CN111736329A - ZOOM optical system of double-sheet type aspherical mirror - Google Patents
ZOOM optical system of double-sheet type aspherical mirror Download PDFInfo
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- CN111736329A CN111736329A CN202010665040.3A CN202010665040A CN111736329A CN 111736329 A CN111736329 A CN 111736329A CN 202010665040 A CN202010665040 A CN 202010665040A CN 111736329 A CN111736329 A CN 111736329A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lenses (AREA)
Abstract
The invention discloses a two-piece type aspherical mirror ZOOM optical system which comprises an aspherical positive meniscus mirror, an aspherical biconvex mirror and a protective mirror. The invention has novel structural design, adopts a full aspheric mirror optical system, is based on the advantages of small quantity and good aberration elimination effect of aspheric mirrors, is based on the zooming characteristic of a zoom lens to a focusing light spot and the focusing characteristic of a focusing compensation lens to a focusing focus, is based on the aberration elimination diffraction limit image quality under larger numerical aperture, is based on the relation between a coating damage threshold and the size of the light spot of a mirror surface and reduces the thermal lens effect, realizes the continuous adjustment of the size of the focusing light spot, the size of a divergence angle and the position of the focus through the position matching adjustment of the focusing compensation lens and the zoom lens, is suitable for the high-power optical fiber laser cutting application, and particularly is compatible with the cutting speed and the cutting quality of thin, medium and thick plates.
Description
Technical Field
The invention relates to the technical field of high-power optical fiber laser cutting, in particular to a two-piece type aspherical mirror ZOOM optical system.
Background
The laser processing technology covers various laser processing technologies such as laser cutting, welding, quenching, punching, micro-processing and the like, and utilizes the basic characteristic of interaction between laser and substances. The laser processing technology is a high and new technology without replacement due to the advantages of non-contact between the laser beam and the processing material, processing speed and quality and the like.
Currently, laser cutting is the main position of the whole laser processing industry, wherein the laser cutting of an optical fiber output type is the first priority. The optical fiber output laser covers an optical fiber laser and a semiconductor optical fiber coupling laser, and the market share of the optical fiber output laser is increasingly prominent because of the flexibility of the optical fiber and the good coupling output of a near infrared beam. At present, the kilowatt level of optical fiber output lasers is quite popular, and the megawatt level lasers are gradually brought to the market, so that various processing technologies of optical fiber lasers are more generalized. With the increase of the laser power of the fiber laser, the processes and levels of the high-power laser processing lens from the substrate to the coating film are also continuously increased.
The high-power optical fiber laser head is generally a fixed-focus processing head, namely the focal length of a collimating mirror and the focal length of a focusing mirror are always fixed, and plates with different thicknesses are cut by changing the mode of the focusing mirror with different focal lengths. At present, two types of lenses for high-power laser processing are available, one is an aberration-eliminating spherical lens combination lens group, and the other is an aberration-eliminating aspherical lens.
Compared with an anti-aberration aspherical mirror, the anti-aberration aspherical mirror is easier to process and easy to batch, the processing consistency can be well guaranteed, meanwhile, the price is relatively low, the after-sale maintenance is more convenient, the anti-aberration effect is poorer than that of the anti-aberration aspherical mirror, the number of lenses is more than that of the aspherical mirror scheme, and the thermal lens effect is not favorable when the high-power laser cutting is applied.
With the increase of laser power, the beam quality of the fiber laser is deteriorated, for the same fiber core diameter, the commonly used middle and low power fiber laser for cutting is about 80mrad (1/e ^2) of divergence half angle, the fiber laser power reaches more than 4kW or even higher, such as ten thousand watt level, the divergence half angle of the fiber laser of part suppliers is about 100mrad (1/e ^2), for the fused silica lens material with lower refractive index, the spherical combined mirror is more difficult to reach the diffraction limit image quality, and even if the divergence half angle and the energy distribution of each laser under the same power are different, the conventional fixed focus cutting head is not well compatible with the cutting of various plates.
Moreover, for the plates with different thicknesses, the effect is not optimal in a mode of replacing the focusing lens by corresponding to a group of optimal focal length configurations theoretically. The continuous ZOOM beam expanding focusing system, namely the ZOOM system, realizes the condition that one set of light path replaces the combination of a plurality of lens groups. In foreign countries, the lens of the high-power continuous zoom beam expanding system usually adopts an aspherical mirror scheme, which is a 4-piece aspherical mirror system such as Precitec, HighYAG and the like, and a 3-piece aspherical mirror scheme is also provided in China, wherein besides the high total price and the larger thermal lens effect, at least one lens in the middle of the optical path system has a very small surface light spot size, the corresponding coating requirement is very high, the use risk is increased, and the processing difficulty and the coating difficulty are undoubtedly increased.
