KR102429862B1 - Apparatus for laser processing using laser beams of different wavelength and method thereof - Google Patents

Abstract

A laser processing apparatus and method using a laser beam of different wavelengths are disclosed. According to an embodiment of the present invention, the laser processing apparatus, a first laser oscillator for outputting a first laser beam and a second laser oscillator for outputting a second laser beam and transmitting the first laser beam to the beam combination unit A first beam transmission system and a second beam transmission system for transmitting the second laser beam to the beam combination unit, and a second beam transmission system for transmitting the first laser beam and reflecting the second laser beam, the transmitted first laser beam and the Design a beam combination unit including a first optical system for combining a reflected second laser beam and transmitting the first through the same path, and the beam shape of the first laser beam and the second laser beam transmitted through the same path, By scanning the second transmitted first laser beam and the second laser beam while rotating at a constant speed with a beam shape design unit for second transmitting the first and second laser beams designed respectively, By adjusting the angle of inclination of the polygon mirror and the beam combination for irradiating the first laser beam and the second laser beam to the object to be processed, the irradiated first laser beam and the irradiated second laser beam on the object to be processed, respectively It may include a control unit for controlling the irradiation position of the determined.

Description

Laser processing apparatus and method using a laser beam of different wavelengths

The present invention relates to a laser processing apparatus using a laser beam having a different wavelength and a method therefor. Specifically, the present invention relates to an apparatus and method for performing laser processing by transmitting laser beams of different wavelengths to the same beam transmission optical system.

In the laser processing method, a laser processing method capable of designing a laser beam irradiated to an object to be processed into a desired shape by controlling the reflection distance of a laser beam of a single wavelength to be changed by transferring an optical system is provided.

Such a laser processing method has the advantage that the shape of the laser beam can be designed in various ways according to the processing purpose, but when the laser absorption rate is different for each area of a single processing object or for each stacked layer, or the processing purpose is different, processing Expose the limits of reduced efficiency.

In order to overcome these limitations and maximize the efficiency of laser processing, it is required to select an optimal laser wavelength, and for this purpose, a laser processing method in which a plurality of laser beams having different wavelengths are combined may be considered.

However, when a plurality of laser beams are combined and individually focused using a different beam delivery optical system for each wavelength, it is difficult to keep the shapes and irradiation positions of the plurality of laser beams constant. It becomes even more difficult when an optical system with a high-speed scanning function is included. In particular, when using a lens-type refractive optical system, it is difficult to transmit laser beams of different wavelengths to one optical system because the refractive index is a function of wavelength. it is impossible

Korean Patent No. 2046015

The technical problem to be solved by the present invention is to provide an apparatus and method for transmitting a plurality of laser beams in the same path using the same reflection optical system. Specifically, the technical problem to be solved by the present invention is a laser processing apparatus capable of maintaining the same beam shape and position on an object to be processed even when a high-speed scan is performed using a polygon mirror after designing a beam shape and condensing the light, and a laser processing apparatus and the same to provide a way

Another technical problem to be solved by the present invention is to provide a laser processing apparatus and method for controlling the irradiation position of each of the plurality of laser beams so that the distance between the irradiation positions of the plurality of laser beams is adjusted within a preset range will do

Another technical problem to be solved by the present invention is a laser processing apparatus for designing the shape of the final laser beam irradiated to the object to be processed by varying the length and width of the beam irradiation section according to the type of material and processing conditions of the object to be processed and to provide a method therefor.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

A laser processing apparatus using a laser beam of a different wavelength according to an embodiment of the present invention for solving the above problems includes a first laser oscillator for outputting a first laser beam and a second laser oscillator for outputting a second laser beam; A first beam transmission system for transmitting the first laser beam to the beam combination unit, a second beam transmission system for transmitting the second laser beam to the beam combination unit, transmits the first laser beam, and reflects the second laser beam The first laser beam and the first laser beam transmitted through the same path and a beam combining unit including a first optical system that combines the transmitted first laser beam and the reflected second laser beam and transmits the first through the same path Designs a beam shape of a second laser beam, rotates at a constant speed with a beam shape design unit for transmitting the respectively designed first and second laser beams, and the second transmitted first laser By scanning the beam and the second laser beam, the irradiated first on the object to be processed by adjusting the angle of inclination of the polygon mirror and the beam combination for irradiating the first laser beam and the second laser beam to the object to be processed The laser beam and the second laser beam irradiated may include a control unit for controlling the irradiation position to be determined, respectively.

According to one embodiment, the laser processing apparatus, of the first laser beam transmitted from the first beam transmission system to the first optical system and the second laser beam transmitted from the second beam transmission system to the first optical system , further comprising a beam size adjusting unit for adjusting the cross-sectional size of the at least one laser beam, wherein the at least one laser beam passes through the beam size adjustment unit to be incident to the first optical system after the cross-sectional size is adjusted can

According to one embodiment, the first surface of the first optical system, a first laser beam transmitted through the first beam transmission system is incident, and a preset wavelength range including the wavelength of the incident first laser beam An anti-reflection coating layer may be formed.

According to an embodiment, on the second surface of the first optical system, an anti-reflection coating layer for a preset wavelength range including the wavelength of the incident first laser beam is formed, and the coating layer is configured to transmit the second beam The second laser beam transmitted through the system may be reflected.

According to an embodiment, the beam shape design unit may include at least one of a second optical system including at least one path control mirror and at least one beam design mirror, and the path control mirror and the beam design mirror included in the second optical system. A portion of the transfer mirror group may include a transfer unit for transferring the transfer mirror group.

According to an embodiment, the beam design mirror includes a first beam design mirror and a second beam design mirror, wherein the beam design mirror may determine at least one of a width and a length of a beam shape irradiated to the object to be processed. have.

According to an embodiment, the transfer mirror group includes the second beam design mirror and the path adjustment mirror, and the first beam design mirror includes the first laser beam and the first transmitted through the same path. A second laser beam is transmitted to the second beam design mirror positioned in the transport direction of the transport mirror group, and the second beam design mirror adjusts the path of the transmitted first laser beam and the second laser beam. However, by controlling the transfer unit to transfer the transfer mirror group in the transfer direction, the controller may adjust the distance between the first beam design mirror and the second beam design mirror.

According to an embodiment, the path adjustment mirror includes the first laser beam and the second laser beam transmitted from the second beam design mirror when the position of the second beam design mirror is changed according to the transfer of the transfer mirror group. A path through which the beam is transmitted to the polygon mirror may be fixed.

According to one embodiment, the laser processing apparatus, the first laser beam and the second laser beam scanned by the polygon mirror, before being irradiated to the object to be processed, the scanned first laser beam from the polygon mirror and a light collecting unit receiving the scanned second laser beam and condensing the scanned first laser beam and the scanned second laser beam, wherein the light collecting unit includes the incident first laser beam and the second laser beam. By reflecting the second laser beam through the reflective surface, at least one of the width and length of each of the first laser beam and the second laser beam irradiated to the object to be processed may be reduced in response to the curvature of the reflective surface. .

