CN113042882A - Dense point-like three-dimensional laser processing device - Google Patents

Dense point-like three-dimensional laser processing device Download PDF

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Publication number
CN113042882A
CN113042882A CN202110313348.6A CN202110313348A CN113042882A CN 113042882 A CN113042882 A CN 113042882A CN 202110313348 A CN202110313348 A CN 202110313348A CN 113042882 A CN113042882 A CN 113042882A
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China
Prior art keywords
laser processing
laser
processing device
focusing
mirror
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CN202110313348.6A
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Inventor
杜建伟
王阳阳
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ANYANG RUIHENG CNC MACHINE TOOL CO LTD
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ANYANG RUIHENG CNC MACHINE TOOL CO LTD
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Priority to CN202110313348.6A priority Critical patent/CN113042882A/en
Publication of CN113042882A publication Critical patent/CN113042882A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention provides a dense point-like three-dimensional laser processing device which comprises an X-direction translation guide rail, a working platform, a machine tool arranged on one side of the working platform, a fixing plate arranged on the other side of the working platform and a laser arranged on the machine tool, wherein one end of the X-direction translation guide rail is arranged on the machine tool, the other end of the X-direction translation guide rail is arranged on the fixing plate, the working platform is arranged on the X-direction translation guide rail, and a laser dense point-like laser processing head is arranged on the working platform. The dense point-like three-dimensional laser processing device provided by the invention adopts a continuous high-power laser as a processing light source, a plurality of processing heads are adopted, multi-head processing is realized, the laser power is fully utilized, and the processing speed is high. The multi-prism and the light splitting mechanism are adopted for light splitting, the continuous high-power laser beam is divided into multiple paths of pulse laser to be output, the laser energy utilization efficiency is high, the cost is low, and the service life is long.

Description

Dense point-like three-dimensional laser processing device
Technical Field
The invention relates to the field of machine tool machining, in particular to a dense point-like three-dimensional laser machining device.
Background
The laser is a light source of stimulated radiation coherence, and has the advantages of good coherence, high brightness, collimation and the like. Utilize laser to carry out surface machining to the part, the physical structure on object surface, chemical properties and metallographic structure all can change to change the corrosion resistance on object surface, resistance to wear and fatigue etc.. Based on this, researchers have developed techniques such as laser surface hardening, laser surface cladding, laser surface alloying, laser shock hardening, and laser amorphization. These techniques have found wide application in the manufacturing field. Although the laser surface treatment technology has a good application prospect, the laser spot area needs to be ensured to be small in the processing process, so that high power is kept, and the efficiency of laser processing is limited.
Aiming at the problem of low processing efficiency, some researchers adopt a plurality of sets of lasers to process and improve the processing efficiency, and the scheme greatly improves the application cost. Another method for improving the processing efficiency is to increase the area of the laser spot, and to ensure the processing effect, the overall power of the laser needs to be increased, and the price of the laser gradually increases with the increase of the power, which increases the cost. In addition, the other method for improving the processing efficiency is to optimize the processing route and reduce unnecessary time, so that the processing efficiency is improved, but the method has high requirements on the positioning precision of a machine tool, also has high requirements on the acceleration of the motion of a laser head, and has limited lifting space. The current common method is to design a vibrating mirror at a laser head and control the movement of a light beam by using the vibrating mirror, but the method also carries out processing by using one focusing point, and the efficiency improvement is limited.
Disclosure of Invention
The invention aims to provide a dense point-like three-dimensional laser processing device to solve the problem that the processing efficiency of a laser dense point-like laser processing technology in the prior art is low.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
according to a first aspect of the embodiments of the present invention, there is provided a dense point-like three-dimensional laser processing device, including an X-direction translation guide rail, a work platform, a machine tool disposed on one side of the work platform, a fixing plate disposed on the other side of the work platform, and a laser disposed on the machine tool, wherein one end of the X-direction translation guide rail is mounted on the machine tool, and the other end is mounted on the fixing plate, the work platform is mounted on the X-direction translation guide rail, and a laser dense point-like laser processing head is disposed on the work platform.
Furthermore, the laser dense point-like laser processing head moves on the working platform along the Z direction, and the X direction is vertical to the Z direction.
