CN214489229U - Polygon scanning galvanometer device for ultrahigh-speed laser processing - Google Patents
Polygon scanning galvanometer device for ultrahigh-speed laser processing Download PDFInfo
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- CN214489229U CN214489229U CN202120456051.0U CN202120456051U CN214489229U CN 214489229 U CN214489229 U CN 214489229U CN 202120456051 U CN202120456051 U CN 202120456051U CN 214489229 U CN214489229 U CN 214489229U
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Abstract
The utility model relates to a hypervelocity laser machining is with polygon scanning mirror device that shakes, including the controller to and the ultrashort pulse laser ware, the two dimension that are controlled by the controller respectively shake mirror subassembly and f-theta lens, still include the polygon mirror that shakes, and the polygon that is connected with the controller shakes the mirror rotating device, the polygon mirror that shakes is equipped with two up-down symmetry's multiaspect reflection base station, and the plane of reflection contained angle between two multiaspect reflection base stations is 90. The utility model discloses can shake mirror, two dimension through the polygon with the light beam that ultrashort pulse sent and shake the mirror reflection, through f-theta lens with the even effect of light beam on the co-construction surface to this realizes work such as hypervelocity laser beam drilling, cutting.
Description
Technical Field
The utility model relates to an hypervelocity laser beam machining technical field, concretely relates to hypervelocity laser beam machining is with polygon scanning mirror device that shakes.
Background
The laser ultra-high speed processing technology has the advantages of high coherence, small heat influence, high processing efficiency, high precision and repetition rate, no selectivity to materials, flexible and various processing modes, low cost and the like, and has important application prospects in the fields of semiconductor material processing, micro-optical element manufacturing, printed circuit boards and the like.
Aiming at researching and developing a high-precision polygon scanning system in typical industries, the accuracy and repeatable deflection and positioning of laser beams are improved, an intelligent equipment system suitable for laser ultra-high speed processing is built, and laser ultra-high speed processing is realized.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art, the utility model provides a hypervelocity is polygon scanning mirror device that shakes for laser processing, simple structure is compact, the focus is little, the scanning precision is high, the processing cost is lower to it is even to have image planes illumination distribution, energy concentration is high and relative distortion advantage such as little.
The utility model discloses a realize through following technical scheme:
the utility model provides a hypervelocity laser machining is with polygon scanning mirror device that shakes, including the controller to and by the ultrashort pulse laser ware, two-dimentional mirror subassembly and the f-theta lens that shake of controller control respectively, still include the polygon mirror that shakes to and the polygon mirror rotating device that shakes that is connected with the controller, the polygon mirror that shakes is equipped with two multiaspect reflection base stations of longitudinal symmetry, and the plane of reflection contained angle between two multiaspect reflection base stations is 90.
The polygon mirror oscillator is used for separating high-frequency pulse high pulses to avoid overlapping of a plurality of pulses on a workpiece, the polygon scanning mirror oscillator device for ultra-high speed laser processing outputs pulse laser corresponding to processing technological parameters through the polygon scanning mirror oscillator device based on preset laser processing technological parameters, and ultra-high speed processing of the workpiece is achieved. The included angle of the reflecting surfaces between the two multi-surface reflecting base stations is 90 degrees, and the beam mirrors emitted by the ultrashort pulse laser form parallel light paths after being reflected by the reflecting surfaces on the upper multi-surface emitting base station and the lower multi-surface emitting base station, so that the light path adjustment is facilitated, and the structural layout space of light path devices is saved.
Furthermore, each multi-surface reflection base station is provided with at least three reflection surfaces, and the reflection surfaces are distributed based on the polygonal galvanometer central shaft array.
The polygon galvanometer can reflect laser beams by means of a plurality of reflecting surfaces in the rotating process, and each reflecting surface is distributed based on the central shaft array of the polygon galvanometer, so that the reflecting surfaces are uniform and stable in reflection.
The utility model has the advantages that:
the light beam emitted by the ultrashort pulse is reflected by the rotary polygonal vibrating mirror and the swinging two-dimensional vibrating mirror, and the light beam is uniformly acted on the co-construction surface through the f-theta lens, so that the light beam reflected by the polygonal vibrating mirror can keep a stable straight line for processing a workpiece in cooperation with the light beam emitted by the swinging two-dimensional vibrating mirror through the f-theta lens without bending, the processing effect is ensured, the difference of the punching quality is small, and the basic consistency of the punching hole pattern and the punching size is ensured.
The device has the advantages of simple and compact structure, small focal length, high scanning precision, lower processing cost, uniform illumination distribution on an image surface, high energy concentration, small relative distortion and the like.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of a polygon galvanometer of the present invention;
fig. 3 is a perspective view of fig. 2.
