CN114966925A - Reflective broadband integrating mirror and broadband optical fiber laser optical system - Google Patents

Reflective broadband integrating mirror and broadband optical fiber laser optical system Download PDF

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Publication number
CN114966925A
CN114966925A CN202210651533.0A CN202210651533A CN114966925A CN 114966925 A CN114966925 A CN 114966925A CN 202210651533 A CN202210651533 A CN 202210651533A CN 114966925 A CN114966925 A CN 114966925A
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CN
China
Prior art keywords
broadband
mirror
plane
reflective
symmetrical
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CN202210651533.0A
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Chinese (zh)
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邵华江
王伟
李思佳
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Shanghai Empower Automation Technology Co ltd
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Shanghai Empower Automation Technology Co ltd
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Priority to CN202210651533.0A priority Critical patent/CN114966925A/en
Priority to PCT/CN2022/114206 priority patent/WO2023236354A1/en
Publication of CN114966925A publication Critical patent/CN114966925A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/10Mirrors with curved faces
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0977Reflective elements
    • G02B27/0983Reflective elements being curved

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The invention relates to a reflective broadband integrator mirror and a broadband fiber laser optical system, the reflective broadband integrator mirror is based on incident light of a point light source and comprises a base body, the base body is provided with a bottom surface, a mirror surface and a symmetrical surface, the base body is symmetrical about the symmetrical surface, the mirror surface and the bottom surface are inclined at a set acute angle and comprise at least three concave broadband curved surfaces, the broadband curved surfaces pass through the symmetrical surface and are symmetrical about the symmetrical surface, two adjacent broadband curved surfaces are intersected and form arc-shaped strip lines, the focuses of all the arc-shaped strip lines are coplanar to form a focusing plane, and the focusing plane is parallel to the symmetrical surface and arranged at intervals; the reflected light after the mirror reflection focuses to a light spot towards the center, and a plurality of reflected light reflected by the same circular arc strip line are symmetrical about a symmetrical plane, so that the light spot is good in symmetry, the light spot is homogenized in a one-way flat top mode, the whole uniformity is good, the light path structure is simple, the power loss is small, the light path stability is good, the cost is low, and the large-scale application prospect is good.

Description

Reflective broadband integrating mirror and broadband optical fiber laser optical system
Technical Field
The invention relates to the technical field of laser beam shaping, in particular to a reflective broadband integrating mirror and a broadband optical fiber laser optical system.
Background
Laser processing technologies such as laser cutting, welding, quenching, drilling, micromachining and the like are widely applied due to the advantages of non-contact, high processing speed, excellent quality and the like, and among them, broadband fiber laser processing technologies such as broadband laser cladding, broadband laser quenching and the like are very common in the industrial laser processing industry.
The broadband fiber laser processing technique generally requires energy distribution shaping of the laser beam to achieve flat-top distribution to ensure better surface effect and depth consistency. The current spot shaping scheme has three kinds: the method has the technical scheme that firstly, the waveguide is shaped, but the optical absorption is large, so that the method is severely limited in high-power laser processing; the second scheme is that the transmission type lenses such as the lens array, the binary optical element, the integral lens and the like are made of hard and brittle fused quartz, so that the processing difficulty is high, and the processing cost is high; the third scheme is a reflective broadband integrating mirror, which has advantages in high-power laser processing such as water-cooling, good thermal conductivity, and capability of bearing extremely high laser power, but the existing reflective broadband integrating mirrors are all based on parallel beam incidence, and the laser of optical fiber coupling output needs to collimate the diverging beam of the output point, so that the optical path structure is complex, the power loss is high, the instability of the optical path is more prominent, and the cost is also high.
Disclosure of Invention
In view of the above, it is necessary to provide a reflective broadband integrator mirror and a broadband fiber laser optical system, which can solve the problem that the reflective broadband integrator mirror cannot process a point light source beam.
The invention provides a reflection type broadband integrating mirror, which is based on incident light of a point light source and comprises a base body, wherein the base body is provided with a bottom surface, a mirror surface and a symmetrical surface, the base body is symmetrical about the symmetrical surface, the mirror surface and the bottom surface are inclined at a set acute angle and comprise at least three concave broadband curved surfaces, the broadband curved surfaces pass through the symmetrical surface and are symmetrical about the symmetrical surface, two adjacent broadband curved surfaces are intersected and form an arc-shaped strip line, the focuses of all the arc-shaped strip lines are coplanar to form a focusing plane, and the focusing plane is parallel to the symmetrical surface and is arranged at intervals.
