CN115351445A - Light beam combining device, light beam combining system, laser processing device and control method - Google Patents

Abstract

The application provides a light beam composite set, system and laser processing device, control method relates to laser processing technology field, includes: the laser device comprises a laser light source, wherein a light emitting path of the laser light source is provided with a polarization beam splitter, a beam combiner and a focusing module, and the polarization beam splitter splits a light beam emitted by the laser light source into a first light beam and a second light beam with different polarization directions; a shaping module is arranged on the light path of the first light beam, and the shaping module shapes the first light beam into a strip light beam to be emitted; a multi-focus module is arranged on the light path of the second light beam, and splits the second light beam to form a plurality of point-shaped light beams and strip-shaped light beams which are emitted in parallel; the beam combiner combines and connects the strip-shaped light beam and the plurality of point-shaped light beams to form a continuous combined light beam, and the focusing module focuses the combined light beam to form a preset combined light spot on the receiving surface. When the laser grooving device is applied to laser grooving, the combined light spots are beneficial to the flatness of the groove-shaped bottom, the efficient removal of materials is realized, and the grooving efficiency and effect are improved.

Description

Light beam combining device, light beam combining system, laser processing device and control method

Technical Field

The application relates to the technical field of laser processing, in particular to a light beam combination device, a light beam combination system, a laser processing device and a control method.

Background

In the laser processing technology, a groove can be formed on the surface of a product by utilizing laser, and a Gaussian laser beam is mainly adopted for expanding and then focusing during the groove forming process to form a tiny focus spot, and the spot is focused on the surface of a material and is matched with the movement of a platform to complete the cutting of a straight line. Generally, the diameter of a single focusing light spot is smaller than the width of the groove, for example, the diameter of the single focusing light spot is less than 20 micrometers, and the width of the groove needs to be about 50 micrometers, so that the width accumulation is realized by cutting back and forth for multiple times during the groove forming, and the bottom of the groove formed by the single-point groove forming method is uneven due to the fact that the flanging is processed for multiple times, the processing efficiency and the accuracy are low, and the groove cannot achieve the best effect.

Disclosure of Invention

The embodiment of the application aims to provide a light beam combination device, a light beam combination system, a laser processing device and a control method, wherein grooving is carried out by combining light beams, and the flatness of the bottom of a groove shape and the groove shape precision can be improved.

In one aspect of the embodiment of the application, a light beam combining device is provided, and the light beam combining device includes a laser light source, wherein a polarization beam splitter, a beam combiner and a focusing module are arranged on a light outgoing path of the laser light source, and the polarization beam splitter splits a light beam emitted by the laser light source into a first light beam and a second light beam which have different polarization directions; a shaping module is arranged on the light path of the first light beam, and the shaping module shapes the first light beam into a strip-shaped light beam to be emitted; a multi-focus module is arranged on an optical path of the second light beam, and the multi-focus module splits the second light beam to form a plurality of point-shaped light beams which are emitted in parallel with the strip-shaped light beam; the beam combiner combines and connects the strip-shaped light beams and the plurality of point-shaped light beams to form continuous combined light beams, and the focusing module focuses the combined light beams to form preset combined light spots on a receiving surface.

Optionally, the shaping module shapes the first light beam into a flat-top light beam with uniform light intensity and emits the flat-top light beam.

Optionally, the shaping module comprises a concave cylindrical mirror and a convex cylindrical mirror which are sequentially arranged, the focal length ratio of the concave cylindrical mirror to the convex cylindrical mirror is 1:2, and the interval between the concave cylindrical mirror and the convex cylindrical mirror is 15 mm-35 mm.

Optionally, a diaphragm module is further disposed between the shaping module and the beam combiner, and the diaphragm module performs spatial filtering on the strip-shaped light beam.

Optionally, the multi-focus module includes a diffraction beam splitter and a polarization beam splitter, which are sequentially disposed, the second light beam is split into one-dimensional N beam spot beams by the diffraction beam splitter, and then the N beam spot beams are split into 2N beam spot beams after passing through the polarization beam splitter, and the 2N beam spot beams are symmetrically arranged in two rows to form a plurality of the spot beams.

