CN206445360U - One kind is based on single galvanometer and adaptive mirror 3D scanning optics - Google Patents
One kind is based on single galvanometer and adaptive mirror 3D scanning optics Download PDFInfo
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- CN206445360U CN206445360U CN201720138315.1U CN201720138315U CN206445360U CN 206445360 U CN206445360 U CN 206445360U CN 201720138315 U CN201720138315 U CN 201720138315U CN 206445360 U CN206445360 U CN 206445360U
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- 230000003044 adaptive effect Effects 0.000 title claims abstract description 129
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 230000006978 adaptation Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract description 3
- 150000002739 metals Chemical class 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000649 photocoagulation Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000017105 transposition Effects 0.000 description 1
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Abstract
The utility model discloses one kind based on single galvanometer and adaptive mirror 3D scanning optics, including the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer；The utility model novel in structural design, using single vibration mirror scanning scheme, introduce adaptive mirror zoom and expand module with focusing on focusing module, on the premise of ensureing that eyeglass installation is fixed, focal beam spot size can either be individually controlled, ensure that focus on light beam is significantly focused again；Optimize to rotate around incident light axis in galvanometer quantity, dual-axis rotation while equally realizing that 3D is significantly scanned and do not influence laser reflectivity, improve the laser reflectivity change caused by beam deflection angle；Total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and bear power.
Description
Technical field
The utility model is related to laser galvanometer scanning technical field, is specially that a kind of list galvanometer that is based on is swept with adaptive mirror 3D
Retouch optical system.
Background technology
Laser processing technology covers a variety of Laser Processing works such as laser cutting, welding, surface treatment, punching, micro Process
Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and untouchable, the process velocity of rapidoprint
With the advantage such as quality, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting account for the main status of whole Laser Processing industry, and with the raising of laser power, Gao Gong
The processing technologys such as rate laser welding, cladding, surface treatment will also obtain widely extension and lifting, wherein being swashed especially with high power
Photocoagulation can be popularized faster, such as in automobile, aviation, the application of the multiple industries of ship.
In Laser industry processed and applied, conventional laser technology scheme is insufficient for all kinds of process requirements, all kinds of multiple
How restricted the processing application of miscellaneous figure is, is also inconvenient against huge machine tool running, and machining accuracy and speed
In urgent need to be improved, vibration mirror scanning scheme is just arisen at the historic moment.
Vibration mirror scanning is famous with high speed, and the quick of all kinds of shapes can be realized in mm magnitudes or even large-scale m magnitudes
Scanning, and scanning accuracy is high with repeatable accuracy, is mainly used in laser marking, body laser inner carving, laser welding, laser boring industry
Deng with stepping up for laser power, vibration mirror scanning application will greatly be extended, and sweeping as vibration mirror scanning
Retouch eyeglass, though machining eyeglass technique is more preferably, plated film industry is also all the more ripe, because can not direct water-cooling will be special by high power
It is the limitation of myriawatt level above power laser application, along with conventional dual galvanometer scanning system two panels galvanometer all can be because of eyeglass
Beam deflection angle and cause the not small change of laser reflectivity, traditional 3D vibration mirror scannings are focused module by displacement in addition,
Light path complexity is added, while focal beam spot size often has different, Laser Processing breadth is limited to a certain extent.
In high power laser processing problems, it is capable of the metallic reflection type eyeglass of direct water-cooling and thermal conductive resin,
Ensure under less clear aperature, still can bear high laser power, this is the advantage for being difficult to substitute.Moreover, common
Galvanometer scanning system generally requires more eyeglass composition in Laser Processing even two-dimensional scan process, reduces light beam
Capacity usage ratio, and reflection type optical path is then relatively more preferable.
Adaptive mirror, is used as a kind of variable special optical reflecting optics of curved surface, it is intended that the current displacement focusing mould of substitution
Group.Conventional adaptive mirror, its curved surface type cover sphere with it is aspherical, the adaptive mirror of sphere is for the smaller light of beam deflection angle
Lu Zhong, and aspherical adaptive mirror is then usually used in the larger light path of beam deflection angle.Instantly adaptive mirror, is carried on the back by eyeglass
Air pressure is filled with the single air current in face, with minute surface outer gas swaging into pressure difference, by the change of pressure difference, to change adaptive mirror
Often there is linear relationship in curved surface focal length, adaptive mirror pressure difference, add metal direct water-cooling structure with focal length, establish adaptive
The advantage that mirror can not be substituted.