From laser coating, according to the lens of same power coating, the damage threshold value is closely related with incident facula size, and the incident facula is bigger, and the laser power that the lens can stably bear is often higher, consequently increases the facula size on the mirror surface to a certain extent through designing, helps improving the lens and actually bears the power, reduces the influence of hot lens effect to system optical path structure, improves stability.
Disclosure of Invention
The invention aims to provide a two-piece type aspherical mirror ZOOM optical system to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a two-piece type aspherical mirror ZOOM optical system comprises an aspherical positive meniscus mirror, an aspherical double convex mirror and a protective mirror; the central axes of the aspheric positive meniscus lens, the aspheric biconvex lens and the protective lens are coaxial and are all made of fused quartz materials; the concave surface of the aspheric positive meniscus mirror faces the light emitting point of the optical fiber coupling output laser, only one mirror surface corresponding to the two mirror surfaces is an aspheric surface, the other mirror surface is a spherical surface, and the effective focal length is between 50mm and 250 mm;
the aspheric biconvex lens is corresponding to two mirror surfaces, only one mirror surface is aspheric, the other mirror surface is spherical, and the effective focal length is between 50mm and 250 mm.
Preferably, the aspheric positive meniscus lens forms a focusing compensation lens, and the aspheric biconvex lens forms a zoom lens; the aspheric positive meniscus lens and the aspheric biconvex lens move along the direction of the optical axis.
Preferably, when the aspheric positive meniscus lens and the aspheric biconvex lens are matched to move and keep the focal position still, the adjustment of the sizes of the focused light spots and the divergence angles is realized; the aspheric double-convex lens is fixed, and when the aspheric positive meniscus lens moves, the focusing focus position is adjusted.
Preferably, the incident light source of the ZOOM optical system is a fiber coupling output laser; the optical path transmission direction of the optical system sequentially comprises an optical fiber coupling output laser light emitting point, an aspheric positive meniscus lens, an aspheric biconvex lens and a protective lens.
Preferably, the using method comprises the following steps:
A. under the normal incidence of the light-emitting point of the high-power optical fiber coupling output laser, divergent light beams are converged on the divergence of the light beams through the aspheric positive meniscus lens, the light beams after the divergence of the light beams are still the divergent light beams, and finally the divergent light beams are focused to one point through the aspheric biconvex lens;
B. when the aspheric positive meniscus lens and the aspheric biconvex lens move to different positions along the optical axis in a matching way, the position of the final focusing focus is ensured to be unchanged, and the adjustment of the size of the focusing focus light spot and the size of the divergence angle of the focusing light beam is realized;
C. when the aspheric biconvex lens is fixed at a certain position in the optical path system, the aspheric positive meniscus lens is only moved along the optical axis, and the adjustment of the focus position is realized at the moment.
Compared with the prior art, the invention has the beneficial effects that:
(1) the invention has novel structural design, adopts a full aspheric mirror optical system, is based on the advantages of small quantity and good aberration elimination effect of aspheric mirrors, is based on the zooming characteristic of a zoom lens to a focusing light spot and the focusing characteristic of a focusing compensation lens to a focusing focus, is based on the aberration elimination diffraction limit image quality under larger numerical aperture, is based on the relation between a coating damage threshold and the size of the light spot of a mirror surface and reduces the thermal lens effect, realizes the continuous adjustment of the size of the focusing light spot, the size of a divergence angle and the position of the focus through the position matching adjustment of the focusing compensation lens and the zoom lens, is suitable for the high-power optical fiber laser cutting application, and particularly is compatible with the cutting speed and the cutting quality of thin, medium and thick plates.
(2) The aspheric positive meniscus lens and the aspheric biconvex lens of the invention only have one lens surface as the aspheric surface, and the other lens surface is the spherical surface, so the processing difficulty is not large relatively, the consistency of the lens is easy to ensure, in addition, the number of the lenses is small, the influence of the thermal lens effect on the optical path system is favorably reduced, and the cost of the optical path system lens is reduced.
(3) Compared with the traditional ZOOM optical path system, the optical path system disclosed by the invention has the advantages that the problem that the requirement on the damage threshold of a lens coating film is very high due to the fact that the size of the light spot on the surface of at least one lens is too small is solved to a great extent, the sizes of the light spots on the surface of the lens are large no matter an aspheric positive meniscus lens or an aspheric biconvex lens is adopted, the bearing power of the two lenses is favorably improved, and the stability of the optical path system is ensured.
