CN206445359U - A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics - Google Patents

A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics Download PDF

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CN206445359U
CN206445359U CN201720138249.8U CN201720138249U CN206445359U CN 206445359 U CN206445359 U CN 206445359U CN 201720138249 U CN201720138249 U CN 201720138249U CN 206445359 U CN206445359 U CN 206445359U
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galvanometer
laser
total
convex surface
reflection type
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邵华江
李思佳
李思泉
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Jiaqiang Shanghai Intelligent Technology Co ltd
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Shanghai Automobile Gear Works
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Abstract

The utility model discloses a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, the utility model novel in structural design, using single vibration mirror scanning scheme, optimize galvanometer quantity while equally realizing that 3D is significantly scanned, being rotated in dual-axis rotation around incident light axis does not influence laser reflectivity, improve the laser reflectivity change caused by beam deflection angle, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve eyeglass and bear power, simultaneously longer focusing focal length, by the bit shift compensation for expanding focus module, there are different plated films according to the species of laser, it is particularly suitable for use in kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.

Description

A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics
Technical field
The utility model is related to laser galvanometer scanning technical field, specially a kind of single galvanometer total-reflection type displacement focusing 3D Scanning optics.
Background technology
Laser processing technology covers a variety of Laser Processing works such as laser cutting, welding, surface treatment, punching, micro Process Skill, make use of the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and untouchable, the process velocity of rapidoprint With the advantage such as quality, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting account for the main status of whole Laser Processing industry, and with the raising of laser power, Gao Gong The processing technologys such as rate laser welding, cladding, surface treatment will also obtain widely extension and lifting, wherein being swashed especially with high power Photocoagulation can be popularized faster, such as in automobile, aviation, the application of the multiple industries of ship.
In Laser industry processed and applied, conventional laser technology scheme is insufficient for all kinds of process requirements, all kinds of multiple How restricted the processing application of miscellaneous figure is, is also inconvenient against huge machine tool running, and machining accuracy and speed In urgent need to be improved, vibration mirror scanning scheme is just arisen at the historic moment.
Vibration mirror scanning is famous with high speed, and the quick of all kinds of shapes can be realized in mm magnitudes or even large-scale m magnitudes Scanning, and scanning accuracy is mainly used in laser marking, body laser inner carving, laser welding, laser boring industry etc. with repeating high, With stepping up for laser power, vibration mirror scanning application will greatly be extended, and be used as the scanning of vibration mirror scanning Eyeglass, though machining eyeglass technique is more preferably, plated film industry is also all the more ripe, because can not direct water-cooling will be particularly by high power The limitation of myriawatt level above power laser application, along with conventional dual galvanometer scanning system two panels galvanometer all can be because of eyeglass Beam deflection angle and the not small change for causing laser reflectivity, and Laser Processing breadth is limited to a certain extent.
In high power laser processing problems, it is capable of the metallic reflection type eyeglass of direct water-cooling and thermal conductive resin, Ensure under less clear aperature, still can bear high laser power, this is the advantage for being difficult to substitute.Moreover, common Galvanometer scanning system generally requires more eyeglass composition in Laser Processing even two-dimensional scan process, reduces light beam Capacity usage ratio, and reflection type optical path is then relatively more preferable.
Based on the premises, the utility model proposes the total-reflection type metal that a kind of number of lenses is few, capacity usage ratio is high Single galvanometer system, it is based on convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and the combination of plane reflection galvanometer, based on single galvanometer Dual-axis rotation characteristic, is focused based on the displacement for expanding focus module, the thermal conductive resin based on metal material, based on laser kind Class plates different high reflectance film layers, is particularly suitable for use in kilowatt, the 3D laser of myriawatt level superpower laser significantly scanning machining Using.
Utility model content
The purpose of this utility model is to provide a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, to solve The problem of being proposed in certainly above-mentioned background technology.
To achieve the above object, the utility model provides following technical scheme:A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, including convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer, the convex surface are off-axis Parabolic lens has identical beam deflection angle with the concave ellipsoidal surface speculum and centre normal is parallel, the convex surface off-axis paraboloidal mirror Focus is overlapped with the concave ellipsoidal surface speculum front focus, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection Galvanometer center is overlapped with beam center.
It is preferred that, the convex surface off-axis paraboloidal mirror and the concave ellipsoidal surface speculum are cylindric slant reflection mirror.
It is preferred that, it is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer cold But aquaporin.
It is preferred that, the concave ellipsoidal surface speculum front focal length is shorter, and back focal length is longer.
It is preferred that, the convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass It is the good metal eyeglass of thermal conductivity.
Compared with prior art, the beneficial effects of the utility model are:
(1) the utility model novel in structural design, using single vibration mirror scanning scheme, plane reflection galvanometer possesses twin shaft rotation Turn, i.e., can rotate, can also be rotated with incident light axis around mirror surface.
(2) in the utility model, galvanometer quantity is optimized while equally realizing that 3D is significantly scanned, around entering in dual-axis rotation Penetrating optical axis rotation does not influence laser reflectivity, improves the laser reflectivity change caused by beam deflection angle.
(3) the utility model uses total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly Width improves eyeglass and bears power.
(4) concave ellipsoidal surface speculum of the present utility model has a both front and back focal length, convex surface off-axis paraboloidal mirror focal length with it is recessed ellipse Spherical reflector front focal length coordinates realization to expand incident beam, and concave ellipsoidal surface speculum back focal length is gathered to expanding light beam It is burnt.
