CN110681992B - Adjustable broadband laser processing optical system and processing method - Google Patents
Adjustable broadband laser processing optical system and processing method Download PDFInfo
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- CN110681992B CN110681992B CN201911057407.7A CN201911057407A CN110681992B CN 110681992 B CN110681992 B CN 110681992B CN 201911057407 A CN201911057407 A CN 201911057407A CN 110681992 B CN110681992 B CN 110681992B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 238000003672 processing method Methods 0.000 title claims abstract description 6
- 238000009826 distribution Methods 0.000 claims description 23
- 239000000843 powder Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 9
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000001788 irregular Effects 0.000 abstract description 2
- 238000005253 cladding Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000008859 change Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000004372 laser cladding Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention discloses an adjustable broadband laser processing optical system and a processing method, and belongs to the field of laser processing optical systems. The system comprises a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface; the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor; the light beam emitted by the laser enters the focusing lens at a certain divergence angle, is collimated and focused by the focusing lens, enters the vibrating mirror and is reflected by the vibrating mirror, so that the laser processing device is used for processing a workpiece on the working surface. The invention can rapidly and sensitively adjust the size of the working light spot, has obvious advantages especially for irregular or uneven processing surfaces, and improves the processing uniformity and processing efficiency.
Description
Technical Field
The invention belongs to the field of laser processing optical systems, and particularly relates to an adjustable broadband laser processing optical system and method.
Background
The laser processing technology is a surface modification technology for carrying out alloy strengthening treatment on various parts by utilizing high-energy laser and nano materials, and can obviously improve the engineering properties of abrasion resistance, corrosion resistance, heat resistance, oxidation resistance and the like of a base layer under the condition that the surface of a part is not deformed. With the rapid development of industrialization and laser technology industry in recent years, laser processing has been widely used in direct molding and remanufacturing processes as an effective method for improving the surface quality and service life of devices.
The existing laser processing and forming system mostly adopts an optical element to cut, reshape and reorganize laser beams, and the laser processing optical system is used for converting and projecting the laser beams emitted by a laser device on a processing surface for laser cladding processing. The existing laser processing optical system is difficult to meet the processing efficiency and quality requirements, the fixed working mode of the existing laser processing optical system cannot be changed into spots flexibly, the existing laser processing optical system is not suitable for parts with complex structures, and particularly the existing laser processing optical system is low in processing efficiency for some workpieces with small sizes and irregular surfaces. Moreover, the traditional processing system has limited cladding efficiency and quality, taking an integral transformation mirror cladding system as an example, redistributing and converging light beams by utilizing a scalar diffraction theory, and the light field distribution belt after the transformation of the integral mirror has strong interference and diffraction effects, so that the light spot stripe structure is obvious in a shorter working time, and the uniformity of the light beams is destroyed; although the stripe structure of the laser gradually weakens with the increase of the laser irradiation time due to the thermal diffusion effect, the working temperature field of the laser cannot ensure uniformity due to the high-speed scanning process of the laser, so that the deposition efficiency and quality are affected. Therefore, the development of a tunable broadband laser processing optical system is of great interest for laser processing applications.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an adjustable broadband laser processing optical system and a processing method, and aims to solve the problems of poor processing quality and low efficiency of the existing laser processing system.
In order to achieve the above object, the present invention provides a tunable broadband laser processing optical system, which includes a laser, a movable focusing lens unit, a scanning galvanometer unit, and a working surface; the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail; the scanning galvanometer unit comprises a galvanometer and a second motor, and the galvanometer is connected with the second motor; the light beam emitted by the laser enters the focusing lens at a certain divergence angle, is collimated and focused by the focusing lens, enters the vibrating mirror and is reflected by the vibrating mirror, so that the laser processing device is used for processing a workpiece on the working surface. The invention uses a piece of collimating and focusing combined mirror, does not need to be collimated and focused first, reduces the pollution of the lens, saves the processing cost and reduces the operation difficulty.
