted by described collimator and extender mirror accepted by the speculum of described optical focus structure, described nozzle is away from described paraboloidal mirror, and a focal point settings of contiguous described ellipsoidal mirror and can towards described focus inject high pressure assist gas.
Wherein in an embodiment, described laser process equipment is laser cutting device.
For above-mentioned laser process equipment, when incoming laser beam advances or retrogressing along incident direction relative to speculum, or when carrying out biased relative to its incident direction, all without the need to carrying out any adjustment to laser process equipment, the laser beam leaving ellipsoidal mirror just can be made to keep identical focal position, ensure that the stability of light path.
Accompanying drawing explanation
By the more specifically explanation of the preferred embodiment of the present utility model shown in accompanying drawing, above-mentioned and other object of the present utility model, Characteristics and advantages will become more clear.Reference numeral identical in whole accompanying drawing indicates identical part, and does not deliberately draw accompanying drawing by actual size equal proportion convergent-divergent, focuses on purport of the present utility model is shown.
Fig. 1 is the schematic diagram after the optical focus structure removing speculum in an embodiment;
Fig. 2 is for the structure of optical focus shown in Fig. 1 is along the sectional view of II-II line;
Fig. 3 is applied to the schematic diagram in laser process equipment for the structure of optical focus shown in Fig. 1;
Fig. 4 is another view of the structure of optical focus shown in Fig. 3;
The view again that Fig. 5 is the structure of optical focus shown in Fig. 3;
Fig. 6 is the optical focus structural representation in another embodiment.
Detailed description of the invention
For enabling above-mentioned purpose of the present utility model, feature and advantage become apparent more, are described in detail detailed description of the invention of the present utility model below in conjunction with accompanying drawing.Set forth a lot of detail in the following description so that fully understand the utility model.But the utility model can be much different from alternate manner described here to implement, those skilled in the art can when doing similar improvement without prejudice to when the utility model intension, and therefore the utility model is by the restriction of following public concrete enforcement.
Refer to Fig. 1 to Fig. 3, the laser process equipment of an embodiment, comprise laser instrument, collimator and extender mirror, optical focus structure 100 and the nozzle 200 (see Fig. 3) that the transmission direction along laser beam 105 sets gradually.Laser instrument produces laser beam 105 and expands laser beam 105 via collimator and extender mirror.After this laser beam 105 arrives at workpiece via after optical focus structure 100 and laser scanning mechanism 200, to process workpiece.Optical focus structure 100 pairs of laser beams 105 produce focussing force, and laser beam 105 is focused on workpiece.Nozzle 200 ejects high pressure assist gas along the direction of laser beam 105, thus to coordinate laser beam 105 pairs of workpiece to process.In the present embodiment.In the present embodiment, this laser process equipment is laser cutting device, and the wave-length coverage of incoming laser beam 105 is 200 ~ 12000 nanometers.
Optical focus structure 100 comprises speculum 10, paraboloidal mirror 30 and the ellipsoidal mirror 50 that the transmission direction along laser beam 105 sets gradually.Speculum 10 is accepted the laser beam 105 that transmits from collimator and extender mirror and is reflexed to paraboloidal mirror 30, and laser beam 105 reflexes on ellipsoidal mirror 50 by paraboloidal mirror 30, and then on reflection workpiece.
Speculum 10 is level crossing and arranges rotationally and the transmission direction of relative laser bundle 105 inclination, to be reflexed on paraboloidal mirror 30 by laser beam 105.In the present embodiment, laser beam 105 arrives on speculum 10 in the horizontal direction, and speculum 10 tilts upward setting.Paraboloidal mirror 30 near reflection mirror 10 is arranged, and its opening is towards speculum 10.The symmetry axis 31 relative reflection mirror 10 of paraboloidal mirror 30 tilts, and is parallel to the laser beam 105 that speculum 10 reflects back.The inner surface 33 of paraboloidal mirror 30 is provided with high reverse--bias rete to form the first reflecting surface, for laser beam 105 is reflexed to ellipsoidal mirror 50.Ellipsoidal mirror 50 is towards speculum 10 and paraboloidal mirror 30, and its opening inner surface 51 is provided with high reverse--bias rete to form the second reflecting surface, for laser beam 105 is reflexed to workpiece.The elliptic contour major axis 53 of ellipsoidal mirror 50 overlaps with the symmetry axis 31 of paraboloidal mirror 30, and the elliptic contour of ellipsoidal mirror 50 focus 55 overlaps with the focus 35 of paraboloidal mirror 30.Paraboloidal mirror 30 is one-body molded by metal material with ellipsoidal mirror 30.In the present embodiment, the opening direction of paraboloidal mirror 30 is tilted to down, contrary with the incline direction of speculum 10, and another focus 57 of the elliptic contour of ellipsoidal mirror 50 is in the side of speculum 10 away from paraboloidal mirror 30, namely speculum 10 is arranged between two focuses 55,57 of the elliptic contour of ellipsoidal mirror 50.