Optionally, a half-wave plate is disposed between the diffractive beam splitting lens and the polarizing beam splitter, and the half-wave plate is used for adjusting the power of the two columns of the point light beams.

Optionally, a beam expanding module is further disposed on a light exit side of the multi-focus module, and the beam expanding module expands the light exit diameters of the plurality of point-like light beams.

Optionally, the wavelength range of the laser light source is 355nm to 1064nm, the pulse width range is 5fs to 250ns, and the light emitting diameter of the laser light source is 1mm to 3 mm.

The embodiment of the present application further provides a light beam combining system, including: the controller is electrically connected with the laser light source and the focusing module of the light beam combination system respectively.

The embodiment of the application further provides a laser processing device, including the beam combination system as above, and the processing platform with the driving piece that the processing platform is connected, the processing platform is used for bearing and treats the machined part, through the combination beam of beam combination system outgoing is in treat that the machined surface of treating the machined part forms and predetermines the cutting groove.

The embodiment of the present application further provides a laser processing control method, for controlling the laser processing apparatus as described above, including: controlling a laser light source to emit a Gaussian laser beam; the Gaussian laser beam is emitted towards the polarization beam splitter, the polarization beam splitter splits the light beam into a first light beam and a second light beam with different polarization directions, the first light beam is shaped into a strip light beam through the shaping module and emitted, the second light beam forms a plurality of point light beams through the multi-focus module and is emitted in parallel with the strip light beam, and the strip light beam and the point light beams are combined and connected through the beam combiner to form a continuous combined light beam and emit the combined light beam to the focusing module; the focusing module focuses the combined light beam and then emits the focused combined light beam to a workpiece to be machined on a machining platform, and the focusing module moves along a direction vertical to the surface to be machined of the workpiece to be machined; and the machining platform is moved along a preset direction through a driving piece so as to form a preset cutting groove on the surface to be machined of the workpiece to be machined.

Optionally, the controlling the laser light source to emit the gaussian laser beam includes controlling the wavelength range of the laser light source to be 355nm to 1064nm, controlling the pulse width range to be 5fs to 250ns, and controlling the light emitting diameter of the laser light source to be 1mm to 3 mm.

The embodiment of the application provides a light beam combining device, a light beam combining system, a laser processing device and a control method, wherein a laser light source emits light beams, the light beams are split into a first light beam and a second light beam after passing through a polarization beam splitter, the first light beam is shaped by a shaping module to form a strip light beam to be emitted, the second light beam forms a plurality of point light beams to be emitted after passing through a multi-focus module, the plurality of point light beams and the strip light beam are emitted towards a beam combiner in the same direction and in parallel, the beam combiner combines, arranges and connects the strip light beam and the plurality of point light beams to form continuous combined light beams, and the combined light beams are focused by a focusing module to form preset combined light spots on a receiving surface. The laser beam splitter can split the light beam of the laser light source into two light beams, the two light beams respectively form a strip-shaped light spot and a plurality of point light spots, and the two light beams are combined, arranged and connected through the beam combiner to form a preset combined light spot. When being applied to laser cutting fluting with the combination facula, the strip facula can be located the center as wide facula, a plurality of facula are located both sides respectively as narrow facula, and strip facula and some facula are connected and are formed integratively, so, the point facula on both sides is fixed a position two edges of cutting the groove in advance, the strip facula of center excises the mid portion of cutting the groove to predetermineeing, the machining precision and the processing effect of cell type have been promoted, do benefit to the flatness of cell type bottom, and machining efficiency is high, do not need to cut many times repeatedly, once can cut the shaping, realize that the high efficiency of material is got rid of, grooved efficiency and effect have been improved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.

FIG. 1 is a schematic structural diagram of a light beam combining apparatus provided in this embodiment;

fig. 2 is a combined light spot formed by the light beam combining device provided in this embodiment.

An icon: 100-a laser light source; 101-a polarizing beam splitter; 102-a shaping module; 103-a beam combiner; 104-a mirror; 105-a controller; 106-a multi-focus module; 107-a focusing module; 200-processing a platform; 201-parts to be processed.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.

In the description of the present application, it should be noted that the terms "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the cutting surfaces of the application conventionally lay out when used, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the device or element being referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

It should also be noted that, unless expressly stated or limited otherwise, the terms "disposed" and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.