According to an embodiment, the control unit controls the beam combination unit so that the reflected second laser beam has a reflection angle corresponding to the inclination angle by adjusting the inclination angle of the first optical system within a preset range. can

According to an embodiment, the beam combining unit may include a tilt driving unit for tilting the first optical system and the first optical system and generating a tilt angle within the preset range of the first optical system.

According to one embodiment, the beam combination unit, the first optical system and the first optical system for vibrating motion, and for the vibrating motion and the vibrator for adjusting at least one value of an amplitude and a frequency for the vibration motion, An elastic part providing elastic force may be included at one end of the first optical system.

According to an embodiment, the vibrator includes a first vibrator disposed at a first angle and a first distance from a center point of a cross-section of a laser beam incident on the first optical system, and the first vibrator from a center point of a cross-section of the laser beam. It may include a second vibrator disposed at a second angle and a second distance different from the angle.

According to one embodiment, the control unit, based on the adjusted at least one value, so that the irradiation position of the cross-section of the second laser beam within the irradiation area of the cross-section of the first laser beam for which the irradiation position is determined to vary can be controlled

A laser processing apparatus using a laser beam of a different wavelength according to another embodiment of the present invention for solving the above problems includes a first laser oscillator for outputting one laser beam and a second laser oscillator for outputting a second laser beam and the Design a first beam transmission system for transmitting a first laser beam to a beam shape design unit, a second beam transmission system for transmitting the second laser beam to a beam shape design unit, and a beam shape of the transmitted first laser beam, A first beam shape design unit for transmitting the first laser beam having the designed beam shape to a beam combination unit and a beam shape of the transmitted second laser beam are designed, and the second laser beam with the designed beam shape is applied to the beam. Transmitting the second beam shape design unit and the first laser beam transmitted to the combination unit, and reflecting the second laser beam, combining the transmitted first laser beam and the reflected second laser beam in the same path By scanning the first laser beam and the second laser beam transmitted through the same path while rotating at a constant speed with a beam combination unit including an optical system for transmitting, the first laser beam and the second laser beam are processed into an object By adjusting the angle of inclination of the polygon mirror and the beam combination unit irradiated to the, the control unit to control so that the irradiation position of each of the irradiated first laser beam and the irradiated second laser beam on the object to be processed is determined. have.

A laser processing method using a laser beam of a heterogeneous wavelength according to another embodiment of the present invention for solving the above problems is performed by a laser processing apparatus using a laser beam of a heterogeneous wavelength, and the method is a first laser beam receiving, first designing a cross-sectional shape of the first laser beam, receiving a second laser beam, and second designing a cross-sectional shape of the second laser beam, and the first design incident on an optical system Transmitting the first laser beam and reflecting the second designed second laser beam incident on the optical system, thereby transmitting the first laser beam and the second laser beam in the same path and rotating at a constant speed using a polygon mirror to scan the first laser beam and the second laser beam transmitted through the same path, and irradiating the scanned first laser beam and the scanned second laser beam to the object Including the step, by adjusting the inclination angle of the optical system, the irradiation position of each of the irradiated first laser beam and the irradiated second laser beam on the object to be processed can be determined.

According to an embodiment of the present invention, there is an advantage that, during laser processing, processing efficiency can be increased as the shape or irradiation position of the final beam is changed.

According to an embodiment of the present invention, even when a difference between the reactivity and the absorption rate of the object to be processed occurs depending on the wavelength of the laser beam, the laser processing can be performed by selecting the optimal laser wavelength.

According to an embodiment of the present invention, by controlling the shape and/or irradiation position of a plurality of laser beams, cutting of a film having a multilayer structure, grooving or physical property modification of a product added such as coating to a base material, etc. laser processing is possible.

According to an embodiment of the present invention, there is an advantage in that the energy output can be varied in the laser processing process. For example, in welding applications where defects are to be reduced by implementing micro preheating or postheating functions by adjusting the reactivity during machining, the efficiency of performing processes that require energy output control during machining is increased.

Effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.

1 is an exemplary view for explaining the shape of a laser beam irradiated to a processing object, which is referred to in some embodiments of the present invention.
2 is an example of a laser processing apparatus using a laser beam of a different wavelength, according to an embodiment of the present invention.
3 and 4 are block diagrams of a laser processing apparatus using a heterogeneous laser beam according to another embodiment of the present invention.
5 and 6 are exemplary views of a beam combining unit, referenced in some embodiments of the present invention.
7 is an exemplary view for explaining a design method of a cross-sectional shape of a beam referenced in some embodiments of the present invention.
8 is an illustration of a beam shape design, referenced in some embodiments of the present invention.
9 is an illustration of a light collecting unit, referenced in some embodiments of the present invention.
10 is an illustration of a final laser beam set, referenced in some embodiments of the present invention.
11 and 12 are exemplary views for explaining a method of controlling a position of an irradiated laser beam according to another embodiment of the present invention.
13 is an exemplary view for explaining the movement of the second beam cross-sectional shape within the irradiated first beam cross-sectional shape, which is referred to in some embodiments of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the art to which the present invention pertains. It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular. The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase.

In the present specification, the shape of the laser beam or the cross-sectional shape of the beam means the shape of the cross-section seen in the traveling direction of the laser beam or the shape of the laser beam expressed by irradiating the laser beam to the object to be processed. In particular, hereinafter, a beam shape formed by irradiating a laser beam to a processing object may be referred to as a final beam shape.

Hereinafter, a laser processing apparatus using a laser beam of a heterogeneous wavelength may be abbreviated as a laser processing apparatus, and a laser processing method using a laser beam of a heterogeneous wavelength may be abbreviated as a laser processing method, respectively.

1 is an exemplary view for explaining the shape of a laser beam irradiated to a processing object, which is referred to in some embodiments of the present invention.

According to an embodiment of the present invention, the laser processing apparatus can vary the beam shape, and can independently vary the width (x) and length (y) of the cross-sectional shape of the beam.

Referring to FIG. 1 , when a laser beam 1 is expressed in terms of X, Y and Z axes, the Z axis is the traveling direction of the laser beam, and can be described by dividing it into shapes in the X and Y directions perpendicular to the Z axis. have. In particular, according to an embodiment of the present invention, the laser processing apparatus can design the shape of the cross section 3 of the laser beam expressed in the X and Y planes seen in the traveling direction.

The beam shape 5 is an example of the final beam shape irradiated to the object to be processed by the laser processing apparatus. Hereinafter, among the configurations of the final beam shape 5 , a narrow portion in the X direction may be expressed as a 'width' and a relatively long Y direction may be expressed as a 'length'.

2 is an example of an apparatus for designing a focal point shape using a laser beam having a heterogeneous wavelength according to an embodiment of the present invention. 3 and 4 are block diagrams of a laser processing apparatus using a heterogeneous laser beam according to another embodiment of the present invention.