Furthermore, a Y-direction translation guide rail is arranged on the machine tool, two ends of the X-direction translation guide rail are respectively installed on the Y-direction translation guide rail and the fixing plate, and the X direction, the Y direction and the Z direction are mutually perpendicular.
Furthermore, a conveying device is arranged below the working platform and comprises a plurality of rotating rollers which are arranged in parallel, one ends of the rotating rollers are installed on the machine tool, the other ends of the rotating rollers are installed on the fixing plate, and the rotating rollers are arranged in parallel with the X-direction translation guide rail.
Further, intensive punctiform laser processing head of laser includes polygon prism structure, sets up preceding spectroscope on polygon prism structure right side, symmetry set up two back spectroscopes in preceding spectroscope both sides and set up the collimating mirror between polygon prism structure and preceding spectroscope, the right side of preceding spectroscope still symmetry is equipped with two and focuses on the head, two focus on the head and set up side by side.
Further, the front spectroscope comprises two reflectors which are symmetrically arranged, the front spectroscope uniformly divides the light collimated by the collimating mirror into two parts, and the split light respectively passes through the rear spectroscopes which are symmetrically arranged on two sides of the front spectroscope.
Further, the polygon mirror mechanism comprises a polygon mirror and a motor for driving the polygon mirror to rotate, when the polygon mirror rotates clockwise, reflected light scans sequentially from top to bottom at the collimating mirror, and the collimating mirror collimates light reflected by the polygon mirror.
Furthermore, the rear spectroscope comprises two identical reflectors, the included angle of the two reflectors is adjusted, so that laser passes through the rear spectroscope to form two beams of laser which are not parallel and have a certain angle, secondary light splitting is realized, and the light beam after secondary light splitting passes through the focusing mirror to form two focusing points.
Furthermore, a reflecting mirror of the rear spectroscope is arranged on the angle shifter, and the output of different focus point arrays is realized by adjusting the inclination angle of the reflecting mirror; when the angle of the mirror is 0, the focal points are arranged in a line.
Further, the focusing head comprises a focusing lens and a wedge-shaped prism arranged in front of the focusing lens, and parallel light passes through the wedge-shaped prism and then forms two focusing points through the focusing lens, so that secondary light splitting is realized.
The embodiment of the invention has the following advantages:
1. the embodiment of the invention provides a dense point-like three-dimensional laser processing device, which adopts a continuous high-power laser as a processing light source, a plurality of processing heads are adopted, multi-head processing is realized, the laser power is fully utilized, and the processing speed is high.
2. The multi-prism and the light splitting mechanism are adopted for light splitting, the continuous high-power laser beam is divided into multiple paths of pulse laser to be output, the laser energy utilization efficiency is high, the cost is low, and the service life is long.
3. Using a continuous high power laser (CO)2Laser, YAG laser, fiber laser). The technology is mature.
4. The double optical heads are used for focusing, the two focusing heads are arranged side by side, the focal length is synchronously adjusted, the performance of light output by each focusing head is almost the same, and the processing effect is consistent.
5. The quantity of light beams output by each focusing head is more than 1, the quantity of focused focusing points is more than 1, and compared with the original method that one focusing head focuses on 1 light beam, the utilization rate of the focusing head is improved, the quantity of the focusing heads is reduced, the cost is reduced, and the structure is simplified.
6. And a precise adjustment mode of the transverse distance between focusing points in the same focusing head. The transverse distance of a focusing point is precisely controlled by controlling the included angle between rear reflectors in the light splitting mechanism or adding a wedge-shaped lens with a specific angle in the focusing head, so that the processing efficiency is improved.
7. And precisely adjusting the transverse distance between the focusing points of the two focusing heads. The distance between the two focusing heads is adjusted, the requirements of different processing precision are met, and the application scene of the equipment can be enlarged.
8. The control between the rotating speed of the polygon mirror and the conveying speed of the parts is matched. The faster the rotating speed of the polygon prism is, the faster the part conveying speed is, the faster the machining speed is, and the machining efficiency is greatly improved.
9. In the processing process, a plurality of focusing points are output at one time, and the processing speed is improved.
