CN206445359U - A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics - Google Patents
A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics Download PDFInfo
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- CN206445359U CN206445359U CN201720138249.8U CN201720138249U CN206445359U CN 206445359 U CN206445359 U CN 206445359U CN 201720138249 U CN201720138249 U CN 201720138249U CN 206445359 U CN206445359 U CN 206445359U
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 abstract description 7
- 238000001816 cooling Methods 0.000 abstract description 6
- 238000003754 machining Methods 0.000 abstract description 5
- 150000002739 metals Chemical class 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 102000010637 Aquaporins Human genes 0.000 description 1
- 108010063290 Aquaporins Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000649 photocoagulation Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- Optical Elements Other Than Lenses (AREA)
- Laser Beam Processing (AREA)
Abstract
The utility model discloses a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, the utility model novel in structural design, using single vibration mirror scanning scheme, optimize galvanometer quantity while equally realizing that 3D is significantly scanned, being rotated in dual-axis rotation around incident light axis does not influence laser reflectivity, improve the laser reflectivity change caused by beam deflection angle, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and bear power, simultaneously longer focusing focal length, by the bit shift compensation for expanding focus module, there are different plated films according to the species of laser, it is particularly suitable for use in kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
Description
Technical field
The utility model is related to laser galvanometer scanning technical field, specially a kind of single galvanometer total-reflection type displacement focusing 3D
Scanning optics.
Background technology
Laser processing technology covers a variety of Laser Processing works such as laser cutting, welding, surface treatment, punching, micro Process
Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and untouchable, the process velocity of rapidoprint
With the advantage such as quality, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting account for the main status of whole Laser Processing industry, and with the raising of laser power, Gao Gong
The processing technologys such as rate laser welding, cladding, surface treatment will also obtain widely extension and lifting, wherein being swashed especially with high power
Photocoagulation can be popularized faster, such as in automobile, aviation, the application of the multiple industries of ship.
In Laser industry processed and applied, conventional laser technology scheme is insufficient for all kinds of process requirements, all kinds of multiple
How restricted the processing application of miscellaneous figure is, is also inconvenient against huge machine tool running, and machining accuracy and speed
In urgent need to be improved, vibration mirror scanning scheme is just arisen at the historic moment.
Vibration mirror scanning is famous with high speed, and the quick of all kinds of shapes can be realized in mm magnitudes or even large-scale m magnitudes
Scanning, and scanning accuracy is mainly used in laser marking, body laser inner carving, laser welding, laser boring industry etc. with repeating high,
With stepping up for laser power, vibration mirror scanning application will greatly be extended, and be used as the scanning of vibration mirror scanning
Eyeglass, though machining eyeglass technique is more preferably, plated film industry is also all the more ripe, because can not direct water-cooling will be particularly by high power
The limitation of myriawatt level above power laser application, along with conventional dual galvanometer scanning system two panels galvanometer all can be because of eyeglass
Beam deflection angle and the not small change for causing laser reflectivity, and Laser Processing breadth is limited to a certain extent.
In high power laser processing problems, it is capable of the metallic reflection type eyeglass of direct water-cooling and thermal conductive resin,
Ensure under less clear aperature, still can bear high laser power, this is the advantage for being difficult to substitute.Moreover, common
Galvanometer scanning system generally requires more eyeglass composition in Laser Processing even two-dimensional scan process, reduces light beam
Capacity usage ratio, and reflection type optical path is then relatively more preferable.
Based on the premises, the utility model proposes the total-reflection type metal that a kind of number of lenses is few, capacity usage ratio is high
Single galvanometer system, it is based on convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and the combination of plane reflection galvanometer, based on single galvanometer
Dual-axis rotation characteristic, is focused based on the displacement for expanding focus module, the thermal conductive resin based on metal material, based on laser kind
Class plates different high reflectance film layers, is particularly suitable for use in kilowatt, the 3D laser of myriawatt level superpower laser significantly scanning machining
Using.
Utility model content
The purpose of this utility model is to provide a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, to solve
The problem of being proposed in certainly above-mentioned background technology.
To achieve the above object, the utility model provides following technical scheme：A kind of single galvanometer total-reflection type displacement focusing
3D scanning optics, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, the convex surface are off-axis
Parabolic lens has identical beam deflection angle with the concave ellipsoidal surface speculum and centre normal is parallel, the convex surface off-axis paraboloidal mirror
Focus is overlapped with the concave ellipsoidal surface speculum front focus, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection
Galvanometer center is overlapped with beam center.
It is preferred that, the convex surface off-axis paraboloidal mirror and the concave ellipsoidal surface speculum are cylindric slant reflection mirror.