Referring to FIG. 2 , the focal shape design device using a laser beam having a different wavelength includes a first laser oscillator 10 , a second laser oscillator 20 , a first beam transmission system 15 , and a second beam transmission system ( 25 ), a beam combination unit 30 , a beam shape design unit 40 , a polygon mirror 50 , and a control unit 70 . The first laser oscillator 10 and the second laser oscillator 20 of FIG. 2 are illustrated as a laser 1 10 and a laser 2 20 in FIGS. 3 and 4 , respectively.

According to an embodiment, the first and second laser oscillators 10 and 20 are FIR wavelength lasers such as CO2 lasers, IR wavelength lasers such as fiber lasers, green lasers, blue lasers, and UV lasers. It may be any one of laser sources, but embodiments of the present invention are not limited thereto and may be any one of various lasers widely known in the art to which the present invention pertains. The first and second laser oscillators 10 and 20 output a first laser beam 11 and a second laser beam 21, respectively.

According to an embodiment, the first and second beam transmission systems 15 and 25 may be optical fibers that transport the laser beams generated by the first and second laser oscillators 10 and 20 .

In another embodiment, the first and second beam transmission systems 15 and 25 may be beam transmission systems including lenses or reflection mirrors. The beam transmission systems 15 and 25 may transfer the laser beam to the optical system of the beam combination unit 30 .

According to an embodiment, when the first and second beam transmission systems 15 and 25 are optical fibers, the associated device may be the first optical fiber connector 17 and the second optical fiber connector 27 , respectively.

In particular, in FIG. 2 , the case in which the first laser beam 11 is output through the first optical fiber connector 17 and transmitted to the optical system of the beam combining unit 30 is illustrated as an example. In addition, a case in which the second laser beam 21 is output through the second optical fiber connector 27 and transmitted to the optical system of the beam combining unit 30 is illustrated as an example.

2 to 4 , the laser processing apparatus 100 according to an embodiment of the present invention may provide a method of varying the irradiation position of two laser beams having wavelengths.

Two laser beams, that is, the first laser beam 11 and the second laser beam 21 may have different wavelengths. The wavelengths of the two laser beams according to the embodiment of the present invention may be green wavelengths in the IR region of about 1070 nm and about 532 nm. In addition, it may be a CO ₂ laser with an FIR wavelength of 10.6um or 9.3~9.7um, and a fiber laser with a wavelength of around 1080nm. In the case of an FIR laser, a beam transmission system using a general optical system is used instead of an optical fiber.

According to an embodiment of the present invention, the mode of the first laser beam 11 and the second laser beam 21 is applicable to both a single mode and a multi mode, and a desired beam shape, It may be determined according to the processing purpose. For example, a single mode capable of forming a small beam may be used for applications for removing materials such as cutting or grooving, and a multi-mode may be used when a rather large beam configuration is required.

The first laser beam 11 and the second laser beam 21 that have passed through the optical system of the beam combination unit 30 may be transmitted to the beam shape design unit 40 that designs a beam shape. The optical system of the beam combining unit 30 may be referred to as a first optical system in order to distinguish it from the optical system of the beam shape design unit 40 .

The first optical system transmits 31 the first laser beam 11 and the second laser beam 21 to the beam shape design unit 40 in the same path. Transmission of the first laser beam 11 and the second laser beam 21 through the same path from the first optical system may be referred to as a first transmission 31 .

Specifically, the first optical system may transmit the first laser beam 11 and reflect the second laser beam 21 , the transmitted first laser beam 11 and the reflected second laser beam 21 . can be combined to transmit the first 31 through the same path.

In an embodiment, the first laser beam 11 and the second laser beam 21 have different wavelengths, and may be incident to the optical system included in the beam shape design unit 40 through the same path.

The beam shape design unit 40 may design cross-sectional shapes of the first laser beam 11 and the second laser beam 21 that are first transmitted 31 from the first optical system. Specifically, the beam shape design unit 40 may design the beam shape by configuring the focusing distances of the X-direction component and the Y-direction component of the first laser beam 11 differently. The beam shape design unit 40 may design a beam shape with respect to the second laser beam 21 by varying the focusing distance for each component in the same X and Y directions.

For such a beam shape design, the optical system of the beam shape design unit 40 may include a plurality of beam shaping mirrors, and in one embodiment, the mirror surface has any one of a concave or convex surface, or an area A concave portion and a convex portion may be mixedly configured. In another embodiment, the mirror surface of the optical system of the beam shape design unit 40 may have a structure that is not spherical, concave or convex, but has a hyperbolic shape, a parabolic shape, or a combination thereof.

The first laser beam 11 and the second laser beam 21 whose shape is designed by the beam shape design unit 40 are transmitted 41 to the polygon mirror 50 . In order to distinguish it from the first transmission 31 on the same path, the transmission of the laser beam with a designed shape is referred to as a second transmission 41 .

Meanwhile, referring to FIG. 3 , the beam shape design unit 40 includes a beam width control unit 401 for determining the X-direction shape of the laser beam and a beam length control unit 403 for determining the Y-direction shape of the laser beam. can do. For example, the first laser beam 11 and the second laser beam 21 , which are first transmitted 31 from the beam combining unit 30 , are first incident on the beam width adjusting unit 401 in the X direction of the laser beam. The shape can be designed. At this time, the Y-direction shape in the beam width control unit 401 is not affected, and the Y-direction shape of the first laser beam 11 and the second laser beam 21 is designed by the beam length control unit 403 . .

The order of designing the laser beam shape inside the beam shape design unit 40 is only an example, and the embodiment of the present invention is not limited thereto, and the beam width may be designed after designing the length of the beam.

In addition, if the X and Y directions are not independently adjusted and adjusted at a predetermined ratio according to the design, the beam shape design unit can be configured as one set without X and Y separation. That is, the beam width control unit 401 and the beam length control unit 403 may be formed as one component. According to this, it is possible to implement various beam shapes by replacing only the beam design mirror as necessary.

The polygon mirror 50 rotates at a constant speed and scans the second transmitted first laser beam 11 and the second laser beam 21 .

According to an embodiment of the present invention, the scanned first laser beam 11 and the second laser beam 22 may be irradiated to the processing object 200 in the final beam shape 51 . In particular, according to an embodiment of the present invention, the polygon mirror 50 may rapidly scan the beam having a shape designed in any one of the X direction and the Y direction to the object 200 . According to another embodiment, in addition to the polygon mirror 50, if necessary, a galvano scanner using the repeated motion of the mirror may be applied.