According to the reflection law in paraboloidal characteristic and optics, be parallel to the laser beam 105 that symmetry axis 31 incides paraboloidal mirror 30, the focus 35 inherently passing through paraboloidal mirror 30 after the inner surface 33 of paraboloidal mirror 30 reflects, namely focus 35 is the convergent point of the laser beam 105 after reflection, and the laser beam 105 after reflection sends as by focus 35.Simultaneously, according to the reflection law in the fundamental property of ellipsoid and optics, the laser beam 105 sent by the focus 55 (being also the focus 35 of paraboloidal mirror 30) of the elliptic contour of ellipsoidal mirror 50 simultaneously must converge at another focus 57 of the elliptic contour of ellipsoidal mirror 50 after ellipsoidal mirror 50 reflects.Namely laser beam 105 converges at the focus 57 of ellipsoidal mirror 50 after being reflected by paraboloidal mirror 30 and ellipsoidal mirror 50.In the present embodiment, after laser beam 105 reflects via ellipsoidal mirror 50, its optical axis is perpendicular to the optical axis of the laser beam 105 be incident on speculum 10.
The focus 57 of the contiguous ellipsoidal mirror 50 of nozzle 200 is arranged, and it can along being parallel to the direction of laser beam 105 to focus 57 place inject high pressure assist gas.
Refer to Fig. 4 and Fig. 5, by accommodation reflex mirror 10, the laser beam 105 being incident to speculum 10 can be made identical or contrary with the optical axis direction of the laser beam 105 leaving ellipsoidal mirror 50.
Refer to Fig. 6, in another embodiment, the elliptic contour major axis 71 of ellipsoidal mirror 70 is arranged at an angle with the symmetry axis 81 of paraboloidal mirror 80, and the elliptic contour of ellipsoidal mirror 70 focus 75 overlaps with the focus 85 of paraboloidal mirror 80.Paraboloidal mirror 80 is one-body molded by metal material with ellipsoidal mirror 70.
Laser process equipment of the present utility model, to advance relative to speculum 10 along the incident direction of laser beam 105 when incident laser source or retreat, or when carrying out biased to the incident direction of laser beam 105, all without the need to carrying out any adjustment to laser process equipment, the laser beam 105 leaving ellipsoidal mirror 50 just can be made to keep identical focal position, ensure that the stability of light path.In addition, when the incident direction of incoming laser beam 105 and position all change, only need the position and the angle that adjust speculum 10, laser beam 105 is made to be incident on paraboloidal mirror 30 along the direction parallel with symmetry axis 31, the laser beam 105 leaving ellipsoidal mirror 50 can be made to keep identical focal position, make the optical path adjusting of laser beam 105 comparatively easy, reduce maintenance cost.
This laser process equipment owing to have employed above-mentioned optical focus structure 100, can reduce the f-theta lens in order to focus on or telecentric lens, thus decrease its manufacturing cost.
Because paraboloidal mirror 30 and ellipsoidal mirror 50 adopt same material one-body molded, the installation and debugging of relative position and relative angle etc. between the two can be avoided, reduce manufacturing cost.
Optical focus structure 100 of the present utility model is applied to the laser process equipment of fixed light path, as in laser cutting device time, it can improve stability of layout, improve the stability of laser scanning manufacturing quality, improve light path debugging efficiency, reduce maintenance cost, be especially suitable for being applied in flight light path and half flight light path.Laser process equipment only need be constant in its direction of maintenance always maintaining incoming laser beam 105, do not need to maintain incoming laser beam 105 conllinear (namely maintain direction and position all constant) all the time, thus the optical focus structure solving other types needs to maintain a difficult problem for its direction conllinear all the time.
And along with the development of laser cutting technique, present laser split requirement is more and more accurate, the demand of Solid Laser Precise Cutting Technology is increasing, increasing application needs to carry out laser assisted microprocessing, meet current demand so more difficult, and adopt the laser cutting device section of the optical focus structure 100 in this case to carry out laser assisted microprocessing.In addition, because the size of general laser light source part and weight are all large than optical focus structure, and laser light source part internal structure is also more complicated, make improvements also more complicated, cost is higher.And the optical focus structure 100 of this case adjusts optical path direction with concluding the business.