Shown in the figure:
1. the device comprises an ultrashort pulse laser 2, a rotating device 3, a polygonal vibrating mirror 4, a two-dimensional vibrating mirror 5, an f-theta lens 6, a workpiece 7, a multi-surface reflection base station 8 and a reflection surface.
Detailed Description
In order to clearly illustrate the technical features of the present solution, the present solution is explained below by way of specific embodiments.
As shown in fig. 1, a polygon scanning galvanometer device for ultra-high speed laser processing comprises a controller, an ultra-short pulse laser 1, a two-dimensional galvanometer component and an f-theta lens 5 which are respectively controlled by the controller, and further comprises a polygon galvanometer 3 and a polygon galvanometer rotating device 2 connected with the controller, wherein the polygon galvanometer 3 is provided with two multi-surface reflecting base platforms 7 which are symmetrical up and down, and an included angle of a reflecting surface 8 between the two multi-surface reflecting base platforms 7 is 90 degrees, as shown in fig. 2. The two-dimensional galvanometer component comprises a two-dimensional galvanometer 4 and a driving device for driving the two-dimensional galvanometer 4 to swing, and the two-dimensional galvanometer component and the driving device both belong to the prior art and are not described herein.
Each multi-surface reflection base 7 has not less than three reflection surfaces 8, and each reflection surface 8 is distributed based on the central axis array of the polygonal galvanometer 3. As shown in fig. 2, in the present embodiment, the polygon mirror base 7 has eight reflecting surfaces 8, and the eight reflecting surfaces 8 have the same size and are arranged in an array based on the central axis of the polygon mirror 3.
The utility model discloses the during operation: the ultra-short pulse laser 1 is controlled by a controller to emit laser beams by presetting main system processing parameters such as laser frequency division coefficient, laser Q signal pulse width, line repetition times, Z-axis line distance, processing line number, main shaft rotating speed and the like, a polygonal vibrating mirror 3 is driven by a rotating device 2 to rotate around a central shaft of the polygonal vibrating mirror to separate high-frequency pulse high pulses, the laser beams enter a two-dimensional vibrating mirror 4 after being emitted by reflecting surfaces 8 on an upper multi-surface emitting base station 7 and a lower multi-surface emitting base station 7, and are emitted to the surface of a workpiece 6 after being adjusted by an f-theta lens 5, the control of scanning beams is realized by controlling the change of the deflection angle of the two-dimensional vibrating mirror 4 through the controller, and the beams are in line from points so as to realize the processing of uniform linear slotting, punching, cutting and the like on the surface of the workpiece 6. The utility model discloses add man-hour, shake the pulse laser that mirror device output processing technology parameter corresponds through polygon scanning based on preset laser beam machining technology parameter, realize the hypervelocity processing of work piece.
Of course, the above description is not limited to the above examples, and technical features of the present invention that are not described in the present application may be implemented by or using the prior art, and are not described herein again; the above embodiments and drawings are only used for illustrating the technical solutions of the present invention and are not intended to limit the present invention, and the present invention has been described in detail with reference to the preferred embodiments, and those skilled in the art should understand that changes, modifications, additions or substitutions made by those skilled in the art within the spirit of the present invention should also belong to the protection scope of the claims of the present invention.
Claims (2)
1. The utility model provides a polygon scanning mirror device that shakes for hypervelocity laser processing, includes the controller to and by ultrashort pulse laser, two-dimentional mirror subassembly and the f-theta lens of controller control respectively, its characterized in that: the polygon mirror that shakes is equipped with two multiaspect reflection base stations of longitudinal symmetry, and the plane of reflection contained angle between two multiaspect reflection base stations is 90.
2. The polygon scanning mirror apparatus for ultra high speed laser processing according to claim 1, wherein: each multi-surface reflection base station is provided with at least three reflection surfaces, and each reflection surface is distributed based on the polygonal galvanometer central shaft array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120456051.0U CN214489229U (en) | 2021-03-03 | 2021-03-03 | Polygon scanning galvanometer device for ultrahigh-speed laser processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120456051.0U CN214489229U (en) | 2021-03-03 | 2021-03-03 | Polygon scanning galvanometer device for ultrahigh-speed laser processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214489229U true CN214489229U (en) | 2021-10-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120456051.0U Active CN214489229U (en) | 2021-03-03 | 2021-03-03 | Polygon scanning galvanometer device for ultrahigh-speed laser processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214489229U (en) |
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2021
- 2021-03-03 CN CN202120456051.0U patent/CN214489229U/en active Active
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