In the reflection type broadband integrating mirror, the point light source is arranged on one side of the mirror surface far away from the bottom surface and irradiates the mirror surface along the direction towards the mirror surface, incident light is distributed in a conical shape and is focused at the position of an arc-shaped strip line, reflected light after being reflected by the mirror surface focuses towards the center to form a light spot, because the broadband curved surface is symmetrical relative to a symmetrical plane, a plurality of reflected light reflected by the same arc-shaped strip line are symmetrical relative to the symmetrical plane, and further the light spot is better in symmetry, because all the broadband curved surfaces are arranged in parallel and pass through the symmetrical plane, all the arc-shaped strip lines are parallel and focus focuses on the same plane, a focusing plane parallel to the symmetrical plane is formed, so that the light spot is homogenized in a one-way flat top way, the integral uniformity is better, and only one reflection type broadband integrating mirror is needed for an optical fiber coupling output laser to realize the one-way flat top homogenization of point emitted light, the optical path has the advantages of simple structure, less power loss, better stability, relatively lower optical cost and better large-scale application prospect.
In one embodiment, the deflection angle a of the light beam of the mirror is 30-150 °.
In the reflective broadband integrating mirror, the range of the beam deflection angle a of the mirror surface is limited so as to be suitable for application scenes of different illumination positions.
In one embodiment, the set acute angle is 90 ° -a/2.
In the reflective broadband integrating mirror, the inclined angle of the mirror surface relative to the bottom surface can be conveniently and quickly determined by limiting the calculation formula of the set acute angle formed by the mirror surface and the bottom surface and combining the light beam deflection angle a of the mirror surface, so that the seat body can be conveniently prepared.
In one embodiment, all the broadband curved surfaces form an elliptical section line on a section parallel to the symmetry plane.
In the reflective broadband integrating mirror, by limiting the sectional line shapes of all the broadband curved surfaces on the section parallel to the symmetry plane, the focal points of all the arc-shaped strip lines can be conveniently and reliably ensured to be coplanar to form a focusing plane parallel to the symmetry plane.
In one embodiment, the elliptical stubs correspond to different center broadband unequal spacings of the broadband curved surface.
In the reflective broadband integral mirror, the sectional line size of all the broadband curved surfaces on the section parallel to the symmetrical surface is limited, so that the unidirectional uniformity, the overall uniformity and the symmetry of the light spot are improved.
In one embodiment, the number of the broadband curved surfaces is less than or equal to 50.
In the reflecting type broadband integrating mirror, the number range of the broadband curved surfaces is limited, so that the structure of the mirror surface is simplified on the basis of ensuring the unidirectional flat top homogenization function, and the preparation of a seat body is facilitated.
In one embodiment, the number of the broadband surfaces is 6-15.
In the reflective broadband integrating mirror, the number range of the broadband curved surfaces is further reduced, so that the structure of the mirror surface can be further simplified, and the production cost of the reflective broadband integrating mirror is reduced.
In one embodiment, the spacing between the focal plane and the symmetry plane is determined according to the formula:
H=F2*L2/(D+L2),(1);
D=2*F1*tan(b),(2);
wherein: h is the distance between the focusing plane and the symmetry plane, F1 is the incident focal length, F2 is the emergent focal length, D is the maximum spot size perpendicular to the symmetry plane on the mirror surface, L2 is the homogenized spot width, and b is the beam divergence half angle.
In the above-mentioned reflective broadband integrator mirror, through formula (1), formula (2) and according to known incident focal length F1, exit focal length F2, the maximum spot size D perpendicular to the plane of symmetry on the mirror surface, homogenized spot width L2, the half angle b of beam divergence, can confirm the interval between plane of focus and the plane of symmetry comparatively conveniently, and then design the seat structure conveniently and swiftly.
In one embodiment, a water cooling channel is formed inside the seat body, and a water inlet and a water outlet of the water cooling channel are respectively opened on the bottom surface.
