CN110681992A - Adjustable broadband laser processing optical system and processing method - Google Patents
Adjustable broadband laser processing optical system and processing method Download PDFInfo
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- CN110681992A CN110681992A CN201911057407.7A CN201911057407A CN110681992A CN 110681992 A CN110681992 A CN 110681992A CN 201911057407 A CN201911057407 A CN 201911057407A CN 110681992 A CN110681992 A CN 110681992A
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- 239000000843 powder Substances 0.000 claims description 15
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- 238000003754 machining Methods 0.000 claims description 4
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- 230000008859 change Effects 0.000 description 7
- 238000005253 cladding Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004372 laser cladding Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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Abstract
The invention discloses an adjustable broadband laser processing optical system and a processing method, and belongs to the field of laser processing optical systems. The system comprises a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface; the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor; the laser processing device comprises a laser, a focusing lens, a vibrating mirror, a laser device and a laser processing device, wherein the laser is used for processing a workpiece on a working surface, the laser device is used for emitting light beams to the focusing lens at a certain divergence angle, the light beams are collimated and focused by the focusing lens, then emitted to the vibrating mirror and reflected by the vibrating mirror, and therefore the laser processing device is used for processing the workpiece on. The invention can quickly and sensitively adjust the size of the working light spot, has obvious advantages especially for special-shaped or uneven processing surfaces, and also improves the processing uniformity and the processing efficiency.
Description
Technical Field
The invention belongs to the field of laser processing optical systems, and particularly relates to an adjustable broadband laser processing optical system and method.
Background
The laser processing technology is a surface modification technology for carrying out alloy strengthening treatment on various parts by utilizing high-energy laser and nano materials, and can obviously improve the engineering properties of a base layer, such as wear resistance, corrosion resistance, heat resistance, oxidation resistance and the like under the condition of no deformation of the surface of a part. With the rapid development of industrialization and laser technology industry in recent years, laser processing has been widely used in direct forming and remanufacturing processes as an effective method for improving the surface quality and service life of devices.
The existing laser processing and forming system mostly adopts an optical element to cut, shape and recombine laser beams, and the laser processing optical system is used for converting and projecting the laser beams emitted by a laser device onto a processing surface for laser cladding processing. The existing laser processing optical system is difficult to meet the processing efficiency and quality requirements, the fixed working mode of the optical system cannot flexibly change spots, the optical system is not suitable for parts with complex structures, and especially the processing efficiency of workpieces with small sizes and irregular surfaces is not high. Moreover, the traditional processing system has limited deposition efficiency and quality, taking an integral conversion mirror deposition system as an example, the system redistributes and converges light beams by utilizing a scalar diffraction theory, the light field distribution after the conversion of the integral mirror has strong interference and diffraction effects, and the light spot stripe structure is obvious in short working time, so that the uniformity of the light beams is damaged; although the stripe structure is gradually weakened along with the increase of the laser irradiation time due to the existence of the thermal diffusion effect, the working temperature field cannot ensure the uniformity due to the high-speed scanning process of the laser, and the deposition efficiency and quality are affected. Therefore, the development of an adjustable broadband laser processing optical system has important significance for laser processing application.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an adjustable broadband laser processing optical system and a processing method, aiming at solving the problems of poor processing quality and low efficiency of the existing laser processing system.
In order to achieve the above object, the present invention provides an adjustable broadband laser processing optical system, which comprises a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface; the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor; the laser processing device comprises a laser, a focusing lens, a vibrating mirror, a laser device and a laser processing device, wherein the laser is used for processing a workpiece on a working surface, the laser device is used for emitting light beams to the focusing lens at a certain divergence angle, the light beams are collimated and focused by the focusing lens, then emitted to the vibrating mirror and reflected by the vibrating mirror, and therefore the laser processing device is used for processing the workpiece on. The invention uses a collimating and focusing combined lens, does not need to collimate and then focus, reduces the pollution of the lens, saves the processing cost and reduces the operation difficulty.
Furthermore, the system also comprises a light splitting device, wherein the light splitting device comprises a light splitting prism, two symmetrically arranged reflectors and a sliding groove, and the light splitting prism can move along the sliding groove;
the light beam is reflected to two light splitting prism surfaces of the light splitting prism through the vibrating mirror, the light is split into two sub-light beams through the light splitting prism, and the two sub-light beams are respectively reflected by the reflecting mirror and then converged on the working surface to obtain two light spots.