10. The relative three-dimensional motion of the focusing head and the processed part can be realized, and the three-dimensional processing is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of a dense spot-like three-dimensional laser processing apparatus according to embodiment 1 of the present invention;
fig. 2 is a second schematic structural diagram of a dense spot-like three-dimensional laser processing apparatus according to embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of a laser dense point-like laser processing head in the dense point-like three-dimensional laser processing device provided by the invention;
FIG. 4 is a schematic structural diagram of a front beam splitter in the dense point-like three-dimensional laser processing apparatus according to the present invention;
fig. 5a and 5b are schematic diagrams illustrating adjustment of a rear spectroscope in a dense point-like three-dimensional laser processing device according to the present invention;
fig. 6a and 6b are schematic diagrams illustrating adjustment of a rear spectroscope in a dense point-like three-dimensional laser processing device according to the present invention;
FIG. 7 is a schematic view of a focusing head with a wedge-shaped lens in the dense point-like three-dimensional laser processing device provided by the present invention;
FIG. 8 is a schematic view of a focusing head without a wedge lens in the dense point-like three-dimensional laser processing device provided by the present invention;
description of reference numerals: 1-laser, 2-machine tool, 201-Y direction translation guide rail, 202-X direction translation guide rail, 203-rotating roller, 204-fixing plate, 3-small part, 4-working platform, 5-laser dense point laser processing head, 501-multi-prism structure, 502-collimating mirror, 503-front spectroscope, 504-rear spectroscope, 5041-reflecting mirror, 5042-angle shifter, 505-focusing head, 5051-wedge prism, 5052-focusing mirror and 6-large part.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Further, the term "plurality" means two or more unless specifically limited otherwise. Furthermore, the terms "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example 1
The embodiment provides a dense dot-shaped three-dimensional laser processing device, including X direction translation guide rail 202, work platform 4, set up at 4 lathe 2 of one side of work platform, set up at the fixed plate of 4 opposite sides of work platform and set up laser instrument 1 on lathe 2, the one end of X direction translation guide rail 202 is installed on lathe 2, and the other end is installed on fixed plate 204, work platform 4 install on X direction translation guide rail 202, and be equipped with laser dense dot-shaped laser processing head 5 on work platform 4.
Preferably, the laser dense point-like laser processing head 5 is moved on the working platform 4 in a Z direction, the X direction being perpendicular to the Z direction.
When the X-direction translation guide rail is used for machining the small part 3, the Y-direction translation guide rail 201 is arranged on the machine tool 2, two ends of the X-direction translation guide rail 202 are respectively installed on the Y-direction translation guide rail 201 and the fixing plate 204, and the X direction, the Y direction and the Z direction are mutually perpendicular.
When the machine tool is used for machining a large part 6, a conveying device is arranged below the working platform 4, the conveying device comprises a plurality of rotating rollers 203 arranged in parallel, one end of each rotating roller 203 is installed on the machine tool 2, the other end of each rotating roller is installed on the fixing plate 204, and the rotating rollers 203 are arranged in parallel with the X-direction translation guide rails 202.
When a part is processed, the working platform 4 can control the laser dense point-like laser processing head 5 to move in the Z direction, the movement distance is matched with the shape of the part, and the focusing point is ensured on the surface of the part.
Preferably, the laser dense point-like laser processing head 5 includes a polygon mirror structure 501, a front beam splitter 503 disposed at the right side of the polygon mirror structure 501, two rear beam splitters 504 symmetrically disposed at two sides of the front beam splitter 503, and a collimating mirror 502 disposed between the polygon mirror structure 501 and the front beam splitter 503, two focusing heads 505 are further symmetrically disposed at the right side of the front beam splitter 503, and the two focusing heads 505 are disposed side by side.
Preferably, the front beam splitter 503 includes two symmetrically disposed reflecting mirrors 5041, the front beam splitter 503 divides the light collimated by the collimating mirror 502 into two parts uniformly, and the divided light passes through the rear beam splitters 504 symmetrically disposed at two sides of the front beam splitter 503 respectively.
Preferably, the polygon mirror mechanism 501 includes a polygon mirror and a motor for driving the polygon mirror to rotate, when the polygon mirror rotates clockwise, the reflected light scans sequentially from top to bottom at the collimating mirror 502, and the collimating mirror 502 collimates the light reflected by the polygon mirror.