(5) the utility model passes through plane reflection galvanometer dual-axis rotation, convex surface off-axis paraboloidal mirror and concave ellipsoidal surface speculum The focus module that expands of composition moves progress focal length compensation along incident light axis, it is possible to achieve the scanning application of 3D big width lasers.
Brief description of the drawings
Fig. 1 is overall work schematic diagram of the present utility model;
Fig. 2 is plane reflection mirror structures schematic diagram of the present utility model;
Fig. 3 is the structural representation of embodiment 1 of the present utility model;
Fig. 4 is the structural representation of embodiment 2 of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made The every other embodiment obtained, belongs to the scope of the utility model protection.
Fig. 1-4 are referred to, the utility model provides a kind of technical scheme:A kind of single galvanometer total-reflection type displacement focusing 3D is swept Optical system, including convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3 are retouched, the convex surface is off-axis Parabolic lens 1 has identical beam deflection angle with the concave ellipsoidal surface speculum 2 and centre normal is parallel, the off-axis parabolic in convex surface The focus of mirror 1 is overlapped with the front focus of concave ellipsoidal surface speculum 2, the convex surface off-axis paraboloidal mirror 1, concave ellipsoidal surface speculum 2, flat Face reflection galvanometer 3 center is overlapped with beam center.
In the utility model, on the basis of clear aperature utilization rate is ensured, in order to reduce eyeglass weight, and be easily installed with Eyeglass directionality is recognized, convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface speculum 2 are cylindric slant reflection mirror.
In the utility model, convex surface off-axis paraboloidal mirror 1 is used as beam expanding lens, and concave ellipsoidal surface speculum 2 is used as beam expanding lens with gathering Jiao Jing.
In the utility model, convex surface off-axis paraboloidal mirror 1 is all provided with inside concave ellipsoidal surface speculum 2 and plane reflection galvanometer 3 There is cooling-water duct, for direct water-cooling, improve eyeglass and bear laser power.
In the utility model, concave ellipsoidal surface speculum 2 has both front and back focal length, and front focal length is shorter, and back focal length is longer, convex surface The focal length of off-axis paraboloidal mirror 1 coordinates realization to expand incident beam with the front focal length of concave ellipsoidal surface speculum 2, concave ellipsoidal surface speculum 2 Back focal length is focused to expanding light beam.
In the utility model, plane reflection galvanometer 3 possesses dual-axis rotation mode, i.e., can be revolved around mirror surface central shaft 7 Turn, can also be rotated with incident light axis 8.
Operation principle:After collimated light beam glancing incidence to convex surface off-axis paraboloidal mirror 1, beam divergence is simultaneously inclined with certain light beam Corner reflexes to concave ellipsoidal surface speculum 2, and by the center of concave ellipsoidal surface speculum 2, the front focal length of concave ellipsoidal surface speculum 2 with it is convex The focal length absolute ratio of face off-axis paraboloidal mirror 1, is the multiplication factor of laser beam, and its object is under long focus condition, reduce and focus on Spot diameter, improves focal beam spot power density.The back focal length of concave ellipsoidal surface speculum 2 is longer, is m magnitudes, via recessed ellipsoid Light beam after the front focal length of face speculum 2 is expanded with convex surface off-axis paraboloidal mirror 1 is focused on by the back focal length of concave ellipsoidal surface speculum 2, is gathered Defocused laser beam is reflected by plane reflection galvanometer 3 again, when plane reflection galvanometer 3 around mirror median plane axle 7, incident light axis 8 according to certain When relation rotates, the scanning patter of two dimension will be being produced below plane reflection galvanometer 3 on arbitrary face, is now being thrown off axis by convex surface The focal length of object lens 1 moves horizontally to compensate focal length with the focus module that expands combined by concave ellipsoidal surface speculum 2 along incident light axis, The processing of 3D scanning lasers can be achieved.
Embodiment 1:
The present embodiment is to be directed to optical fiber output class laser, after optical-fiber laser output, is collimated by off-axis paraboloidal mirror 4, its In, optical fiber goes out light spot position and overlapped with the focus of off-axis paraboloidal mirror 4, and collimated light beam is by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface Speculum 2 is expanded after focusing, then by biaxial rotated plane reflection galvanometer 3, realizes that 3d space is scanned, now by convex surface from The focal length of axle parabolic lens 1 is moved horizontally along incident light axis and obtained with the focus module that expands combined by concave ellipsoidal surface speculum 2 Focus compensation on any 3D positions.
Embodiment 2:
The present embodiment is that, for freely exporting collimated light beam, plane mirror 5 is coaxially adjusted with the composition light beam of plane mirror 6 Module is saved, under parallel beam incident, plane mirror 5 and plane mirror 6 is sequentially passed through, due to that may be produced during incidence Raw angular deviation and position deviation, so the coaxial regulating system pair of light beam for needing plane mirror 5 to be constituted with plane mirror 6 Light beam is coaxially adjusted, then expands focusing by convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface speculum 2, eventually passes twin shaft The plane reflection galvanometer 3 of rotation, realizes that 3d space is scanned, and is now reflected by the focal length of convex surface off-axis paraboloidal mirror 1 and concave ellipsoidal surface The focus module that expands combined by mirror 2 moves horizontally to obtain the compensation of the focus on any 3D positions along incident light axis.
The utility model novel in structural design, using single vibration mirror scanning scheme, while equally realizing that 3D is significantly scanned Optimize to rotate around incident light axis in galvanometer quantity, dual-axis rotation and do not influence laser reflectivity, improve caused by beam deflection angle Laser reflectivity change, total-reflection type optics of metals eyeglass, can direct water-cooling, with good heat conductive characteristic, greatly improve mirror Piece bears power, while longer focusing focal length, by expanding the bit shift compensation of focus module, has not according to the species of laser With plated film, be particularly suitable for use in kilowatt, the 3D laser significantly scanning machining application of myriawatt level superpower laser.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art, It is appreciated that these embodiments can be carried out in the case where not departing from principle of the present utility model and spirit a variety of changes, repaiies Change, replace and modification, scope of the present utility model is defined by the appended claims and the equivalents thereof.

