CN212043123U - Reflective optical system based on self-adaptive mirror focusing - Google Patents
Reflective optical system based on self-adaptive mirror focusing Download PDFInfo
- Publication number
- CN212043123U CN212043123U CN201921819928.7U CN201921819928U CN212043123U CN 212043123 U CN212043123 U CN 212043123U CN 201921819928 U CN201921819928 U CN 201921819928U CN 212043123 U CN212043123 U CN 212043123U
- Authority
- CN
- China
- Prior art keywords
- mirror
- axis
- adaptive
- axis parabolic
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 25
- 230000003044 adaptive effect Effects 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 8
- 239000000498 cooling water Substances 0.000 claims description 4
- 241001347978 Major minor Species 0.000 claims 1
- 238000003698 laser cutting Methods 0.000 abstract description 11
- 239000000835 fiber Substances 0.000 abstract description 10
- 230000004075 alteration Effects 0.000 abstract description 9
- 238000001816 cooling Methods 0.000 abstract description 9
- 238000009826 distribution Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 7
- 230000008901 benefit Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 230000008030 elimination Effects 0.000 abstract description 5
- 238000003379 elimination reaction Methods 0.000 abstract description 5
- 238000005520 cutting process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
The utility model discloses a reflection type optical system based on adaptive mirror focusing, including first off-axis parabolic mirror, the adaptive mirror, second off-axis parabolic mirror, off-axis hyperboloid mirror, the utility model discloses structural design is novel, based on off-axis parabolic mirror and off-axis hyperboloid mirror to parallel incident light aberration elimination characteristic, based on adaptive mirror continuously adjustable focus characteristic and service property, based on good heat conductivity and direct water-cooling effect of metal reflector, through the change of adaptive mirror focus, when realizing focusing beam focus position control, guarantee the focus facula circularity of whole in-process, energy distribution and beam quality uniformity have bearing power height, optical performance is good, advantages such as direct water-cooling, especially be applicable to the kilowatt of optical core footpath more than 50um and, the high-power fiber laser cutting of ten thousand watts level is used.
Description
Technical Field
The utility model relates to an optic fibre laser cutting technical field specifically is a based on adaptive mirror focusing reflection type optical system.
Background
The laser processing technology covers various laser processing technologies such as laser cutting, welding, surface treatment, punching, micromachining and the like, and utilizes the basic characteristic of interaction between laser and substances. The laser processing technology is a high and new technology without replacement due to the advantages of non-contact between the laser beam and the processing material, processing speed and quality and the like.
Laser cutting has taken the leading position of whole laser processing trade at present, along with the improvement of laser power, the continuous price reduction of laser instrument and processing equipment, when pursuing the price/performance ratio, high power laser cutting is also marketing in a large scale gradually.
The fiber laser has the advantages of high electro-optic conversion efficiency, good fiber flexibility, high coupling efficiency, good beam quality and the like, and the appearance of high-power lasers, so that the market share is increasingly prominent, the kilowatt level of the fiber coupling output laser is quite popular at present, the kilowatt level laser is gradually released to the market, and various processing technologies of the fiber laser are more generalized.
At present, an optical fiber laser cutting optical path system mainly adopts a transmission type, a lens material is usually a fused quartz material, but along with the increase of the power of a laser, the fused quartz material and the processing cost, the coating material and the coating cost are greatly improved, and even a good quartz lens can generate a thermal lens effect, so that the quality and the stability of a focused light beam can be obviously reduced, which is not superior to a metal curved surface reflector which is directly water-cooled, has good heat conductivity and good aberration elimination.
Conventional metal curved surface reflectors mainly comprise spherical reflectors, off-axis parabolic mirrors, off-axis ellipsoidal mirrors, off-axis hyperboloidal mirrors and the like, and the spherical reflectors are not suitable for laser cutting application due to large optical aberration.
The conventional combination of a single off-axis ellipsoidal mirror, a double off-axis parabolic mirror and the like can form an optical fiber laser cutting optical system by itself, and because the change of optical aberration is seriously influenced by the installation distance between an optical fiber emergent point and a lens, the focal position can not be adjusted, and the focusing beam section needs to be adjusted by a mechanical structure, so that the problems of insufficient adjustment amount, unstable adjustment structure and the like exist, and the conventional combination is not beneficial to laser perforation and medium plate cutting application.
The self-adaptive mirror is added in the single-chip off-axis ellipsoidal mirror and the double-chip off-axis parabolic mirror system, so that the problem of focus adjustment is solved, but the optical aberration after focusing is large, even if the conventional optical fiber laser with the core diameter of 100 mu m for cutting is used, the finally obtained focused beam energy distribution can be seriously distorted, and the cutting of medium-thick plates and the consistency of all cross sections are not facilitated.