Further, the system also comprises a light splitting device, wherein the light splitting device comprises a light splitting prism, two symmetrically placed reflecting mirrors and a sliding groove, and the light splitting prism can move along the sliding groove;
the light beam is reflected to two light splitting edges of the light splitting prism through the vibrating mirror, the light beam is reflected and split into two sub-light beams through the light splitting prism, and the two sub-light beams are respectively reflected by the reflecting mirror and then converged on the working surface to obtain two light spots.
Further, the two sub-beams form a specific included angle when converging, and a multi-channel powder feeding tube is placed in a hollow non-light area formed between the two sub-beams so as to synchronously convey the light and the powder.
Further, the focusing lens is connected with a support on the guide rail, and the focusing lens is controlled to move back and forth on the guide rail along the optical axis direction through the first motor so as to adjust the light spot width during scanning. The width of the light spot on the working surface can be quickly adjusted by moving the position of the focusing lens, so that the flexibility and the processing efficiency of equipment processing are improved.
Further, the second motor drives the vibrating mirror to vibrate back and forth to scan the broadband light beam, the scanning angle of the vibrating mirror is adjusted through programming, the scanning range of light spots is adjusted, and efficient machining of parts with different sizes is achieved.
The invention also provides a processing method based on the broadband laser processing optical system, and the stay time of the light spots at each position is controlled by adjusting the scanning speed of the vibrating mirror so as to obtain the light field distribution with a specific shape.
Further, the scanning speed of the vibrating mirror when the deflection angle is larger is controlled to be smaller than that when the deflection angle is smaller, saddle-shaped light fields with high two sides and low center are obtained on the working surface in a light field distribution mode, accordingly, a uniformly distributed temperature field is obtained, and the processing quality of a cladding layer is improved.
Further, by controlling the beam splitting prism to move back and forth between the two reflectors along the sliding groove, the energy distribution of the two sub-beams is adjusted, so that the width ratio of the two light spots on the working surface is changed.
Further, the convergence angle of the two sub-beams is changed by adjusting the rotation angle of the reflecting mirror, so that the distance between the two light spots on the working surface is controlled.
The invention has the following beneficial effects:
(1) According to the invention, the scanning range of the light spot is changed by controlling the angle of the vibrating mirror, and the variable spot is realized by combining the movement adjustment of the focusing lens, so that the processing flexibility is improved, and the efficient processing of workpieces with various sizes is realized.
(2) The invention utilizes the light splitting device to realize the laser cladding of the light beam hollow and the light internal powder feeding on one hand, thereby improving the coupling utilization rate of the light powder; on the other hand, the double light beams obtained by the light splitting are used for synchronously scanning double light spots, so that the processing efficiency is greatly improved.
(3) The deflection of the vibrating mirror is controlled through programming, so that the special light field distribution of saddle shape, parabola shape and the like according to actual requirements can be realized, and the processing of the special-shaped surface can be realized; in particular, the saddle-shaped optical field can obtain a scanning temperature field which is uniformly distributed, and the processing quality of the cladding layer is improved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of a tunable broadband laser processing optical system of the present invention;
FIG. 2 is a schematic diagram of another embodiment of a tunable broadband laser processing optical system of the present invention;
FIG. 3 is a schematic diagram of the principle of moving the collimating and focusing lens to change the spots;
FIG. 4 is a schematic diagram of a beam splitting prism moving to adjust the energy ratio of two spots;
FIG. 5 (a) is a schematic diagram of a mirror angle-varying dual spot center-to-center spacing;
FIG. 5 (b) is a schematic view of the corresponding spot distribution when the mirror angle is changed to adjust the center-to-center spacing of the dual spots;
FIG. 6 (a) is a schematic diagram of realizing the stay time of the saddle-shaped distributed light spots, the light intensity distribution and the temperature field distribution;
FIG. 6 (b) is a schematic diagram of a scanning spot distribution in a scanning period corresponding to the implementation of saddle distribution;
fig. 7 is a schematic diagram of a spectroscopic device with a built-in powder feeding tube to realize optical internal powder feeding.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1
As shown in fig. 1, an adjustable broadband laser processing optical system provided by an embodiment of the present invention includes an optical fiber laser 1, a focusing lens 2, a first motor and a guide rail 3 for controlling movement of the focusing lens 2, a galvanometer 4, a second motor 5 for driving the galvanometer to vibrate, and a working surface 6. The light beam emitted by the fiber laser 1 enters the focusing lens 2 at a certain divergence angle, is collimated and focused by the focusing lens 2, enters the vibrating mirror 4, and is reflected to the working surface 6 by the vibrating mirror 4.