Based on the premises, the utility model proposes one kind based on single galvanometer and adaptive mirror 3D scanning optics, light
Road includes the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer,
Adjustable zoom feature based on adaptive mirror, based on single galvanometer dual-axis rotation characteristic, the thermal conductive resin based on metal material, base
Plate different high reflectance film layers in laser species, be particularly suitable for use in kilowatt, the 3D laser of myriawatt level superpower laser it is big
Width scanning machining application.
Utility model content
The purpose of this utility model is to provide a kind of based on single galvanometer and adaptive mirror 3D scanning optics, to solve
The problem of being proposed in above-mentioned background technology.
To achieve the above object, the utility model provides following technical scheme：One kind is based on single galvanometer and adaptive mirror 3D
Scanning optics, including the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and flat
Galvanometer is reflected in face, and the first adaptive mirror has identical beam deflection angle with the second adaptive mirror and centre normal is parallel, group
Module is expanded into continuous zoom；The 3rd adaptive mirror is placed in before focal length off-axis paraboloidal mirror, and light beam sequentially passes through first certainly
Mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer are adapted to, described first is adaptive
In Ying Jing, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer center of lens and light beam
The heart is overlapped.
It is preferred that, the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror are elliptic cylindrical shape reflection
Mirror.
It is preferred that, the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror mirror surface are bumps
Variable curve.
It is preferred that, the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror speculum mounting surface have
Single air current.
It is preferred that, the focal length off-axis paraboloidal mirror is cylindric oblique reflection mirror, focuses on focal length long.
It is preferred that, the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and
Plane reflection galvanometer band water-cooling channel.
It is preferred that, the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and
Plane reflection galvanometer eyeglass is the good metal eyeglass of thermal conductivity.
Compared with prior art, the beneficial effects of the utility model are：
(1) the utility model novel in structural design, using single vibration mirror scanning scheme, plane reflection galvanometer possesses twin shaft rotation
Turn, i.e., can rotate, can also be rotated with incident light axis around mirror surface.
(2) optimize while equally realizing that 3D is significantly scanned and rotated not around incident light axis in galvanometer quantity, dual-axis rotation
Laser reflectivity is influenceed, the laser reflectivity change caused by beam deflection angle is improved.
(3) the utility model uses total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly
Width improves eyeglass and bears power.
(4) the of the present utility model first adaptive mirror and the second adaptive microscope group are combined into continuous zoom and expand module, right
Parallel entrance beam carries out expanding or shrink beam for continuously adjustabe, it is therefore intended that while not changing focused spot position, changes poly-
Burnt spot diameter.
(5) beam expanding lens of the utility model the 3rd is constituted with off-axis paraboloidal mirror and focuses on focusing module, and zoom is expanded after module
The hot spot that expands be focused and realize and significantly focus.
(6) the utility model introduces adaptive mirror zoom and expands module with focusing on focusing module, is ensureing eyeglass installation
On the premise of fixed, focal beam spot size can either be individually controlled, ensure that focus on light beam is significantly focused again, by flat
Face reflection galvanometer dual-axis rotation coordinates, it is possible to achieve the scanning application of 3D big width lasers.
Brief description of the drawings
Fig. 1 is overall work schematic diagram of the present utility model；
Fig. 2 is plane reflection mirror structures schematic diagram of the present utility model；
Fig. 3 is the structural representation of embodiment 1 of the present utility model；
Fig. 4 is the structural representation of embodiment 2 of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1-4 are referred to, the utility model provides a kind of technical scheme：One kind is scanned based on single galvanometer with adaptive mirror 3D
Optical system, including the first adaptive mirror 1, the second adaptive mirror 2, the 3rd adaptive mirror 3, focal length off-axis paraboloidal mirror 4 and flat
Galvanometer 5 is reflected in face, and the first adaptive mirror 1 has identical beam deflection angle with the second adaptive mirror 2 and centre normal is parallel,
Composition continuous zoom expands module；According to optic path direction, the 3rd adaptive mirror 3 be placed in focal length off-axis paraboloidal mirror 4 it
Before, light beam sequentially pass through the first adaptive mirror 1, the second adaptive mirror 2, the 3rd adaptive mirror 3, focal length off-axis paraboloidal mirror 4 and
Plane reflection galvanometer 5, the first adaptive mirror 1, the second adaptive mirror 2, the 3rd adaptive mirror 3, focal length off-axis paraboloidal mirror 4 and flat
The face reflection center of lens of galvanometer 5 is overlapped with beam center.