3 and 4 , the laser processing apparatus 100 may further include a light collecting unit 60 . In this case, the scanned first laser beam 11 and the second laser beam 22 may be transferred to the light collecting unit 60 to undergo a final shaping process. The scanned first laser beam 11 and the second laser beam 21 are condensed and reflected by the condensing unit 60 to be designed in the shape of the final beam, and the final beam shape is irradiated to the object 200 to be processed. can be

The control unit 70 may control the overall operation and function of at least a portion of the laser processing apparatus 100 . Specifically, the control unit 70 may control the laser oscillators 10 and 20 to determine the wavelength and intensity of the laser beam, and the inclination of the first optical system 300 of the beam combination unit 3 and the beam shape design unit It is possible to control the position movement of the transfer mirror group of (40), and for this purpose, it is possible to control the operation of the servo motor, the tilt drive unit, the transfer unit, and the vibrator provided in the laser processing apparatus 100 . Through this, the control unit 70 can determine the position at which the final beam shape 51 of the irradiated first laser beam 11 and the irradiated second laser beam 21 is irradiated on the object 200 to be processed. have.

On the other hand, according to another embodiment of the present invention, the laser processing apparatus 100, the first laser beam 11 and the second beam transmission system 25 transmitted from the first beam transmission system 15 to the first optical system (25) It may further include a beam size adjusting unit for adjusting the cross-sectional size of at least one laser beam among the second laser beams 21 transmitted from the to the first optical system.

In FIG. 3 , in particular, the beam size adjusting unit 29 for adjusting the cross-sectional size of the second laser beam 21 is illustrated as an example. In this case, the second laser beam 21 may be transmitted to the beam combining unit 30 after the cross-sectional size is first adjusted by the beam size adjusting unit 29 .

Thereafter, the second laser beam 21 incident on the first optical system is incident on and reflected on the first optical system, and forms the same path as the first laser beam 11 that has passed through the first optical system as in the above-described embodiment. can

In general, when the wavelength of the laser beam is long, the beam shape is formed larger than when the wavelength is short, and the multimode can obtain a larger beam shape than the single mode. In addition, the case where the size of the incident laser beam is small is irradiated with a larger beam shape than the case where the size of the incident laser beam is small.

Therefore, when it is necessary to compare the shape sizes of the two laser beams or if it is necessary to adjust the sizes of individual laser beams, the size comparison or individual size adjustments are made by placing the beam size adjusting unit 29 on at least one of the two laser beams. implementation becomes possible. For example, a beam expander may be used as the beam size adjuster 29 .

According to another embodiment of the present invention, the laser processing apparatus 100 is a plurality of beam shape design units (40, 410) for contrasting the beam shape size, or for individual size and/or shape control for each laser beam. may include.

2 and 4 , the first laser beam 11 and the second laser beam 21 may be transmitted to the first beam shape design unit 40 and the second beam shape design unit 410 , respectively. .

In this case, the first laser beam 11 passes through the beam width control unit 401 and the beam length control unit 403 to the beam combination unit 30, similarly to the embodiment of the beam shape design unit 40 described above. is sent In the case of the second laser beam 21 , it is incident on the second beam shape design unit 410 , and is transmitted to the beam combination unit 30 through the beam width control unit 411 and the beam length control unit 413 .

The first laser beam 11 and the second laser beam 21 for which the beam shape is designed form the same path as described with reference to FIGS. 2 and 3 in the number of beam combinations 30, respectively, and the polygon mirror 50 is transmitted (31).

The polygon mirror 50 may irradiate the transmitted first laser beam 11 and the second laser beam 21 to the final beam shape 51 on the object to be processed, and the laser processing apparatus 100 may include the condensing unit 60 . ), the final beam shape 51 may be irradiated to the object to be processed through the light collecting unit 60 .

As described above, when the same first optical system is used for the two laser beams, the shapes of the two lasers to be irradiated generally have the same shape. However, according to an embodiment of the present invention, the wavelengths of the two laser beams are different The size of the final beam shape 51 to be irradiated may vary according to setting, beam mode, adjustment of the incident beam size, etc., and the final beam shape 51 may be determined through design according to the purpose of processing in advance. can

In addition to the size of the final beam shape 51 , it is also a very important task to determine the position at which the final beam shape of the two laser beams is irradiated to maximize the purpose and efficiency of laser processing. The determination of the irradiation position of the final beam shape may be performed by the beam combining unit 30 .

Next, with reference to FIG. 5 and FIG. 6, the control method of a beam irradiation position is demonstrated.

5 and 6 are exemplary views of a beam combining unit, referenced in some embodiments of the present invention.

In FIG. 5 , the first optical system 300 of the beam combining unit 30 is illustrated as an example. Referring to FIG. 5 , as the first laser beam 11 is incident on the first optical system 300 according to an embodiment of the present invention, a path 501 , a path 501-1, and a path 501-2 ) to form a transmission path.

To this end, the first surface 510 corresponding to the incident surface of the first optical system 300 is anti-reflection for a preset wavelength range including the wavelength of the incident first laser beam 11 . A coating layer may be formed,

In addition, the material of the first optical system 300 is also determined to transmit the wavelength range of the first laser beam, and the second surface 520 corresponding to the emission surface also forms an anti-reflection coating layer for the preset wavelength range.

Meanwhile, according to an embodiment of the present invention, the second laser beam 21 is reflected from the second surface 520 of the first optical system 300 . The second laser beam 21 is incident on the path 503 and is reflected by the path 503 - 1 . Accordingly, the path 501-2 of the first laser beam 11 and the path 503-1 of the second laser beam 21 form the same path. That is, the first laser beam 11 and the second laser beam 21 may be transmitted through the same path.

The reflection of the second laser beam 21 is made in the antireflection coating layer on the emitting surface of the first laser beam 11 , and the antireflection efficiency of the second surface 520 varies according to the wavelength of the second laser beam 21 . can That is, this is because the optical system 300 must be coated to reflect all wavelengths of the second laser beam 21 on the second surface 520 , which is the exit surface of the first laser beam 11 . Conversely, the reflection efficiency of the second laser beam 21 may vary according to the wavelength of the first laser beam 11 . The coating layers of the incident surface 510 and the exit surface 520 may be formed by applying a coating layer having at least one of various properties. In particular, in order to increase the efficiency of the transmission of the first laser beam 11 and the reflection of the second laser beam 21, the optimum antireflection wavelength range and/or reflection wavelength according to the wavelengths of the first and second lasers At least one coating layer having a range may be applied.

Referring to FIG. 6 , the first optical system 300 may perform a tilting motion by the controller 70 . A case in which the first optical system 300 is inclined at the angle 610 will be described as an example.

According to the embodiment of the present invention, by finely adjusting the angle of the first optical system 300 of the beam combining unit 30, the difference in the angle of the traveling path of the first laser beam 11 and the second laser beam 21 is can occur The controller 70 may control the traveling directions of the first laser beam 11 and the second laser beam 21 by generating the angle difference as described above.