Based on above-mentioned each point, the utility model provides a reflection type optical system based on self-adaptation mirror focusing, based on off-axis parabolic mirror and off-axis hyperboloid mirror to parallel incident light aberration elimination characteristic, based on self-adaptation mirror continuously adjustable focal length characteristic and service property, based on good heat conductivity of metal reflector and direct water-cooling effect, change through the self-adaptation mirror focus, when realizing focus beam focus position regulation, guarantee the focus facula circularity of whole in-process, energy distribution and beam quality uniformity, it is high to have power bearing, optical performance is good, direct water-cooling advantage, especially be applicable to 50um and above the kilowatt of optical fiber core footpath, the high-power fiber laser cutting of ten thousand watts is used.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a based on adaptive mirror focusing reflection type optical system and working method thereof to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a focusing reflective optical system based on an adaptive mirror comprises a first off-axis parabolic mirror, the adaptive mirror, a second off-axis parabolic mirror and an off-axis hyperboloid mirror, and is characterized in that the first off-axis parabolic mirror, the second off-axis parabolic mirror and the off-axis hyperboloid mirror on the focusing reflective optical system are cylindrical inclined plane reflectors;
the adaptive mirror is an elliptic cylindrical reflector, and the ratio of the length axis to the length axis of an ellipse is;
the off-axis parabolic mirror comprises a first off-axis parabolic mirror, an adaptive mirror and a second off-axis parabolic mirror, wherein the off-axis hyperbolic mirror is a metal reflector and is provided with a cooling water channel, and the adaptive mirror is also provided with a single gas channel;
the first off-axis parabolic mirror, the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperbolic mirror are all beam deflection angles of 90 degrees;
the central symmetrical plane of the off-axis hyperboloid mirror is coplanar with the central symmetrical plane of the self-adaptive mirror in the long axis direction;
the center normal of the first off-axis parabolic mirror is parallel to the center normal of the off-axis hyperbolic mirror, the center normal of the adaptive mirror is parallel to the center normal of the second off-axis parabolic mirror, and the center normal of the first off-axis parabolic mirror is perpendicular to the center normal of the adaptive mirror.
Preferably, the adaptive mirror changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, so that the focal length of the adaptive mirror is changed and adjusted.
Preferably, the off-axis hyperboloid mirror comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is overlapped with the focus of the second off-axis parabolic mirror.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model discloses structural design is novel, on the basis of off-axis parabolic mirror and off-axis hyperboloid mirror to parallel incident light aberration elimination characteristic, on the basis of continuous adjustable focal length characteristic of self-adaptation mirror and service property, on the basis of good heat conductivity of metal reflector and direct water-cooling effect, through the change of self-adaptation mirror focus, when realizing focusing beam focus position regulation, guarantee focus facula circularity, energy distribution and light beam quality uniformity in the whole process, have bearing power height, optical property is good, direct water-cooling advantage such as, especially, be applicable to the kilowatt of 50um and above optical fiber core footpath, the high-power fiber laser cutting of ten thousand watts level is used;
(2) the first off-axis parabolic mirror, the adaptive mirror, the second off-axis parabolic mirror and the off-axis hyperboloid mirror of the utility model are all metal lenses, are internally provided with cooling water channels, have direct water cooling effect, have good heat conductivity, can greatly improve the laser power born by the lenses, eliminate the thermal lens effect and ensure that the lenses can be safely used;
(3) the utility model discloses a focusing of self-adaptation mirror when reducing the mechanical structure design degree of difficulty, this optical path system of the long focus of cooperation can realize great focus focusing volume, satisfies ten thousand watts big focusing volume thick plate cutting requirements completely, and light spot circularity, energy distribution and light beam quality assurance uniformity in the whole accommodation process have the most basic guarantee to medium plate material cutting section quality simultaneously.
Drawings
FIG. 1 is a schematic structural view of the cutting machine body of the present invention;
fig. 2 is a schematic structural diagram of the cutting mechanism of the present invention.
In the figure: 1. a first off-axis parabolic mirror; 2. an adaptive mirror; 3. a second off-axis parabolic mirror; 4. an off-axis hyperboloid mirror.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a reflective optical system based on adaptive mirror focusing comprises a first off-axis parabolic mirror 1, an adaptive mirror 2, a second off-axis parabolic mirror 3, an off-axis hyperbolic mirror 4, a first off-axis parabolic mirror 1 on the reflective optical system, a second off-axis parabolic mirror 3 and a cylindrical inclined plane mirror 4, wherein the adaptive mirror 2 is an elliptic cylindrical mirror, and the ratio of the length to the axis of an ellipse is equal to that of the length to the axis of the ellipse.