In the utility model, in the case of clear aperature optimization and curved surface deformation accuracy is considered, the first adaptive mirror
1st, the second adaptive mirror 3 of adaptive mirror 2 and the 3rd is elliptic cylindrical shape speculum, and cylindroid ratio of long axis to short axis depends on adaptive
Answer mirror beam deflection angle.
In the utility model, the first adaptive mirror 1, the second adaptive speculum of mirror 3 of adaptive mirror 2 and the 3rd have single
Gas channel, mirror surface is concavo-convex variable curve, by being filled with the change of differential pressure of atmospheric pressure in single air current, to change
The curved surface focal length of one adaptive mirror 1, the second adaptive mirror 3 of adaptive mirror 2 and the 3rd.
In the utility model, on the basis of clear aperature utilization rate is ensured, in order to reduce eyeglass weight, and be easily installed with
Eyeglass directionality is recognized, focal length off-axis paraboloidal mirror 4 is cylindric slant reflection mirror, and focal length is longer.
In the utility model, the first adaptive mirror 1, the second adaptive mirror 2, the 3rd adaptive mirror 3, focal length off-axis paraboloidal mirror
4 and plane reflection galvanometer 5 be the metal material with thermal conductive resin, band water-cooling channel, be easy to direct water-cooling, greatly improve
Specular laser light power damage thresholds.
In the utility model, the first adaptive mirror 2 of adaptive mirror 1 and second constitutes continuous zoom and expands module, and the 3rd certainly
Adapt to mirror 3 and constitute focusing focusing module with focal length off-axis paraboloidal mirror 4.
In the utility model, plane reflection galvanometer 5 possesses dual-axis rotation mode, i.e., can be revolved around mirror surface central shaft 9
Turn, can also be rotated with incident light axis 10.
Operation principle：Collimated light beam glancing incidence is to the first adaptive mirror 1, by the air pressure for adjusting the first adaptive mirror 1
Pressure difference, changes incident beam diverging shrinkage character, the reflected beams pass through the second adaptive mirror 2, while according to certain algorithm relation
Control to adjust the differential pressure of atmospheric pressure of the second adaptive mirror 2 so that be collimated light beam after diverging or the light beam reflection shunk.Among these,
The first adaptive mirror 2 of adaptive mirror 1 and second constitutes continuous zoom and expands module, and parallel entrance beam is realized and expands or contracts
Beam so that focal beam spot diameter changes, and do not influence focused spot position simultaneously.Through expanding or shrink beam after directional light
Beam, then glancing incidence is to the 3rd adaptive minute surface of mirror 3, equally based on adaptive mirror characteristic to laser-beam divergence shrinkage at
Reason, corresponding the reflected beams incide focal length off-axis paraboloidal mirror 4, and to realize that light beam is focused on, focused spot location-dependent query is in the 3rd
The parameter coordination of adaptive mirror 3 and focal length off-axis paraboloidal mirror 4, so can be achieved the significantly change of focus on light beam focal position.It is poly-
Defocused laser beam is incided on plane reflection galvanometer 5, is coordinated by the minute surface central shaft 9 of plane reflection galvanometer 5 with incident light axis 10 and rotated,
The scanning patter on any level face can be obtained in plane reflection galvanometer 5 times, added continuous zoom and expanded module and focusing
Mutual cooperation between focusing module, can meet the compensation of focused spot position, can guarantee that the lower section of plane reflection galvanometer 5 is same again
Focal beam spot uniformity on one horizontal plane, then based on the long focus characteristics of focal length off-axis paraboloidal mirror 4, that is, realize 3D significantly scan it is sharp
Light processed and applied.
Embodiment 1：
The present embodiment is to be directed to optical fiber output class laser, after optical-fiber laser output, is collimated by off-axis paraboloidal mirror 6, its
In, optical fiber goes out light spot position and overlapped with the focus of off-axis paraboloidal mirror 6, and collimated light beam is adaptive by the first adaptive mirror 1 and second
The composition continuous zoom of mirror 2 expands module progress zoom and expanded, and expands light beam again via the 3rd adaptive mirror 3 and the off-axis parabolic of focal length
Mirror 4 constitutes focusing focusing module and focuses on and focus, and eventually passes biaxial rotated plane reflection galvanometer 5 and reflects.Based on continuous change
The mutual cooperation for expanding module again and focusing between focusing module carries out focal position compensation and spot diameter compensation, based on flat
The dual-axis rotation angular compliance of galvanometer 5 is reflected in face, realizes the scanning application of arbitrary graphic in the lower section 3d space of plane reflection galvanometer 5.