Even if the angle of the first optical system 300 of the beam combination unit 30 is slightly changed, the angle of the transmitted first laser beam 11 does not change. Strictly speaking, although the entrance and exit positions of the first laser beam 11 are slightly changed, the irradiation position of the final beam shape 51 is not affected. On the other hand, the angle 620 of the reflected second laser beam 21 may generate a large change compared to the angle 610 . For example, angle 620 may have twice the angle 610 . In this way, the laser processing apparatus 100 can change and control the irradiation position of the final beam shape 51 of the two laser beams.

Specifically, in the case of the first laser beam 11, even if the first optical system 300 is inclined by the angle 610, the path 501, the path 501-1, and the path 501-2 of FIG. follow the same path In fact, although minute changes occur in the incidence and exit paths of FIGS. 5 and 6 , it hardly affects the irradiation position of the final beam shape 51 irradiated to the object 200 .

On the other hand, in the case of the second laser beam 21, as the first optical system 300 is inclined by the angle 610, the incident angle is changed and the angle 620 is changed compared to before the inclination is generated and reflected, so that the final beam The irradiation position of the shape is also different.

For example, the tilt angle 610 within the critical range of maintaining the final beam shape 51 and adjusting the irradiation position may be within about 0.1 degrees, but the embodiment of the present invention is not limited thereto.

7 is an exemplary view for explaining a design method of a cross-sectional shape of a beam referenced in some embodiments of the present invention. Hereinafter, the beam shape designed by the determined beam component will be described.

In FIG. 7 , a graph 710 for a horizontal component X and a graph 720 for a vertical component Y are illustrated as design elements of the laser beam. According to an embodiment of the present invention, the control unit 70 may design a laser beam by transferring the optical system of the beam shape design unit 40 . In particular, cross-sections of various laser beams may be selected as design elements according to optical system transport.

In FIG. 7 , a first X element 711 , a second X element 713 , and a third X element 715 are shown as examples of a horizontal component of a cross section of a laser beam that can be selected as the design element. In addition, as examples of the vertical component of the cross section of the laser beam that can be selected as the design element, a first Y element 721 , a second Y element 723 , and a third Y element 725 are shown.

As shown in the graph 710 and the graph 720, the focal length of the horizontal component and the vertical component are mutually different according to the transport of the optical system, and the beam shape design unit 40 includes innumerable horizontal components and vertical components on the path of the laser beam. The beam shape can be designed by selecting and combining each element suitable for the purpose of processing among the elements of the component.

For example, the first designed beam cross-sectional shape 731 may be designed to be composed of a horizontal component first X element 711 and a vertical component first Y element 721 . The second designed beam cross-sectional shape 732 may be designed to be composed of a horizontal component second X element 713 and a vertical component second Y element 723 . In addition, the cross-sectional shape of the third design beam may be designed to consist of a horizontal component third X element 715 and a vertical component third Y element 725 . Even in the above exception, as in the configuration of the first X element 711 and the third Y element 723 , coupling between elements at different positions in the graph 710 and the graph 720 is also possible, and for this purpose, the control unit 70 Various setting changes such as the number of mirrors in the optical system, transport distance, transport angle, and/or transport direction can be performed.

The control unit 70 can design a beam shape by appropriately selecting and combining shapes on a horizontal component and a vertical component of the laser beam by transferring the optical system of the beam shape design unit 40 .

8 is an illustration of a beam shape design, referenced in some embodiments of the present invention.

Referring to FIG. 8 , the beam shape design unit 40 may include a beam design mirror 433 , a beam design mirror 435 , and at least one path adjustment mirror 437 . The beam design mirrors 433 and 435 may be referred to as beam shaping mirrors. In FIG. 8 , a case in which a mirror 431 is added in addition to the mirror 437 as a beam path adjusting mirror of the optical system is illustrated as an example. The mirror 431 may be excluded according to the traveling path of the laser beams 11 and 21, and is not essential.

The various mirrors shown in FIG. 8 and the structures of the various mirrors may form an optical system. Hereinafter, to distinguish the optical system of the beam shape design unit 40 from the first optical system 300 of the beam combining unit 30 , it will be referred to as a second optical system.

When the first laser beam 11 and the second laser beam 21 are transmitted from the beam combining unit 30 , the path adjustment mirror 431 reflects the beam design mirror 433 . In this case, the path adjustment mirror 431 is for smooth transmission of the laser beam and may be a flat mirror.

At least some of the path adjusting mirrors 431. 437 and the beam design mirrors 433 and 435 included in the second optical system may form the transfer mirror group 800 .

The beam shape design unit 40 may include a transfer unit for transferring the transfer mirror group 800 under the control of the controller 70 . The transfer unit may transfer the transfer mirror group by, for example, a motor driven method, but the embodiment of the present invention is not limited thereto.

As the transport unit transports the transport mirror group 800 in the transport direction 810 , the distance 801 between the beam design mirror 433 and the beam design mirror 435 increases. The beam design mirror 433 and the beam design mirror 435 may be, for example, a Biconic mirror or a cylindrical mirror, or may be a free from surface combining several curved surfaces.

The first laser beam 11 and the second laser beam 21 transmitted from the path adjustment mirror 431 are transferred to the beam design mirror 433 and reflected, and are transmitted to the beam design mirror 435 . In this case, as the distance 801 between the beam design mirror 433 and the beam design mirror 435 increases, a beam shape may be designed.

As described above with reference to FIGS. 3 and 4 , the X-direction shape is designed by the beam width control unit 401 in the beam shape design unit 40 , and the Y-direction shape is changed by the beam length control unit 403 . can be designed. Each of the beam width adjusting unit 401 and the beam length adjusting unit 403 may be configured in the same manner as in the second optical system.

The beam design mirror 435 and the path adjustment mirror 437 are simultaneously moved in the transport direction 810 to the transport mirror group 800 . Due to this structure, while the distance 801 between the beam design mirror 433 and the beam design mirror 435 is varied, the path adjustment mirror 437 controls the path of the laser beam after the beam shape design unit 40 . can be fixed.

For example, if there is no path adjustment mirror 437 , whenever the distance 801 between the two beam design mirrors is changed, the path of the laser beam reflected by the beam design mirror 435 is also changed. do.

For example, if the path following the beam shape design unit 40 is the polygon mirror 50, the laser beam cannot be scanned from a certain surface of the polygon mirror 50, so that the object to be processed is irradiated with a uniform laser beam shape. it won't be possible

As another example, even when the traveling path following the beam shape design unit 40 is the beam combination unit 30, as the incident positions of the first laser beam 11 and the second laser beam 21 are continuously varied, There is a problem in that the irradiation position on the processing object 200 cannot be controlled.

That is, according to the embodiment of the present invention, the path adjustment mirror 437 is bundled with the beam design mirror 435 and the transfer mirror group and transferred at the same time, so that even when the position of the beam design mirror 435 according to the transfer is changed, the first laser There is an advantage in that the path through which the beam 11 and the second laser beam 21 are transmitted can be fixed.