The focusing lens 2 is connected with a support on the guide rail, and is controlled by a first motor to move back and forth on the guide rail along the optical axis direction so as to realize the effect of changing the spots on the working surface 6. The traditional laser processing optical system adopts a plurality of focusing mirrors to combine, move and adjust the variable speckles, and the invention uses the collimating focusing combined mirrors, thereby realizing very convenient long-distance focusing, reducing lens pollution, having high adjusting speed and being beneficial to real-time variable speckles processing.
The galvanometer 4 is connected with a second motor 5, and the second motor 5 controls the oscillating of the galvanometer 4 to and fro so as to realize the process of scanning the broadband light beam. In specific occasions such as aiming at the surfaces of large-scale shaft parts, the length of a rectangular light spot (shown in the y direction in the figure) can be freely adjusted by adopting galvanometer scanning. In addition, the repeated irradiation in a scanning mode is beneficial to vibration of a laser molten pool, improves the molten pool, improves cladding quality and deepens hardening depth of laser cladding or laser reinforcement.
Example 2
Referring to fig. 2, another tunable broadband laser processing optical system provided by the embodiment of the invention includes an optical fiber laser 1, a focusing lens 2, a first motor and a guide rail 3 for controlling movement of the focusing lens 2, a galvanometer 4, a second motor 5 for driving the galvanometer to vibrate, a beam splitter prism 7, a reflecting mirror 8, a sliding groove 9 for controlling the position of the beam splitter prism 7, and a working surface 6, wherein the beam splitter prism 7, the reflecting mirror 8, and the sliding groove 9 for controlling the position of the beam splitter prism 7 form a beam splitter device. The light beam emitted by the fiber laser 1 enters the focusing lens 2 at a certain divergence angle, is collimated and focused by the focusing lens 2, enters the vibrating mirror 4, is reflected to two light-splitting prism faces of the light-splitting prism 7 by the vibrating mirror 4, is reflected and split by the light-splitting prism 7, and is reflected by the two symmetrically placed reflecting mirrors 8 to be converged on the working face 6. The beam splitter prism 7 can move back and forth on the sliding groove 9 and is limited by adopting pins.
The focusing lens 2 is connected with a support on the guide rail, and is controlled by a first motor to move back and forth on the guide rail along the optical axis direction so as to realize the effect of changing the spots on the working surface 6. When the vibrating mirror 4 is polarized to the position of a dotted line, the light beam is changed from a solid line to a dotted line, and the light spot scans back and forth in a certain range along the y direction shown in the figure on the working surface 6, so that a double rectangular light spot with a certain length is formed.
Fig. 3 shows that when the focusing lens 2 moves to the position of the dotted line on the guide rail 3, the system light route solid line is changed to the dotted line, and the function of changing the width (x direction in the figure) of the double rectangular light spot on the working surface 6 is realized. The second motor 5 controls the vibration angle of the vibrating mirror 4 through programming, can regulate and control the scanning range of the reflecting light spot on the working surface, realizes the change of the scanning double light spot length (y direction in the figure) in the scanning direction, combines the front and back movement of the focusing mirror to regulate the light spot width change, and realizes the adjustable rectangular double light spot function.