Referring to fig. 1, an embodiment of the present application provides a light beam combining apparatus, including: the laser system comprises a laser light source 100, wherein a light outgoing path of the laser light source 100 is provided with a polarization beam splitter 101, a beam combiner 103 and a focusing module 107, and the polarization beam splitter 101 splits a light beam emitted by the laser light source 100 into a first light beam and a second light beam which have different polarization directions; a shaping module 102 is arranged on the light path of the first light beam, and the shaping module 102 shapes the first light beam into a strip light beam to be emitted; a multi-focus module 106 is arranged on the light path of the second light beam, and the multi-focus module 106 splits the second light beam to form a plurality of point-shaped light beams and strip-shaped light beams which are emitted in parallel; the beam combiner 103 combines and connects the strip-shaped light beam and the plurality of point-shaped light beams to form a continuous combined light beam, and the focusing module 107 focuses the combined light beam to form a preset combined light spot on a receiving surface.

The laser source 100 can be a laser, the light beam emitted by the laser source 100 is a laser beam, the wavelength range of the laser source 100 is 355 nm-1064 nm, the pulse width range is 5 fs-250 ns, and the light emitting diameter of the laser source 100 is 1 mm-3 mm.

The light beam emitted from the laser light source 100 is split into a first light beam and a second light beam after passing through the polarization beam splitter 101, and the polarization directions of the first light beam and the second light beam are different, for example, the first light beam is P-type light with horizontal polarization, and the second light beam is S-type light with vertical polarization. The polarization beam splitter 101 can be a polarization beam splitter cube, the input of the polarization beam splitter 101 is linear polarized light, the output is vertical polarized light in the transmission direction and horizontal polarized light in the reflection 90-degree direction, and the rotation of the 1/2 wave plate is matched to realize the continuous adjustment of P light and S light, the power range of the P light is 0-max, the adjustment range of the S light is 0-max, and the total power of the P light and the S light is input light power (without considering the loss of the lens).

The first light beam is shaped by the shaping module 102 to form a strip light beam, the second light beam is split into a plurality of point light beams after passing through the multi-focus module 106, the point light beams and the strip light beam are emitted to the beam combiner 103 in the same direction and in parallel to be combined, the beam combiner 103 arranges the point light beams and the strip light beam to form a combined light beam, and the combined light beam is focused by the focusing module 107 to form a preset combined light spot on a receiving surface.

The specific shape of the predetermined combined light spot can be adjusted according to the beam combiner 103, for example, a combined light spot that is completely combined as shown in fig. 2 can be formed, and the arrow direction in fig. 2 indicates the cutting direction.

The combined spot is applicable to machining, for example, laser grooving. When the combined beam is applied to grooving, the problem of uneven bottom of the existing groove can be solved, the combined beam formed by the beam combiner 103 comprises one path of strip-shaped beam and one path of multiple point-shaped beams, the two paths of beams are respectively adopted for processing, the multiple point-shaped beams can be separated into two groups of point beams, the two groups of point beams can position two edges of the preset cutting groove, the two edges of the preset cutting groove are isolated and grooved through the two groups of point beams, the middle part of the preset cutting groove is grooved through the strip-shaped beam, and the problem of poor groove shape caused by single-point processing in the prior art is greatly solved.

The strip-shaped light spots can be regarded as central wide light spots, the point-shaped light spots can be regarded as edge narrow light spots, and the efficiency can be doubled by utilizing combined light spot grooving formed by combining the central wide light spots and the edge narrow light spots; the two sides of the spot-shaped light spots are distributed more, and the average power of each spot-shaped light spot is weakened, so that the processing effect is better; in addition, as shown in fig. 2, two ends of the strip-shaped light spot are respectively connected with the point-shaped light spots at two sides in an overlapped manner, so that a continuous combined light spot is formed, and the phenomenon that the material corresponding to the discontinuous part is not cut in place due to the discontinuity of the combined light spot, so that the cutting missing phenomenon is caused, and the size and the precision of the grooving are influenced can be avoided.