In the above, the second step of adjusting the shape of the beam width in the beam width adjusting unit 401 in the X direction in the beam shape design unit 40 and adjusting the shape of the beam length in the beam length adjusting unit 403 in the Y direction The method and configuration of performing the beam shape design of the have been described.

According to another embodiment of the present invention, the beam shape design unit 40 may design the shape of the beam width in the X direction and the beam length shape in the Y direction in one step.

To this end, the two beam design mirrors 433 and 435 may be configured as mirror pairs having independent curvatures in the X and Y directions, respectively. Beam design mirrors 433 and 435 may be, for example, toroidal surfaces or surface mirrors or free form surface mirrors. However, in this case, if the amount of variable distance between the two beam design mirrors 433 and 435 increases, the effect of the X-direction beam width increases, and thus the variable range of the Y-direction beam length may be limited.

According to another embodiment of the present invention, the beam width adjusting unit 401 and the beam length adjusting unit 403 of the beam shape design unit 40 are each for adjusting the width of the laser beam and the length of the laser beam. It may be configured by applying only the design mirror. When a highly integrated beam shape of several um is not required, the beam design tolerance can be somewhat large. In this case, it is possible to configure the beam shape design unit 40 by applying only one beam design mirror.

9 is an illustration of a light collecting unit, referenced in some embodiments of the present invention.

According to an embodiment of the present invention, the laser processing apparatus 100, scanned by the polygon mirror 50, the first laser beam 11 and the second laser beam 21 is irradiated to the processing object (200) Before being transmitted, the scanned first laser beam 11 and the scanned second laser beam 21 are transmitted from the polygon mirror 50 , and the scanned first laser beam 11 and the scanned second laser beam 21 are received. ) may further include a light collecting unit 60 for condensing the light.

The light collecting unit 60 reflects the incident first laser beam 11 and the second laser beam 21 , and the first laser beam 11 and the second laser beam 21 are irradiated to the object 200 to be processed. ), at least one of a width and a length may be reduced to correspond to the curvature of the reflective surface of the light collecting unit 60 .

In particular, according to an embodiment of the present invention, the light condensing unit 900 of FIG. 9 is an optical system having a final condensing function, and functions to condense the laser beam in the X direction and does not have a separate light condensing function in the Y direction. only. It may have a curvature to compensate for distortion due to a path difference that may occur when the scanning length is increased. In FIG. 9 , a case in which the reflective surface has a parabolic curvature 903 in the X direction and a flat curvature 901 in the Y direction is illustrated as an example. do.

According to an embodiment, the focal length toward the processing object 200 may be adjusted by providing a function in which the laser beam 910 is incident from the light collecting unit 900 and is reflected 911 in a vertical direction. Also, the light collecting unit 900 may rapidly change the width of the additional final beam shape.

10 is an illustration of a final laser beam set, referenced in some embodiments of the present invention.

In laser processing, whether a beam is irradiated prior to the processing object 200 according to a direction in which the laser beam is scanned affects processing efficiency.

Referring to FIG. 10 , the laser processing apparatus 100 designs the shapes of the first laser beam 11 and the second laser beam 21 to generate final laser beam sets 1010 , 1020 , 1030 , 1040 , and , can be irradiated to the object 200 to be processed. A case in which the beam shape by the first laser beam 11 is the final beam shape 1003 and the beam shape by the second laser beam 21 is the final beam shape 1001 will be described. Hereinafter, it is assumed that the scan direction proceeds from left to right.

In the case of the final laser beam set 1010, it is advantageous when the wide area beam 1003 precedes and gives a preheating effect, and the trailing beam 1001 performs main processing.

In the case of the final laser beam set 1020, since it has a multi-layer structure, it is effective for processing products having different laser absorption rates for each layer, and is effective for processing requiring high energy concentration such as cutting or grooving.

In the case of the final laser beam sets 1030 and 1040, it is very useful when processing for the purpose of reducing defects that may occur after high-energy processing and processing after reducing burrs of the cut surface is required.

The difference between the irradiation positions of the final beam shape 1001 and the final beam shape 1003 may be determined by a difference in inclination angle of the beam combination unit.

11 and 12 are exemplary views for explaining a method of controlling a position of an irradiated laser beam according to another embodiment of the present invention.

A case in which the first optical system 300 performs the tilting motion by the controller 70 has been described above with reference to FIG. 6 . In more detail, as the controller 70 adjusts the inclination angle 610 of the first optical system 300 within a preset range, the reflected second laser beam 21 receives a reflection angle 620 corresponding to the inclination angle. It is possible to control the beam combination unit 30 to have a.

In particular, the beam combination unit 30 may include a tilt driver for tilting the first optical system 300 and generating a tilt angle within a preset range of the first optical system 300 .

According to an embodiment, the tilt driving unit may generate a tilt by physically transmitting a pushing force to at least one end of the optical system 300 , and may include a servo motor and be driven by the control unit 70 .

Referring to FIG. 11 , the beam combination unit 30 causes the first optical system 300 and the first optical system 300 to oscillate, and a vibrator ( 1110 and an elastic part 1111 providing an elastic force to one end of the first optical system 30 for the vibration motion.

11 is a side view of the first optical system 300 , wherein the vibrator 1110 and the elastic part 1111 are included in the holder 1101 positioned at one end of the first optical system 300 , and the first optical system 300 . It may be provided on the front and back of one end, respectively.

The vibrator 1110 is controlled by the controller 70 and is electrically driven.

When the vibrator 1110 vibrates at the amplitude and/or frequency determined by the control unit 70, the force due to the vibration of the vibrator 1110 is transmitted to the first optical system 300, and the vibrator 1110 moves to the first optical system ( When the 300 is pushed, the first optical system 300 vibrates with the elastic force provided by the elastic part 1111 .

The holder 1102 positioned at the other end of the first optical system 300 includes elastic parts 1112 and 1113 , and the elastic parts 1112 and 1113 assist the vibrational movement of the first optical system 300 .

In FIG. 11 , a case in which one vibrator 1110 is attached is illustrated as an example, but the embodiment of the present invention is not limited thereto.

Even if the first optical system 300 performs the oscillation motion, as in the above-described embodiment, the path of the first laser beam 11 does not affect the irradiation position with the paths 501 , 501-1 and 501-2 . . On the other hand, the path of the second laser beam 21 is incident on the path 503 , and the reflection path is changed to the path 513 or the path 523 by the vibrational motion of the first optical system 300 . The irradiation position of the final beam shape by the second laser beam 21 may be rapidly changed in response to the change of the reflection angle.

In the above, one vibrator is provided to perform a two-dimensional vibration motion, and the change of the irradiation position of the final beam shape has been described accordingly. A one-dimensional vibrating motion is performed by vibration of one vibrator, and the final beam shape in which the irradiation position is changed accordingly may be referred to as a one-dimensional dynamic beam.

Hereinafter, the shape of the final beam generated during the vibrating motion by the plurality of vibrators will be described.