When the beam splitter prism 7 shown in fig. 4 moves from the solid line center position to the broken line position along the sliding groove 9, the energy ratio of the two beam splitters is different, and the vibration range of the vibrating mirror 4 is from the solid line position to the broken line position, so that two double rectangular light spots with different widths are obtained on the working surface 6.
When the reflecting mirror 8 shown in fig. 5 (a) rotates from the solid line position to the broken line position, the two split light beams are changed from the solid line to the broken line, and the light spot distribution of the working surface changes as shown in fig. 5 (b), and the change of the convergence angle of the two light beams can realize the change of the distance between the two light spots on the working surface.
The deflection of the vibrating mirror is controlled through programming, so that the special light field distribution of saddle shape, parabolic shape and the like according to actual requirements can be realized, and the processing of the special-shaped surface is realized. For example, in this embodiment, the saddle light field distribution is obtained by adjusting the scanning speed of the galvanometer to control the dwell time of each position spot. Fig. 6 (a) shows the spot dwell time T, the light field intensity distribution I and the temperature field distribution T during the processing, and fig. 6 (b) shows the distribution of the scanning spots of the formed saddle-shaped light field in one scanning period. The scanning speed is small when the deflection angle of the vibrating mirror is large, and the scanning speed is large when the deflection angle is small, so that the light field distribution on the working surface presents saddle-shaped light fields with high two sides and low center. As can be seen from fig. 6 (b), the cladding temperature field corresponding to the saddle-shaped light field is approximately rectangular, so that the thermal action process of the cladding layer is uniform, the defect of crescent distribution of the conventional hardening layer is overcome, the cladding layer with uniform hardening thickness is obtained, and the processing quality is remarkably improved. For another example, when the deflection angle of the vibrating mirror is larger, the scanning speed is large, and when the deflection angle is smaller, the scanning speed is small, so that the light field distribution on the working surface presents a parabolic light field with low two sides and high center, and the processing of the local convex surface is realized. Therefore, the scanning speed under the deflection angle of the vibrating mirror is controlled through programming, the light field distribution with any specific shape can be obtained, and the processing of the special-shaped surface is realized.
On the basis of explaining the composition of the laser processing optical system, fig. 7 is a schematic diagram showing the implementation of the optical internal powder feeding by the built-in powder feeding tube of the beam splitting device. The beam splitting prism 7 and the pair of reflectors 8 enable the two split sub-beams to be converged on the working surface 6 at a certain inclination angle, a multi-channel powder feeding tube 10 is placed in a hollow non-light area formed between the two split sub-beams to realize synchronous feeding of powder in light and the powder in light, and the hollow device of the beam provides space for realizing powder feeding in light, so that efficient combination and utilization of the powder are realized, and the processing quality of a cladding layer is greatly improved. And the beam splitting device is added to realize double-light-spot synchronous processing, so that the processing efficiency is effectively improved.
In addition, the invention can be directly combined with the fiber laser with the QBH joint and the industrial robot, so that the processing efficiency of the laser processing system is improved.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (9)
1. An adjustable broadband laser processing optical system is characterized by comprising a laser, a movable focusing lens unit, a scanning galvanometer unit and a working surface;
the movable focusing lens unit comprises a focusing lens, a first motor and a guide rail, wherein the first motor controls the focusing lens to move along the guide rail;
the scanning galvanometer unit comprises a galvanometer and a second motor, the galvanometer is connected with the second motor, and the angle and the scanning speed of the galvanometer can be adjusted;
the light beam emitted by the laser enters the focusing lens at a certain divergence angle, is collimated and focused by the focusing lens, enters the vibrating mirror and is reflected by the vibrating mirror, so that the laser processing is performed on a workpiece on the working surface;
the system also comprises a light splitting device, wherein the light splitting device comprises a light splitting prism, two symmetrically placed reflecting mirrors and a sliding groove, and the light splitting prism can move along the sliding groove;
the light beam is reflected to two light splitting edges of the light splitting prism through the vibrating mirror, the light beam is reflected and split into two sub-light beams through the light splitting prism, and the two sub-light beams are respectively reflected by the reflecting mirror and then converged on the working surface to obtain two light spots; the rotation angle of the reflecting mirror is adjustable;
the scanning speed is small when the deflection angle of the vibrating mirror is large, and the scanning speed is large when the deflection angle is small, so that the light field distribution on the working surface presents saddle-shaped light fields with high two sides and low center;
or the scanning speed of the vibrating mirror is larger when the deflection angle is larger than that of the vibrating mirror when the deflection angle is smaller, and a parabolic light field with low two sides and high center is obtained on the working surface.