In above-mentioned reflection type broadband integrator mirror, through setting up the water-cooling passageway to inject water inlet, the delivery port position of water-cooling passageway, be favorable to cooling the pedestal, avoid above-mentioned reflection type broadband integrator mirror to be in high temperature state for a long time, improve reflection type broadband integrator mirror's life.
In addition, the invention also provides a broadband fiber laser optical system, which comprises a point light source and the reflective broadband integrating mirror according to any technical scheme, wherein the point light source is positioned at the incident focal point of the reflective broadband integrating mirror.
In the broadband fiber laser optical system, the point light source is positioned at the incident focal point of the reflective broadband integrating mirror, the light emitted by the point light source irradiates the mirror surface along the direction facing the mirror surface, the incident light is distributed in a conical shape and is focused at the arc-shaped strip line, the reflected light after being reflected by the mirror surface focuses towards the center to form a light spot, the broadband curved surface is symmetrical relative to the symmetrical surface, so that a plurality of reflected lights reflected by the same arc-shaped strip line are symmetrical relative to the symmetrical surface, and the light spot has better symmetry, all the broadband curved surfaces are arranged in parallel and pass through the symmetrical surface, all the arc-shaped strip lines are parallel, and the focusing focal points are coplanar to form a focusing plane parallel to the symmetrical surface, so that the light spot is subjected to unidirectional flat-top homogenization and better integral uniformity, therefore, the broadband fiber laser optical system with the reflective broadband integrating mirror can realize unidirectional flat-top homogenization and shaping of non-parallel light beams, the optical path has the advantages of simple structure, less power loss, better stability, relatively lower optical cost and better large-scale application prospect.
Drawings
FIG. 1 is a schematic diagram of a reflective broadband integrator mirror according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of the reflective broadband integrator mirror of FIG. 1;
FIG. 3 is a top view of the reflective broadband integrator mirror of FIG. 1;
FIG. 4 is a front view of a broadband fiber laser optical system along the incident direction of light in accordance with an embodiment of the present invention;
FIG. 5 is a cross-sectional view of the broadband fiber laser optical system of FIG. 4 at a plane of symmetry location;
FIG. 6 is a schematic diagram of a light spot after being homogenized by a single flat top of a reflective broadband integrator in an embodiment of the present invention;
FIG. 7 is a cross-sectional view of a reflective broadband integrator mirror in accordance with another embodiment of the present invention.
Reference numerals are as follows:
10. a broadband fiber laser optical system;
100. a reflective broadband integrator mirror; 110. a base body; 111. a bottom surface; 112. a mirror surface; 1121. a broadband curved surface; 1122. a circular arc strip line; 1123. an elliptical section line; 113. a plane of symmetry; 114. a water-cooling channel; 1141. a water inlet; 1142. a water outlet; alpha, setting an acute angle;
20. a point light source; 21. the maximum spot.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will recognize without departing from the spirit and scope of the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, but are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
The technical scheme provided by the embodiment of the invention is described below by combining the accompanying drawings.
As shown in fig. 1, fig. 2, fig. 3, fig. 4, and fig. 5, the present invention provides a reflective broadband integrator mirror 100, which is used for performing unidirectional flat-top homogenizing and shaping on incident light of a point light source 20 based on incident light of the point light source 20, wherein in a specific setting, a light-emitting cross section of the point light source 20 is in a regular spot shape, such as a circle, an ellipse, etc., energy distribution is non-flat-top distribution, and the point light source 20 may be a laser coupled by an optical fiber and may also be in other structural forms capable of meeting requirements. The reflective broadband integrator mirror 100 includes a base 110, the base 110 is made of metal material, such as pure copper, aviation aluminum material, etc., the shape of the base 110 may be cylindrical, cubic, etc., and the material and the shape of the base 110 are not limited thereto, but may also be in other structural forms capable of meeting the requirements.
The base 110 has a bottom 111, a mirror surface 112 and a symmetry plane 113, the mirror surface 112 and the bottom 111 are disposed in an inclined manner at a predetermined acute angle α, and the base 110 is symmetrical with respect to the symmetry plane 113. The mirror surface 112 includes at least three broadband curved surfaces 1121, and the shape of the broadband curved surfaces 1121 is a concave surface, and when the mirror surface is specifically disposed, the number of the broadband curved surfaces 1121 may be 3, 4, 5, 10, 20, or more than 20.