The self-adaptive parabolic mirror comprises a first off-axis parabolic mirror 1, a self-adaptive mirror 2, a second off-axis parabolic mirror 3 and an off-axis hyperboloid mirror 4, wherein the off-axis hyperboloid mirror is a metal reflector, common materials comprise copper and aluminum alloy, the metal reflector and the copper and aluminum alloy are all provided with cooling water channels, and the self-adaptive mirror 2 is also provided with a single gas channel;
the system comprises a first off-axis parabolic mirror 1, a self-adaptive mirror 2, a second off-axis parabolic mirror 3 and an off-axis hyperbolic mirror 4, wherein the off-axis parabolic mirrors are all 90-degree light beam deflection angles;
the center symmetrical plane of the off-axis hyperboloid mirror 4 is coplanar with the center symmetrical plane of the self-adaptive mirror 2 in the long axis direction;
the center normal of the first off-axis parabolic mirror 1 is parallel to the center normal of the off-axis hyperboloid mirror 4, the center normal of the adaptive mirror 2 is parallel to the center normal of the second off-axis parabolic mirror 3, and the center normal of the first off-axis parabolic mirror 1 is perpendicular to the center normal of the adaptive mirror 2.
The adaptive mirror 2 changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, and realizes the self focal length change adjustment.
The off-axis hyperboloid mirror 4 comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is superposed with the focus of the second off-axis parabolic mirror 3.
The working principle is as follows: the fiber laser emits divergent light, the divergent light is incident on the surface of the first off-axis parabolic mirror 1 and then reflected to form parallel collimated light beams, and the collimated light beams are reflected by the self-adaptive mirror 2, the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4 in sequence to form focused light beams.
When the self-adaptive mirror 2 is not filled with gas, the mirror surface of the self-adaptive mirror 2 is a concave surface, the surface type of the mirror surface of the self-adaptive mirror 2 can be changed by inputting gas with different pressures, the adjustable transformation of the concave surface, the plane and the convex surface is realized, and the change of the focal length of the self-adaptive mirror from positive focus to negative focus is obtained.
When the mirror surface of the adaptive mirror 2 is a concave surface, the focal length is positive, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, the reflected light beams have certain convergence and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is deviated from a zero-focus position, positive defocusing adjustment is realized, and the light spot energy distribution of the adaptive mirror under the limit positive focus is referred to a left-side block diagram of fig. 2.
When the mirror surface of the adaptive mirror 2 is a plane, the focal length is infinite, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, the reflected light beams are still parallel light and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is at a zero-focus position, and the distribution of light spot energy at the zero-focus position refers to a block diagram in fig. 2.
When the mirror surface of the adaptive mirror 2 is a convex surface, the focal length is negative, parallel collimated light beams generated by reflection after passing through the surface of the first off-axis parabolic mirror 1 are reflected by the mirror surface of the adaptive mirror 2, reflected light beams have certain divergence and are finally focused by the second off-axis parabolic mirror 3 and the off-axis hyperbolic mirror 4, the focus is deviated from a zero-focus position, negative defocusing adjustment is realized, and the light spot energy distribution of the adaptive mirror under the limit negative focus is referred to the right block diagram of fig. 2.
The utility model discloses structural design is novel, based on off-axis parabolic mirror and off-axis hyperboloid mirror to parallel incident light aberration elimination characteristic, based on continuous adjustable focal length characteristic of self-adaptation mirror and service property, based on good heat conductivity of metal reflector and direct water-cooling effect, change through the self-adaptation mirror focus, when realizing focusing beam focus position control, guarantee the focusing facula circularity of whole in-process, energy distribution and light beam quality uniformity, it is high to have power bearing, optical property is good, advantages such as direct water-cooling, be particularly useful for the kilowatt of 50um and above optical fiber core footpath, the high-power fiber laser cutting of ten thousand watts is used.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. A focusing reflective optical system based on an adaptive mirror comprises a first off-axis parabolic mirror (1), the adaptive mirror (2), a second off-axis parabolic mirror (3) and an off-axis hyperboloid mirror (4), and is characterized in that the first off-axis parabolic mirror (1), the second off-axis parabolic mirror (3) and the off-axis hyperboloid mirror (4) on the focusing reflective optical system are cylindrical inclined plane reflectors;
the adaptive mirror (2) is an elliptic cylindrical reflector with an elliptic major-minor axis ratio of
The off-axis parabolic mirror comprises a first off-axis parabolic mirror (1), a self-adaptive mirror (2), a second off-axis parabolic mirror (3), an off-axis hyperboloid mirror (4) and a gas pipeline, wherein the off-axis hyperboloid mirror is a metal reflector and is provided with a cooling water channel;
the first off-axis parabolic mirror (1), the adaptive mirror (2), the second off-axis parabolic mirror (3) and the off-axis hyperbolic mirror (4) are all beam deflection angles of 90 degrees;
the central symmetry plane of the off-axis hyperboloid mirror (4) is coplanar with the central symmetry plane of the adaptive mirror (2) in the long axis direction;
the center normal of the first off-axis parabolic mirror (1) is parallel to the center normal of the off-axis hyperboloid mirror (4), the center normal of the adaptive mirror (2) is parallel to the center normal of the second off-axis parabolic mirror (3), and the center normal of the first off-axis parabolic mirror (1) is perpendicular to the center normal of the adaptive mirror (2).