Furthermore, the two sub-beams form a specific included angle when converging, and a multi-channel powder feeding pipe is placed in a hollow no-light area formed between the two sub-beams to carry out synchronous light and powder conveying.
Furthermore, the focusing lens is connected with a bracket on the guide rail, and the first motor controls the focusing lens to move back and forth on the guide rail along the direction of the optical axis so as to adjust the width of a light spot during scanning. By moving the position of the focusing lens, the width of the light spot on the working surface can be quickly adjusted, and the flexibility and the processing efficiency of equipment processing are improved.
Furthermore, the second motor drives the galvanometer to vibrate back and forth to scan broadband light beams, the scanning angle of the galvanometer is adjusted through programming, the scanning range of light spots is adjusted, and efficient machining of parts of different sizes is achieved.
The invention also provides a processing method based on the broadband laser processing optical system, which is used for controlling the stay time of light spots at each position by adjusting the scanning speed of the galvanometer so as to obtain the light field distribution with a specific shape.
Further, the scanning speed of the galvanometer when the deflection angle is large is controlled to be smaller than that when the deflection angle is small, a saddle-shaped light field with high two sides and low center is obtained on the working surface in the light field distribution, so that a uniformly distributed temperature field is obtained, and the processing quality of the cladding layer is improved.
Further, the beam splitting prism is controlled to move back and forth between the two reflecting mirrors along the sliding groove, and the energy distribution of the two sub beams is adjusted, so that the width ratio of the two light spots on the working surface is changed.
Further, the convergence angle of the two sub-beams is changed by adjusting the rotation angle of the reflecting mirror, so that the distance between the two light spots on the working surface is controlled.
The invention has the following beneficial effects:
(1) the invention changes the scanning range of the light spot by controlling the angle of the galvanometer and combines the movement adjustment of the focusing lens to realize the spot changing, thereby improving the processing flexibility and realizing the high-efficiency processing of workpieces with various sizes.
(2) The invention utilizes the light splitting device to realize the hollow light beam and the laser deposition of the powder feeding in the light on the one hand, thereby improving the coupling utilization rate of the light powder; on the other hand, double light beams obtained by light splitting are synchronously subjected to double-spot scanning, so that the processing efficiency is greatly improved.
(3) The deflection of the vibrating mirror is controlled by programming, so that saddle-shaped, parabolic and other special light field distributions according to actual requirements can be realized, and the processing of the special-shaped surface is realized; particularly, the saddle-shaped light field can obtain a uniformly distributed scanning temperature field, and the processing quality of the cladding layer is improved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a tunable broadband laser processing optical system of the present invention;
FIG. 2 is a schematic diagram of another embodiment of a tunable broadband laser processing optical system of the present invention;
FIG. 3 is a schematic diagram illustrating the principle of moving a collimating focusing lens to change the spot;
FIG. 4 is a schematic diagram of the splitting prism moving to adjust the energy ratio of two light spots;
FIG. 5(a) is a schematic diagram of adjusting the center-to-center distance of double light spots by changing the angle of a reflector;
FIG. 5(b) is a schematic diagram of the corresponding light spot distribution when the angle of the reflector is changed to adjust the center-to-center distance between the two light spots;
FIG. 6(a) is a schematic diagram of the residence time of the light spot, the light intensity distribution and the temperature field distribution for realizing the saddle-shaped distribution;
FIG. 6(b) is a schematic view of the distribution of scanning spots in one scanning period corresponding to the saddle-shaped distribution;
fig. 7 is a schematic diagram of a powder feeding tube built in the spectrometer to realize optical internal powder feeding.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
As shown in fig. 1, an adjustable broadband laser processing optical system according to an embodiment of the present invention includes a fiber laser 1, a focusing lens 2, a first motor and a guide rail 3 for controlling the movement of the focusing lens 2, a galvanometer 4, a second motor 5 for driving the galvanometer to vibrate, and a working surface 6. The light beam emitted by the optical fiber laser 1 is incident to the focusing lens 2 at a certain divergence angle, is collimated and focused by the focusing lens 2, is incident to the vibrating mirror 4, and is reflected to the working surface 6 by the vibrating mirror 4.