2. The broadband laser processing optical system of claim 1, wherein the two sub-beams are converged at a specific angle, and a multi-channel powder feeding tube is disposed in a hollow non-light area formed between the two sub-beams for synchronous delivery of the optical powder.
3. The broadband laser processing optical system according to any one of claims 1 to 2, wherein the focusing lens is connected to a support on the guide rail, and is controlled by the first motor to move back and forth on the guide rail in the optical axis direction so as to adjust the spot width during scanning.
4. The broadband laser processing optical system according to any one of claims 1 to 2, wherein the second motor drives the galvanometer to vibrate back and forth to scan the broadband beam, and the scanning range of the light spot is adjusted by programming and adjusting the scanning angle of the galvanometer.
5. A method of processing a broadband laser processing optical system according to any one of claims 1 to 2, wherein the dwell time of each position spot is controlled by adjusting the scanning speed of the galvanometer to obtain a light field distribution of a specific shape.
6. The method of claim 5, wherein the scanning speed of the galvanometer is controlled to be smaller when the deflection angle is larger than when the deflection angle is smaller, and the saddle-shaped light field with high two sides and low center is obtained on the working surface.
7. A method of processing a broadband laser processing optical system according to claim 3 or 4, characterized in that the width ratio of the two spots on the working surface is changed by controlling the beam splitting prism to move back and forth between the two mirrors along the sliding groove and adjusting the energy distribution of the two sub-beams.
8. A processing method based on the broadband laser processing optical system according to claim 3 or 4, characterized in that the converging angle of the two sub-beams is changed by adjusting the rotation angle of the reflecting mirror, thereby controlling the interval between the two spots on the working surface.
9. A laser processing apparatus characterized in that the broadband laser processing optical system according to any one of claims 1 to 4 is used.
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| CN201911057407.7A CN110681992B (en) | 2019-10-31 | 2019-10-31 | Adjustable broadband laser processing optical system and processing method |
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| CN201911057407.7A CN110681992B (en) | 2019-10-31 | 2019-10-31 | Adjustable broadband laser processing optical system and processing method |
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| CN110681992B true CN110681992B (en) | 2024-02-02 |
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| CN111505833B (en) * | 2020-04-26 | 2022-06-03 | 浙江雷拉激光科技有限公司 | Multiband laser coupling technology |
| CN111570410B (en) * | 2020-05-07 | 2021-08-31 | 武汉锐科光纤激光技术股份有限公司 | Laser cleaning gun head and laser cleaning machine |
| CN112658472A (en) * | 2020-12-15 | 2021-04-16 | 华能新能源股份有限公司 | Ridge type laser beam splitting system and method |
| CN112981310B (en) * | 2021-01-20 | 2023-03-10 | 中国工程物理研究院材料研究所 | Laser strengthening working module suitable for workpiece surface nitriding modification |
| CN113655624A (en) * | 2021-08-04 | 2021-11-16 | 江苏亮点光电研究有限公司 | Large-area square light spot laser output device and optical shaping method |
| CN115351301B (en) * | 2022-08-18 | 2023-09-29 | 湖南华曙高科技股份有限公司 | Optical path system and optical path adjusting method of additive manufacturing equipment |
| CN116851922A (en) * | 2023-07-25 | 2023-10-10 | 中国船舶集团有限公司第七一九研究所 | System and method for preparing decontamination surface structure by laser interference additive manufacturing |
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