Drawings
FIG. 1 is a schematic diagram of the overall optical path structure of the present invention;
FIG. 2 is a schematic diagram of an optical path for realizing different light spot magnification by the matching movement of a focusing compensation lens and a zoom lens;
FIG. 3 is a schematic diagram of an optical path for adjusting a focus position when the focusing compensation mirror of the present invention is moved alone.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-3, the present invention provides a technical solution: a two-piece type aspherical mirror ZOOM optical system comprises an aspherical positive meniscus mirror 1, an aspherical double convex mirror 2 and a protective mirror 3; the ZOOM optical system incident light source is an optical fiber coupling output laser; the optical path transmission direction of the optical system sequentially comprises an optical fiber coupling output laser light emitting point, an aspheric positive meniscus lens 1, an aspheric biconvex lens 2 and a protective lens 3; the central axes of the aspheric positive meniscus lens 1, the aspheric biconvex lens 2 and the protective lens 3 are coaxial and are all made of fused quartz materials; the concave surface of the aspheric positive meniscus lens 1 faces the light emitting point of the optical fiber coupling output laser, only one of the two corresponding mirror surfaces is aspheric, the other mirror surface is spherical, and the effective focal length is 50-250 mm;
the aspheric biconvex lens 2 has two corresponding mirror surfaces, only one mirror surface is aspheric, the other mirror surface is spherical, and the effective focal length is 50-250 mm.
In the invention, an aspheric positive meniscus lens 1 forms a focusing compensation lens, and an aspheric biconvex lens 2 forms a zoom lens; the aspheric positive meniscus lens 1 and the aspheric biconvex lens 2 move along the direction of the optical axis; when the aspheric positive meniscus lens 1 and the aspheric biconvex lens 2 are matched to move to keep the focal position still, the adjustment of the sizes of the focused light spots and the divergence angles is realized; the aspheric biconvex lens 2 is fixed, and when the aspheric positive meniscus lens 1 moves, the focusing focus position is adjusted.
The working principle is as follows: the using method of the invention comprises the following steps:
A. under the normal incidence of the light-emitting point of the high-power optical fiber coupling output laser, divergent light beams are converged on the divergence of the light beams through the aspheric positive meniscus lens 1, the light beams after the divergence of the light beams are still the divergent light beams, and finally the light beams are focused to one point through the aspheric biconvex lens 2;
B. when the aspheric positive meniscus lens 1 and the aspheric biconvex lens 2 move to different positions along the optical axis in a matching way, the position of the final focusing focus is ensured to be unchanged, and the adjustment of the size of the focusing focus light spot and the size of the divergence angle of the focusing light beam is realized;
C. when the aspheric biconvex lens 2 is fixed at a certain position in the optical path system, the aspheric positive meniscus lens 1 is moved only along the optical axis, and the adjustment of the focus position is realized at the moment.
In the actual use process, according to the difference of the laser parameters and the difference of the types, thicknesses and the like of the plates, the focused light beams can be adjusted according to the figures 2 and 3, and finally the corresponding plates are ensured to obtain the optimal cutting effect.
In conclusion, the optical system is novel in structural design, a full aspheric mirror optical system is adopted, based on the advantages of small quantity of aspheric mirrors and good aberration elimination effect, based on the zooming characteristic of a zoom lens to a focusing light spot and the focusing characteristic of a focusing compensation lens to a focusing focus, based on the aberration elimination diffraction limit image quality under a larger numerical aperture, based on the relation between a coating damage threshold and a mirror surface light spot size and the reduction of a thermal lens effect, the size of the focusing light spot, the size of a divergence angle and the position of the focus are continuously adjusted by matching and adjusting the positions of the focusing compensation lens and the zoom lens, the optical system is suitable for high-power optical fiber laser cutting application, and particularly, the cutting speed and the cutting quality of thin, medium and thick plates are compatible; the aspheric positive meniscus lens and the aspheric biconvex lens of the invention only have one lens surface as the aspheric surface, the other lens surface is the sphere, relatively speaking the processing difficulty is not great, the consistency of the lens is easy to ensure, in addition, the lens quantity is small, which is helpful to reduce the influence of the thermal lens effect on the optical path system and reduce the cost of the optical path system lens; compared with the traditional ZOOM optical path system, the optical path system disclosed by the invention has the advantages that the problem that the requirement on the damage threshold of a lens coating film is very high due to the fact that the size of the light spot on the surface of at least one lens is too small is solved to a great extent, the sizes of the light spots on the surface of the lens are large no matter an aspheric positive meniscus lens or an aspheric biconvex lens is adopted, the bearing power of the two lenses is favorably improved, and the stability of the optical path system is ensured.
The invention is not described in detail, but is well known to those skilled in the art.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (5)
1. A two-piece type aspherical mirror ZOOM optical system is characterized in that: comprises an aspheric positive meniscus lens (1), an aspheric biconvex lens (2) and a protective lens (3); the central axes of the aspheric positive meniscus lens (1), the aspheric biconvex lens (2) and the protective lens (3) are coaxial and are all made of fused quartz materials; the concave surface of the aspheric positive meniscus lens (1) faces the light-emitting point of the optical fiber coupling output laser, only one of the two corresponding mirror surfaces is aspheric, the other mirror surface is spherical, and the effective focal length is 50-250 mm;
the aspheric biconvex mirror (2) is provided with two corresponding mirror surfaces, only one mirror surface is an aspheric surface, the other mirror surface is a spherical surface, and the effective focal length is between 50mm and 250 mm.