The focusing lens 2 is connected with a support on the guide rail and is controlled by the first motor to move back and forth on the guide rail along the direction of an optical axis so as to realize the effect of 6 variable spots on the working surface. The traditional laser processing optical system adopts a plurality of focusing lenses to combine and move to adjust variable spots, and the collimating focusing combined lens is used in the invention, so that the long-distance focusing can be realized very conveniently, the pollution of lenses is reduced, the adjusting speed is high, and the real-time variable spot treatment is facilitated.
The galvanometer 4 is connected with a second motor 5, and the second motor 5 controls the galvanometer 4 to vibrate back and forth so as to realize the process of broadband light beam scanning. Under the specific occasions such as aiming at the surface of a large-scale shaft part, the length of a rectangular light spot can be freely adjusted by scanning with a galvanometer (as shown in the y direction in the figure). In addition, repeated irradiation in a scanning mode is adopted, so that vibration of a laser molten pool is facilitated, the molten pool is improved, the cladding quality is improved, and the hardening depth of laser cladding or laser strengthening is deepened.
Example 2
Referring to fig. 2, another tunable broadband laser processing optical system according to an embodiment of the present invention includes a fiber laser 1, a focusing lens 2, a first motor and guide rail 3 for controlling the movement of the focusing lens 2, a vibrating mirror 4, a second motor 5 for driving the vibrating mirror to vibrate, a splitting prism 7, a reflecting mirror 8, a sliding groove 9 for controlling the position of the splitting prism 7, and a working surface 6, where the splitting prism 7, the reflecting mirror 8, and the sliding groove 9 for controlling the position of the splitting prism 7 form a splitting device. The light beam emitted by the optical fiber laser 1 is incident to the focusing lens 2 at a certain divergence angle, the light beam is collimated and focused by the focusing lens 2 and then is incident to the vibrating mirror 4, and is reflected to two light splitting prism surfaces of the light splitting prism 7 by the vibrating mirror 4, and the light beam is reflected by the light splitting prism 7, reflected by two symmetrically placed reflectors 8 and then converged on the working surface 6. The beam splitting prism 7 can move back and forth on the sliding groove 9 and is limited by a pin.
The focusing lens 2 is connected with a support on the guide rail and is controlled by the first motor to move back and forth on the guide rail along the direction of an optical axis so as to realize the effect of 6 variable spots on the working surface. When the galvanometer 4 is polarized to the position of the dotted line, the light beam is changed from a solid line to a dotted line, and the light spot scans back and forth on the working surface 6 in a determined range along the y direction shown in the figure to form a double-rectangular light spot with a certain length.
Fig. 3 shows that when the focusing lens 2 moves to the position of the dotted line on the guide rail 3, the optical path of the system is changed from the solid line to the dotted line, so as to realize the function of changing the width (x direction in the figure) of the double-rectangular light spot on the working surface 6. The second motor 5 controls the vibration angle of the vibrating mirror 4 through programming, can regulate and control the scanning range of the reflected light spots on the working surface, realizes the change of the length of the scanning double light spots in the scanning direction (y direction in the figure), and realizes the adjustable rectangular double light spots function by combining the change of the width of the light spots adjusted by the back-and-forth movement of the focusing mirror.
When the beam splitter prism 7 shown in fig. 4 moves from the center position of the solid line to the position of the dotted line along the sliding groove 9, the energy ratio of the two split light beams is different, the vibration range of the galvanometer 4 is from the position of the solid line to the position of the dotted line, and two double rectangular light spots with different widths are obtained on the working surface 6.
When the reflector 8 shown in fig. 5(a) is rotated from the solid line position to the dotted line position, the two split light beams change from the solid line to the dotted line, the spot distribution of the working surface changes as shown in fig. 5(b), and the change of the convergence angle of the two light beams can realize the change of the distance between the two spots on the working surface.
The deflection of the galvanometer is controlled by programming, so that saddle-shaped, parabolic and other special light field distribution according to actual requirements can be realized, and the processing of the special-shaped surface is realized. For example, in the present embodiment, the saddle-shaped light field distribution is obtained by adjusting the scanning speed of the galvanometer to control the dwell time of the light spot at each position. Fig. 6(a) shows the corresponding conditions of the stay time T of the light spot, the intensity distribution I of the light field and the temperature distribution T in the processing process, and fig. 6(b) shows the distribution of the scanning light spot of the saddle-shaped light field formed in one scanning period. When the deflection angle of the galvanometer is larger, the scanning speed is small, and when the deflection angle is smaller, the scanning speed is large, so that the optical field distribution on the working surface presents a saddle-shaped optical field with high two sides and low center. As can be seen from fig. 6(b), the deposition temperature field corresponding to the saddle-shaped light field is approximately in rectangular distribution, so that the thermal action process of the cladding layer formation is uniform, the defect of crescent distribution of the conventional hardened layer is overcome, the cladding layer with uniform hardened thickness is obtained, and the processing quality is remarkably improved. For another example, when the deflection angle of the galvanometer is large, the scanning speed is high, and when the deflection angle is small, the scanning speed is low, so that the optical field distribution on the working surface presents a parabolic optical field with low two sides and high center, and the processing of the local convex surface is realized. Therefore, the scanning speed under the deflection angle of the galvanometer is controlled by programming, the light field distribution in any specific shape can be obtained, and the processing of the special-shaped surface is realized.