Moreover, the power of the central strip-shaped light spot and the plurality of point-shaped light spots at the edge can be adjusted at will, and the better scheme is that the power of the central strip-shaped light spot is approximately equal to the power of the plurality of point-shaped light spots at the edge; it may also be the case that the central strip spot is more powerful than the edge spots, or that the central strip spot is less powerful than the edge spots.

The direction of the light path can also be changed through the reflecting mirror 104, so as to change the volume of the light beam combination device and adapt to different scene requirements. For example, a mirror 104 may be further disposed on one side of the polarization beam splitter 101, and the split second light beam exits through the mirror 104 to change the optical path, so as to form the optical path in which the first light beam and the second light beam are parallel in fig. 1. The plurality of spot beams formed by the multi-focus module 106 are incident to the beam combiner 103 through the reflector 104 to be combined with the strip beam to form a combined beam, and the combined beam is incident to the focusing module 107 through the reflector 104.

In summary, in the light beam combining apparatus provided in the embodiment of the present application, the laser light source 100 emits a light beam, the light beam is split into a first light beam and a second light beam by the polarization beam splitter 101, the first light beam is shaped by the shaping module 102 to form a strip light beam, the second light beam is shaped by the multi-focus module 106 to form a plurality of point light beams, the plurality of point light beams and the strip light beam are emitted toward the beam combiner 103 in the same direction and in parallel, the beam combiner 103 combines and arranges the strip light beam and the plurality of point light beams to form a combined light beam, and the combined light beam is focused by the focusing module 107 to form a preset combined light spot on the receiving surface. The laser beam splitter can split the light beam of the laser light source 100 into two light beams, the two light beams respectively form a strip-shaped light spot and a plurality of point light spots, and the two light beams are combined and arranged by the beam combiner 103 to form a preset combined light spot. When being applied to the laser cutting fluting with the combination facula, the strip facula can be located the center as wide facula, a plurality of facula are located both sides respectively as narrow facula, so, can be earlier through the point facula on both sides to predetermine two edges of cutting the cut groove and rule the cutting formation and predetermine the border location who cuts the cut groove, the strip facula at rethread center is to predetermineeing the mid portion who cuts the cut groove and excise, the machining precision and the processing effect of cell type have been promoted, do benefit to the flatness of cell type bottom, and machining efficiency is high, realize that the high efficiency of material is got rid of, grooved efficiency and effect have been improved.

Specifically, the first light beam is shaped into a strip-shaped light beam by the shaping module 102, which can be used to process the middle portion of the preset cutting groove, so that the material of the middle portion of the preset cutting groove can be completely cut off, and the shaping module 102 shapes the first light beam into a flat-top light beam with uniform light intensity for emission. In other words, after the first light beam passes through the shaping module 102, the shaping module 102 shapes the first light beam into a strip-shaped light beam, and the strip-shaped light beam is a flat-top light beam with uniform light intensity, so that the middle material of the preset cutting groove can be completely cut off through the strip-shaped light beam as much as possible, and the phenomenon that the partial material in the preset cutting groove is omitted and is not completely cut off due to uneven light beam energy, which affects the forming and cutting efficiency of the preset cutting groove, is avoided.

Specifically, the shaping module 102 includes a concave cylindrical mirror and a convex cylindrical mirror which are sequentially arranged, the focal length ratio of the concave cylindrical mirror to the convex cylindrical mirror is 1:2, and the interval between the concave cylindrical mirror and the convex cylindrical mirror is 15mm to 35mm.

The cylindrical mirror is combined, so that the purpose of shaping the first light beam into a flat-top light beam with uniform intensity and emitting a strip-shaped light beam can be effectively fulfilled.

In addition, the size of the strip-shaped light spot can be changed by 0.5-4 times through the regulator, and the width regulation range of the strip-shaped light spot is 8-20 microns.

On the basis, a diaphragm module is further arranged between the shaping module 102 and the beam combiner 103, and the diaphragm module performs spatial filtering on the strip-shaped light beams.

The first light beam is shaped into a flat-topped strip-shaped light beam with uniform light intensity through the shaping module 102 and then emitted, and the flat-topped strip-shaped light beam passes through the diaphragm module which performs spatial filtering on the strip-shaped light beam, so that the uniformity of the strip-shaped light beam is better; and, still make the edge of strip light beam clear through the diaphragm module to can form smooth, the high surface of precision after cutting the cutting groove of predetermineeing.