2. The adaptive mirror based focusing reflective optical system of claim 1, wherein: the adaptive mirror (2) changes the concave-convex characteristic of the mirror surface by inputting different gas pressures, and realizes the self focal length change adjustment.
3. The adaptive mirror based focusing reflective optical system of claim 1, wherein: the off-axis hyperboloid mirror (4) comprises a near focus and a far focus, the reflecting surface reflects the corresponding focus to be the near focus, and the far focus is superposed with the focus of the second off-axis parabolic mirror (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921819928.7U CN212043123U (en) | 2019-10-28 | 2019-10-28 | Reflective optical system based on self-adaptive mirror focusing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921819928.7U CN212043123U (en) | 2019-10-28 | 2019-10-28 | Reflective optical system based on self-adaptive mirror focusing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212043123U true CN212043123U (en) | 2020-12-01 |
Family
ID=73507915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921819928.7U Active CN212043123U (en) | 2019-10-28 | 2019-10-28 | Reflective optical system based on self-adaptive mirror focusing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212043123U (en) |
-
2019
- 2019-10-28 CN CN201921819928.7U patent/CN212043123U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114460740B (en) | Single-mirror annular light spot optical system | |
| CN110076449A (en) | Realize the laser head assembly of big aspect ratio processing | |
| CN111736329A (en) | ZOOM optical system of double-sheet type aspherical mirror | |
| CN105904087A (en) | Reflection type high-power double-metal-galvanometer scanning system | |
| CN115685537A (en) | Design method of optical system for generating uniform annular light | |
| CN215449768U (en) | Reflecting homogenizing mirror for generating flat-top-like rectangular light spots | |
| CN212043123U (en) | Reflective optical system based on self-adaptive mirror focusing | |
| CN106735887A (en) | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics | |
| CN205702846U (en) | A kind of reflective high power bimetallic galvanometer scanning system | |
| CN212885690U (en) | Bifocal laser welding optical system and laser welding head thereof | |
| WO2021027659A1 (en) | Composite light spot laser system based on multiple optical fiber output laser modules and processing bit | |
| CN206445359U (en) | A kind of single galvanometer total-reflection type displacement focusing 3D scanning optics | |
| CN111856890A (en) | Focusing optical system and extreme ultraviolet light generating system | |
| CN110614430A (en) | Reflective optical system based on adaptive mirror focusing and working method thereof | |
| CN114578551B (en) | Optical system design method for generating annular focusing laser spot | |
| CN101644828A (en) | Paraboloidal mirror light-concentration system of replaceable partially reflecting surface | |
| WO2023123044A1 (en) | Uniform light spot shaping system | |
| CN114012248A (en) | Light path system of laser cutting head | |
| CN110560919A (en) | Optical aberration-based optical fiber laser cutting lens group | |
| CN110488398A (en) | It is a kind of to obtain adjustable bifocal free-form surface lens | |
| CN106773075A (en) | A kind of dizzy beam homogenization optical system of total-reflection type delustring | |
| CN106735886A (en) | One kind is based on single galvanometer and self adaptation mirror 3D scanning optics | |
| CN210649070U (en) | Optical aberration-based optical fiber laser cutting lens group | |
| CN206431372U (en) | A kind of dizzy beam homogenization optical system of total-reflection type delustring | |
| CN110614449A (en) | Optical internal coaxial wire feeding optical mechanism based on multi-beam splitting ellipsoidal mirror and working method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shanghai Jiaqiang Ruitu Software Technology Co., Ltd. Assignor: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd. Contract record no.: X2022310000051 Denomination of utility model: A reflective optical system based on adaptive mirror focusing Granted publication date: 20201201 License type: Common License Record date: 20220803 |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016 Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd. Country or region after: China Address before: 201615 room 304-1, building 5, 1158 Zhongxin Road, Songjiang District, Shanghai Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd. Country or region before: China |