It is preferred that, it is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer cold
But aquaporin.
It is preferred that, the concave ellipsoidal surface speculum front focal length is shorter, and back focal length is longer.
It is preferred that, the convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass
It is the good metal eyeglass of thermal conductivity.
Compared with prior art, the beneficial effects of the utility model are：
(1) the utility model novel in structural design, using single vibration mirror scanning scheme, plane reflection galvanometer possesses twin shaft rotation
Turn, i.e., can rotate, can also be rotated with incident light axis around mirror surface.
(2) in the utility model, galvanometer quantity is optimized while equally realizing that 3D is significantly scanned, around entering in dual-axis rotation
Penetrating optical axis rotation does not influence laser reflectivity, improves the laser reflectivity change caused by beam deflection angle.
(3) the utility model uses total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly
Width improves eyeglass and bears power.
(4) concave ellipsoidal surface speculum of the present utility model has a both front and back focal length, convex surface off-axis paraboloidal mirror focal length with it is recessed ellipse
Spherical reflector front focal length coordinates realization to expand incident beam, and concave ellipsoidal surface speculum back focal length is gathered to expanding light beam
It is burnt.
(5) the utility model passes through plane reflection galvanometer dual-axis rotation, convex surface off-axis paraboloidal mirror and concave ellipsoidal surface speculum
The focus module that expands of composition moves progress focal length compensation along incident light axis, it is possible to achieve the scanning application of 3D big width lasers.
Brief description of the drawings
Fig. 1 is overall work schematic diagram of the present utility model；
Fig. 2 is plane reflection mirror structures schematic diagram of the present utility model；
Fig. 3 is the structural representation of embodiment 1 of the present utility model；
Fig. 4 is the structural representation of embodiment 2 of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1-4 are referred to, the utility model provides a kind of technical scheme：A kind of single galvanometer total-reflection type displacement focusing 3D is swept
Optical system, including convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3 are retouched, the convex surface is off-axis
Parabolic lens 1 has identical beam deflection angle with the concave ellipsoidal surface speculum 2 and centre normal is parallel, the off-axis parabolic in convex surface
The focus of mirror 1 is overlapped with the front focus of concave ellipsoidal surface speculum 2, the convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2, flat
Face reflection galvanometer 3 center is overlapped with beam center.
In the utility model, on the basis of clear aperature utilization rate is ensured, in order to reduce eyeglass weight, and be easily installed with
Eyeglass directionality is recognized, convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface speculum 2 are cylindric slant reflection mirror.
In the utility model, convex surface off-axis paraboloidal mirror 1 is used as beam expanding lens, and concave ellipsoidal surface speculum 2 is used as beam expanding lens with gathering
Jiao Jing.
In the utility model, convex surface off-axis paraboloidal mirror 1 is all provided with inside concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3
There is cooling-water duct, for direct water-cooling, improve eyeglass and bear laser power.
In the utility model, concave ellipsoidal surface speculum 2 has both front and back focal length, and front focal length is shorter, and back focal length is longer, convex surface
The focal length of off-axis paraboloidal mirror 1 coordinates realization to expand incident beam with the front focal length of concave ellipsoidal surface speculum 2, concave ellipsoidal surface speculum 2
Back focal length is focused to expanding light beam.
In the utility model, plane reflection galvanometer 3 possesses dual-axis rotation mode, i.e., can be revolved around mirror surface central shaft 7
Turn, can also be rotated with incident light axis 8.
Operation principle：After collimated light beam glancing incidence to convex surface off-axis paraboloidal mirror 1, beam divergence is simultaneously inclined with certain light beam
Corner reflexes to concave ellipsoidal surface speculum 2, and by the center of concave ellipsoidal surface speculum 2, the front focal length of concave ellipsoidal surface speculum 2 with it is convex
The focal length absolute ratio of face off-axis paraboloidal mirror 1, is the multiplication factor of laser beam, and its object is under long focus condition, reduce and focus on
Spot diameter, improves focal beam spot power density.The back focal length of concave ellipsoidal surface speculum 2 is longer, is m magnitudes, via recessed ellipsoid
Light beam after the front focal length of face speculum 2 is expanded with convex surface off-axis paraboloidal mirror 1 is focused on by the back focal length of concave ellipsoidal surface speculum 2, is gathered
Defocused laser beam is reflected by plane reflection galvanometer 3 again, when plane reflection galvanometer 3 around mirror median plane axle 7, incident light axis 8 according to certain
When relation rotates, the scanning patter of two dimension will be being produced below plane reflection galvanometer 3 on arbitrary face, is now being thrown off axis by convex surface
The focal length of object lens 1 moves horizontally to compensate focal length with the focus module that expands combined by concave ellipsoidal surface speculum 2 along incident light axis,
The processing of 3D scanning lasers can be achieved.