Embodiment 2：
The present embodiment is that, for freely exporting collimated light beam, plane mirror 7 is coaxially adjusted with the composition light beam of plane mirror 8
Module is saved, under parallel beam incident, plane mirror 7 and plane mirror 8 is sequentially passed through, due to that may be produced during incidence
Raw angular deviation and position deviation, so the coaxial regulating system pair of light beam for needing plane mirror 7 to be constituted with plane mirror 8
Light beam is coaxially adjusted, then expands module by the first adaptive mirror 1 and the second adaptive composition of mirror 2 continuous zoom and become
Expand again, expand light beam and focus on and focus via the 3rd adaptive mirror 3 and the composition focusing focusing module of focal length off-axis paraboloidal mirror 4,
Biaxial rotated plane reflection galvanometer 5 is eventually passed to reflect.Expanded based on continuous zoom between module and focusing focusing module
Mutual cooperation carry out focal position compensation and compensated with spot diameter, it is real based on the dual-axis rotation angular compliance of plane reflection galvanometer 5
The scanning application of arbitrary graphic in the existing lower section 3d space of plane reflection galvanometer 5.
The utility model novel in structural design, using single vibration mirror scanning scheme, introduces adaptive mirror zoom and expands module
With focusing on focusing module, on the premise of ensureing that eyeglass installation is fixed, focal beam spot size, and energy can either be individually controlled
Enough ensure that focus on light beam is significantly focused, breach the burnt module limitation of traditional bit transposition；While equally realizing that 3D is significantly scanned
Optimize to rotate around incident light axis in galvanometer quantity, dual-axis rotation and do not influence laser reflectivity, improve caused by beam deflection angle
Laser reflectivity change；Total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve mirror
Piece bears power, while longer focusing focal length, there is different plated films according to the species of laser, is particularly suitable for use in kilowatt, ten thousand
The 3D laser significantly scanning machining application of watt level superpower laser.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit a variety of changes, repaiies
Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.
Claims (7)
1. one kind is based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Including the first adaptive mirror, second
Adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer, the first adaptive mirror and second is certainly
Adaptation mirror has identical beam deflection angle and centre normal is parallel, and composition continuous zoom expands module；The 3rd adaptive mirror
It is placed in before focal length off-axis paraboloidal mirror, light beam sequentially passes through the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, length
Burnt off-axis paraboloidal mirror and plane reflection galvanometer, the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length
Off-axis paraboloidal mirror and plane reflection galvanometer center of lens are overlapped with beam center.
2. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
It is elliptic cylindrical shape speculum to state the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror.
3. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
It is concavo-convex variable curve to state the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror mirror surface.
4. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
Stating the first adaptive mirror, the second adaptive mirror and the 3rd adaptive mirror speculum mounting surface has single air current.
5. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
Focal length off-axis paraboloidal mirror is stated for cylindric oblique reflection mirror, focal length is focused on long.
6. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
State the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer band water cooling
Passage.
7. it is according to claim 1 a kind of based on single galvanometer and adaptive mirror 3D scanning optics, it is characterised in that：Institute
State the first adaptive mirror, the second adaptive mirror, the 3rd adaptive mirror, focal length off-axis paraboloidal mirror and plane reflection galvanometer eyeglass equal
For the good metal eyeglass of thermal conductivity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720138315.1U CN206445360U (en) | 2017-02-16 | 2017-02-16 | One kind is based on single galvanometer and adaptive mirror 3D scanning optics |
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| CN201720138315.1U CN206445360U (en) | 2017-02-16 | 2017-02-16 | One kind is based on single galvanometer and adaptive mirror 3D scanning optics |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735886A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics |
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2017
- 2017-02-16 CN CN201720138315.1U patent/CN206445360U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735886A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics |
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Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016 Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201611 first floor, No. 56, Lane 1500, Xinfei Road, Songjiang District, Shanghai Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd. Country or region before: China |