Preferably, the rear beam splitter 504 includes two identical reflecting mirrors 5041, and by adjusting an included angle between the two reflecting mirrors 5041, the laser beam passes through the rear beam splitter 504 to form two laser beams which are not parallel and have a certain angle, so as to realize re-splitting, and the re-split light beam passes through the focusing mirror 5052 to form two focusing points. The reflecting mirror 5041 of the rear beam splitter 504 is placed on the angle shifter 5042, and the output of different focusing point arrays is realized by adjusting the inclination angle of the reflecting mirror 5041; when the angle of the mirror 5041 is 0, the focal point assumes a line arrangement.
Preferably, the focusing head 505 includes a focusing mirror 5052 and a wedge prism 5051 disposed in front of the focusing mirror 5052, and the parallel light passes through the wedge prism 5051 and then passes through the focusing mirror 5052 to form two focusing points, so as to realize secondary light splitting.
The following describes the present invention in detail with reference to the accompanying drawings, a laser dense point laser processing head is shown in fig. 3, a polygon mechanism 501 includes a polygon mirror and a high-speed motor for driving the polygon mirror to rotate, when the polygon mirror rotates clockwise, reflected light scans sequentially from top to bottom on a collimating mirror 502, the collimating mirror 502 collimates the light reflected by the polygon mirror, the size of the collimating mirror needs to ensure that the reflected light formed by scanning passes through the collimating mirror 502 in the rotating process of the polygon mirror, a front beam splitter 503 is composed of two reflecting mirrors 5041 as shown in fig. 4, an included angle between the two reflecting mirrors 5041 is an angle β, and the function of the polygon splitter is to divide the light collimated by the collimating mirror 502 into two parts uniformly, so as to realize first light splitting. The split light respectively passes through the rear beam splitters 504, each rear beam splitter 504 is composed of two identical reflectors 5041, as shown in fig. 6, a certain angle θ is formed between the two reflectors 5041, and the angle can be controlled and changed, so that two laser beams which are not parallel and have a certain angle are formed after the laser passes through the rear beam splitters 504, secondary light splitting is achieved, the split laser beams pass through the focusing mirrors 5052, two focusing points are formed, the distance between the focusing points is f θ, and f is the focal length of the focusing mirrors. Meanwhile, as shown in fig. 5, the mirror 5041 of the rear beam splitter 504 is also disposed on the angle shifter 5042, and the output of different focusing point arrays can be realized by adjusting the inclination angle of the mirror 5041, wherein the focusing points are arranged in a line when the inclination angle of the mirror 5041 is 0, and the focusing points are arranged in a zigzag state when the inclination angle of the mirror 5041 is not 0. As shown in fig. 7, a wedge prism 5051 is installed in front of a focusing mirror 5052, and a beam of parallel light passes through the wedge prism 5051 and then passes through the focusing mirror 5052 to form two focusing points, so that re-splitting is realized, and it is expected that two non-parallel beams of light are formed by the rear beam splitter 504 and 4 focusing points are formed after passing through the focusing head 505 with the wedge prism 5051. When the edge of the wedge prism 5051 is parallel to the laser scanning direction, 4 parallel points are formed and distributed in 2 x 2, when the edge of the wedge prism 5051 is perpendicular to the laser scanning direction, 4 linear points are formed and distributed in 1 x 4, and when the edge of the wedge prism 5051 is not perpendicular to the laser scanning direction or is not parallel to the laser scanning direction, the 4 linear points are distributed in a zigzag manner.
In the process of processing the parts, the two focusing heads 505 are arranged side by side, so that the focal length can be synchronously adjusted, and the same processing effect is realized. And the output of one focusing head 505, a plurality of focusing points and different alignment can be realized by adjusting the angles of two reflecting mirrors 5041 of the rear spectroscope 504 and the angle of the wedge prism 5051. And the distance of the focusing point of the same focusing head 505 can be precisely controlled by controlling the angle of the rear spectroscope 504 and the angle of the wedge prism 5051.
The piece to be machined is placed stationary on the machining table as shown in fig. 1 or is carried by the conveyor to a Y-direction movement as shown in fig. 2. In fig. 1, a work platform 4 on a machine tool 2 is capable of three-dimensional movement, the movement of which is controlled by the machine tool 2. The motion speed control of the workbench needs to be matched with the rotating speed of the polygon prism, and the optimal processing effect can be achieved. In fig. 2, the working platform on the machine tool 2 can perform two-dimensional motion perpendicular to the Y direction, the motion of the working platform is controlled by the numerical control machine 2, the part can perform Y-direction motion under the action of the conveying device, and the motion of the part is controlled by the numerical control machine 2, so that three-dimensional processing is realized.