All the broadband curved surfaces 1121 pass through the symmetry plane 113, all the broadband curved surfaces 1121 are symmetrical with respect to the symmetry plane 113, two adjacent broadband curved surfaces 1121 intersect with each other, and arc-shaped strip lines 1122 are formed at the intersection positions, and in specific arrangement, all the broadband curved surfaces 1121 may be arranged in parallel, and the arc-shaped strip lines 1122 are parallel. The focal points of all the circular arc-shaped strip lines 1122 are coplanar, and these focal points form a focal plane, which is parallel to the symmetry plane 113 and spaced from the symmetry plane 113. In a specific arrangement, the central axis of the incident beam and the central axis of the reflected beam of the mirror 112 form a central beam transmission plane, which is parallel to the plane of symmetry 113.
As shown in fig. 4, 5 and 6, in the reflective broadband integrator 100, the point light source 20 is disposed on a side of the mirror surface 112 away from the bottom surface 111 and irradiates the mirror surface 112 in a direction toward the mirror surface 112, the incident light is distributed in a tapered shape and focused at the circular arc strip 1122, the reflected light reflected by the mirror surface 112 is focused into a light spot toward the center, since the broadband curved surface 1121 is symmetrical with respect to the symmetrical surface 113, so that a plurality of reflected lights reflected by the same circular arc strip 1122 are symmetrical with respect to the symmetrical surface 113, and the light spot symmetry is better, since all the broadband curved surfaces 1121 are arranged in parallel and pass through the symmetrical surface 113, all the circular arc strips 1122 are parallel and the focus focal points are coplanar, and a focusing plane parallel to the symmetrical surface 113 is formed, so that the light spot is unidirectionally flat-topped, the overall uniformity is better, and only one reflective broadband integrator 100 is needed for the fiber coupled output laser to realize unidirectional spot emission Flat-top homogenizing and shaping, simple optical path structure, less power loss, better optical path stability, relatively lower optical cost and better large-scale application prospect.
In order to adapt to different application scenarios, in a preferred embodiment, as shown in FIG. 5, the beam deflection angle a of the mirror 112 may be 30-150. In a specific arrangement, the beam deflection angle a of the mirror 112 is 30 °, 45 °, 60 °, 75 °, 90 °, 105 °, 120 °, 135 °, 150 °, although the beam deflection angle a of the mirror 112 is not limited to the above value, and may be other values within the range of 30 ° to 150 °.
In the reflective broadband integrating mirror 100, after the incident light is reflected by the broadband curved surface 1121, the deflection angle of the reflected light with respect to the incident light is the beam deflection angle a of the mirror surface 112, at this time, the deflection angle of the whole spot position after being homogenized and shaped by the unidirectional flat top with respect to the point light source 20 is the beam deflection angle a of the mirror surface 112, so as to be suitable for the irradiation position forming an included angle a with the point light source 20, and by expanding the beam deflection angle a of the mirror surface 112, the reflective broadband integrating mirror 100 can be applied to application scenes of different irradiation positions.
To facilitate the arrangement of the seat body 110, specifically, as shown in fig. 2 and 7, the set acute angle α may be 90 ° -a/2. In the reflective broadband integrator mirror 100, the beam deflection angle a of the mirror surface 112 is determined according to a given application scenario, and then the angle at which the mirror surface 112 is tilted with respect to the bottom surface 111 is determined more conveniently and rapidly according to the beam deflection angle a of the mirror surface 112 and by using a limiting condition that the set acute angle α can be 90 ° -a/2, thereby facilitating the setting of the base 110.
In order to simplify the structure of the mirror 112, specifically, the number of the broadband curved surfaces 1121 may be less than or equal to 50. In the reflective broadband integrating mirror 100, the number of the broadband curved surfaces 1121 is limited to be selected within a range of 3-50, for example, 30, 35, 40, 45, or 50 broadband curved surfaces 1121 are provided in the mirror surface 112, so that on the basis of ensuring the one-way flat-top homogenization function, the number of the broadband curved surfaces 1121 is not too large, thereby avoiding the problems of complicated arrangement manner, narrow arrangement space, and the like of the broadband curved surfaces 1121 in the mirror surface 112, simplifying the structure of the mirror surface 112, and facilitating the preparation of the base body 110. Specifically, the number of the broadband curved surfaces 1121 may be 6 to 15, for example, 6, 7, 8, 9, 10, 11, 12, 13, 14, or 15 broadband curved surfaces 1121 are provided in the mirror surface 112, so as to further simplify the structure of the mirror surface 112, facilitate the preparation of the base 110, and reduce the production cost of the reflective broadband integral mirror 100.
