CN106735887A - A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics - Google Patents
A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics Download PDFInfo
- Publication number
- CN106735887A CN106735887A CN201710082685.2A CN201710082685A CN106735887A CN 106735887 A CN106735887 A CN 106735887A CN 201710082685 A CN201710082685 A CN 201710082685A CN 106735887 A CN106735887 A CN 106735887A
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- China
- Prior art keywords
- galvanometer
- laser
- total
- convex surface
- concave ellipsoidal
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
Abstract
The invention discloses a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, novel in structural design of the present invention, using single vibration mirror scanning scheme, optimize galvanometer quantity while equally realizing that 3D is significantly scanned, being rotated around incident light axis in dual-axis rotation does not influence laser reflectivity, improve the laser reflectivity change caused by beam deflection angle, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and bear power, focusing focal length simultaneously more long, by the bit shift compensation for expanding focus module, species according to laser has different plated films, it is particularly suited for kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
Description
Technical field
The present invention relates to laser galvanometer scanning technical field, specially a kind of single galvanometer total-reflection type displacement focusing 3D scannings
Optical system.
Background technology
Laser processing technology covers various Laser Processing works such as laser cutting, welding, surface treatment, punching, micro Process
Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and untouchable, the process velocity of rapidoprint
With the advantage such as quality, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting account for entirely laser machining the main status of industry, and with the raising of laser power, Gao Gong
The processing technologys such as rate laser welding, cladding, surface treatment will also obtain widely extension and lifting, wherein being swashed with high power especially
Photocoagulation can be popularized faster, such as in automobile, aviation, the application of ship multiple industry.
In Laser industry processed and applied, conventional laser technology scheme is insufficient for all kinds of process requirements, all kinds of multiple
How restricted the treatment application of miscellaneous figure is, is also inconvenient against huge machine tool running, and machining accuracy and speed
In urgent need to be improved, vibration mirror scanning scheme is just arisen at the historic moment.
Vibration mirror scanning is famous with high speed, and the quick of all kinds of shapes can be realized in mm magnitudes or even large-scale m magnitudes
Scanning, and scanning accuracy is high with repetition, is mainly used in laser marking, body laser inner carving, laser welding, laser boring industry etc.,
With stepping up for laser power, vibration mirror scanning application will greatly be extended, and as the scanning of vibration mirror scanning
Eyeglass, though machining eyeglass technique is more preferably, plated film industry is also all the more ripe, because cannot direct water-cooling will be particularly by high power
The limitation of myriawatt level above power laser application, along with conventional dual galvanometer scanning system two panels galvanometer all can be because of eyeglass
Beam deflection angle and cause the not small change of laser reflectivity, and limit Laser Processing breadth to a certain extent.
In high power laser processing problems, it is capable of the metallic reflection type eyeglass of direct water-cooling and thermal conductive resin,
Ensure under less clear aperature, can still bear high laser power, this is the advantage for being difficult to substitute.And, commonly
Galvanometer scanning system generally requires more eyeglass composition in Laser Processing even two-dimensional scan process, reduces light beam
Capacity usage ratio, and reflection type optical path is then relatively more preferable.
Based on the premises, the present invention proposes that a kind of total-reflection type metal list that number of lenses is few, capacity usage ratio is high shakes
Mirror system, it is based on convex surface off-axis paraboloidal mirror, and concave ellipsoidal surface speculum and plane reflection galvanometer are combined, based on single galvanometer twin shaft
Revolving property, is focused based on the displacement for expanding focus module, the thermal conductive resin based on metal material, based on the plating of laser species
Different high reflectance film layers, is particularly well-suited to kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
The content of the invention
It is an object of the invention to provide a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, with solution
State the problem proposed in background technology.
To achieve the above object, the present invention provides following technical scheme：A kind of single galvanometer total-reflection type displacement focusing 3D sweeps
Retouch optical system, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, the off-axis parabolic in convex surface
Mirror has identical beam deflection angle with the concave ellipsoidal surface speculum and centre normal is parallel, the convex surface off-axis paraboloidal mirror focus
Overlapped with the concave ellipsoidal surface speculum front focus, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection galvanometer
Center overlaps with beam center.
Preferably, the convex surface off-axis paraboloidal mirror is cylindric slant reflection mirror with the concave ellipsoidal surface speculum.
Preferably, it is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer cold
But aquaporin.
Preferably, the concave ellipsoidal surface speculum front focal length is shorter, and back focal length is more long.
Preferably, the convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass
It is the good metal eyeglass of thermal conductivity.