2. A two-piece aspherical mirror ZOOM optical system according to claim 1, wherein: the aspheric positive meniscus lens (1) forms a focusing compensation lens, and the aspheric biconvex lens (2) forms a zoom lens; the aspheric positive meniscus lens (1) and the aspheric biconvex lens (2) move along the direction of the optical axis.
3. A two-piece aspherical mirror ZOOM optical system according to claim 1, wherein: the aspheric positive meniscus lens (1) and the aspheric biconvex lens (2) are matched to move to keep the focal position still, so that the adjustment of the sizes of focused light spots and divergence angles is realized; the aspheric biconvex lens (2) is fixed, and when the aspheric positive meniscus lens (1) moves, the focusing focus position is adjusted.
4. A two-piece aspherical mirror ZOOM optical system according to claim 1, wherein: the ZOOM optical system incident light source is an optical fiber coupling output laser; the optical path transmission direction of the optical system sequentially comprises an optical fiber coupling output laser light emitting point, an aspheric positive meniscus lens (1), an aspheric biconvex lens (2) and a protective lens (3).
5. The use method of the two-piece type aspherical mirror ZOOM optical system according to claim 1 is realized, and is characterized in that: the using method comprises the following steps:
A. under the normal incidence of the light-emitting point of the high-power optical fiber coupling output laser, divergent light beams are converged on the divergence of the light beams through the aspheric positive meniscus lens (1), the light beams after the divergence of the light beams are still the divergent light beams, and finally the divergent light beams are focused to one point through the aspheric biconvex lens (2);
B. when the aspheric positive meniscus lens (1) and the aspheric biconvex lens (2) move to different positions along the optical axis in a matching way, the position of the final focusing focus is ensured to be unchanged, and the adjustment of the size of the focusing focus light spot and the size of the divergence angle of the focusing light beam is realized;
C. when the aspheric biconvex lens (2) is fixed at a certain position in the optical path system, the aspheric positive meniscus lens (1) is only moved along the optical axis, and the adjustment of the focusing focus position is realized at the moment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010665040.3A CN111736329A (en) | 2020-07-10 | 2020-07-10 | ZOOM optical system of double-sheet type aspherical mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010665040.3A CN111736329A (en) | 2020-07-10 | 2020-07-10 | ZOOM optical system of double-sheet type aspherical mirror |
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| CN111736329A true CN111736329A (en) | 2020-10-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010665040.3A Withdrawn CN111736329A (en) | 2020-07-10 | 2020-07-10 | ZOOM optical system of double-sheet type aspherical mirror |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113977072A (en) * | 2021-11-30 | 2022-01-28 | 广东宏石激光技术股份有限公司 | Variable-spot diffraction element-based zoom laser processing system and method |
| CN114089524A (en) * | 2022-01-13 | 2022-02-25 | 江苏迅镭激光科技有限公司 | ZOOM ZOOM optical system with three-piece type spherical mirror capable of continuously changing magnification and zooming |
| CN114326066A (en) * | 2022-01-14 | 2022-04-12 | 苏州迅镭激光科技有限公司 | ZOOM ZOOM optical system with double-piece aspheric mirror capable of continuously changing magnification |
| WO2023206880A1 (en) * | 2022-04-26 | 2023-11-02 | 上海嘉强自动化技术有限公司 | Laser processing head |
-
2020
- 2020-07-10 CN CN202010665040.3A patent/CN111736329A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113977072A (en) * | 2021-11-30 | 2022-01-28 | 广东宏石激光技术股份有限公司 | Variable-spot diffraction element-based zoom laser processing system and method |
| CN114089524A (en) * | 2022-01-13 | 2022-02-25 | 江苏迅镭激光科技有限公司 | ZOOM ZOOM optical system with three-piece type spherical mirror capable of continuously changing magnification and zooming |
| CN114326066A (en) * | 2022-01-14 | 2022-04-12 | 苏州迅镭激光科技有限公司 | ZOOM ZOOM optical system with double-piece aspheric mirror capable of continuously changing magnification |
| CN114326066B (en) * | 2022-01-14 | 2024-05-07 | 苏州迅镭激光科技有限公司 | Double-piece type aspheric mirror continuous ZOOM ZOOM optical system |
| WO2023206880A1 (en) * | 2022-04-26 | 2023-11-02 | 上海嘉强自动化技术有限公司 | Laser processing head |
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