In addition, the length of the strip-shaped light spot correspondingly formed by the strip-shaped light beam can be continuously adjusted through the diaphragm module, and when the size of the diaphragm module is maximized, the imaging of the strip-shaped light beam after focusing is about 110 micrometers; when the size of the stop module is minimized, the size of the strip-shaped light spot correspondingly formed by the strip-shaped light beam is 0.

For the second beam, the second beam passes through the multi-focus module 106 to form a plurality of spot beams. The multi-focus module 106 includes a diffraction beam splitter and a polarization beam splitter, which are sequentially arranged, the second light beam is split into a one-dimensional N beam spot by the diffraction beam splitter, and then the one-dimensional N beam spot is split into 2N beam spot light beams by the polarization beam splitter, and the 2N beam spot light beams are symmetrically arranged in two rows to form a plurality of point light beams.

The second light beam is divided into one-dimensional N-beam spot light beams through the diffraction beam splitting lens, for example, the light beams can be divided into four beam spot light beams, the separation angle of each beam spot light beam is 0.25 degrees, the four beam spot light beams can be changed into eight beam spot light beams after passing through the polarization beam splitting lens, the eight beam spot light beams are symmetrically arranged in two rows, and the two rows of symmetrically arranged beam spot light beams respectively correspond to two opposite edges of the preset cutting groove so as to position and cut the two opposite edges of the preset cutting groove.

A half-wave plate is arranged between the diffraction beam splitting lens and the polarization beam splitter and used for adjusting the power of two lines of point light beams. The two lines of point beams symmetrically arranged, the energy of the left four-beam spot beam and the energy of the right four-beam spot beam can be continuously adjusted through a half-wave plate, and the typical adjusting range is that the power of the left light spot and the power of the right light spot are equal.

The light-emitting side of the multi-focus module 106 is further provided with a beam expanding module, and the beam expanding is realized by the beam expanding module on the light-emitting diameter of the plurality of point-like light beams.

Through the adjustment of the beam expanding module, the light emitting diameter of the point-like light beam can be changed by 2-10 times, and the width can be continuously adjusted. According to the laser principle, ω' = λ fM2/π ω; when the laser beam normally enters the lens, lambda is the incident laser wavelength, f is the focal length of the lens, omega is the radius of the spot of the laser incident on the surface of the lens, and omega' is the radius of the focused spot. The spot size is calculated through the formula, and the actual spot is possibly larger due to lens aberration, diffraction and the like. The beam waist position and the lens position can be increased to increase omega, so that the light spot becomes small, and the focal depth Z =2 pi omega' 2/lambda M2.

Reference may be made in particular to the following table:

on this basis, the embodiment of the present application further discloses a light beam combination system, which includes a controller 105 and the light beam combination device as described above, where the controller 105 is electrically connected to the laser light source 100 and the focusing module 107 of the light beam combination system, respectively.

The controller 105 is connected with the laser source 100, and the laser source 100 can emit light beams under the control of the controller 105 so as to cut and groove a plurality of cutting channels of the product to be measured respectively through the light beams.

The controller 105 may also be connected to a beam splitter, and the beam splitter splits the light beam of the laser light source 100 under the control of the controller 105, so that the light beam of the laser light source 100 forms a path of horizontally polarized P light and a path of vertically polarized S light after passing through the beam splitter.

The controller 105 is connected with the focusing module 107, and the focusing module 107 moves along the direction vertical to the surface to be processed of the part 201 to be processed under the control of the controller 105 so as to perform grooving on the surface to be processed to form a preset cutting groove.

Automatic control of the system is achieved by the cooperation of the controller 105 and the beam combining means described above.

When the beam combination system is applied to laser processing, the embodiment of the present application further provides a laser processing apparatus, including the beam combination system and a driving part connecting the processing platform 200 and the processing platform 200, where the processing platform 200 is used to carry a workpiece 201 to be processed, and a combined beam emitted by the beam combination system forms a preset cutting groove on a surface to be processed of the workpiece 201 to be processed.