Embodiment 1：
The present embodiment is to be directed to optical fiber output class laser, after optical-fiber laser output, is collimated by off-axis paraboloidal mirror 4, its
In, optical fiber goes out light spot position and overlapped with the focus of off-axis paraboloidal mirror 4, and collimated light beam is by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface
Speculum 2 is expanded after focusing, then by biaxial rotated plane reflection galvanometer 3, realizes that 3d space is scanned, now by convex surface from
The focal length of axle parabolic lens 1 is moved horizontally along incident light axis and obtained with the focus module that expands combined by concave ellipsoidal surface speculum 2
Focus compensation on any 3D positions.
Embodiment 2：
The present embodiment is that, for freely exporting collimated light beam, plane mirror 5 is coaxially adjusted with the composition light beam of plane mirror 6
Module is saved, under parallel beam incident, plane mirror 5 and plane mirror 6 is sequentially passed through, due to that may be produced during incidence
Raw angular deviation and position deviation, so the coaxial regulating system pair of light beam for needing plane mirror 5 to be constituted with plane mirror 6
Light beam is coaxially adjusted, then expands focusing by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface speculum 2, eventually passes twin shaft
The plane reflection galvanometer 3 of rotation, realizes that 3d space is scanned, and is now reflected by the focal length of convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface
The focus module that expands combined by mirror 2 moves horizontally to obtain the compensation of the focus on any 3D positions along incident light axis.
The utility model novel in structural design, using single vibration mirror scanning scheme, while equally realizing that 3D is significantly scanned
Optimize to rotate around incident light axis in galvanometer quantity, dual-axis rotation and do not influence laser reflectivity, improve caused by beam deflection angle
Laser reflectivity change, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve mirror
Piece bears power, while longer focusing focal length, by expanding the bit shift compensation of focus module, has not according to the species of laser
With plated film, be particularly suitable for use in kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit a variety of changes, repaiies
Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, it is characterised in that：Including convex surface off-axis paraboloidal mirror,
Concave ellipsoidal surface speculum and plane reflection galvanometer, the convex surface off-axis paraboloidal mirror have identical with the concave ellipsoidal surface speculum
Beam deflection angle and centre normal is parallel, the convex surface off-axis paraboloidal mirror focus and the concave ellipsoidal surface speculum front focus weight
Close, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection galvanometer center are overlapped with beam center.
2. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
The convex surface off-axis paraboloidal mirror and the concave ellipsoidal surface speculum are cylindric slant reflection mirror.
3. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
Cooling-water duct is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer.
4. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
The concave ellipsoidal surface speculum front focal length is shorter, and back focal length is longer.
5. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that：
The convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass are that thermal conductivity is good
Metal eyeglass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720138249.8U CN206445359U (en) | 2017-02-16 | 2017-02-16 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720138249.8U CN206445359U (en) | 2017-02-16 | 2017-02-16 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
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| Publication Number | Publication Date |
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| CN206445359U true CN206445359U (en) | 2017-08-29 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735887A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
| CN115416299A (en) * | 2022-11-04 | 2022-12-02 | 杭州爱新凯科技有限公司 | Need not to remove laser galvanometer 3D printing apparatus of focusing |
| CN116184681A (en) * | 2023-04-27 | 2023-05-30 | 成都莱普科技股份有限公司 | Beam shaping device and beam shaping method for carbon dioxide laser |
-
2017
- 2017-02-16 CN CN201720138249.8U patent/CN206445359U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106735887A (en) * | 2017-02-16 | 2017-05-31 | 上海嘉强自动化技术有限公司 | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics |
| CN115416299A (en) * | 2022-11-04 | 2022-12-02 | 杭州爱新凯科技有限公司 | Need not to remove laser galvanometer 3D printing apparatus of focusing |
| CN116184681A (en) * | 2023-04-27 | 2023-05-30 | 成都莱普科技股份有限公司 | Beam shaping device and beam shaping method for carbon dioxide laser |
| CN116184681B (en) * | 2023-04-27 | 2023-08-04 | 成都莱普科技股份有限公司 | Beam shaping device and beam shaping method for carbon dioxide laser |
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| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016 Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201611 first floor, No. 56, Lane 1500, Xinfei Road, Songjiang District, Shanghai Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd. Country or region before: China |
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