Compared with prior art, the beneficial effects of the invention are as follows：
(1) novel in structural design of the present invention, using single vibration mirror scanning scheme, plane reflection galvanometer possesses dual-axis rotation, i.e.,
Can be rotated around mirror surface, can also be rotated with incident light axis.
(2) in the present invention, galvanometer quantity is optimized while equally realizing that 3D is significantly scanned, around incident light in dual-axis rotation
Axle rotation does not influence laser reflectivity, improves the laser reflectivity change caused by beam deflection angle.
(3) present invention use total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, significantly carry
Eyeglass high bears power.
(4) concave ellipsoidal surface speculum of the invention has both front and back focal length, convex surface off-axis paraboloidal mirror focal length and concave ellipsoidal surface
Speculum front focal length coordinates to be realized expanding incident beam, and concave ellipsoidal surface speculum back focal length is focused to expanding light beam.
(5) present invention is by plane reflection galvanometer dual-axis rotation, convex surface off-axis paraboloidal mirror and concave ellipsoidal surface speculum group into
Expand focus module along incident light axis movement carry out focal length compensation, it is possible to achieve 3D big width lasers scanning application.
Brief description of the drawings
Fig. 1 is overall work schematic diagram of the invention；
Fig. 2 is plane reflection mirror structures schematic diagram of the invention；
Fig. 3 is the structural representation of embodiments of the invention 1；
Fig. 4 is the structural representation of embodiments of the invention 2.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1-4 are referred to, the present invention provides a kind of technical scheme：A kind of single galvanometer total-reflection type displacement focusing 3D scanning light
System, including convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3, the off-axis parabolic in convex surface
Mirror 1 has identical beam deflection angle with the concave ellipsoidal surface speculum 2 and centre normal is parallel, the convex surface off-axis paraboloidal mirror 1
Focus overlaps with the front focus of concave ellipsoidal surface speculum 2, the convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2, plane
Reflection galvanometer 3 center overlaps with beam center.
In the present invention, on the basis of clear aperature utilization rate is ensured, in order to reduce eyeglass weight, and it is easily installed and identification
Eyeglass directionality, convex surface off-axis paraboloidal mirror 1 is cylindric slant reflection mirror with concave ellipsoidal surface speculum 2.
In the present invention, convex surface off-axis paraboloidal mirror 1 is used as beam expanding lens, and concave ellipsoidal surface speculum 2 is used as beam expanding lens and focus lamp.
In the present invention, convex surface off-axis paraboloidal mirror 1 is equipped with cold inside concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3
But aquaporin, for direct water-cooling, improves eyeglass and bears laser power.
In the present invention, concave ellipsoidal surface speculum 2 has both front and back focal length, and front focal length is shorter, and back focal length is more long, and convex surface is off-axis
The focal length of parabolic lens 1 coordinates with the front focal length of concave ellipsoidal surface speculum 2 to be realized expanding incident beam, burnt after concave ellipsoidal surface speculum 2
It is focused away to expanding light beam.
In the present invention, plane reflection galvanometer 3 possesses dual-axis rotation mode, i.e., can be rotated around mirror surface central shaft 7,
Can be rotated with incident light axis 8.
Operation principle：After collimated light beam glancing incidence to convex surface off-axis paraboloidal mirror 1, beam divergence is simultaneously inclined with certain light beam
Corner reflexes to concave ellipsoidal surface speculum 2, and by the center of concave ellipsoidal surface speculum 2, the front focal length of concave ellipsoidal surface speculum 2 with it is convex
The focal length absolute ratio of face off-axis paraboloidal mirror 1, is the multiplication factor of laser beam, its object is under focus condition long, reducing and focusing on
Spot diameter, improves focal beam spot power density.The back focal length of concave ellipsoidal surface speculum 2 is more long, is m magnitudes, via recessed ellipsoid
Light beam after the front focal length of face speculum 2 is expanded with convex surface off-axis paraboloidal mirror 1 is focused on by the back focal length of concave ellipsoidal surface speculum 2, is gathered
Defocused laser beam is reflected by plane reflection galvanometer 3 again, when plane reflection galvanometer 3 around mirror median plane axle 7, incident light axis 8 according to certain
When relation rotates, the scanning patter of two dimension will be produced on arbitrary face below plane reflection galvanometer 3, now thrown off axis by convex surface
The focal length of object lens 1 moves horizontally to compensate focal length with the focus module that expands combined by concave ellipsoidal surface speculum 2 along incident light axis,
It is capable of achieving the processing of 3D scanning lasers.