The driving part drives the processing platform 200 to move, the driving part is connected with the controller 105, the processing platform 200 can move along the direction of the preset cutting path of the surface to be processed under the control of the controller 105, a complete cutting path is formed for grooving and cutting, and finally the preset cutting groove is obtained.

The embodiment of the application further provides a laser processing device, which focuses laser on the surface of a material, and focuses the laser on the surface of the material through the focusing module 107, so that the material near the laser focus absorbs laser energy, after molecular chains and ionic bonds of the material are broken, plasma cloud is formed by combining with a melt, and the plasma is discharged under the collection of the dust collecting device, so that the purpose of removing the material and grooving is achieved.

In the material removing process, due to the arrangement of the light beam combination system, two paths of light beams, namely a strip light beam formed by a first light beam and a plurality of point light beams formed by a second light beam, are respectively processed, the plurality of point light beams are separated into two groups of point light beams for edge isolation grooving, after Gaussian laser is expanded and collimated by the first light beam, the first light beam is matched with the concave cylindrical mirror and the convex cylindrical mirror to combine, a round light spot is elongated into a strip-shaped light spot, the strip-shaped light spot is shaped by matching with a square aperture to obtain a flat strip-shaped light spot, the strip-shaped light spot is subjected to grooving on the middle part, all materials in a wider cutting path are removed by matching the two paths of light beams, the flatness, the processing precision and the processing efficiency of the groove bottom can be effectively improved, and the problem of poor single-point processing groove shape can be greatly solved.

In addition, an embodiment of the present application further provides a laser processing control method, configured to control the laser processing apparatus described above, where the method includes:

and S100, controlling the laser light source 100 to emit Gaussian laser beams.

Taking the workpiece 201 to be processed as a wafer as an example, before the step, the workpiece 201 to be processed is placed on the processing platform 200, and the workpiece 201 to be processed is moved to the position below the CCD for rough positioning and fine positioning so as to correct the workpiece 201 to be processed; then, the focusing module 107 is adjusted to place the focal point of the focusing module 107 on the workpiece 201 to be processed.

Then starting processing, controlling the laser light source 100 through the controller 105, and controlling the wavelength range of the laser light source 100 to be 355 nm-1064 nm, the pulse width range to be 5 fs-250 ns, and the light-emitting diameter of the laser light source 100 to be 1 mm-3 mm, so as to adjust the parameters of the laser light source 100 to adapt to different slotting requirements.

The formed gaussian laser beam is emitted towards the polarization beam splitter 101, the polarization beam splitter 101 splits the light beam into a first light beam and a second light beam with different polarization directions, the first light beam is shaped into a strip light beam by the shaping module 102 and emitted, the second light beam is emitted in parallel by forming a plurality of point light beams by the multi-focus module 106 and emitted from the strip light beam, and the strip light beam and the plurality of point light beams are combined and connected by the beam combiner 103 to form a continuous combined light beam and emit the combined light beam to the focusing module 107.

And S110, the focusing module 107 focuses the combined light beam to be emitted to the to-be-processed part 201 on the processing platform 200, and the focusing module 107 moves along the direction vertical to the to-be-processed surface of the to-be-processed part 201.

The controller 105 controls the focusing module 107 to move the focusing module 107 along a direction perpendicular to the surface to be processed of the workpiece 201 to be processed, so as to form a preset combined light spot on the surface to be processed of the workpiece 201, and thus grooving on the surface to be processed is realized.

And S120, moving the processing platform 200 along a preset direction through a driving piece to form a preset cutting groove on the surface to be processed of the part 201 to be processed.

Through the steerable driving piece of controller 105, and then control processing platform 200 can follow and predetermine the direction and remove, predetermine the direction and predetermine the fluting direction of cutting the groove unanimously, through the removal of processing platform 200 like this, cooperation focus module 107 just can wait that the machined surface of machined part 201 forms and predetermine the cutting groove.

The beam combination system, the laser processing device and the laser processing control method have the same structure and beneficial effects as the beam combination device in the embodiment. The structure and advantages of the light beam combining device have been described in detail in the foregoing embodiments, and are not described in detail herein.