The motion speed control of the workbench needs to be matched with the rotating speed of the polygon prism, and the optimal processing effect can be achieved.
As shown in FIG. 3, in the example where two focusing heads 505 are used, adjustment of the separation between the focal points of the two focusing heads 505 can be achieved by changing the distance between the two mirrors 5041 of the rear beam splitter 504 and the distance between the focusing heads 505.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A dense point-like three-dimensional laser processing device is characterized in that: including X direction translation guide rail, work platform, set up at the lathe of work platform one side, set up at the fixed plate of work platform opposite side and set up the laser instrument on the lathe, the one end of X direction translation guide rail is installed on the lathe, and the other end is installed on the fixed plate, work platform install on X direction translation guide rail, and be equipped with the intensive punctiform laser processing head of laser on the work platform.
2. The dense dot-like three-dimensional laser processing device according to claim 1, wherein: the laser dense point-like laser processing head moves on the working platform along the Z direction, and the X direction is vertical to the Z direction.
3. The dense dot-like three-dimensional laser processing device according to claim 2, wherein: the X-direction translation guide rail is arranged on the machine tool, two ends of the X-direction translation guide rail are respectively arranged on the Y-direction translation guide rail and the fixing plate, and the X direction, the Y direction and the Z direction are mutually perpendicular.
4. The dense dot-like three-dimensional laser processing device according to claim 1, wherein: and a conveying device is arranged below the working platform and comprises a plurality of rotating rollers which are arranged in parallel, one ends of the rotating rollers are arranged on the machine tool, the other ends of the rotating rollers are arranged on the fixed plate, and the rotating rollers are arranged in parallel with the X-direction translation guide rail.
5. The dense dot-like three-dimensional laser processing device according to claim 1, wherein: the laser dense point-like laser processing head comprises a polygon prism structure, a front spectroscope arranged on the right side of the polygon prism structure, two rear spectroscopes symmetrically arranged on two sides of the front spectroscope and a collimating mirror arranged between the polygon prism structure and the front spectroscope, wherein two focusing heads are symmetrically arranged on the right side of the front spectroscope and arranged side by side.
6. The dense dot-like three-dimensional laser processing device according to claim 5, wherein: the front spectroscope comprises two reflectors which are symmetrically arranged, the front spectroscope uniformly divides light collimated by the collimating mirror into two parts, and the split light respectively passes through the rear spectroscopes which are symmetrically arranged at two sides of the front spectroscope.
7. The dense dot-like three-dimensional laser processing device according to claim 5, wherein: the polygon mirror mechanism comprises a polygon mirror and a motor for driving the polygon mirror to rotate, when the polygon mirror rotates clockwise, reflected light scans sequentially from top to bottom at the collimating mirror, and the collimating mirror collimates the light reflected by the polygon mirror.
8. The dense dot-like three-dimensional laser processing device according to claim 5, wherein: the rear spectroscope comprises two identical reflectors, the included angle of the two reflectors is adjusted, so that laser forms two beams of laser which are not parallel and have a certain angle after passing through the rear spectroscope, secondary light splitting is realized, and the light beam after secondary light splitting forms two focusing points through the focusing mirror.
9. The dense dot-like three-dimensional laser processing device according to claim 8, wherein: the reflecting mirror of the rear spectroscope is placed on the angle shifter, and the output of different focus point arrays is realized by adjusting the inclination angle of the reflecting mirror; when the angle of the mirror is 0, the focal points are arranged in a line.
10. The dense dot-like three-dimensional laser processing device according to claim 5, wherein: the focusing head comprises a focusing lens and a wedge-shaped prism arranged in front of the focusing lens, and parallel light passes through the wedge-shaped prism and then forms two focusing points through the focusing lens, so that secondary light splitting is realized.
CN202110313348.6A 2021-03-24 2021-03-24 Dense point-like three-dimensional laser processing device Pending CN113042882A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117348184A (en) * 2023-09-13 2024-01-05 杭州开亚科技合伙企业(有限合伙) Optical system adjusting device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117348184A (en) * 2023-09-13 2024-01-05 杭州开亚科技合伙企业(有限合伙) Optical system adjusting device and method

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