Referring to FIG. 12 , the first optical system 200 may include a plurality of vibrators including a vibrator 1210 and a vibrator 1110 at an upper end thereof. As described above, by applying the two vibrators 1110 and 1210, a two-dimensional dynamic beam may be formed by combining the amplitude, frequency, and phase difference of each vibrator. In this case, the phase difference may be determined as the position of the vibration start point. 12 is a front view of the first optical system 300 .

The vibrator 1110 may be disposed at a first angle 1201 and a first distance 1211 from a center point 1230 of a cross-section of a laser beam incident on the first optical system 300 .

Also, the vibrator 1210 may be disposed at a second angle 1202 and a second distance 1212 different from the first angle 1201 from the center point 1230 of the cross-section of the laser beam.

The control unit 70, by adjusting at least one of the phase difference, amplitude, and frequency extracted from the first angle 1201 and the first distance 1211, the second angle 1202 and the second distance 1212, 2 A dimensional dynamic beam can be configured. The first optical system 300 performs oscillation in a two-dimensional plane, and accordingly, the irradiation position of the final beam shape may be changed.

The first optical system 300 may include elastic parts 1113 and 1213 at the lower end.

The vibrators 1110 and 1210 and the elastic parts 1113 and 1213 described above may be attached to the first optical system 300, and in particular, the vibrators 1110 and 1210 are electrically driven, and the structure for supplying power is shown in FIG. 12 is omitted.

As the dynamic beam shape is configured in FIGS. 11 and 12 , the control unit 70 controls the irradiation position of the cross-section of the second laser beam 21 in the irradiation area of the cross-section of the first laser beam 11 for which the irradiation position is determined. can be controlled to be variable.

In particular, in FIG. 12 , by adjusting the position of the vibrator, it is possible to form more diverse dynamic beams.

13 is an exemplary view for explaining the movement of the second beam cross-sectional shape within the irradiated first beam cross-sectional shape, which is referred to in some embodiments of the present invention.

Referring to FIG. 13 , the final beam shape 1310 is an example of the 1D dynamic beam referenced in FIG. 11 , and the final beam shape 1320 is an example of the 2D dynamic beam referenced in FIG. 12 .

The final beam shape 1310 is a final shape 1003 in which the first laser beam 11 is irradiated to the object 200 and a second laser beam whose irradiation position is varied in the longitudinal direction of the Y axis by one-dimensional vibrational motion. (21) the irradiated final shape (1001).

The final beam shape 1320 includes the final shape 1003 in which the first laser beam 11 is irradiated to the object 200 and the irradiation position in the width direction of the X-axis and the longitudinal direction of the Y-axis by two-dimensional vibrational motion. includes the irradiated final shape 1001 of the variable second laser beam 21 .

In the final beam shape (1310, 1320), inside the final beam shape (1003), the case where the final beam shape (1001) linear motion is shown, but the embodiment of the present invention is not limited thereto.

In particular, the laser processing apparatus 100 can control the final beam shape 1001 by the second laser beam 21 to move as well as inside the final beam shape 1003 of the first laser beam 11 outside. . In addition, the laser processing apparatus 100 may be controlled to perform a movement in which the final beam shape 1001 enters the inside of the final beam shape 1003 and then leaves again to the outside.

In addition, according to another embodiment of the present invention, the laser processing apparatus 100 may be controlled to perform the final beam shape (1003, 1001) to perform the repetitive motion constituting the plane in addition to the linear motion. For example, the laser processing apparatus 100 controls the final beam shape 1003 to perform various repetitive movements such as numbers '8', '0', circles, ovals, and infinity symbols in the final beam shape 1003. You may.

According to one embodiment, the final beam shape 1320 is, when the light collecting unit 900 is provided in the laser processing apparatus 100, the amplitude of the second laser beam 21 in the X-axis direction is small compared to the Y direction. can

Next, a laser processing method using a laser beam of a different wavelength, performed by a laser processing apparatus using a laser beam of a different wavelength, will be described.

The laser processing apparatus 100 may receive the first laser beam 11 and first design a cross-sectional shape of the first laser beam 110 .

Next, the laser processing apparatus 100 may receive the second laser beam 21 and design a second cross-sectional shape of the second laser beam 21 .

The laser processing apparatus 100 transmits the first designed first laser beam 11 incident on the optical system, and reflects the second designed second laser beam 21 incident on the optical system, so that the first laser beam ( 11) and the second laser beam 21 may be transmitted through the same path.

Next, the laser processing apparatus 100 may scan the first laser beam 11 and the second laser beam 21 transmitted through the same path by using the polygon mirror 50 rotating at a constant speed.

Finally, the laser processing apparatus 100 may irradiate the scanned first laser beam 11 and the scanned second laser beam 21 to the object 200 to be processed. In particular, the laser processing apparatus 100 by adjusting the inclination angle of the optical system, the irradiation position of each of the irradiated first laser beam 11 and the irradiated second laser beam 21 on the object 200 can be determined. .

The determination and/or calculation methods of the controller 70 according to the embodiment of the present invention described with reference to the accompanying drawings so far may be performed by executing a computer program implemented as a computer-readable code. The computer program may be transmitted from the first computing device to the second computing device through a network such as the Internet and installed in the second computing device, thereby being used in the second computing device. The first computing device and the second computing device include all of a server device, a stationary computing device such as a desktop PC, and a mobile computing device such as a notebook computer, a smartphone, and a tablet PC.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can realize that the present invention can be embodied in other specific forms without changing the technical spirit or essential features thereof. you will be able to understand Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

10 First laser oscillator 20 Second laser oscillator
15 First beam transmission system 25 Second beam transmission system
30 beam combination unit 300 first optical system
40 Beam Shape Design Department
50 polygon mirror
60 light collector
70 control
100 Laser processing equipment using laser beams of different wavelengths
200 object to be machined

Claims (16)