To facilitate the formation of the focal plane, in a preferred embodiment, all the broadband curved surfaces 1121 form elliptical stubs 1123 on a cross section parallel to the symmetry plane 113, as shown in fig. 1 and 7. In the reflective broadband integrator mirror 100, since all the broadband curved surfaces 1121 pass through the symmetry plane 113, all the broadband curved surfaces 1121 form the elliptical sectional lines 1123 on the cross section parallel to the symmetry plane 113, so as to conveniently and reliably ensure that the focal points of all the circular arc-shaped strip lines 1122 are coplanar to form the focusing plane parallel to the symmetry plane 113.
In order to further improve the overall uniformity, specifically, the elliptical sectional lines 1123 correspond to the unequal center broadband intervals of the different broadband curved surfaces 1121, so that the plurality of reflected light rays reflected by the same elliptical sectional line 1123 can be uniform everywhere, the unidirectional uniformity of the light spots is further improved, the overall uniformity is better, and the symmetry of the light spots can be improved.
To facilitate determining the separation between the focal plane and the plane of symmetry 113, as shown in fig. 4 and 5, in a preferred embodiment, the separation between the focal plane and the plane of symmetry 113 is determined according to the following formula:
H=F2*L2/(D+L2),(1);
D=2*F1*tan(b),(2);
wherein: h is the distance between the focusing plane and the symmetry plane 113, F1 is the incident focal length, F2 is the emergent focal length, D is the maximum spot 21 size on the mirror plane 112 perpendicular to the symmetry plane 113, L2 is the homogenized spot width, and b is the beam divergence half angle.
In the reflective broadband integrator mirror 100, as shown in fig. 6, the point light source 20 having a beam divergence half angle b is at an incident focal point, the point divergent beam is normally incident on the mirror surface 112 having an incident focal length of F1 and an exit focal length of F2, the incident beam is combined and superimposed after being subjected to spectral reflection by the broadband curved surface 1121, and the combined and superimposed beam realizes light spot energy homogenization in a direction where a focusing plane is parallel to the symmetric plane 113, the light spot energy is distributed flat-top, and the homogenized light spot length is L1; the incident light beam is focused through the arc-shaped strip line 1122 of the broadband curved surface 1121, and the focusing plane obtains an out-of-focus light spot perpendicular to the symmetric plane 113, the light spot energy is in gaussian distribution, and the light spot width is L2. Therefore, according to the known incident focal length F1, the exit focal length F2, the maximum spot 21 size D perpendicular to the symmetry plane 113 on the mirror surface 112, the homogenized spot width L2, and the half angle b of beam divergence, the distance between the focus plane and the symmetry plane 113 can be determined more conveniently according to the above formula (1) and formula (2), and the structure of the seat body 110 can be designed conveniently and quickly.
In order to prolong the service life of the reflective broadband integrator mirror 100, as shown in fig. 7, in a preferred embodiment, a water cooling channel 114 is formed inside the base body 110, and a water inlet 1141 and a water outlet 1142 of the water cooling channel 114 are respectively opened on the bottom surface 111.
In the reflective broadband integrator 100, the water inlet 1141 is used for introducing cooling water into the seat body 110 to cool the seat body 110, and the cooling water flows out through the water outlet 1142. In practical operation, the water-cooling channel 114 is externally connected with a cooling water source, and cooling water flows into the water-cooling channel 114 through the water inlet 1141 and flows out through the water outlet 1142, so as to be beneficial to cooling the base 110, avoid the reflective broadband integrator mirror 100 from being in a high-temperature state for a long time, and improve the service life of the reflective broadband integrator mirror 100.
As shown in fig. 4 and fig. 5, the present invention further provides a broadband fiber laser optical system 10, which includes a point light source 20 and the reflective broadband integrator mirror 100 according to any of the above technical solutions, wherein the point light source 20 is located at an incident focal point of the reflective broadband integrator mirror 100.