Claims (5)

1. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics, it is characterised in that:Including convex surface off-axis paraboloidal mirror, Concave ellipsoidal surface speculum and plane reflection galvanometer, the convex surface off-axis paraboloidal mirror have identical with the concave ellipsoidal surface speculum Beam deflection angle and centre normal is parallel, the convex surface off-axis paraboloidal mirror focus and the concave ellipsoidal surface speculum front focus weight Close, the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum, plane reflection galvanometer center are overlapped with beam center.
2. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that: The convex surface off-axis paraboloidal mirror and the concave ellipsoidal surface speculum are cylindric slant reflection mirror.
3. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that: Cooling-water duct is equipped with inside the convex surface off-axis paraboloidal mirror, concave ellipsoidal surface speculum and plane reflection galvanometer.
4. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that: The concave ellipsoidal surface speculum front focal length is shorter, and back focal length is longer.
5. a kind of single galvanometer total-reflection type displacement focusing 3D scanning optics according to claim 1, it is characterised in that: The convex surface off-axis paraboloidal mirror eyeglass, concave ellipsoidal surface speculum eyeglass and plane reflection galvanometer eyeglass are that thermal conductivity is good Metal eyeglass.
CN201720138249.8U 2017-02-16 2017-02-16 A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics Active CN206445359U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106735887A (en) * 2017-02-16 2017-05-31 上海嘉强自动化技术有限公司 A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics
CN115416299A (en) * 2022-11-04 2022-12-02 杭州爱新凯科技有限公司 Need not to remove laser galvanometer 3D printing apparatus of focusing
CN116184681A (en) * 2023-04-27 2023-05-30 成都莱普科技股份有限公司 Beam shaping device and beam shaping method for carbon dioxide laser

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106735887A (en) * 2017-02-16 2017-05-31 上海嘉强自动化技术有限公司 A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics
CN115416299A (en) * 2022-11-04 2022-12-02 杭州爱新凯科技有限公司 Need not to remove laser galvanometer 3D printing apparatus of focusing
CN116184681A (en) * 2023-04-27 2023-05-30 成都莱普科技股份有限公司 Beam shaping device and beam shaping method for carbon dioxide laser
CN116184681B (en) * 2023-04-27 2023-08-04 成都莱普科技股份有限公司 Beam shaping device and beam shaping method for carbon dioxide laser

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Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016

Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd.

Country or region after: China

Address before: 201611 first floor, No. 56, Lane 1500, Xinfei Road, Songjiang District, Shanghai

Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd.

Country or region before: China

CP03 Change of name, title or address