a first laser oscillator for outputting a first laser beam;
a second laser oscillator for outputting a second laser beam;
a first beam transmission system for transmitting the first laser beam to a beam combining unit;
a second beam transmission system for transmitting the second laser beam to a beam combining unit;
A beam that transmits the first laser beam and reflects the second laser beam, and includes a first optical system that combines the transmitted first laser beam and the reflected second laser beam and transmits the first through the same path combination part;
a beam shape design unit for designing beam shapes of the first and second laser beams transmitted through the same path, and for transmitting the designed first and second laser beams, respectively;
a polygon mirror rotating at a constant speed and irradiating the first laser beam and the second laser beam to the object to be processed by scanning the second transmitted first and second laser beams;
a control unit for controlling the irradiation position of each of the irradiated first laser beam and the irradiated second laser beam on the object to be processed by adjusting the inclination angle of the beam combination unit; and
Before the first laser beam and the second laser beam scanned by the polygon mirror are irradiated to the object to be processed, the scanned first laser beam and the scanned second laser beam are transmitted from the polygon mirror, and Containing;
The light collecting unit may include at least one of a width and a length of each of the first laser beam and the second laser beam irradiated to the object by reflecting the incident first laser beam and the second laser beam through a reflective surface. to reduce in response to the curvature of the reflective surface,
A laser processing device using a laser beam of different wavelengths. According to claim 1, wherein the laser processing apparatus,
adjusting the cross-sectional size of at least one of a first laser beam transmitted from the first beam transmission system to the first optical system and a second laser beam transmitted from the second beam transmission system to the first optical system Further comprising a beam size adjustment unit,
The at least one laser beam passes through the beam size adjusting unit and is incident on the first optical system after the cross-sectional size is adjusted,
A laser processing device using a laser beam of different wavelengths. According to claim 1, wherein the first surface of the first optical system,
A first laser beam transmitted through the first beam transmission system is incident, and an anti-reflection coating layer is formed for a preset wavelength range including the wavelength of the incident first laser beam,
A laser processing device using a laser beam of different wavelengths. According to claim 3, wherein the second surface of the first optical system,
An anti-reflection coating layer is formed for a preset wavelength range including the wavelength of the incident first laser beam, wherein the coating layer reflects the second laser beam transmitted through the second beam transmission system,
A laser processing device using a laser beam of different wavelengths. According to claim 1, The beam shape design unit,
a second optical system including at least one path adjustment mirror and at least one beam design mirror; and
At least some of the path adjustment mirror and the beam design mirror included in the second optical system form a transport mirror group and include a transport unit for transporting the transport mirror group,
A laser processing device using a laser beam of different wavelengths. The method of claim 5, wherein the beam design mirror includes a first beam design mirror and a second beam design mirror, wherein the beam design mirror determines at least one of a width and a length of a beam shape irradiated to the object to be processed. ,
A laser processing device using a laser beam of different wavelengths. The method according to claim 6, wherein the transfer mirror group includes the second beam design mirror and the path adjustment mirror,
The first beam design mirror transmits the first laser beam and the second laser beam first transmitted through the same path to the second beam design mirror positioned in the transport direction of the transport mirror group,
The second beam design mirror transmits the transmitted first laser beam and the second laser beam to the path adjustment mirror,
The control unit controls the transfer unit to transfer the transfer mirror group in the transfer direction to adjust the distance between the first beam design mirror and the second beam design mirror,
A laser processing device using a laser beam of different wavelengths. The method of claim 7, wherein the path adjustment mirror,
When the position of the second beam design mirror is changed according to the transfer of the transfer mirror group, the first laser beam and the second laser beam transmitted from the second beam design mirror are transmitted to the polygon mirror by the second transmission path fixing the
A laser processing device using a laser beam of different wavelengths. delete According to claim 1, wherein the control unit,
By adjusting the inclination angle of the first optical system within a preset range, controlling the beam combination unit so that the reflected second laser beam has a reflection angle corresponding to the inclination angle,
A laser processing device using a laser beam of different wavelengths. The method of claim 10, wherein the beam combination unit,
the first optical system; and
Comprising a tilt driving unit for tilting the first optical system and generating a tilt angle within the preset range of the first optical system,
A laser processing device using a laser beam of different wavelengths. The method of claim 10, wherein the beam combination unit,
the first optical system;
a vibrator for vibrating the first optical system and adjusting at least one of an amplitude and a frequency for the vibrating motion; and
For the vibrating motion, comprising an elastic part that provides an elastic force to one end of the first optical system,
A laser processing device using a laser beam of different wavelengths. The method of claim 12, wherein the vibrator,
a first vibrator disposed at a first angle and a first distance from a center point of a cross-section of a laser beam incident on the first optical system; and
a second vibrator disposed at a second angle and a second distance different from the first angle from the center point of the cross-section of the laser beam;
A laser processing device using a laser beam of different wavelengths. 13. The method of claim 12, wherein the control unit,
Controlling the irradiation position of the cross-section of the second laser beam to vary within the irradiation area of the cross-section of the first laser beam in which the irradiation position is determined based on the adjusted at least one value,
A laser processing device using a laser beam of different wavelengths. a first laser oscillator for outputting a first laser beam;
a second laser oscillator for outputting a second laser beam;
a first beam transmission system for transmitting the first laser beam to a beam shape design unit;
a second beam transmission system for transmitting the second laser beam to a beam shape design unit;
a first beam shape design unit that designs a beam shape of the transmitted first laser beam and transmits the first laser beam having the designed beam shape to a beam combination unit;
a second beam shape design unit that designs a beam shape of the transmitted second laser beam and transmits the second laser beam having the designed beam shape to a beam combination unit;
a beam combining unit including an optical system for transmitting the first laser beam and reflecting the second laser beam, combining the transmitted first laser beam and the reflected second laser beam and transmitting the same through the same path;
a polygon mirror rotating at a constant speed and irradiating the first laser beam and the second laser beam to the object to be processed by scanning the first laser beam and the second laser beam transmitted through the same path;
a control unit for controlling the irradiation position of each of the irradiated first laser beam and the irradiated second laser beam on the object to be processed by adjusting the inclination angle of the beam combination unit; and
Before the first laser beam and the second laser beam scanned by the polygon mirror are irradiated to the object to be processed, the scanned first laser beam and the scanned second laser beam are transmitted from the polygon mirror, and , A light condensing unit condensing the scanned first laser beam and the scanned second laser beam
The light collecting unit may include at least one of a width and a length of each of the first laser beam and the second laser beam irradiated to the object by reflecting the incident first laser beam and the second laser beam through a reflective surface. to reduce in response to the curvature of the reflective surface,
A laser processing device using a laser beam of different wavelengths. In a laser processing method using a laser beam of a heterogeneous wavelength, which is performed by a laser processing apparatus using a laser beam of a heterogeneous wavelength,
receiving a first laser beam and first designing a cross-sectional shape of the first laser beam;
receiving a second laser beam and designing a second cross-sectional shape of the second laser beam;
The first designed first laser beam incident on the optical system is transmitted, and the second designed second laser beam incident on the optical system is reflected, thereby directing the first laser beam and the second laser beam to the same path. transmitting;
scanning the first laser beam and the second laser beam transmitted through the same path by using a polygon mirror rotating at a constant speed;
Before the first laser beam and the second laser beam scanned by the polygon mirror are irradiated to the object to be processed, the scanned first laser beam and the scanned second laser beam are transmitted from the polygon mirror, condensing the scanned first laser beam and the scanned second laser beam; and
Including; irradiating the scanned first laser beam and the scanned second laser beam to the object to be processed;
By adjusting the tilt angle of the optical system, the irradiation position of each of the irradiated first laser beam and the irradiated second laser beam on the object is determined,
In the condensing step, by reflecting the incident first laser beam and the second laser beam through a reflective surface, of the width and length of each of the first laser beam and the second laser beam irradiated to the object to be processed reducing at least one corresponding to the curvature of the reflective surface,
A laser processing method using a laser beam of different wavelengths.

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