Be appreciated that, the elliptic contour major axis 53 of ellipsoidal mirror 50 might not be parallel or vertical with the symmetry axis 31 of paraboloidal mirror 30, as long as make the elliptic contour of ellipsoidal mirror 50 focus 55 overlap with the focus 35 of paraboloidal mirror 30, and ellipsoidal mirror 50 towards paraboloidal mirror 30 to accept the laser beam 105 that paraboloidal mirror 30 reflects back, namely ellipsoidal mirror 50 elliptic contour major axis 53 can with symmetry axis 31 oblique of paraboloidal mirror 30
The above embodiment only have expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (7)
1. an optical focus structure, for in laser process equipment, it is characterized in that, comprise the speculum that the transmission direction along laser beam sets gradually, paraboloidal mirror and ellipsoidal mirror, described speculum is arranged rotationally and the incident direction of relative laser bundle tilts, reflex on described paraboloidal mirror to make laser beam along the direction of the symmetry axis being parallel to described paraboloidal mirror, the contiguous described speculum of described paraboloidal mirror arrange and its opening towards described speculum, the inner surface of described paraboloidal mirror is the first reflecting surface, the inner surface of described ellipsoidal mirror is the second reflecting surface, described second reflecting surface is towards described speculum and described paraboloidal mirror, one of them focus of the elliptic contour of described ellipsoidal mirror overlaps with the focus of described paraboloidal mirror.
2. optical focus structure as claimed in claim 1, is characterized in that, described paraboloidal mirror and described ellipsoidal mirror one-body molded, the major axis of the elliptic contour of described ellipsoidal mirror is parallel with the symmetry axis of described paraboloidal mirror or vertical.
3. optical focus structure as claimed in claim 1, is characterized in that, described paraboloidal mirror and described ellipsoidal mirror one-body molded, the major axis of the elliptic contour of described ellipsoidal mirror and the symmetry axis oblique of described paraboloidal mirror.
4. optical focus structure as claimed in claim 1, it is characterized in that, the inner surface of described paraboloidal mirror is provided with reflective coating to form described first reflecting surface, and the inner surface of described ellipsoidal mirror is provided with reflective coating to form described second reflecting surface.
5. optical focus structure as claimed in claim 1, is characterized in that: described speculum is between two focuses of the elliptic contour of described ellipsoidal mirror.
6. a laser process equipment, it is characterized in that, comprise laser instrument that the transmission direction along laser beam sets gradually, collimator and extender mirror, optical focus structure according to any one of Claims 1 to 5, and nozzle, the laser beam transmitted by described collimator and extender mirror accepted by the speculum of described optical focus structure, described nozzle is away from described paraboloidal mirror, and a focal point settings of contiguous described ellipsoidal mirror and can towards described focus inject high pressure assist gas.
7. laser process equipment as claimed in claim 6, is characterized in that: described laser process equipment is laser cutting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420773295.1U CN204353651U (en) | 2014-12-09 | 2014-12-09 | Optical focus structure and laser process equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420773295.1U CN204353651U (en) | 2014-12-09 | 2014-12-09 | Optical focus structure and laser process equipment |
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| CN204353651U true CN204353651U (en) | 2015-05-27 |
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| CN201420773295.1U Expired - Fee Related CN204353651U (en) | 2014-12-09 | 2014-12-09 | Optical focus structure and laser process equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105904087A (en) * | 2016-06-26 | 2016-08-31 | 上海嘉强自动化技术有限公司 | Reflection type high-power double-metal-galvanometer scanning system |
| CN111487764A (en) * | 2020-05-25 | 2020-08-04 | 清华大学 | Laser dynamic focusing system based on parabolic reflector folding light path |
-
2014
- 2014-12-09 CN CN201420773295.1U patent/CN204353651U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105904087A (en) * | 2016-06-26 | 2016-08-31 | 上海嘉强自动化技术有限公司 | Reflection type high-power double-metal-galvanometer scanning system |
| CN111487764A (en) * | 2020-05-25 | 2020-08-04 | 清华大学 | Laser dynamic focusing system based on parabolic reflector folding light path |
| CN111487764B (en) * | 2020-05-25 | 2021-05-18 | 清华大学 | Laser dynamic focusing system based on parabolic reflector folding light path |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150527 |
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| CF01 | Termination of patent right due to non-payment of annual fee |