In the broadband fiber laser optical system 10, the point light source 20 is located at the incident focus of the reflective broadband integrator mirror 100, the light emitted from the point light source 20 irradiates the mirror surface 112 in a direction toward the mirror surface 112, the incident light is distributed in a conical shape and is focused at the circular arc strip line 1122, the reflected light reflected by the mirror surface 112 is focused toward the center to form a light spot, the broadband curved surface 1121 is symmetrical with respect to the symmetrical surface 113, so that a plurality of reflected lights reflected by the same circular arc strip line 1122 are symmetrical with respect to the symmetrical surface 113, and the light spot has good symmetry, because all the broadband curved surfaces 1121 are arranged in parallel and pass through the symmetrical surface 113, all the circular arc strip lines 1122 are parallel and the focus focuses on the same plane to form a focusing plane parallel to the symmetrical surface 113, so that the light spot is unidirectionally homogenized and flattened, and the overall uniformity is good, therefore, the broadband fiber laser optical system 10 having the reflective broadband integrator mirror 100 can realize unidirectionally flattening of non-parallel light beams The top homogenizing shaping has the advantages of simple optical path structure, less power loss, better optical path stability, relatively lower optical cost and better large-scale application prospect.
All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. The utility model provides a reflective broadband integrator mirror, is based on the incident light of pointolite, a serial communication port, which comprises a base body, the pedestal has bottom surface, mirror surface and plane of symmetry, the pedestal regards to the plane of symmetry is symmetrical, the mirror surface with the bottom surface is the broadband curved surface who sets for the acute angle slope, and includes at least three concave surface form, the broadband curved surface passes through the plane of symmetry just regards to the plane of symmetry is symmetrical, adjacent two intersect and form circular-arc strip line, all between the broadband curved surface the focus coplane of circular-arc strip line forms the plane of focus, the plane of focus with the plane of symmetry is parallel and the interval sets up.
2. The reflective broadband integrator mirror of claim 1, wherein the beam deflection angle a of the mirror surface is between 30 ° and 150 °.
3. The reflective broadband integrator mirror of claim 2, wherein the set acute angle is 90 ° -a/2.
4. The reflective broadband integrator mirror of claim 1, wherein all of the broadband curved surfaces form an elliptical section line in a cross section parallel to the plane of symmetry.
5. The reflective broadband integrator mirror of claim 4, wherein the elliptical stubs correspond to unequal spacing of the central broadband of the different broadband curved surfaces.
6. The reflective broadband integrator mirror of claim 1, wherein the number of broadband surfaces is less than or equal to 50.
7. The reflective broadband integrator mirror of claim 6, wherein the number of broadband surfaces is 6-15.
8. The reflective broadband integrator mirror of claim 1, wherein a separation between the focal plane and the symmetry plane is determined according to the formula:
H=F2*L2/(D+L2),(1);
D=2*F1*tan(b),(2);
wherein: h is the distance between the focusing plane and the symmetry plane, F1 is the incident focal length, F2 is the emergent focal length, D is the maximum spot size perpendicular to the symmetry plane on the mirror surface, L2 is the homogenized spot width, and b is the beam divergence half angle.
9. The reflective broadband integrator mirror of claim 1, wherein a water cooling channel is formed inside the base, and a water inlet and a water outlet of the water cooling channel are respectively opened at the bottom surface.
10. A broadband fiber laser optical system comprising a point light source and the reflective broadband integrator mirror of any of claims 1-9, the point light source being located at an incident focal point of the reflective broadband integrator mirror.
CN202210651533.0A 2022-06-10 2022-06-10 Reflective broadband integrating mirror and broadband optical fiber laser optical system Pending CN114966925A (en)

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CN202210651533.0A CN114966925A (en) 2022-06-10 2022-06-10 Reflective broadband integrating mirror and broadband optical fiber laser optical system
PCT/CN2022/114206 WO2023236354A1 (en) 2022-06-10 2022-08-23 Reflective broadband integrator mirror and broadband optical fiber laser optical system

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CN202210651533.0A CN114966925A (en) 2022-06-10 2022-06-10 Reflective broadband integrating mirror and broadband optical fiber laser optical system

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