Based on the above explanation of the composition of the laser processing optical system, fig. 7 is a schematic diagram of the optical internal powder feeding realized by the built-in powder feeding tube of the optical splitting device. The beam splitting prism 7 and the pair of reflectors 8 enable two photon beams to be converged on the working surface 6 at a certain inclination angle, a hollow no-light area formed between the two photon beams is provided with the multi-channel powder feeding pipe 10 to achieve optical internal powder feeding and synchronous optical powder conveying, and the device with the hollow beams is characterized in that space is provided for optical internal powder feeding, so that efficient combination and utilization of optical powder are achieved, and the processing quality of a cladding layer is greatly improved. Moreover, a light splitting device is added to realize synchronous processing of double light spots, and the processing efficiency is effectively improved.
In addition, the invention can also be directly combined with a fiber laser with a QBH joint and an industrial robot, so that the processing efficiency of the laser processing system is improved.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. An adjustable broadband laser processing optical system is characterized by comprising a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface;
the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail;
the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor;
the laser processing device comprises a laser, a focusing lens, a vibrating mirror, a laser device and a laser processing device, wherein the laser is used for processing a workpiece on a working surface, the laser device is used for emitting light beams to the focusing lens at a certain divergence angle, the light beams are collimated and focused by the focusing lens, then emitted to the vibrating mirror and reflected by the vibrating mirror, and therefore the laser processing device is used for processing the workpiece on.
2. The broadband laser machining optical system according to claim 1, further comprising a beam splitting device including a beam splitting prism, two symmetrically disposed mirrors, and a sliding groove, the beam splitting prism being movable along the sliding groove;
the light beam is reflected to two light splitting prism surfaces of the light splitting prism through the vibrating mirror, the light is split into two sub-light beams through the light splitting prism, and the two sub-light beams are respectively reflected by the reflecting mirror and then converged on the working surface to obtain two light spots.
3. The broadband laser processing optical system of claim 2, wherein the two sub-beams form a specific angle when converging, and a multi-channel powder feeding tube is disposed in a hollow no-light area formed between the two sub-beams for synchronous light powder delivery.
4. The broadband laser processing optical system according to any one of claims 1 to 3, wherein the focusing lens is connected to a holder on a guide rail, and is controlled by the first motor to move back and forth on the guide rail in the optical axis direction to adjust the spot width during scanning.
5. The broadband laser processing optical system according to any one of claims 1 to 3, wherein the second motor drives the galvanometer to oscillate back and forth for broadband beam scanning, and the scanning range of the light spot is adjusted by programming and adjusting the scanning angle of the galvanometer.
6. A processing method based on the broadband laser processing optical system of any one of claims 1 to 3, characterized in that the stay time of each position light spot is controlled by adjusting the scanning speed of the galvanometer to obtain a light field distribution with a specific shape.
7. The process of claim 6, wherein the scanning speed of the galvanometer at a larger deflection angle is controlled to be lower than that at a smaller deflection angle, so as to obtain a saddle-shaped light field with a light field distribution presenting high sides and low center on the working surface.
8. The machining method of the broadband laser machining optical system according to claim 2 or 3, wherein the width ratio of the two light spots on the working surface is changed by controlling the beam splitting prism to move back and forth between the two reflecting mirrors along the sliding groove to adjust the energy distribution of the two sub-beams.
9. A processing method based on the broadband laser processing optical system of claim 2 or 3, wherein the distance between the two light spots on the working surface is controlled by changing the convergence angle of the two sub-beams by adjusting the rotation angle of the reflecting mirror.
10. A laser processing apparatus using the broadband laser processing optical system according to any one of claims 1 to 5.
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