Embodiment 1：
The present embodiment is directed to optical fiber output class laser, after optical-fiber laser output, is collimated by off-axis paraboloidal mirror 4, its
In, optical fiber goes out light spot position and is overlapped with the focus of off-axis paraboloidal mirror 4, and collimated light beam is by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface
After speculum 2 expands focusing, then by biaxial rotated plane reflection galvanometer 3, realize that 3d space is scanned, now by convex surface from
The focal length of axle parabolic lens 1 moves horizontally to obtain with the focus module that expands combined by concave ellipsoidal surface speculum 2 along incident light axis
Focus compensation on any 3D positions.
Embodiment 2：
The present embodiment is directed to and freely exports collimated light beam, and plane mirror 5 is coaxially adjusted with the composition light beam of plane mirror 6
Section module, under parallel beam incident, sequentially passes through plane mirror 5 and plane mirror 6, due to that may be produced during incidence
Raw angular deviation and position deviation, so needing the coaxial regulating system pair of light beam that plane mirror 5 is constituted with plane mirror 6
Light beam is coaxially adjusted, then expands focusing by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface speculum 2, eventually passes twin shaft
The plane reflection galvanometer 3 of rotation, realizes that 3d space is scanned, and is now reflected by the focal length of convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface
The focus module that expands combined by mirror 2 moves horizontally to obtain the compensation of the focus on any 3D positions along incident light axis.
Novel in structural design of the present invention, using single vibration mirror scanning scheme, optimizes while equally realizing that 3D is significantly scanned
Galvanometer quantity, being rotated around incident light axis in dual-axis rotation does not influence laser reflectivity, improves swashing caused by beam deflection angle
Light reflectivity change, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and hold
By power, while focusing focal length more long, by expanding the bit shift compensation of focus module, the species according to laser has different
Plated film, is particularly suited for kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding can carry out various changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention
And modification, the scope of the present invention be defined by the appended.
Claims (5)
1. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, it is characterised in that：Including convex surface off-axis paraboloidal mirror,
Concave ellipsoidal surface speculum and plane reflection galvanometer, the convex surface off-axis paraboloidal mirror have identical with the concave ellipsoidal surface speculum
Beam deflection angle and centre normal is parallel, the convex surface off-axis paraboloidal mirror focus and the concave ellipsoidal surface speculum front focus weight
Close, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection galvanometer center overlap with beam center.
2. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
The convex surface off-axis paraboloidal mirror is cylindric slant reflection mirror with the concave ellipsoidal surface speculum.
3. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
Cooling-water duct is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer.
4. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
The concave ellipsoidal surface speculum front focal length is shorter, and back focal length is more long.
5. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
It is good that the convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass are thermal conductivity
Metal eyeglass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710082685.2A CN106735887A (en) | 2017-02-16 | 2017-02-16 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710082685.2A CN106735887A (en) | 2017-02-16 | 2017-02-16 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
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| Publication Number | Publication Date |
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| CN106735887A true CN106735887A (en) | 2017-05-31 |
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| CN201710082685.2A Pending CN106735887A (en) | 2017-02-16 | 2017-02-16 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
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Cited By (4)
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| CN107020451A (en) * | 2017-06-19 | 2017-08-08 | 中国工程物理研究院激光聚变研究中心 | The laser output device of rotatable scanning |
| US10788662B2 (en) | 2018-05-02 | 2020-09-29 | National Tsing Hua University | Portable surface finishing device based on coherent light source |
| CN113557445A (en) * | 2019-03-12 | 2021-10-26 | 法雷奥开关和传感器有限责任公司 | Optical signal deflection device for an optical measuring system for detecting an object, measuring system and method for operating an optical signal deflection device |
| CN116909014A (en) * | 2023-09-11 | 2023-10-20 | 之江实验室 | Elliptic surface-based galvanometer plane scanning device and scanning method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107020451A (en) * | 2017-06-19 | 2017-08-08 | 中国工程物理研究院激光聚变研究中心 | The laser output device of rotatable scanning |
| US10788662B2 (en) | 2018-05-02 | 2020-09-29 | National Tsing Hua University | Portable surface finishing device based on coherent light source |
| CN113557445A (en) * | 2019-03-12 | 2021-10-26 | 法雷奥开关和传感器有限责任公司 | Optical signal deflection device for an optical measuring system for detecting an object, measuring system and method for operating an optical signal deflection device |
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| CN116909014B (en) * | 2023-09-11 | 2023-12-01 | 之江实验室 | Elliptic surface-based galvanometer plane scanning device and scanning method |
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