The above embodiments are merely examples of the present application and are not intended to limit the scope of the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (12)

1. A beam combining apparatus, comprising: the laser device comprises a laser light source, wherein a light emitting path of the laser light source is provided with a polarization beam splitter, a beam combiner and a focusing module, and the polarization beam splitter splits a light beam emitted by the laser light source into a first light beam and a second light beam which have different polarization directions;

a shaping module is arranged on the light path of the first light beam, and the shaping module shapes the first light beam into a strip light beam to be emitted; a multi-focus module is arranged on an optical path of the second light beam, and the multi-focus module splits the second light beam to form a plurality of point-shaped light beams which are emitted in parallel with the strip-shaped light beam; the beam combiner combines and connects the strip-shaped light beam and the plurality of point-shaped light beams to form a continuous combined light beam, and the focusing module focuses the combined light beam to form a preset combined light spot on a receiving surface.

2. The beam combining device of claim 1, wherein the shaping module shapes the first beam into a flat-top beam with uniform intensity.

3. The beam combining device according to claim 2, wherein the shaping module comprises a concave cylindrical mirror and a convex cylindrical mirror which are arranged in sequence, the focal length ratio of the concave cylindrical mirror to the convex cylindrical mirror is 1:2, and the distance between the concave cylindrical mirror and the convex cylindrical mirror is 15mm to 35mm.

4. The beam combining device according to any one of claims 1 to 3, wherein a diaphragm module is further disposed between the shaping module and the beam combiner, and the diaphragm module spatially filters the strip beam.

5. The beam combining device of claim 1, wherein the multi-focus module comprises a diffractive beam splitter and a polarizing beam splitter arranged in sequence, the second beam is split into a one-dimensional N-beam spot beams by the diffractive beam splitter, and after passing through the polarizing beam splitter, the N-beam spot beams are split into 2N-beam spot beams, and the 2N-beam spot beams are arranged symmetrically in two rows to form a plurality of spot beams.

6. The beam combining apparatus of claim 5, wherein a half-wave plate is disposed between the diffractive beam splitting mirror and the polarizing beam splitter, the half-wave plate being configured to adjust the power of the two columns of spot beams.

7. The beam combining device according to claim 5, wherein a beam expanding module is further disposed on the light exit side of the multi-focus module, and the beam expanding module expands the light exit diameter of the plurality of spot-like light beams.

8. The beam combining apparatus of claim 1, wherein the laser source has a wavelength of 355nm to 1064nm, a pulse width of 5fs to 250ns, and an exit diameter of 1mm to 3 mm.

9. A beam combining system comprising a controller and the beam combining apparatus of any one of claims 1 to 8, wherein the controller is electrically connected to the laser source and the focusing module of the beam combining system, respectively.

10. A laser processing apparatus, comprising the beam combining system as claimed in claim 9, and a driving member connected to a processing platform, wherein the processing platform is used for carrying a workpiece to be processed, and a combined beam emitted from the beam combining system forms a predetermined cutting groove on a surface to be processed of the workpiece to be processed.

11. A laser processing control method for controlling the laser processing apparatus according to claim 10, comprising:

controlling a laser light source to emit a Gaussian laser beam; the Gaussian laser beam is emitted towards the polarization beam splitter, the polarization beam splitter splits the light beam into a first light beam and a second light beam with different polarization directions, the first light beam is shaped into a strip-shaped light beam through the shaping module and emitted, the second light beam forms a plurality of point-shaped light beams through the multi-focus module and is emitted in parallel with the strip-shaped light beam, and the strip-shaped light beam and the plurality of point-shaped light beams are combined and connected through the beam combiner to form a continuous combined light beam which is emitted to the focusing module;

the focusing module focuses the combined light beam and then emits the focused combined light beam to a workpiece to be machined on a machining platform, and the focusing module moves along a direction vertical to the surface to be machined of the workpiece to be machined;

and the machining platform is moved along a preset direction through a driving piece so as to form a preset cutting groove on the surface to be machined of the workpiece to be machined.

12. The laser processing control method according to claim 11, wherein the controlling the laser light source to emit the gaussian laser beam includes:

the wavelength range of the laser light source is controlled to be 355 nm-1064 nm, the pulse width range is controlled to be 5 fs-250 ns, and the light emitting diameter of the laser light source is controlled to be 1 mm-3 mm.

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